CN203732037U - Ultrahigh-precision X fluorescence thickness gauge - Google Patents
Ultrahigh-precision X fluorescence thickness gauge Download PDFInfo
- Publication number
- CN203732037U CN203732037U CN201420072473.8U CN201420072473U CN203732037U CN 203732037 U CN203732037 U CN 203732037U CN 201420072473 U CN201420072473 U CN 201420072473U CN 203732037 U CN203732037 U CN 203732037U
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- Prior art keywords
- fluorescence
- laser
- thicknessmeter
- detector
- light source
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- Expired - Lifetime
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- 238000012360 testing method Methods 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 13
- 230000005611 electricity Effects 0.000 claims abstract description 6
- 238000005057 refrigeration Methods 0.000 claims abstract description 6
- 230000005284 excitation Effects 0.000 claims description 13
- 238000003908 quality control method Methods 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000004304 visual acuity Effects 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 241000353097 Molva molva Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Abstract
The utility model discloses an ultrahigh-precision X fluorescence thickness gauge, which comprises a light source exciting device, a signal detection device, a signal processing device, a dual-laser locator, a computer and a sample test platform, wherein the signal detection device is provided with a detector connected with the signal processing device; the signal processing device is connected with the computer; the light source exciting device is in control connection with the computer; the light source exciting device is internally provided with an X ray tube; the detector is an SI-PIN electricity-driven refrigeration detector; the dual-laser locator emits vertical laser lines and oblique laser lines at the same time; the vertical laser lines are aligned at a laser alignment point on the sample test platform; and the oblique laser lines are emitted at a certain oblique angle and are crossed with X ray excited by the X ray tube on the surface of a tested sample. The X fluorescence thickness gauge is high in precision, is an ideal analysis instrument in various metal plating industries and has the advantages of convenient use, accurate positioning, low cost, high precision and short test time.
Description
Technical field
The utility model relates to analysis Instrument equipment technical field, relates in particular to a kind of superhigh precision X-fluorescence thicknessmeter.
Background technology
The history of X-fluorescence thicknessmeter is long, but traditional X-fluorescence thicknessmeter generally adopts proportional counter tube as X-ray detector, its shortcoming is that it differentiates rate variance, adjacent element can not differentiate out, as copper and nickel, the element such as copper and zinc just can not be differentiated mutually, need to just can measure by means such as optical filters, therefore measurement effect is poor.
In addition, adopt two laser positioning modes although thicknessmeter originally also has, can not carry out height and measure, therefore inaccurate in Z short transverse, the sharpness that can only observe sample by eyes regulates highly, therefore measurement result is caused to certain error.
Utility model content
Technical problem to be solved in the utility model: provide a kind of result that can make the adjacent coat of metal measure not to be subject to that the resolution of detector affects, result superhigh precision X-fluorescence thicknessmeter more accurately for the deficiencies in the prior art, this superhigh precision X-fluorescence thicknessmeter also adopts two laser positionings and height detection function, make the location of sample measurement point more accurate, measurement result is more satisfied.
The technical matters that the utility model solves can realize by the following technical solutions:
A kind of superhigh precision X-fluorescence thicknessmeter, comprise excitation light source device, signal detecting device, signal processing apparatus, two laser locators, computing machine and sample test platform, in described signal detecting device, be provided with the detector being connected with described signal processing apparatus, described signal processing apparatus is connected with described computing machine, described excitation light source device is connected with described computer control, in described excitation light source device, be provided with X-ray tube, described detector is SI-PIN electricity refrigeration detector, described pair of laser locator sends vertical laser rays and oblique laser rays simultaneously, described vertical laser rays is aimed at the laser alignment point being arranged on described sample test platform, described oblique laser rays penetrates and crosses in the surface of sample with the X ray that described X-ray tube is excited with the angle necessarily tilting.
In a preferred embodiment of the present utility model, directly over described pair of laser locator, be provided with a height sensor.
In a preferred embodiment of the present utility model, described sample test platform is the electrodeless Quality control mobile platform of X-Y-Z three-D electric.
In a preferred embodiment of the present utility model, the ray launching port place of described X-ray tube is provided with a micropore collimating apparatus, and the direction of this micropore collimating apparatus vertically downward.
In a preferred embodiment of the present utility model, directly over described sample test platform, be provided with one and highly protect sensor, this highly protects the height of sensor lower than the height of described micropore collimating apparatus and detector.
In a preferred embodiment of the present utility model, described excitation light source device also comprises a high-voltage power supply for described X-ray tube power supply, and described high-voltage power supply is connected with described computing machine by a digital controller.
In a preferred embodiment of the present utility model, described allocation of computer has display.
In a preferred embodiment of the present utility model, described allocation of computer has printer.
Principle of work of the present utility model is as follows:
X ray generator sends excitation of X-rays sample, make the extranulear electron (particularly K electron) in the atom of each element in sample be stimulated and emit, and in situ produce a hole, now outer-shell electron (particularly L layer electronics) will be filled this VOID POSITIONS, unnecessary energy is just emitted with the form of characteristic X-ray, these characteristic X-rays enter detector and produce pulse signal, send into digit pulse spectroscope amplifier through prime amplifier, send into again analog to digital converter, analog to digital converter converts simulating signal to digital quantity, send into computer interface, software is composed the data acquisition and controlling of data by control interface, X-fluorescence thickness measuring software is according to the relation of the fluorescence intensity of coating element and thickness of coating, calculate the one-tenth-value thickness 1/10 of coating.
The beneficial effects of the utility model are as follows:
1, the utility model has adopted the international advanced high resolving power electricity of imported with original packaging refrigeration detector, this detector is without protection of liquid nitrogen, can be applied to easily each coat of metal industry, and there is high count rate, high resolving power, minimumly can reach 145eV, make general sample in 10～100 seconds, can obtain satisfied result;
2, X-ray tube of the present utility model adopts positive high voltage to excite, and excites with test condition and adopts the digital control of computer software and show, make its processing speed fast, precision is high, reliable and stable;
3, the utility model has adopted the electrodeless Quality control mobile platform of X-Y-Z three-D electric to move up in the X-Y side of surface level, also can on the height of Z, move, the thickness of coating that can adapt to the coat of metal sample of all kinds various sizes size is measured;
4, the utility model has adopted two laser locating apparatus to adopt vertical laser lofting location and oblique laser test sample positioning function, and can carry out height and measure, thereby realizes accurate location survey;
5, the utility model adopts novel multi-layer algorithm, can meet the nearly thickness measure of 4 layers of coat of metal;
6, the utility model, except measuring for metal layer thickness, can also carry out the component content analysis of electroplate liquid;
7, the utility model can also carry out ROHS harmful element element measuring ability, realizes a tractor serves several purposes;
8, the utlity model has simple to operate, easy to use, failure rate is low, cost is low, Measuring Time is short advantage, is the desirable detecting instrument of electroplating industry.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is theory diagram of the present utility model.
Fig. 2 is the detection schematic diagram that excites of the present utility model.
Fig. 3 is the work schematic diagram of signal processing apparatus of the present utility model.
Embodiment
For technological means, creation characteristic that the utility model is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
Referring to Fig. 1 and Fig. 2, a kind of superhigh precision X-fluorescence thicknessmeter providing in figure, comprises excitation light source device 100, signal detecting device 200, signal processing apparatus 300, computing machine 400, the electrodeless Quality control mobile platform 500 of X-Y-Z three-D electric and two laser locator 600.
Excitation light source device 100 comprises X-ray tube 110, the high-voltage power supply 120 of energy is provided and is arranged on ray launching port place and its direction micropore collimating apparatus 130 vertically downward of X-ray tube 110 for X-ray tube 110.High-voltage power supply 120 is connected with computing machine 400 by digital controller 430, and micropore collimating apparatus 130 directly excites coating sample 700 X ray inspiring from X-ray tube 110.Wherein, using the low-power positive high voltage microfocus X-ray tube 110 of high pressure 50KV as excitaton source, this X-ray tube 110 adopts Be(beryllium) window thickness is that the bremstrahlen Xing ﹑ Di Gong of 125 microns is Shuaied the X-ray tube of the right Leng Que of ﹑ Zi ﹑ high life, and need to select target according to practical application, as selective target is: Rh(rhodium target), Ag(silver target), Mo(molybdenum target), Ti(titanium target) etc.In addition, X-ray tube adopts positive high voltage to excite, and excites with test condition and adopts the digital control of computer software and show.In excitation light source device, the voltage of high-voltage power supply and electric current adopt software digital control and demonstration automatically, X ray degree of stability: 0.3%/8 hour, voltage range: 0V to 50kV was adjustable continuously, and range of current: 0mA to 1mA is adjustable continuously.
Signal detecting device 200 comprises detector 210 and is connected with detector 210 and is the detector power supply 220 that detector 210 is powered, wherein, detector 210 is DP5SI-PIN electricity refrigeration detectors of new generation of AMPTEK recent development development, need (40 DEG C) work at low temperatures, low temperature need to be provided by semiconductor refrigerating mode.DP5SI-PIN electricity refrigeration detector is without cooled with liquid nitrogen, Be(beryllium window) thickness is 7.5 microns, right
55the resolution of the X ray of Fe5.9keV in the time that counting rate is 1000CPS is 145eV, and the peak count rate that can receive can reach 200KCPS, makes general sample in 10～100 seconds, can obtain satisfied result.
Signal processing apparatus 300 comprises prime amplifier 310, digit pulse spectroscope amplifier 320 and analog to digital converter 330.Computing machine 400 disposes display 410 and printer 420.
The utility model has adopted the electrodeless Quality control mobile platform 500 of X-Y-Z three-D electric to move up in the X-Y side of surface level, also can on the height of Z, move, the thickness of coating that can adapt to the coat of metal sample of all kinds various sizes size is measured; In order to prevent the too high position such as detector 210 or x-ray collimator 130 that bumps against of ascensional range in Z direction; above sample 700, be also provided with one and highly protect sensor 510; in the time that the electrodeless Quality control mobile platform 500 of X-Y-Z three-D electric rises too high; highly protect sensor 510 transducing signal to be detected; will notify the single-chip microcomputer of instrument internal; single-chip microcomputer automatically cuts out the order of rising after judgement, stops rising, thus protection instrument component.
The utility model has adopted two laser locators 600, this pair of laser locator 600 has vertical laser lofting location and oblique laser test sample positioning function, referring to Fig. 2, two laser locators 600 send vertical laser rays L1 and oblique laser rays L2 simultaneously, this vertical laser rays L1 aims at the laser alignment point A being arranged on example platform 500, the X ray L3 that this oblique laser rays L2 penetrates with the angle that necessarily tilts and excited with X-ray tube 110 is after the surface of sample 700 crosses, produce X-fluorescence ray L4, X-fluorescence ray L4 is detected device 210 and receives.Directly over two laser locators 600, be provided with a height sensor 610, this height sensor 610 can carry out height to two laser locators 600 to be measured, thereby realizes accurate location survey.
Sample 700 is placed on the electrodeless Quality control mobile platform 500 of X-Y-Z three-D electric, control X-ray tube 110 by computing machine 400 and send excitation of X-rays sample 700, make the extranulear electron (particularly K electron) in the atom of each element in sample 700 be stimulated and emit, and in situ produce a hole, now outer-shell electron (particularly L layer electronics) will be filled this VOID POSITIONS, unnecessary energy is just emitted with the form of characteristic X-ray, referring to Fig. 3, these characteristic X-rays enter detector 210 and produce pulse signal, send into digit pulse spectroscope amplifier 320 through prime amplifier 310, send into again analog to digital converter 330, analog to digital converter 330 converts simulating signal to digital quantity, send into computing machine 400 interfaces, software is composed the data acquisition and controlling of data by control interface, X-fluorescence thickness measuring software is according to the relation of the fluorescence intensity of coating element and thickness of coating, calculate the one-tenth-value thickness 1/10 of coating.
More than show and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; that in above-described embodiment and instructions, describes just illustrates principle of the present utility model; do not departing under the prerequisite of the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (8)
1. a superhigh precision X-fluorescence thicknessmeter, comprise excitation light source device, signal detecting device, signal processing apparatus, two laser locators, computing machine and sample test platform, in described signal detecting device, be provided with the detector being connected with described signal processing apparatus, described signal processing apparatus is connected with described computing machine, described excitation light source device is connected with described computer control, in described excitation light source device, be provided with X-ray tube, it is characterized in that, described detector is SI-PIN electricity refrigeration detector, described pair of laser locator sends vertical laser rays and oblique laser rays simultaneously, described vertical laser rays is aimed at the laser alignment point being arranged on described sample test platform, described oblique laser rays penetrates and crosses in the surface of sample with the X ray that described X-ray tube is excited with the angle necessarily tilting.
2. superhigh precision X-fluorescence thicknessmeter as claimed in claim 1, is characterized in that, is provided with a height sensor directly over described pair of laser locator.
3. superhigh precision X-fluorescence thicknessmeter as claimed in claim 2, is characterized in that, described sample test platform is the electrodeless Quality control mobile platform of X-Y-Z three-D electric.
4. superhigh precision X-fluorescence thicknessmeter as claimed in claim 3, is characterized in that, the ray launching port place of described X-ray tube is provided with a micropore collimating apparatus, and the direction of this micropore collimating apparatus vertically downward.
5. superhigh precision X-fluorescence thicknessmeter as claimed in claim 4, is characterized in that, is provided with one and highly protects sensor directly over described sample test platform, and this highly protects the height of sensor lower than the height of described micropore collimating apparatus and detector.
6. superhigh precision X-fluorescence thicknessmeter as claimed in claim 5, is characterized in that, described excitation light source device also comprises a high-voltage power supply for described X-ray tube power supply, and described high-voltage power supply is connected with described computing machine by a digital controller.
7. superhigh precision X-fluorescence thicknessmeter as claimed in claim 6, is characterized in that, described allocation of computer has display.
8. superhigh precision X-fluorescence thicknessmeter as claimed in claim 7, is characterized in that, described allocation of computer has printer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420072473.8U CN203732037U (en) | 2014-02-20 | 2014-02-20 | Ultrahigh-precision X fluorescence thickness gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420072473.8U CN203732037U (en) | 2014-02-20 | 2014-02-20 | Ultrahigh-precision X fluorescence thickness gauge |
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| Publication Number | Publication Date |
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| CN203732037U true CN203732037U (en) | 2014-07-23 |
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| CN201420072473.8U Expired - Lifetime CN203732037U (en) | 2014-02-20 | 2014-02-20 | Ultrahigh-precision X fluorescence thickness gauge |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113654506A (en) * | 2021-07-19 | 2021-11-16 | 电信科学技术第五研究所有限公司 | Atmospheric exposure sample thickness measuring device and method |
-
2014
- 2014-02-20 CN CN201420072473.8U patent/CN203732037U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113654506A (en) * | 2021-07-19 | 2021-11-16 | 电信科学技术第五研究所有限公司 | Atmospheric exposure sample thickness measuring device and method |
| CN113654506B (en) * | 2021-07-19 | 2024-02-13 | 电信科学技术第五研究所有限公司 | Atmospheric exposure sample thickness measuring device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140723 |
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| CX01 | Expiry of patent term |