CN203643743U - Simple positive and negative detection device for photomask - Google Patents
Simple positive and negative detection device for photomask Download PDFInfo
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- CN203643743U CN203643743U CN201320821552.XU CN201320821552U CN203643743U CN 203643743 U CN203643743 U CN 203643743U CN 201320821552 U CN201320821552 U CN 201320821552U CN 203643743 U CN203643743 U CN 203643743U
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- 238000011900 installation process Methods 0.000 description 3
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Abstract
The utility model provides a simple positive and negative detection device for a photomask. The simple positive and negative detection device for the photomask at least comprises a photomask box, a sensor positioned above the photomask box, and a signal acquisition device connected with the sensor, wherein the photomask box is provided with symmetric identifiers positioned at two ends of the center line of the photomask box and at least one light transmission identifier positioned on one side, which is close to a photomask ID (identifier), of the center line. The light transmission identifiers are arranged on one side, which is close to the photomask ID, of the center line on the photomask; the optical sensor which is easy to mount and low in cost replaces a selective mounting component label reading device which is complicated in mounting and high in manufacturing cost and is used for detecting and identifying the light transmission identifiers. On the premise of guaranteeing correct detection and identification, the mounting process is greatly simplified, the time is saved, and the cost is obviously lowered.
Description
Technical field
The utility model relates to semiconductor manufacturing equipment field, particularly relates to the positive and negative detecting easy device of a kind of light shield.
Background technology
In the exposure technology of wafer, the figure on light shield must accurately be transferred on wafer, and therefore, light shield must be guaranteed correct in the process of placing.But because the aligning using in light shield 10 alignment procedures is designated Central Symmetry mark 11, do not read its corresponding light shield ID13(as shown in Figure 1a), in the time that light shield is placed into box for photomask, occur the situation that left and right is inverted, board end alignment procedures still can normally be passed through, and board can not be reported to the police.Therefore, if light shield managerial personnel mistake is while being inverted in box for photomask by light shield, board end can not detect, and so just there will be figure on light shield by being exposed on wafer of mistake, and then the problem of generation defect.
At present, for fear of the be inverted generation of situation of light shield, light shield managerial personnel can install one on board can select installing component, tag reader 12, be used for reading light shield ID13, in the time that light shield 10 is just being put, tag reader 12 can read light shield ID13(as shown in Figure 1 b), in the time that light shield 10 is inverted, tag reader 12 reads less than light shield ID13(as shown in Fig. 1 c), light shield 10 is just being put and is being inverted, and tag reader 12 will produce unlike signal, judges the positive and negative configuration state of light shield 10 with this.
But described tag reader cost is expensive especially, more than reaching tens thousand of units, and this device installation process more complicated, this has just limited its use in exposure technology greatly.
Therefore, provide a kind of positive and negative detecting easy device of follow-on light shield with low cost, that be convenient to installation very necessary.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of light shield positive and negative detecting easy device, be used for solving prior art in the time that light shield is put into box for photomask, for the situation that prevents that light shield is inverted, needing to install to select installing component tag reader to read confirmation to it, and tag reader process more complicated is installed, and the expensive especially problem of tag reader cost.
For achieving the above object and other relevant objects, the utility model provides a kind of light shield positive and negative detecting easy device, and the positive and negative detecting easy device of described light shield at least comprises:
Box for photomask;
Be contained in described box for photomask and be provided with the light shield of light shield ID; Described light shield is provided with and is positioned at the symmetry mark at its center line two ends and is positioned at this center line at least one printing opacity mark near light shield ID mono-side;
Be arranged at the sensor of described box for photomask top; Described sensor comprises radiative transmitting terminal, receive this radiative catoptrical receiving end and for by the reflected light light intensity receiving and the right light intensity determination module of default beam intensity ratio; Described utilizing emitted light irradiates described printing opacity mark in the time that light shield is just being put or is being inverted;
The signal pickup assembly being connected with described sensor light intensity determination module.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described printing opacity is designated two, is positioned at the both sides of described light shield center line near light shield ID mono-side.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described sensor is optical sensor.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, the vertical projection of described sensor is parallel with box for photomask sideline.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described in emit light on light shield, itself and horizontal maximum angle θ
1expression formula be: tan θ
1=h
1/ (d/4), and wherein, h
1for light shield is from the distance of box for photomask bottom, d is the width of printing opacity mark.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described in emit light on light shield, itself and horizontal minimum angle theta
2expression formula be: tan θ
2=h
2/ L, wherein, h
2for light shield is from the distance at box for photomask top, L is the distance of printing opacity mark center to box for photomask border, nearest one end.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described in emit light on light shield, itself and horizontal angular range be 19～78 degree.
As a kind of preferred version of the positive and negative detecting easy device of light shield of the present utility model, described in emit light on light shield, itself and horizontal angular range be 50～70 degree.
As mentioned above, the positive and negative detecting easy device of light shield of the present utility model, there is following beneficial effect: on light shield, be designed with and be positioned at the printing opacity mark of this center line near light shield ID mono-side, use and install simply, optical sensor with low cost substitutes installs complexity, the installing component the selected tag reader that cost involves great expense is detected identification to printing opacity mark, be more than tens thousand of units due to the required cost of former board selectable unit (SU) tag reader being installed, and the required cost of optical sensor that the utility model uses is 6000 yuan of left and right, this is just guaranteeing under the prerequisite that detecting identification is correct, greatly simplify installation process, save the time, significantly reduce cost.
Accompanying drawing explanation
Fig. 1 a is shown as light shield schematic diagram of the prior art.
Fig. 1 b is shown as when light shield of the prior art is just being put and uses tag reader to detect the positive and negative schematic diagram of putting of light shield.
Fig. 1 c is shown as when light shield of the prior art is inverted and uses tag reader to detect the positive and negative schematic diagram of putting of light shield.
Fig. 2 a is shown as the positive and negative detecting easy device of light shield of the present utility model schematic diagram.
Fig. 2 b is shown as the side view of the positive and negative detecting easy device of light shield of the present utility model detecting light shield while just putting.
Fig. 2 c is shown as the side view of the positive and negative detecting easy device of light shield of the present utility model detecting light shield while being inverted.
Fig. 2 d to 2e is shown as emitting light on light shield that the positive and negative detecting easy device of light shield of the present utility model sends, the side view of itself and horizontal angle.
Fig. 2 f is shown as in another embodiment of the present utility model side view when the positive and negative detecting easy device of light shield is just being put.
Fig. 2 g is shown as in another embodiment of the present utility model side view when the positive and negative detecting easy device of light shield is inverted.
Element numbers explanation
10,20 light shields
11,21 symmetrical marks
12 tag readers
22 printing opacity marks
13,23 light shield ID
24 sensors
The vertical projection of 24a sensor on box for photomask
241 transmitting terminals
242 receiving ends
243 light intensity determination modules
25 signal pickup assemblies
26 box for photomask
261 box for photomask tops
262 box for photomask bottoms
27 light shield center lines
28 detection region
Q
1light intensity diffuses
Q
2reflected light light intensity
θ
1utilizing emitted light and horizontal maximum angle
θ
2utilizing emitted light and horizontal minimum angle
The width of d printing opacity mark
H
1light shield is from the distance of box for photomask bottom
H
2light shield is from the distance at box for photomask top
L printing opacity mark center is to the distance on box for photomask border, nearest one end
Embodiment
By particular specific embodiment, embodiment of the present utility model is described below, person skilled in the art scholar can understand other advantages of the present utility model and effect easily by the disclosed content of this instructions.
Refer to Fig. 2 a to Fig. 2 g.Notice, appended graphic the illustrated structure of this instructions, ratio, size etc., all contents in order to coordinate instructions to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, all should still drop on the technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, in this instructions, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the utility model without essence.
Embodiment mono-
Refer to Fig. 2 a to Fig. 2 e, the utility model provides a kind of light shield positive and negative detecting easy device, and the positive and negative detecting easy device of described light shield at least comprises: box for photomask 26; Be contained in described box for photomask 26 and be provided with the light shield 20 of light shield ID23; Described light shield 20 is provided with and is positioned at the symmetry mark 21 at its center line 27 two ends and is positioned at this center line 27 at least one printing opacity mark 22 near light shield ID23 mono-side; Be arranged at the sensor 24 of described box for photomask 26 tops; Described sensor 24 comprises radiative transmitting terminal 241, receive this radiative catoptrical receiving end 242 and for by the reflected light light intensity receiving and the right light intensity determination module 243 of default beam intensity ratio; Described utilizing emitted light irradiates described printing opacity mark 22 in the time that light shield 20 is just being put or is being inverted; The signal pickup assembly 25 being connected with described sensor light intensity determination module 243.
Concrete, described light shield 20 itself is with the light shield ID23 that is useful on its identity of identification, not only has the symmetry mark 21 that is positioned at its center line 27 two ends for aiming at simultaneously, and is positioned at this center line 27 at least one printing opacity mark 22 near light shield ID23 mono-side.Preferably, described printing opacity mark 22 is two, lays respectively at the both sides near light shield ID23 one end.After light shield 20 is put into box for photomask 26, whether be inverted in order to detect it, realized by detect described printing opacity mark 22 with sensor 24 exactly, if sensor 24 detects described printing opacity mark 22, illustrate that light shield 20 just putting, otherwise side is inverted.
It should be noted that, because light shield 20 requires high precision and pinpoint accuracy, so can not use sensor 24 directly detects light shield 20, but need a satisfactory light shield carrying platform, here we use box for photomask that can fixed position, in the process of detecting, contaminated in order to prevent light shield 20, box for photomask 26 must seal, and necessary top, box for photomask top 261 is good.
Refer to Fig. 2 a, after light shield 20 is put into box for photomask 26, to the schematic diagram of its detecting that is just being inverted.After light shield 20 is put into box for photomask 26, detection region 28 is put into well at 261 tops, box for photomask top, now, above the box for photomask 26 of putting well, is equiped with sensor 24, and preferably, described sensor 24 is optical sensor.Described sensor 24 is positioned at box for photomask 26 tops, light shield 20 while just putting near one end of light shield ID23, and the vertical projection 24a of sensor 24 on box for photomask 26 is parallel with the sideline of box for photomask 26.Described sensor 24 is slant settings, and its transmitting terminal 241 is with receiving end 242 downwards towards printing opacity mark 22, and its afterbody is towards symmetry mark 21.The transmitting terminal 241 of described sensor 24 and receiving end 242 are in the same side.The principle of work of the positive and negative detecting easy device of described light shield is: because the printing opacity mark 22 on light shield 20 has light transmission features, therefore, light shield 20 is just being put when being inverted, the light intensity intensity that receiving end 242 receives can be different, now, as long as set in advance the boundary value of a light intensity in sensor 24, light intensity determination module 243 can be compared to the reflected light light intensity receiving and default light intensity, the light intensity intensity receiving when receiving end 242 is greater than this boundary value and is less than this critical value both of these case, sensor 24 can be exported different signals, the signal of output can be collected by the signal pickup assembly 25 being connected with described sensor light intensity determination module 243, light shield managerial personnel can judge according to the unlike signal collecting whether light shield 24 is inverted.Preferably, in the present embodiment, in the time that light intensity intensity is greater than the boundary value of setting, sensor 24 meeting output signals 0, represent that light shield is inverted; In the time that light intensity intensity is less than setting boundary value, sensor 24 meeting output signals 1, expression light shield is just put.
Refer to Fig. 2 b～2c, for sensor 24 is detected the side view of process, wherein, Fig. 2 b be light shield 20 while just putting sensor 24 detect the side view of process, Fig. 2 c be light shield 20 while being inverted sensor 24 detect the side view of process.
As shown in Figure 2 b, in the time that light shield 20 is just being put, transmitting terminal 241 is launched light beam, because box for photomask top 261 has certain light transmission, part light can arrive the printing opacity mark 22 on light shield through box for photomask top 261, be that sensor 24 detects printing opacity mark 22, because its printing opacity mark 22 has light transmission, light can arrive box for photomask bottom 262 through light shield 20, because of box for photomask bottom 262 light tight, and can reflected light, light can reflect after arriving box for photomask bottom 262, because of light shield 20 light tight, therefore the light beam of reflection is intercepted by light shield 20, the light intensity that receiving end 242 receives is very weak, the light intensity that only diffuses Q
1, be less than predefined boundary value, now, sensor 24 can be exported corresponding signal 1, and light shield managerial personnel can be judged to be light shield 20 and just put.
As shown in Figure 2 c, in the time that light shield 20 is inverted, transmitting terminal 241 is launched light beam, part light arrives light shield 20 through box for photomask top 261, because light shield is now inverted, printing opacity mark 22 does not incide the position on light shield 20 at light, be that sensor 24 is detected less than printing opacity and identified, light is directly reflected by light shield 20, the light reflecting through light shield 20 arrives box for photomask 261, part light can penetrate box for photomask 261 transmissions and go out, the a part of light transmitting can receive receiving end 242, situation while just putting compared to light shield 20, the light intensity that now receiving end 242 receives is stronger, for the light intensity Q that diffuses
1with reflected light light intensity Q
2sum Q
1+ Q
2, being greater than predefined boundary value, sensor 24 can be exported corresponding signal 0, and light shield managerial personnel can be judged to be light shield 20 and be inverted.
It should be noted that, because the printing opacity mark 22 on light shield 20 has certain width d, and light shield 20 has respectively certain distance h apart from box for photomask bottom 262 and box for photomask top 261
1and h
2, therefore, in order to guarantee to detect the accuracy of result, the angle that sensor 24 tilts is unsuitable excessive, also unsuitable too small, refers to Fig. 2 d and Fig. 2 e.
As shown in Figure 2 d, when light shield 20 is just being put, the incidence point of the light that sensor 24 is launched is printing opacity mark 22 center, when reflected light arrives the high order end position of printing opacity mark 22, but through time, produce maximum angle θ
1, maximum angle θ
1expression formula can be expressed as:
tanθ
1=h
1/（d/4） （1）
Wherein, h
1for light shield is from the distance of box for photomask bottom, d is the width of printing opacity mark.Now, incident light arrives box for photomask bottom 262, and after 262 reflections of box for photomask bottom, reflected light is just stopped by light shield 20.
Utilizing emitted light and horizontal angle are greater than θ
1time, can not stopped by light shield 20 through the reflected light of box for photomask bottom 262 reflections, and can arrive box for photomask top 261 through printing opacity mark 22, and then it is received by the receiving end 242 of sensor to see through box for photomask top 261.Like this, the light intensity intensity that sensor receives is the light intensity Q that diffuses
1with reflected light light intensity Q
2sum Q
1+ Q
2, be greater than the boundary value of setting, and then make erroneous judgement.
It should be noted that, formula (1) be and the result that obtains under condition accurately, and be actually implemented as artificial placement light shield and enter box for photomask, in box for photomask, also there is certain loosening space in light shield, make incident light accurately to identify center through printing opacity, for preventing this type of error, maximum angle control is in the time that position deviation is maximum, be that incidence point approaches high order end or low order end in printing opacity mark, but in the time approaching high order end, reflected light can directly be stopped by light shield 20, do not exert an influence, therefore consider that the position of maximum deviation is printing opacity mark low order end, consider in the situation of manual operation error, utilizing emitted light and horizontal maximum angle θ
1can be expressed as:
tanθ
1=h
1/（d/2） （2）
Wherein, h
1for light shield is from the distance of box for photomask bottom, d is the width of printing opacity mark.
In theory, utilizing emitted light arrives light shield 20 and horizontal minimum angle theta
2can reach and approach 0 degree, but because it is subject to the impact of following two factors: the sensitivity of a. sensor; B. utilizing emitted light arrives the incidence point of light shield to the distance on box for photomask border, nearest one end, and printing opacity mark center 22 is to the distance on box for photomask border, nearest one end.Therefore, now must there is the minimum value θ of a limit
2.Owing to judging that light shield 20 is just being put and the two kinds of situations that are inverted are that the light intensity receiving according to sensor 24 judges, from Fig. 2 b and Fig. 2 c, while just putting, the light intensity that sensor receiving end 242 receives is the light intensity Q that diffuses
1, while being inverted, the light intensity that sensor receives is the light intensity Q that diffuses
1with reflected light light intensity Q
2sum Q
1+ Q
2, while being inverted, when just putting, the light intensity that sensor receiving end 242 receives has more a reflected light light intensity Q
2, therefore, in order accurately to distinguish the difference of the two, guarantee to be inverted time, reflect that luminous energy is got back to box for photomask top 261 and produce reflected light light intensity Q
2, when light shield is inverted, when reflected light reaches box for photomask top 261 Far Left, produce minimum angle theta
2, as shown in Figure 2 e.Get to the incidence point of light shield 20 due to utilizing emitted light and fix, now, incidence point is the distance L of printing opacity mark center 22 to box for photomask border, nearest one end to the distance on box for photomask border, nearest one end.Now, utilizing emitted light and horizontal minimum angle theta
2can be expressed as:
tanθ
2=h
2/L （3）
Wherein, h
2for light shield is from the distance at box for photomask top, L is the distance of printing opacity mark center to box for photomask border, nearest one end.
Utilizing emitted light and horizontal angle are less than θ
2time, utilizing emitted light can not reach box for photomask top 261 and produce light intensity reflected light light intensity Q
2received by sensor receiving end 242, like this, the light intensity intensity that sensor the receives light intensity Q that only diffuses
1, be less than the boundary value of setting, and then make erroneous judgement.
Preferably, in the present embodiment, the width d=4mm of printing opacity mark 22, printing opacity mark 22 is to the distance h of box for photomask bottom 262
1=10mm, printing opacity mark 22 is to the distance h at box for photomask top 261
2=23mm, printing opacity mark center is under the prerequisite of the distance L=68mm on box for photomask border, nearest one end, and utilizing emitted light and horizontal angular range are 19～78 degree, preferably, when sensor 24 produces better resolving effect, utilizing emitted light and horizontal angular range are 50～70 degree.
Embodiment bis-
In the present embodiment, in the structure of the device using and embodiment mono-, the structure of device is roughly the same, all at least comprises: box for photomask 26; Be contained in described box for photomask 26 and be provided with the light shield 20 of light shield ID23; Described light shield 20 is provided with and is positioned at the symmetry mark 21 at its center line 27 two ends and is positioned at this center line 27 at least one printing opacity mark 22 near light shield ID23 mono-side; Be arranged at the sensor 24 of described box for photomask 26 tops; Described sensor 24 comprises radiative transmitting terminal 241, receive this radiative catoptrical receiving end 242 and for by the reflected light light intensity receiving and the right light intensity determination module 243 of default beam intensity ratio; Described utilizing emitted light irradiates described printing opacity mark 22 in the time that light shield 20 is just being put or is being inverted; The signal pickup assembly 25 being connected with described sensor light intensity determination module 243.The difference of the two is: the decision procedure difference of the light intensity determination module 243 in sensor 24; The position difference that sensor 24 is placed.
In the present embodiment, in the time that light intensity intensity is greater than the boundary value of setting, sensor 24 meeting output signals 1, expression light shield is just put; In the time that light intensity intensity is less than setting boundary value, sensor 24 meeting output signals 0, represent that light shield is inverted.
Corresponding adjustment while placement due to box for photomask 26, there is directivity, and the direction of light shield 20 while just putting has uniqueness in box for photomask 26, therefore in order to realize the present embodiment, will be made compared to embodiment mono-in the position that sensor 24 is placed.Concrete, in the present embodiment, described sensor 24 is positioned at box for photomask 26 tops, light shield 20 while just putting away from one end of light shield ID23, and the vertical projection 24a of sensor 24 on box for photomask 26 is parallel with the sideline of box for photomask 26.Described sensor 24 slant settings, its transmitting terminal 241 does not have printing opacity to identify one end of 22 towards light shield 20 downwards with receiving end 242, and its afterbody is towards symmetry mark 21.Now, the position of sensor 24 is compared to the position of sensor 24 in embodiment mono-, the two take light shield center line 27 as line of symmetry symmetrical.
Refer to Fig. 2 f～2g, for sensor 24 is detected the side view of process, wherein, Fig. 2 f be light shield 20 while just putting sensor 24 detect the side view of process, Fig. 2 g be light shield 20 while being inverted sensor 24 detect the side view of process.
As shown in Fig. 2 f, in the time that light shield 20 is just being put, transmitting terminal 241 is launched light beam, part light arrives light shield 20 through box for photomask top 261, now printing opacity mark 22 does not incide the position on light shield 20 at light, be that sensor 24 is detected less than printing opacity and identified, light is directly reflected by light shield 20, the light reflecting through light shield 20 arrives box for photomask 261, part light can penetrate box for photomask 261 transmissions and go out, the a part of light transmitting can receive receiving end 242, and the light intensity that now receiving end 242 receives is stronger, is the light intensity Q that diffuses
1with reflected light light intensity Q
2sum Q
1+ Q
2, being greater than predefined boundary value, sensor 24 can be exported corresponding signal 1, and light shield managerial personnel can be judged to be light shield 20 and just put.
As shown in Figure 2 g, in the time that light shield 20 is inverted, transmitting terminal 241 is launched light beam, because box for photomask top 261 has certain light transmission, part light can arrive the printing opacity mark 22 on light shield through box for photomask top 261, be that sensor 24 detects printing opacity mark 22, because its printing opacity mark 22 has light transmission, light can arrive box for photomask bottom 262 through light shield 20, because of box for photomask bottom 262 light tight, and can reflected light, light can reflect after arriving box for photomask bottom 262, because of light shield 20 light tight, therefore the light beam of reflection is intercepted by light shield 20, , situation while just putting compared to light shield 20, the light intensity that receiving end 242 receives is very weak, the light intensity that only diffuses Q
1, be less than predefined boundary value, now, sensor 24 can be exported corresponding signal 0, and light shield managerial personnel can be judged to be light shield 20 and be inverted.
In sum, the utility model provides a kind of light shield positive and negative detecting easy device, on light shield, be designed with and be positioned at the printing opacity mark of this center line near light shield ID mono-side, use and install simply, optical sensor with low cost substitutes installs complexity, the installing component the selected tag reader that cost involves great expense is detected identification to printing opacity mark, be more than tens thousand of units due to the required cost of former board selectable unit (SU) tag reader being installed, and the required cost of optical sensor that the utility model uses is 6000 yuan of left and right, this is just guaranteeing under the prerequisite that detecting identification is correct, greatly simplify installation process, save the time, significantly reduce cost.So, the utility model effectively overcome various shortcoming of the prior art and tool apart from industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (8)
1. the positive and negative detecting easy device of light shield, is characterized in that, the positive and negative detecting easy device of described light shield at least comprises:
Box for photomask;
Be contained in described box for photomask and be provided with the light shield of light shield ID; Described light shield is provided with and is positioned at the symmetry mark at its center line two ends and is positioned at this center line at least one printing opacity mark near light shield ID mono-side;
Be arranged at the sensor of described box for photomask top; Described sensor comprises radiative transmitting terminal, receive this radiative catoptrical receiving end and for by the reflected light light intensity receiving and the right light intensity determination module of default beam intensity ratio; Described utilizing emitted light irradiates described printing opacity mark in the time that light shield is just being put or is being inverted;
The signal pickup assembly being connected with described sensor light intensity determination module.
2. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: described printing opacity is designated two, is positioned at the both sides of described light shield center line near light shield ID mono-side.
3. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: described sensor is optical sensor.
4. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: the vertical projection of described sensor is parallel with box for photomask sideline.
5. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: described utilizing emitted light and horizontal maximum angle θ
1expression formula be: tan θ
1=h
1/ (d/4), and wherein, h
1for light shield is from the distance of box for photomask bottom, d is the width of printing opacity mark;
6. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: described in emit light on light shield, its horizontal minimum angle theta
2expression formula be: tan θ
2=h
2/ L, wherein, h
2for light shield is from the distance at box for photomask top, L is the distance of printing opacity mark center to box for photomask border, nearest one end;
7. the positive and negative detecting easy device of light shield according to claim 1, is characterized in that: described in emit light on light shield, itself and horizontal sextant angle scope be 19～78 degree.
8. the positive and negative detecting easy device of light shield according to claim 7, is characterized in that: described in emit light on light shield, itself and horizontal sextant angle scope be 50～70 degree.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320821552.XU CN203643743U (en) | 2013-12-12 | 2013-12-12 | Simple positive and negative detection device for photomask |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320821552.XU CN203643743U (en) | 2013-12-12 | 2013-12-12 | Simple positive and negative detection device for photomask |
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|---|---|
| CN203643743U true CN203643743U (en) | 2014-06-11 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105487339A (en) * | 2014-10-10 | 2016-04-13 | 中芯国际集成电路制造(上海)有限公司 | Particle detection method for bottom contact surface of photomask and auxiliary tool |
| WO2021227903A1 (en) * | 2020-05-15 | 2021-11-18 | 长鑫存储技术有限公司 | Reticle detection device and method, exposure tool, and lithographic apparatus |
-
2013
- 2013-12-12 CN CN201320821552.XU patent/CN203643743U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105487339A (en) * | 2014-10-10 | 2016-04-13 | 中芯国际集成电路制造(上海)有限公司 | Particle detection method for bottom contact surface of photomask and auxiliary tool |
| CN105487339B (en) * | 2014-10-10 | 2018-12-14 | 中芯国际集成电路制造(上海)有限公司 | The particle method for detecting and auxiliary tool of light shield base contact surface |
| WO2021227903A1 (en) * | 2020-05-15 | 2021-11-18 | 长鑫存储技术有限公司 | Reticle detection device and method, exposure tool, and lithographic apparatus |
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