CN203720527U - Photomask clamp - Google Patents
Photomask clamp Download PDFInfo
- Publication number
- CN203720527U CN203720527U CN201420019263.2U CN201420019263U CN203720527U CN 203720527 U CN203720527 U CN 203720527U CN 201420019263 U CN201420019263 U CN 201420019263U CN 203720527 U CN203720527 U CN 203720527U
- Authority
- CN
- China
- Prior art keywords
- light shield
- live splint
- clamp
- photomask
- shield clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The utility model provides a photomask clamp for clamping the edge of a photomask. The photomask clamp comprises a handle, a movable clamp fixed with the handle together, and a spring arranged inside the photomask clamp, wherein the spring is connected with the movable clamp and the handle. The photomask clamp is provided with the movable clamp capable of moving, and is controlled by the spring, and is capable of clamping the edge of the photomask without polluting the photomask. Meanwhile, because the photomask clamp is capable of firmly clamping the photomask to prevent the photomask from falling off, the photomask from being damaged, and prevent a lens below the photomask from being damaged, and thus the success rate of taking the photomask out is increased.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of light shield clamp.
Background technology
In the lithographic equipment of prior art, typically use mechanical arm light shield is transferred to device interior, light shield is placed and is positioned at the top of multiple lens, the technique such as to expose.But, because mechanical arm is moving component, its position that can arrive in lithographic equipment inside has 5, if when accident or fault appear in lithographic equipment, can cause mechanical arm to be positioned at different positions, the light shield being transmitted by mechanical arm also just may be positioned at diverse location.Now, because lithographic equipment cannot be proceeded normal work, need manually to take out light shield, after again equipment board being recovered, just can carry out work.And lithographic equipment only has the side can be deep enough and take out light shield, if the side that the position that mechanical arm stops can be deep enough away from lithographic equipment extremely bothers and exist great risk by manually taking out light shield.
And, please refer to Fig. 1, Fig. 1 is the vertical view of light shield 10, on described light shield 10, there is graph area 20, be positioned at lines in graph area 20 superfine, and film is thinner, if can pollute graph area 20 in finger touches, serious can cause cannot normally using of light shield 10, even scrap.
In prior art, manually take out light shield 10 and have following risk:
1, because described light shield 10 belows are provided with multiple lens, if it is careless to extract light shield 10, can cause light shield 10 to drop, injure lens by a crashing object, even lens are smashed, cause lithographic equipment paralysis.If replacing lens, at least need 2 months, and lens are expensive, can increase production cost.
If 2 finger touches, to light shield 10, can pollute the graph area of light shield 10 20, cause the wafer of producing have defect or scrap.
3, the need of production long period of light shield 10, if scrapping again to change and can causing off-production of light shield 10 brings about great losses.
Because manual operation exists error unavoidably, therefore, how to reduce above-mentioned risk just become those skilled in the art be badly in need of solve technical matters.
Utility model content
The purpose of this utility model is to provide a kind of light shield clamp, can clamp the edge of light shield, avoids light shield to pollute, and has also reduced light shield and has not been stepped up the risk easily dropping simultaneously.
To achieve these goals, the utility model proposes a kind of light shield clamp, for clamping the edge of light shield, described fixture comprises live splint, handle and spring, wherein, described live splint and described handle are fixed together, and described spring is located at the inside of described light shield clamp, and described spring is all connected with described live splint, handle.
Further, described light shield clamp also comprises multiple stators, and described stator is separately fixed at the both sides of described live splint.
Further, described live splint is divided into live splint and lower live splint, described upper live splint and lower live splint size coupling.
Further, described upper live splint and lower activity are all fixed with described stator, and the position of described stator is relative.
Further, described stator and described live splint are formed in one.
Further, described live splint is three limit rectangles.
Further, the width range of described live splint is less than or equal to 3mm.
Further, described live splint and described handle are formed in one.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: light shield clamp has live splint that can be movable, controlled by a spring, can clamp the edge of light shield, can not pollute described light shield, simultaneously due to light shield clamp can be firm the described light shield of clamping, prevent that described light shield from coming off, avoid described light shield to cause damage, also can avoid the lens of below to damage, improved the success ratio of taking out light shield.
Brief description of the drawings
Fig. 1 is the vertical view of light shield;
Fig. 2 is the vertical view of light shield clamp and light shield in the utility model one embodiment;
Fig. 3 is the side view of light shield clamp and light shield in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, light shield clamp of the present utility model is described in more detail, wherein represent preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to about system or about the restriction of business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with way of example, the utility model is more specifically described with reference to accompanying drawing.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 2 and Fig. 3, in the present embodiment, a kind of light shield clamp 100 has been proposed, for clamping the edge of light shield 10, described light shield clamp 100 comprises live splint 140, handle 130 and spring 120, and wherein, described live splint 140 is fixed together with described handle 130, described spring 120 is located at the inside of described light shield clamp 100, and described spring 120 is all connected with described live splint 140, handle 130.
In the present embodiment, described light shield clamp 100 also comprises multiple stators 110, described stator 110 is separately fixed at the both sides of described live splint 140, described live splint 140 is divided into live splint and lower live splint (as shown in Figure 3), the size coupling of described upper live splint and lower live splint, described upper live splint and lower activity are all fixed with described stator 110, and the position of described stator 100 is relative, described stator 110 can be fixed together with the described live splint mode of being formed in one, described stator 100 can be clamped the edge of described light shield 10, increase the blessing power of described light shield clamp 100 to described light shield 10.
In the present embodiment, described live splint 140 is three limits rectangular-shaped or U-shaped (as shown in Figure 2) or rectangular frame shape, the scope of described live splint 140 width W is less than 3mm, due to the graph area 20(of described light shield 10 region as shown in dotted line frame in Fig. 1) very important, can not be touched, but the edge that is positioned at described light shield 10 be can be touched place, therefore the light shield clamp 100 proposing in the present embodiment only clamps the marginarium of described light shield 10, in order not touch graph area 20, therefore adopt width to be less than or equal to the live splint 140 of 3mm.
In the present embodiment, the mode that described live splint and described handle can be formed in one forms, and is similar to scissors function.
To sum up, in the light shield clamp providing at the utility model embodiment, light shield clamp has live splint that can be movable, is controlled by a spring, can clamp the edge of light shield, can not pollute described light shield, simultaneously due to light shield clamp can be firm the described light shield of clamping, prevent that described light shield from coming off, avoid described light shield to cause damage, also can avoid the lens of below to damage, improve the success ratio of taking out light shield.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents make any type of variations such as replacement or amendment that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (8)
1. a light shield clamp, for clamping the edge of light shield, is characterized in that, described fixture comprises live splint, handle and spring, and wherein, described live splint and described handle are fixed together, described spring is located at the inside of described light shield clamp, and described spring is all connected with described live splint, handle.
2. a kind of light shield clamp as claimed in claim 1, is characterized in that, described light shield clamp also comprises multiple stators, and described stator is separately fixed at the both sides of described live splint.
3. a kind of light shield clamp as claimed in claim 2, is characterized in that, described live splint is divided into live splint and lower live splint, described upper live splint and lower live splint size coupling.
4. a kind of light shield clamp as claimed in claim 3, is characterized in that, described upper live splint and lower activity are all fixed with described stator, and the position of described stator is relative.
5. a kind of light shield clamp as claimed in claim 4, is characterized in that, described stator and described live splint are formed in one.
6. a kind of light shield clamp as claimed in claim 3, is characterized in that, described live splint be three limit rectangles or four limits rectangular-shaped.
7. a kind of light shield clamp as claimed in claim 6, is characterized in that, the width range of described live splint is less than or equal to 3mm.
8. a kind of light shield clamp as claimed in claim 1, is characterized in that, described live splint and described handle are formed in one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420019263.2U CN203720527U (en) | 2014-01-13 | 2014-01-13 | Photomask clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420019263.2U CN203720527U (en) | 2014-01-13 | 2014-01-13 | Photomask clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203720527U true CN203720527U (en) | 2014-07-16 |
Family
ID=51159668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420019263.2U Expired - Fee Related CN203720527U (en) | 2014-01-13 | 2014-01-13 | Photomask clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203720527U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113126419A (en) * | 2021-04-16 | 2021-07-16 | 长鑫存储技术有限公司 | Clamping device of photomask |
-
2014
- 2014-01-13 CN CN201420019263.2U patent/CN203720527U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113126419A (en) * | 2021-04-16 | 2021-07-16 | 长鑫存储技术有限公司 | Clamping device of photomask |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20190113 |