CN203631322U - 一种电容器及包括该电容器的电容式传感器 - Google Patents
一种电容器及包括该电容器的电容式传感器 Download PDFInfo
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- CN203631322U CN203631322U CN201320865453.1U CN201320865453U CN203631322U CN 203631322 U CN203631322 U CN 203631322U CN 201320865453 U CN201320865453 U CN 201320865453U CN 203631322 U CN203631322 U CN 203631322U
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- 239000003990 capacitor Substances 0.000 title claims abstract description 101
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000007115 recruitment Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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CN201320865453.1U CN203631322U (zh) | 2013-12-25 | 2013-12-25 | 一种电容器及包括该电容器的电容式传感器 |
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CN201320865453.1U CN203631322U (zh) | 2013-12-25 | 2013-12-25 | 一种电容器及包括该电容器的电容式传感器 |
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CN203631322U true CN203631322U (zh) | 2014-06-04 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107406250A (zh) * | 2015-03-09 | 2017-11-28 | 株式会社村田制作所 | 微机电电容式传感器结构和装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107406250A (zh) * | 2015-03-09 | 2017-11-28 | 株式会社村田制作所 | 微机电电容式传感器结构和装置 |
CN107406250B (zh) * | 2015-03-09 | 2019-10-01 | 株式会社村田制作所 | 微机电电容式传感器结构和装置 |
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Legal Events
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140604 |