CN203687556U - Silicon wafer drying machine - Google Patents

Abstract

The utility model discloses a silicon wafer drying machine. The silicon wafer drying machine comprises a support and a drying cavity supported by the support. The left side and the right side of the drying cavity are provided with a silicon wafer basket inlet and a silicon wafer basket outlet, the support is further provided with a sliding rail penetrating through the silicon wafer basket inlet and the silicon wafer basket outlet, the support movably supports a pull rod parallel to the sliding rail, a pushing pawl is hinged to the pull rod in a supported mode, and the pull rod is driven through a reciprocating linear movement mechanism. The silicon wafer drying machine can meet the requirement for drying a plurality of silicon wafer baskets output at each takt, and the silicon wafer baskets have the determined positions after being output.

Description

Silicon chip drying machine

Technical field

The utility model relates to a kind of drying plant, relates in particular to the drying plant after a kind of Wafer Cleaning.

Background technology

In silicon chip production process, must through matting, will remove its surperficial moisture after Wafer Cleaning, being cleaned, dry silicon chip, silicon chip drying machine is the most frequently used equipment of removing surface moisture after Wafer Cleaning.Silicon wafer cleaner is all to clean the several silicon wafer baskets that silicon chip is housed of female basket carrying to clean at present, after cleaning completes, be to clean female basket carrying silicon wafer basket and enter in dryer and dry equally, in drying course, dryer progressively passes through the oven dry cavity in dryer by the female basket of conveyer belt transport cleaning by technique beat, make the moisture evaporation on silicon chip and silicon wafer basket and the female basket of cleaning surface through hot-air blowing, thereby obtain dry silicon chip, the female basket of silicon chip after drying transfers out oven dry cavity by conveyer belt, operates by manually carrying out blanking.Above-mentioned dryer is to cleaning with female basket carrying silicon wafer basket and being what problem that substantially do not exist by the production form of manually drying rear blanking.

Along with the raising of people to equipment automatization requirement, to clean that female basket carrying silicon wafer basket cleans and can not to meet the need by the production form of manually drying rear blanking, up-to-date silicon wafer cleaner no longer adopts this form, clean in each rinse bath but once directly capture several silicon wafer baskets with manipulator, not re-using the female basket of cleaning loads, and each silicon wafer basket to enter cleaning machine and cleaning be all to operate by special manipulator from dryer output after completing drying, this has just proposed higher status requirement to each productive temp from each silicon wafer basket of dryer output, and inertia when conventionally the transporting pattern of conveyer belt used is due to skidding of may existing of driving-belt and conveyer belt can cause and carries location inaccurate, thereby cannot meet the requirement without the production form of female basket cleaning machine and automatic blanking.

Utility model content

For the existing above-mentioned deficiency of prior art, technical problem to be solved in the utility model is to provide a kind of silicon chip drying machine, it can not only meet each productive temp exports the drying requirement of multiple silicon wafer baskets, and has definite position after each silicon wafer basket oven dry output.

In order to solve the problems of the technologies described above, a kind of silicon chip drying machine of the present utility model, comprise support, be supported on the oven dry cavity on support, the described oven dry cavity left and right sides is provided with silicon wafer basket import and silicon wafer basket outlet, is also provided with the slide rail that runs through silicon wafer basket import and silicon wafer basket outlet on described support, is also supported with movably the pull bar parallel with slide rail on described support, hinged on described pull bar have a propelling movement pawl, and described pull bar is driven by linear reciprocating motion mechanism.

In said structure, owing to being also provided with the slide rail that runs through silicon wafer basket import and silicon wafer basket outlet on described support, described slide rail length is greater than the distance between silicon wafer basket import and silicon wafer basket outlet, slide rail two ends can be stretched out respectively outside silicon wafer basket import and silicon wafer basket outlet, several silicon wafer baskets of drying can be shelved on the slide rail entrance point outside silicon wafer basket import, enter to dry after drying in cavity to be delivered to the slide rail port of export outside silicon wafer basket outlet again, again owing to being also supported with movably the pull bar parallel with slide rail on described support, hinged on described pull bar have a propelling movement pawl, described pull bar is driven by linear reciprocating motion mechanism, the several silicon wafer baskets that are shelved on slide rail entrance point are pushed toward silicon wafer basket Way out from silicon wafer basket import from one group of propelling movement pawl of hinged relevant position on pull bar, pull bar drives propelling movement pawl to move to silicon wafer basket Way out under the driving of linear reciprocating motion mechanism, each propelling movement face that pushes pawl contacts with corresponding silicon wafer basket, promote silicon wafer basket toward a station of silicon wafer basket Way out motion, then motion is returned in the other direction, in return course, push pawl can be in the time encountering silicon wafer basket around its hinged center rotating to dodge, return and arrive after original position, prepare propelling movement next time, on pull bar, be all provided with the propelling movement pawl of respective numbers corresponding to each station, each silicon wafer basket on the each station of so each promotion moves forward a station, each motion has multiple silicon wafer baskets to arrive the slide rail port of export outside silicon wafer basket outlet, by blanking mechanical hand or manually carry out blanking and operate, because the reciprocating motion stroke of pull bar is determined, the position arriving after the each motion of the propelling movement pawl on it is exactly consistent, position after the each silicon wafer basket output that has guaranteed like this to carry is determined, its positioning precision can meet the operation requirements of automatic blanking machinery hand.Therefore, adopt the technical program can not only meet each productive temp and export the drying requirement of multiple silicon wafer baskets, and there is definite position after each silicon wafer basket oven dry output.

A kind of preferred embodiment of the present utility model is provided with two one slide rails on described support, is provided with two pull bars between two one slide rails.Adopt this embodiment, silicon wafer basket two ends are shelved on respectively on two one slide rails, provide propelling movement power by two pull bars between two one slide rails, and silicon wafer basket is shelved steadily like this, and propelling movement process there will not be the shift phenomenon of silicon wafer basket.

Another kind of preferred embodiment of the present utility model is provided with four one slide rails on described support, and four one slide rails form two groups, is provided with two pull bars between two one slide rails of every group.Adopt this embodiment, two one slide rails of every group and two pull bars wherein can push a row silicon wafer basket reposefully, four one slide rails and pull bar wherein can push two row silicon wafer baskets simultaneously, have adapted to the different instructions for uses of cleaning machine, have effectively improved production efficiency.

Another preferred embodiment of the present utility model, on described slide rail, plane is provided with antifriction pad.Adopt this embodiment, can effectively reduce the friction between silicon wafer basket and slide rail, reduce friction noise.

Another preferred embodiment of the utility model, described propelling movement pawl is provided with balancing weight.Adopt this embodiment, can strengthen rotating torque by balancing weight, guarantee to push the hinged rotation flexibility on pull bar time of pawl, prevent that dust adhesion from hindering the rotation that pushes pawl in the time being articulated and connected place.

The further preferred embodiment of the utility model, the propelling movement of described propelling movement pawl exports facing to silicon wafer basket, pushes the hinged axial line of pawl between its propelling movement face and center of gravity, is also provided with the propelling movement pawl block corresponding with pushing pawl on described pull bar.Adopt this embodiment, push pawl under nature in operating position, the torque forming by its center of gravity and hinged axial line is upwards lifted the propelling movement face end that pushes pawl, and remain on the duty that exceeds slide rail plane under the position-limiting action that pushes pawl block, can push forward silicon wafer basket with the motion of pull bar at any time, and in the time that pull bar is made reseting movement backward, each propelling movement piece on last station can be encountered the silicon wafer basket of a rear station, at this moment, pushing piece can overcome the torque that center of gravity produces and rotate around its hinged axial line under the effect of silicon wafer basket, the propelling movement face end that pushes pawl can go to silicon wafer basket bottom, until shift out silicon wafer basket bottom, push pawl and can under the effect of its center of gravity, return back to duty again, thereby can make to push the automatic adaptation of pawl without other power and carry the status requirement in silicon wafer basket and reposition process forward, simple and reliable for structure, guarantee the conveying of silicon wafer basket.

The another further preferred embodiment of the utility model, described oven dry cavity top is provided with air outlet, and described oven dry cavity bottom is provided with return air inlet, between return air inlet and air outlet, is led to and is had blower fan and heater by air channel.Adopt this embodiment, the oven dry of silicon wafer basket adopts the mode of circulating air to carry out, blower fan sucks the hot blast of drying in cavity from the return air inlet of drying cavity top, heater via is blown into silicon wafer basket from the air outlet of drying cavity after being heated to predetermined temperature again, make the moisture evaporation on it, after the continuous drying of several stations, reach drying effect.During this, hot blast is recycling always, has saved the energy, has guaranteed drying effect.

Accompanying drawing explanation

Below in conjunction with the drawings and specific embodiments, the utility model silicon chip drying machine is described in further detail.

Fig. 1 is the structural representation of a kind of specific embodiment of the utility model silicon chip drying machine;

Fig. 2 is the cross sectional representation of structure shown in Fig. 1;

Fig. 3 is the top view of structure shown in Fig. 1;

Fig. 4 is the partial enlarged view in structure shown in Fig. 2;

Fig. 5 is the partial enlarged view in structure shown in Fig. 1.

In figure: 1-linear reciprocating motion mechanism, the outlet of 2-silicon wafer basket, 3-support, 4-are dried cavity, 5-air channel, 6-propelling movement pawl, 7-pull bar, 8-slide rail, 9-return air inlet, 10-air outlet, 11-filter, 12-automatically-controlled door, the import of 13-silicon wafer basket, 14-blower fan, 15-heater, 16-wind-supplying mouth, 17-antifriction pad, 18-propelling movement pawl block, 19-hinging supporting shaft, 20-balancing weight, 21-Connection Block, 22-silicon wafer basket.

The specific embodiment

In the silicon chip drying machine shown in Fig. 1, Fig. 2 and Fig. 3, the frame-shaped structure of support 3 for being formed by steel pipe, the outside of support 3 is covered with the member such as housing and access door, have at support 3 upper supports the cavity 4 of oven dry, dry cavity 4 by stainless sheet steel welding fabrication, form a drying channel, its left and right sides has silicon wafer basket import 13 and silicon wafer basket outlet 2; Silicon wafer basket import 13 exports 2 outsides with silicon wafer basket and is respectively equipped with automatically-controlled door 12, and automatically-controlled door 12 is opened up and down by air cylinder driven, in each technique beat silicon wafer basket 22 course of conveying, opens, and closes, to keep drying temperature and the cleanliness factor in cavity 4 after conveying finishes; Be provided with air outlet 10 on the top of drying cavity 4, dry cavity 4 bottom one sides and be provided with return air inlet 9, between return air inlet 9 and air outlet 10, lead to and have blower fan 14 and heater 15 by air channel 5, make to dry air circulation the heating in cavity 4 by blower fan 14 and heater 15, for guaranteeing drying effect, dry cavity 4 and be provided with the air outlet 10 and return air inlet 9 that connect two air channels 5, in each air channel 5, be provided with blower fan 14 and heater 15, can strengthen like this hot blast air quantity, more be conducive to silicon wafer basket 22 and be dried in the productive temp of regulation; At air outlet, 10 places are provided with filter 11, in order to guarantee to enter the cleanliness factor of drying the hot-air in cavity 4; Air channel 5 is provided with wind-supplying mouth 16, can be as required to the fresh air of air channel 5 interior supplementary clean dried, and to reduce the humidity of drying cavity 4 interior hot blasts, and it is interior in barotropic state to keep drying cavity 4, reduces entering of outside air.

On support 3, be also provided with the slide rail 8 that runs through silicon wafer basket import 13 and silicon wafer basket outlet 2, slide rail 8 is fixedly connected with support 3 through drying cavity 4, its two ends are stretched out respectively silicon wafer basket import 13 and are exported outside 2 with silicon wafer basket, on support 3, be also supported with movably the pull bar parallel with slide rail 87, pull bar 7 sliding bearings are on bearing, bearing is installed with on support 3, pull bar 7 is parallel with slide rail 8, it is same that through drying, silicon wafer basket import 13 is stretched out respectively at cavity 4 and two ends and silicon wafer basket exports outside 2, on pull bar 7 hinged have push pawl 6, the quantity that pushes pawl 6 is corresponding with the quantity of the silicon wafer basket 22 that will carry, slide rail 8 has four, form two groups, two one slide rails 8 form one group, between every group of two one slide rails 8, be provided with two pull bars 7, in order to push a row silicon wafer basket 22, silicon wafer basket 22 two ends are held on respectively on two one slide rails 8, each silicon wafer basket 22 is pushed by two propelling movement pawls 6, two groups of slide rails 8 have four pull bars 7, like this, once can push two row silicon wafer baskets 22, and on each station, there are four silicon wafer baskets 22, be that in every row silicon wafer basket 22, each station has 2 silicon wafer baskets, each station just has eight to push pawl 6, each technique beat just have four silicon wafer baskets 22 complete dry transfer out, four pull bars 7 are connected by connector, unification is driven by linear reciprocating motion mechanism 1, each technique beat linear reciprocating motion mechanism 1 moves once, the silicon wafer basket of each station 22 is pushed forward to a station, the mechanism of linear reciprocating motion shown in figure 1 is cylinder, its move distance is definite value, the position that has guaranteed the silicon wafer basket 22 of each conveying is determined, and be also accurately, there is corresponding outgoing position precision.Certainly linear reciprocating motion mechanism 1 can be also the motion of other forms such as motor-driven pinion and rack, leading screw and nut mechanism, slider-crank mechanism, as long as realizing the linear reciprocating motion of pull bar and have definite movement position.

Fig. 4 amplifies Fig. 2 part, shows one group of transversary relation for delivery of the part such as two one slide rails 8 and two pull bars 7 of silicon wafer basket 22; Fig. 5 amplifies Fig. 1 part, shows the vertical structure relation of parts such as pushing pawl, pull bar 7 and slide rail 8.In the structure shown in Fig. 4 and Fig. 5, two one slide rails 8 are divided into both sides, and two pull bars 7, between two one slide rails 8, push between the pull bar 7 and slide rail 8 of pawl 6 in every side, hinging supporting shaft 19 is fixedly installed on Connection Block 21, on Connection Block 21, be also fixedly installed and push pawl block 18, push pawl 6 and be provided with balancing weight 20, balancing weight 20 is installed in and pushes in pawl 6, its density of material is higher than the density of material that pushes pawl 6 bodies, the face contacting with silicon wafer basket 22 at propelling movement pawl 6 front ends is propelling movement face, this propelling movement exports 2 directions facing to silicon wafer basket, pushing pawl 6 is set on hinging supporting shaft 19, form hinged connection, hinged axial line on propelling movement pawl 6 is between its propelling movement face and center of gravity, under nature, the torque that propelling movement pawl 6 centers of gravity and hinged axial line form is upwards lifted the propelling movement face end that pushes pawl 6, and remain on the duty that exceeds plane on slide rail 8 under the position-limiting action that pushes pawl block 18, Connection Block 21, hinging supporting shaft 19, push pawl block 18 and push pawl 6 assemblings and form a little construction package, this construction package is fixedly mounted on pull bar 7 by Connection Block 21, pull bar 7 is aluminium section bar, this construction package can regulate arbitrarily installation site along its longitudinal link slot, like this, push pawl 6 by hinging supporting shaft 19 and Connection Block 21 is hinged is connected on pull bar 7, on pull bar 7, be also provided with the propelling movement pawl block 18 corresponding with pushing pawl 6 by Connection Block 21.On slide rail 8, plane is provided with antifriction pad 17, and this antifriction pad 17 can be by gluing or be fixedly connected with slide rail 8 by screw.

Below only enumerated preferred embodiments more of the present utility model, but the utility model is not limited to this, without prejudice to the utility model basic structure in the situation that, can also makes many changes and conversion.As the position of centre of gravity that pushes pawl 6 also can arrange between its propelling movement face and hinged axial line, elastic part is separately set keeps the propelling movement that pushes pawl 6 towards above lifting to implement the propelling movement to silicon wafer basket 22, when pull bar 7 moves backward, when propelling movement pawl 6 is encountered the silicon wafer basket 22 of rear position, press and push the elastic force that pawl 6 overcomes elastic part and dodge out silicon wafer basket 22 downwards by silicon wafer basket 22, after propelling movement pawl 6 moves to silicon wafer basket 6 time, push pawl 6 and upwards lift under the elastic force effect of elastic part, prepare propelling movement next time.Can reach by pull bar 7 equally like this, push pawl 6 and push the requirement of silicon wafer basket 22; On described support 3, also can only arrange between two one slide rail 8, two one slide rails 8 and be provided with two pull bars 7, adapt to like this drying requirement of a row silicon wafer basket 22; In described oven dry cavity 4, also can only establish one group of air outlet 10 and return air inlet 9, a blower fan 14 is joined in employing one air channel 5 and heater 15 connects, and can also establish three groups or more air outlets 10 and return air inlet 9, and a blower fan 14 is joined in each air channel 5 and heater 15 connects.And so on, as long as improvement and the conversion done in the utility model basic principle, all should be considered as falling in protection domain of the present utility model.

Claims (10)

1. a silicon chip drying machine, comprise support (3), be supported on the oven dry cavity (4) on support (3), described oven dry cavity (4) left and right sides is provided with silicon wafer basket import (13) and silicon wafer basket outlet (2), it is characterized in that: on described support (3), be also provided with the slide rail (8) that runs through silicon wafer basket import (13) and silicon wafer basket outlet (2), on described support (3), be also supported with movably the pull bar (7) parallel with slide rail (8), at the upper hinged propelling movement pawl (6) that has of described pull bar (7), described pull bar (7) is driven by linear reciprocating motion mechanism (1).

2. silicon chip drying machine according to claim 1, is characterized in that: on described support (3), be provided with two one slide rails (8), be provided with two pull bars (7) between two one slide rails (8).

3. silicon chip drying machine according to claim 1, is characterized in that: on described support (3), be provided with four one slide rails (8), four one slide rails (8) form two groups, between two one slide rails (8) of every group, are provided with two pull bars (7).

4. according to the silicon chip drying machine described in claim 1,2 or 3, it is characterized in that: the upper plane of described slide rail (8) is provided with antifriction pad (17).

5. silicon chip drying machine according to claim 1, is characterized in that: described propelling movement pawl (6) is provided with balancing weight (20).

6. silicon chip drying machine according to claim 1 or 5, it is characterized in that: the propelling movement of described propelling movement pawl (6) is facing to silicon wafer basket outlet (2), push the hinged axial line of pawl (6) between its propelling movement face and center of gravity, on described pull bar (7), be also provided with the propelling movement pawl block (18) corresponding with pushing pawl (6).

7. silicon chip drying machine according to claim 1, is characterized in that: described silicon wafer basket import (13) is respectively equipped with automatically-controlled door (12) with silicon wafer basket outlet (2).

8. silicon chip drying machine according to claim 1, it is characterized in that: described oven dry cavity (4) top is provided with air outlet (10), described oven dry cavity (4) bottom is provided with return air inlet (9), between return air inlet (9) and air outlet (10), leads to by air channel (5) have blower fan (14) and heater (15).

9. silicon chip drying machine according to claim 8, is characterized in that: described air outlet (10) is provided with filter (11).

10. silicon chip drying machine according to claim 8, is characterized in that: described air channel (5) are provided with wind-supplying mouth (16).

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