CN203724930U - 一种用于mocvd设备的固体颗粒物过滤器 - Google Patents
一种用于mocvd设备的固体颗粒物过滤器 Download PDFInfo
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- CN203724930U CN203724930U CN201420091896.4U CN201420091896U CN203724930U CN 203724930 U CN203724930 U CN 203724930U CN 201420091896 U CN201420091896 U CN 201420091896U CN 203724930 U CN203724930 U CN 203724930U
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- 239000007787 solid Substances 0.000 title claims abstract description 21
- 239000013618 particulate matter Substances 0.000 title claims abstract description 19
- 238000005229 chemical vapour deposition Methods 0.000 title abstract 2
- 238000007789 sealing Methods 0.000 claims abstract description 23
- 239000003365 glass fiber Substances 0.000 claims abstract description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 3
- 238000000407 epitaxy Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000009466 transformation Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000001914 filtration Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
Abstract
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CN201420091896.4U CN203724930U (zh) | 2014-03-03 | 2014-03-03 | 一种用于mocvd设备的固体颗粒物过滤器 |
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CN201420091896.4U CN203724930U (zh) | 2014-03-03 | 2014-03-03 | 一种用于mocvd设备的固体颗粒物过滤器 |
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CN203724930U true CN203724930U (zh) | 2014-07-23 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111359250A (zh) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | 碳/碳复合材料化学气相沉积高温尾气冷凝过滤结构 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111359250A (zh) * | 2020-03-30 | 2020-07-03 | 常州翊翔炭材科技有限公司 | 碳/碳复合材料化学气相沉积高温尾气冷凝过滤结构 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160822 Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee after: ANHUI SAN'AN GAS CO.,LTD. Address before: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee before: Anhui Sanan Optoelectronics Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20180411 Address after: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee after: Anhui Sanan Optoelectronics Co.,Ltd. Address before: 241000 Anhui city of Wuhu Province Economic and Technological Development Zone Dong Liang Road No. 8 Patentee before: ANHUI SAN'AN GAS CO.,LTD. |
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TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20140723 |
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CX01 | Expiry of patent term |