CN203720199U - Multi-axis capacitor accelerometer - Google Patents
Multi-axis capacitor accelerometer Download PDFInfo
- Publication number
- CN203720199U CN203720199U CN201320802751.6U CN201320802751U CN203720199U CN 203720199 U CN203720199 U CN 203720199U CN 201320802751 U CN201320802751 U CN 201320802751U CN 203720199 U CN203720199 U CN 203720199U
- Authority
- CN
- China
- Prior art keywords
- anchor point
- movable mass
- axis
- axle construction
- axis capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
The utility model provides a multi-axis capacitor accelerometer. The elastic structure of the X and Y axis structure layer of the multi-axis capacitor accelerometer is a sector structure with a long middle part and two gradually decreasing sides. The sector structure has a good stress releasing capability, and has a shorter length relative to a traditional long-strip-shaped folding girder structure. A first layer polycrystalline silicon formed on a substrate and used for wiring does not need to pass below the elastic structure. The influence of formed steps caused by bottom layer wiring during technology production process to the elastic structure performances can be reduced.
Description
Technical field
The utility model relates to a kind of micro electromechanical structure of surveying acceleration, relates in particular to a kind of multi-axis capacitive accelerometer.
Background technology
Adopting micro electronmechanical (Micro-Electro-Mechanic System is called for short MEMS) inertial sensor that surface treatment is made is taking silicon chip as matrix, by the three-dimensional micro mechanical structure that repeatedly prepared by thin-film deposition and figure processing.Conventional thin layer material comprises: polysilicon, silicon nitride, silicon dioxide and metal.Typical processing step comprises: substrate is prepared, once oxidation forms insulation course, deposit ground floor polysilicon, etch polysilicon forms electrode and interconnection line, and secondary oxidation forms sacrifice layer, oxide layer etching forms through hole, deposit second layer polysilicon, deposited metal, etching sheet metal forms interconnection line, etching second layer polysilicon forms physical construction figure, finally removes sacrifice layer and forms movable structure unit.
Accelerometer, i.e. acceleration induction device, is a kind of electronic equipment that can measure accelerating force, is one of conventional device of micro electronmechanical (MEMS) inertial sensor.Acceleration induction device is mainly used in location sensitive, displacement induction or motion state induction etc.As; on mobile phone, use acceleration induction device; just can detect the laying state of mobile phone; keep flat or inclination etc.; start different programs to reach certain effect according to state; for another example; may be used on notebook computer; survey the moving state of notebook, and according to these data, system can select to close hard disk intelligently still allows it continue operation; can farthest protect due to vibration like this; such as the working environment jolting, or the hard disk infringement that computer causes, the farthest data of protection the inside are fallen because of carelessness.In the digital camera that another one purposes is used at present and video camera, also adopt acceleration transducer, the vibration of the hand for detection of shooting time, and according to the automatic focusing that regulates camera of these vibrations.
Accelerometer mainly comprises twin-axis accelerometer and three axis accelerometer.Twin-axis accelerometer detects the accekeration of X-axis and Y direction.Three axis accelerometer detects the accekeration of X-axis, Y-axis and three directions of Z axis, wherein, X-axis with Y-axis accelerometer for detection of the acceleration acting in two mutually orthogonal directions parallel with principal plane, Z axis accelerometer for detection of act on principal plane vertical direction on acceleration.Conventionally, accelerometer is mainly made up of movable mass, fixed anchor point, elastic construction and fixed electorde etc.Wherein, elastic construction one end is connected with fixed anchor point, and the other end is connected with movable mass, between fixed electorde and movable mass, forms variable capacitance.In the time that acting on movable mass, external acceleration forms inertial force, this inertial force forms displacement to movable mass, capacitive accelerometer detects displacement variable by the capacitance variations between induction fixed electorde and movable mass, thereby determines external acceleration.
The leading indicator of multi-axis capacitive accelerometer has: sensitivity, the linearity, temperature drift and impact resistance.But, in practice, to find, the temperature drift of current multi-axis capacitive accelerometer and impact resistance performance still can not meet the demands.
Utility model content
The purpose of this utility model is, a kind of have stronger stress relief ability and the multi-axis capacitive accelerometer of less temperature drift are provided.
For solving the problems of the technologies described above, the utility model provides a kind of multi-axis capacitive accelerometer, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and multiple detecting electrode, described multiple detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with center anchor point and elastic construction, and described elastic construction is fan-folded girder construction.
The utility model also provides another kind of multi-axis capacitive accelerometer, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and multiple detecting electrode, described multiple detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with elastic construction with described center anchor point, described center anchor point is tool structure jaggy, and described elastic construction is fan-folded girder construction.
Compared with prior art, long in the middle of the elastic construction of the XY axis accelerometer of multi-axis capacitive accelerometer of the present utility model adopts, to successively decrease in both sides sector structure, this sector structure has good stress relief ability.Further, described sector structure length for the folded beam structure of traditional strip is shorter, so, being formed at the suprabasil ground floor polysilicon as wiring can be under elastic construction, can reduce in technique manufacturing process the impact on elastic construction performance of the step that forms due to bottom cloth line.
In addition, the center anchor point of the XY axis accelerometer of multi-axis capacitive accelerometer of the present utility model adopts notched square, while having reduced temperature variation due to the different stress producing of material thermal expansion coefficient of substrate and center anchor point, thereby reduced the deformation of center anchor point, and then reduce temperature drift.
Brief description of the drawings
Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the utility model embodiment mono-;
The schematic diagram of Fig. 2 a Shi Tu1Zhong center anchor point;
Fig. 2 b is the schematic diagram of another kind of center anchor point;
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure;
Fig. 4 is the schematic diagram of Detection capacitance in Fig. 1;
Fig. 5 is the schematic diagram of the bottom wiring that in Fig. 1, Detection capacitance is corresponding;
Fig. 6 is the overall schematic of the multi-axis capacitive accelerometer of the utility model embodiment bis-;
When Fig. 7 is the substrate generation warpage of structure shown in Fig. 6 along the schematic cross-section of straight line a;
Fig. 8 is the schematic diagram of Z axis structural sheet in Fig. 6.
Embodiment
As stated in the Background Art, the temperature drift of existing multi-axis capacitive accelerometer and impact resistance performance still can not meet the demands.Through the applicant's utility model people discovery that studies for a long period of time, this is because the normally folded beam structure of strip of elastic construction of traditional multi-axis capacitive accelerometer, length is relatively long, on the one hand impact resistance a little less than, the wiring (electrode and interconnection line) under elastic construction may affect the rigidity of elastic construction on the other hand.For this reason, the utility model provides a kind of multi-axis capacitive accelerometer, long in the middle of the elastic construction of its XY axis accelerometer adopts, to successively decrease in both sides sector structure, and this sector structure has good stress relief ability; And the length of this sector structure is shorter for the folded beam structure of traditional strip, so, being formed at the suprabasil ground floor polysilicon as wiring can be under elastic construction, can reduce in technique manufacturing process the impact on elastic construction performance of the step that forms due to bottom cloth line.
In addition, the XY axle acceleration structure of traditional multi-axis capacitive accelerometer, passive center anchor point is regular square, the more difficult release of stress producing in its process.For this reason, in multi-axis capacitive accelerometer of the present utility model, the center anchor point of XY axis accelerometer adopts notched square, while having reduced temperature variation due to the different stress producing of material thermal expansion coefficient of substrate and center anchor point, thereby reduced the deformation of center anchor point, and then reduce temperature drift.
Below in conjunction with schematic diagram, the utility model is described in more detail, wherein represent preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
[embodiment mono-]
The multi-axis capacitive accelerometer of the present embodiment is dual-axis capacitance type accelerometer, i.e. X and Y-axis accelerometer.Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the present embodiment.As shown in Figure 1, described multi-axis capacitive accelerometer comprises substrate (not shown in figure 1) and XY axle construction layer, and described XY axle construction layer comprises movable mass 31, center anchor point 32, elastic construction 33 and detecting electrode 34a, 34b.
Continue with reference to figure 1, in the present embodiment, XY axle construction layer 1a comprises eight detecting electrodes altogether, and eight detecting electrodes are symmetrically distributed in four drift angles of movable mass 31, and this modes of emplacement has effectively utilized chip area, is conducive to improve the sensitivity of accelerometer.Detailed, wherein four detecting electrode 34a are symmetrically distributed in the left and right sides of center anchor point 32, for detection of the acceleration of directions X; Other four detecting electrode 34b are symmetrically distributed in the both sides up and down of center anchor point 32, for detection of the acceleration of Y-direction., described eight detecting electrodes are distributed in radially its surrounding centered by center anchor point 32.Certainly, the utility model does not limit quantity and the arrangement mode of detecting electrode, for example four groups of detecting electrodes of other quantity also can be set and take alternate manner for example centered by center anchor point 32, to be equidistantly arranged in center anchor point 32 around.
The schematic diagram of Fig. 2 a Shi Tu1 center anchor point.As shown in Figure 2 a, XY axle construction Ceng1a center anchor point 32 be shaped as four jiaos of notched squares.Specifically, center anchor point 32 is roughly cruciform, and right-angled intersection point place caves inward and forms breach 41,42,43,44, and the shape of described breach 41,42,43,44 is identical, is all square.Find in practice, because substrate is different from the material of center anchor point 32, corresponding thermal expansivity is also different, for example substrate is monocrystalline silicon, and its thermal expansivity representative value is 2.5E-6 (1/K), and center anchor point 32 is polysilicon, its thermal expansivity representative value is 4.7E-6 (1/K), when the material of different heat expansion coefficient is in contact with one another and when temperature changes, can produces stress, thereby produce deformation.The multi-axis capacitive accelerometer of the present embodiment adopts notched central anchor dot structure, and this breach is conducive to discharge stress, thereby reduces deformation, and then reduces temperature drift.Be understandable that, the shape of center of the present utility model anchor point is not limited to cruciform, in the scope that other notched shape all comprises in creation spirit of the present utility model.For example, the shape of center anchor point 32 ' is similarly four jiaos of notched squares, and breach 41 ', 42 ', 43 ', 44 ' is all trapezoidal, as shown in Figure 2 b, also can realize the object that discharges stress.
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure.As shown in Figure 3, the fan-folded girder construction that the elastic construction 33 of XY axle construction layer 1a successively decreases for middle length, both sides.This fan-folded girder construction has good stress relief ability on the one hand, do not affecting under the condition of elastic construction rigidity on the other hand, fan-folded girder construction entire length can be shorter than traditional strip folded beam structure length, so, when elastic construction 33 layout, can walk around the wiring in substrate 10, it is described elastic construction 33 and the wiring of its bottom setting of staggering, that is, ground floor polysilicon as wiring can be via under elastic construction 33, thereby greatly reduce in technique manufacturing process the impact on elastic construction rigidity of the step that forms due to bottom cloth line.
Fig. 4 is the schematic diagram of Detection capacitance in Fig. 1.Shown in Fig. 1 and Fig. 4, every group of detecting electrode comprises: the first detecting electrode 61 and the second detecting electrode 62 and 63.The first detecting electrode 61 is connected with movable mass 31, and movable mass 31Yu center anchor point 32 and elastic construction 33 are connected, and the second detecting electrode 62 and 63 is individually fixed on substrate 10 surfaces.In the time being subject to the acceleration of Y-direction, the first detecting electrode 61 moves together with movable mass 31, thereby first increase of capacitance between detecting electrode 61 and the second detecting electrode 62 and 63, one reduce, by output circuit, two capacitances are done to difference processing and can draw corresponding acceleration.Output circuit structure and difference processing method are techniques well known, do not repeat them here.
In the present embodiment, described multi-axis capacitive accelerometer also comprises multiple scotch 35, is uniformly distributed in the surrounding of described movable mass 31 and is connected with described movable mass 31.Preferably, comprise altogether 35, four scotch 35 of four scotch and be symmetrically distributed in four drift angles of multi-axis capacitive accelerometer, for reducing the impact of external impact force on multi-axis capacitive accelerometer, avoid affecting its sensitivity.
In the present embodiment, described multi-axis capacitive accelerometer also comprises the wiring (electrode and interconnection line) being formed in substrate 10.Substrate 10 is for example silicon base, is wherein illustrated in the movable mass 31 in Fig. 1, center anchor point 32, elastic construction 33, the structure that detecting electrode 34a, 34b can be one of the forming by etch process.In addition, XY axle construction layer also comprises metal level (not shown), in order to by the sensing signal transmission producing to the wiring in substrate 10.
Concrete, described multi-axis capacitive accelerometer can comprise by following processing step: substrate is prepared, once oxidation forms insulation course, deposit ground floor polysilicon, etching ground floor polysilicon forms electrode and interconnection line, secondary oxidation forms sacrifice layer, sacrifice layer etching forms through hole, deposit second layer polysilicon, deposited metal, etching sheet metal forms interconnection line, and it is structural sheet that etching second layer polysilicon forms physical construction figure, and finally removing sacrifice layer formation movable structure unit is accelerometer.
Fig. 5 is the bottom line schematic diagram that in Fig. 1, Detection capacitance is corresponding.Shown in Fig. 1 and Fig. 5, in the present embodiment, center anchor point 32 is positioned at center, and four scotch 35 are uniformly distributed in four jiaos, and center anchor point 32 is connected with the scotch 35 that is positioned at four jiaos.Specifically, the wiring in described substrate 10 comprises four scotch lines 35 ' and four group of second detecting electrode line 62 ', 63 ' (totally eight the second detecting electrode lines).Center anchor point 32 and four scotch 35 all form by second layer polysilicon, the second detecting electrode line 62 ', 63 ' and scotch line 35 ' all form by ground floor polysilicon.Four scotch 35 are connected with center anchor point 32 by four scotch lines 35 ', are roughly X-shaped and are distributed in substrate 10.The second detecting electrode line 62 ' and the second detecting electrode line 63 ' are to be all bent into the broken line of three sections, every group of second detecting electrode line 62 ', 63 ' is parallelly distributed in two substrate blank spaces between scotch line 35 ', the second detecting electrode line 62 ' is in inner side, the second detecting electrode line 63 ' is positioned at the second detecting electrode line 62 ' outside, and elastic construction 33 is right against the outside of the second detecting electrode line 63 '.That is, the line of the second detecting electrode 62 and 63 is not distributed under elastic construction 33, can avoid the elastic construction of line top in technique manufacturing process to form step, thereby eliminate its impact on elastic construction rigidity.
[embodiment bis-]
The multi-axis capacitive accelerometer of the present embodiment is three axle capacitive accelerometers,, comprises X and Y-axis accelerometer as described in embodiment mono-that is, also comprises Z axis accelerometer.Specifically as shown in Figure 6, described X and Y-axis accelerometer comprise XY axle construction layer 1a, described Z axis accelerometer comprises the torsional pendulum type Z axis structural sheet 1b, the 1c that are positioned at XY axle construction layer 1a both sides, described XY axle construction layer 1a entirety is square, described Z axis structural sheet 1b, 1c entirety are rectangle, to save as far as possible area.
When Fig. 7 is the substrate generation warpage of structure shown in Fig. 6, along the schematic cross-section of straight line a, Fig. 8 is the schematic diagram of Z axis structural sheet 1b in Fig. 6.As shown in Figure 6 to 8, Z axis structural sheet 1b, 1c comprise: movable mass 17,18, fixed anchor point 15b, 15c, elastic construction 16b, 16c, fixed electorde 11,12,13,14.
Continue with reference to figure 6, Fig. 7 and Fig. 8, fixed electorde 11,12,13,14 is individually fixed on substrate 10 surfaces.Fixed electorde 11 is identical with fixed electorde 12 width, and about the elastic construction 16b symmetry of Z axis structural sheet 1b.Fixed electorde 13 is identical with fixed electorde 14 width, and about the elastic construction 16c symmetry of Z axis accelerometer 1c.Elastic construction 16b is connected with movable mass 17 with fixed anchor point 15b, and so, movable mass 17 can be floated on substrate 10 tops, between fixed electorde 11,12 and movable mass 17, forms variable capacitance; Similarly, elastic construction 16c is connected with movable mass 18 with fixed anchor point 15c, and so, movable mass 18 can be floated on substrate 10 tops, between fixed electorde 13,14 and movable mass 18, forms variable capacitance.Described elastic construction 16b, 16c can be shell fragment or spring or and equivalent member.In the ground floor polysilicon electricity that the movable mass 17,18 that Z axis structural sheet 1b, 1c are corresponding passes through under fixed anchor point 15b, 15c, be connected, fixed electorde 11 is connected with in fixed electorde 13 electricity, and fixed electorde 12 is connected with in fixed electorde 14 electricity.
Preferably, the barycenter of the movable mass 17 of Z axis structural sheet 1b is not on elastic construction 16b, and the barycenter of the movable mass 18 of Z axis accelerometer 1c is not on elastic construction 16c., the movable mass width difference of fixed anchor point 15b, the 15c left and right sides, thereby corresponding quality difference.Movable mass on the left of the quality of movable mass in the elastic construction 16b left side of Z axis structural sheet 1b and the elastic construction 16c of Z axis structural sheet 1c identical in quality, the movable mass on the quality of the movable mass on the elastic construction 16b right side of described Z axis structural sheet 1b and the elastic construction 16c right side of described Z axis structural sheet 1c identical in quality.That is to say, the Z axis movable mass wider portion in XY axis accelerometer left side is near XY axis accelerometer, and the Z axis movable mass narrower part on XY axis accelerometer right side is near XY axis accelerometer.
A kind of method that the present embodiment also provides multi-axis capacitive accelerometer to carry out acceleration detection, in the time existing along the external acceleration of Z axis, the movable mass of two Z axis structural sheets does torsional movement around connected elastic construction respectively, capacitance between a fixed electorde of the movable mass of one of them Z axis structural sheet and this Z axis structural sheet is C1, capacitance between a fixed electorde of the movable mass of another Z axis structural sheet and this Z axis structural sheet is C2, capacitance between another fixed electorde of the movable mass of described one of them Z axis structural sheet and this Z axis structural sheet is C3, capacitance between another fixed electorde of the movable mass of described another Z axis structural sheet and this Z axis structural sheet is C4, determine the external acceleration of Z axis by detecting the difference of described capacitance C3 and C4 sum and described capacitance C1 and C2 sum.
Detailed, when exist along Z axis external acceleration time, under the effect of inertial force, movable mass 17,18 can do torsional movement around elastic construction 16b, 16c.If when external acceleration is pointed to Z axis negative direction, movable mass 17 is near fixed electorde 12, away from fixed electorde 11, correspondingly, capacitance between movable mass 17 and fixed electorde 12 increases, and the capacitance between movable mass 17 and fixed electorde 11 reduces.Similarly, movable mass 18 is near fixed electorde 14, and away from fixed electorde 13, correspondingly, the capacitance between movable mass 18 and fixed electorde 14 increases, and the capacitance between movable mass 18 and fixed electorde 13 reduces.Fixed electorde 11 is connected with in 13 electricity, fixed electorde 12 is connected with in 14 electricity, if capacitance C2 sum is Ca between the capacitance C1 between movable mass 17 and fixed electorde 11 and movable mass 18 and fixed electorde 13, between capacitance C3 between movable mass 17 and fixed electorde 12 and movable mass 18 and fixed electorde 14, capacitance C4 sum is Cb, both difference Δ C=Cb-Ca=(C3+C4)-(C1+C2), can obtain external acceleration by detecting Δ C.
In more detail, in the time that encapsulation equal stress is larger, substrate 10 may be upwards or downsagging, taking upturned as example, if the movable mass of Z axis accelerometer 17,18 is placed as shown in Figure 6, the capacitance variation amount Δ C3 that stress deformation between movable mass 17 and fixed electorde 12 causes is similar to the capacitance variation amount Δ C2 that the stress deformation between movable mass 18 and fixed electorde 13 causes; Similarly, the capacitance variation amount Δ C1 that stress deformation between movable mass 17 and fixed electorde 11 causes is similar to the capacitance variation amount Δ C4 that the stress deformation between movable mass 18 and fixed electorde 14 causes, Δ C=Cb-Ca=((C3+ Δ C3)+(C4+ Δ C4)) – ((C1+ Δ C1)+(C2+ Δ C2)) ≈ (C3+C4)-(C1+C2); Be that above-mentioned placement can be eliminated the Detection capacitance value variable quantity that basement warping causes substantially.
The movable mass 17 of described Z axis structural sheet, 18, fixed anchor point 15b, 15c, elastic construction 16b, (etching technics forms corresponding figure to the structure that 16c can be one of the forming by etching and fumigation process, fumigation process removes the sacrifice layer under movable mass), can with the movable mass 31 of XY axle construction layer, center anchor point 32, elastic construction 33, detecting electrode 34a, 34b together utilizes second layer polysilicon to form, described fixed electorde 11, 12, 13, 14 are both and utilize ground floor polysilicon to form with suprabasil wiring, described fixed electorde 11 with fixed electorde 13 by being connected in suprabasil fixed electorde line (not shown) electricity, described fixed electorde 12 with fixed electorde 14 by being connected in suprabasil fixed electorde line (not shown) electricity.Detailed, described fixed electorde 11,12,13,14 and fixed electorde line, the second detecting electrode line 62 ', 63 ' and scotch line 35 ' all form by ground floor polysilicon.
It should be noted that, in this instructions, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is and the difference of other embodiment, between each embodiment identical similar part mutually referring to.For the XY axle construction layer of embodiment bis-disclosed capacitive accelerometers, due to corresponding with the XY axle construction layer of embodiment mono-disclosed capacitive accelerometer, so description is fairly simple, relevant part is referring to embodiment mono-corresponding part.
Foregoing description is only the description to the utility model preferred embodiment; the not any restriction to the utility model scope; any change, modification that the those of ordinary skill in the utility model field does according to above-mentioned disclosure, all belong to the protection domain of claims.
Claims (12)
1. a multi-axis capacitive accelerometer, it is characterized in that, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and multiple detecting electrode, described multiple detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with elastic construction with described center anchor point, and described elastic construction is fan-folded girder construction.
2. multi-axis capacitive accelerometer as claimed in claim 1, is characterized in that, described multi-axis capacitive accelerometer also comprises and be formed at described suprabasil wiring, the elastic construction of described XY axle construction layer and the described wiring setting of staggering.
3. multi-axis capacitive accelerometer as claimed in claim 1, is characterized in that, described XY axle construction layer comprises eight detecting electrodes, and described eight detecting electrodes are distributed in radially its surrounding centered by the anchor point of described center; Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, for detection of the acceleration of directions X; Other four detecting electrodes are symmetrically distributed in the both sides up and down of center anchor point, for detection of the acceleration of Y-direction.
4. multi-axis capacitive accelerometer as claimed in claim 3, it is characterized in that, each described detecting electrode includes the first detecting electrode and two the second detecting electrodes, described the first detecting electrode is connected with the movable mass of described XY axle construction layer, and described two the second detecting electrodes are fixed in described substrate.
5. multi-axis capacitive accelerometer as claimed in claim 1, it is characterized in that, described XY axle construction layer also comprises and is fixed on described suprabasil multiple scotch, described multiple scotch be uniformly distributed in described XY axle construction layer movable mass surrounding and be connected with the movable mass of described XY axle construction layer.
6. a multi-axis capacitive accelerometer, it is characterized in that, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and multiple detecting electrode, described multiple detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with elastic construction with described center anchor point, and described center anchor point is tool structure jaggy, and described elastic construction is fan-folded girder construction.
7. multi-axis capacitive accelerometer as claimed in claim 6, is characterized in that, described center anchor point is cruciform, its right-angled intersection point place formation breach that caves inward.
8. multi-axis capacitive accelerometer as claimed in claim 7, is characterized in that, described breach is square breach or trapeze cut.
9. multi-axis capacitive accelerometer as claimed in claim 6, is characterized in that, described multi-axis capacitive accelerometer also comprises and be formed at described suprabasil wiring, the elastic construction of described XY axle construction layer and the described wiring setting of staggering.
10. multi-axis capacitive accelerometer as claimed in claim 6, is characterized in that, described XY axle construction layer comprises eight detecting electrodes, and described eight detecting electrodes are distributed in radially its surrounding centered by the anchor point of described center; Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, for detection of the acceleration of directions X; Other four detecting electrodes are symmetrically distributed in the both sides up and down of center anchor point, for detection of the acceleration of Y-direction.
11. multi-axis capacitive accelerometers as claimed in claim 10, it is characterized in that, each described detecting electrode includes the first detecting electrode and two the second detecting electrodes, described the first detecting electrode is connected with the movable mass of described XY axle construction layer, and described two the second detecting electrodes are fixed in described substrate.
12. multi-axis capacitive accelerometers as claimed in claim 6, it is characterized in that, described XY axle construction layer also comprises and is fixed on described suprabasil multiple scotch, described multiple scotch be uniformly distributed in described XY axle construction layer movable mass surrounding and be connected with the movable mass of described XY axle construction layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320802751.6U CN203720199U (en) | 2013-12-06 | 2013-12-06 | Multi-axis capacitor accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320802751.6U CN203720199U (en) | 2013-12-06 | 2013-12-06 | Multi-axis capacitor accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203720199U true CN203720199U (en) | 2014-07-16 |
Family
ID=51159339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320802751.6U Expired - Fee Related CN203720199U (en) | 2013-12-06 | 2013-12-06 | Multi-axis capacitor accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203720199U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645345A (en) * | 2013-12-06 | 2014-03-19 | 杭州士兰微电子股份有限公司 | Multiaxial capacitive accelerometer |
| CN105712292A (en) * | 2014-12-22 | 2016-06-29 | 德尔福芒斯公司 | Mems structure with thick movable membrane |
-
2013
- 2013-12-06 CN CN201320802751.6U patent/CN203720199U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645345A (en) * | 2013-12-06 | 2014-03-19 | 杭州士兰微电子股份有限公司 | Multiaxial capacitive accelerometer |
| CN103645345B (en) * | 2013-12-06 | 2016-08-17 | 杭州士兰微电子股份有限公司 | multi-axis capacitive accelerometer |
| CN105712292A (en) * | 2014-12-22 | 2016-06-29 | 德尔福芒斯公司 | Mems structure with thick movable membrane |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10647570B2 (en) | Fabrication process for a symmetrical MEMS accelerometer | |
| US9513310B2 (en) | High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer | |
| EP3156804B1 (en) | Microelectromechanical sensor device with reduced stress sensitivity | |
| US20090090184A1 (en) | Out-of-plane sensing device | |
| US6571628B1 (en) | Z-axis accelerometer | |
| US7637160B2 (en) | MEMS suspension and anchoring design | |
| CN103645342A (en) | Multiaxial capacitive accelerometer and acceleration detection method | |
| US9557346B2 (en) | Accelerometer and its fabrication technique | |
| CN104062461A (en) | Universal vibration threshold-value sensor and 3D printing preparation method for same | |
| CN102721829B (en) | Capacitive micro acceleration sensor and uni-wafer manufacturing method thereof | |
| CN203720200U (en) | Multi-axis capacitor accelerometer | |
| CN103675345A (en) | Accelerometer and manufacturing process thereof | |
| CN103675347A (en) | Accelerometer and manufacturing process thereof | |
| CN104133080B (en) | Comb capacitance type micro-acceleration gauge | |
| CN203720199U (en) | Multi-axis capacitor accelerometer | |
| US20120048019A1 (en) | Highly sensitive capacitive sensor and methods of manufacturing the same | |
| CN103645343B (en) | multi-axis capacitive accelerometer | |
| CN203630155U (en) | Multi-axis capacitive accelerometer | |
| CN103235156A (en) | Single elastic beam type interdigital capacitor accelerometer | |
| CN103675344A (en) | Accelerometer and manufacturing process thereof | |
| CN103645345A (en) | Multiaxial capacitive accelerometer | |
| CN104981425B (en) | There is the sensor of particulate barrier | |
| CN204028106U (en) | Comb capacitance type micro-acceleration gauge | |
| US11427465B2 (en) | Capacitive sensors having temperature stable output | |
| CN105891545A (en) | High-accuracy low-g-value SOI micro-accelerometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20191206 |