CN203595389U - Composite sintering furnace for target material - Google Patents
Composite sintering furnace for target material Download PDFInfo
- Publication number
- CN203595389U CN203595389U CN201320618924.9U CN201320618924U CN203595389U CN 203595389 U CN203595389 U CN 203595389U CN 201320618924 U CN201320618924 U CN 201320618924U CN 203595389 U CN203595389 U CN 203595389U
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- Prior art keywords
- resistance
- burner hearth
- combustion chamber
- platform
- sintering furnace
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- Expired - Fee Related
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- 238000005245 sintering Methods 0.000 title abstract description 13
- 239000002131 composite material Substances 0.000 title abstract 6
- 239000013077 target material Substances 0.000 title abstract 3
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 4
- 239000010959 steel Substances 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 46
- 238000010276 construction Methods 0.000 claims description 6
- 229910006295 Si—Mo Inorganic materials 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- 238000004826 seaming Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 11
- 238000005336 cracking Methods 0.000 abstract description 4
- 238000002485 combustion reaction Methods 0.000 abstract 11
- 239000011819 refractory material Substances 0.000 abstract 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 238000005265 energy consumption Methods 0.000 abstract 1
- 239000010720 hydraulic oil Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000011733 molybdenum Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
- 239000000047 product Substances 0.000 description 11
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Abstract
The utility model discloses a composite sintering furnace for a target material. The composite sintering furnace mainly comprises a mechanical frame, a refractory material combustion chamber, a combustion bearing platform and the like. The composite sintering furnace for the target material mainly resolves the technical problems that inner and outer heating of a product is uneven, and the phenomena of cracking, roof falling, dreg falling and the like of the combustion chamber occur. The composite sintering furnace is characterized in that the main body of the mechanical frame is formed by welding A3 section steel and a plate and is of a square double-layer water cooling structure, the top is arranged in a pressure-bearing mode, the middle is connected through a flange, the hydraulic combustion bearing platform is formed by a hydraulic power unit and a combustion bearing table, the combustion table is driven by a hydraulic oil cylinder to ascend and descend, the refractory material combustion chamber is formed by splicing multiple layers of refractory materials of different specifications and special for microwaves, ceramic bolts are pre-buried in the refractory material combustion chamber, a ceramic pressing plate is fixed and pressed through threaded rods in a riveted mode, the threaded rods are fixed in the combustion chamber, molybdenum rods are arranged on the periphery in a hung mode, a temperature-measuring thermal coupler extends into the combustion chamber from the top, and multiple groups of magnetrons for assisting in heating through the microwaves are uniformly distributed on the top of the combustion chamber. The composite sintering furnace has the advantages of being high in temperature control accuracy, uniform in temperature, low in energy consumption, reliable in operation, easy and convenient to operate and the like.
Description
Technical field
The utility model relates to the industrial furnace field for target high temperature sintering, specifically the complex sintered stove of a kind of target.
Background technology
The complex sintered stove of target is mainly applicable to the high-sintering process of target.Target is mainly used in electronics and information industry, no matter be that semiconductor integrated circuit, recording medium or plane show, surface of the work application is all widely used, it is a kind of functional material of high added value, along with developing rapidly of China's electronics and information industry, China becomes one of greatest requirements country of target in the world gradually.At present, the domestic high temperature sintering furnace that does not meet the requirement of target high-sintering process.The sintering of target requires very high to the sensitiveness of temperature, its mode of heating of traditional electric furnace be by outer and in, be difficult to make be heated evenly inside and outside product simultaneously, and although heating using microwave can be heated product by the motion of molecule, cold outward but it can cause heat in product, can cause equally product internal/external heating inequality.In addition, in the design of chamber structure and the selection of resistance to material, exist many hidden danger in the past, and tended to cause burner hearth cracking, the top of collapsing, fall the phenomenons such as slag, can not meet the normal sintering of product.
Summary of the invention
A kind of complex sintered stove of target of the utility model technical problem to be solved is: the complex sintered stove of a kind of target that the heating of electrical heating assisted microwave synthesis is provided, the two supplements mutually, effectively guarantee the uniformity of target sintering, whole framework Double water-cooled outer seal configuration, the burner hearth of resistance to material selects the special resistance to material of different size assembled, by ceramic platen, the rivet clasp of resistance to material is compressed, avoid the generation of burner hearth cracking, the top phenomenon of collapsing.
The technical scheme that the complex sintered stove of a kind of target of the utility model is taked is: the mechanical framework of the complex sintered stove of a kind of target is console mode outer seal configuration, top is for the fixing burner hearth of resistance to material, burning platform is held for fixed hydraulic in bottom, the roof of the furnace of resistance to material is connected with flange, junction increases microwave seal, hydraulic pressure holds to burn platform by hydraulic power unit and hold burning platform and forms, hold to burn under platform and be designed with supporting construction, hydraulic power unit drives to hold and burns platform rising and decline, Si-Mo rod is arranged in the hanging of the burner hearth of resistance to material surrounding, temperature-measuring heat couple stretches into from the roof of the furnace of resistance to material (4) burner hearth of resistance to material, many group magnetrons are evenly distributed on the roof of the furnace of resistance to material, realize Microwave-assisted firing, center, burner hearth side is provided with infrared radiation thermometer, vavuum pump forvacuum, realize the Rapid replacement of atmosphere in burner hearth.Mechanical framework main body adopts A3 shaped steel and sheet material to be welded, square Double water-cooled structure, and mechanical framework surface design has link plate, the processing of link plate surface anticorrosion.The burner hearth of resistance to material select multilayer different size special resistance to material, adopt the seaming mode of exerting pressure assembled, the inner pre-buried ceramic bolt of the burner hearth of resistance to material, ceramic platen compresses by the screw rod rivet clasp that is fixed on the burner hearth of resistance to material inside, and the roof of the furnace of resistance to material is provided with stainless steel device for preventing leakage.
The beneficial effect of the complex sintered stove of a kind of target of the utility model is: framework surface is designed with link plate, the processing of link plate surface anticorrosion, the not only overall appearance of forming device but also prevent the unexpected injury that high temperature causes operating personnel; Hydraulic pressure holds the setting of burning platform, holds to burn on platform to be designed with unique supporting construction, has guaranteed traveling comfort and reliability, effectively prevents from holding burning platform sinkage in use; Burner hearth arranges the effective planarization that guarantees cavity, sealing and reliability, has avoided burner hearth cracking, the generation of the top phenomenon of collapsing; Realize auxiliary heating to different temperatures different product, not only met the requirement of high, precision and frontier test or product, and made up electrical heating in low-temperature zone with for the larger product inhomogeneous deficiency of being heated.
Accompanying drawing explanation
Fig. 1 is the furnace binding schematic diagram of the complex sintered stove of a kind of target of the utility model.
1 is mechanical framework, and 2 is the burner hearth of resistance to material, and 3 for holding burning platform, 4 is top, and 5 is flange, and 6 is link plate, 7 is hydraulic power unit, and 8 for holding burning platform, and 9 is supporting construction, 10 is ceramic bolt, and 11 is ceramic platen, and 12 is Si-Mo rod, 13 is temperature-measuring heat couple, and 14 is vavuum pump, and 15 is many group magnetrons, 16 is device for preventing leakage, and 17 is infrared radiation thermometer.
The specific embodiment
As Fig. 1, the complex sintered stove of a kind of target, mainly by mechanical framework 1, the burner hearth of resistance to material 2, hold and burn platform 3 etc. and form.Wherein, mechanical framework 1 is console mode outer seal configuration, and top is for the fixing burner hearth of resistance to material 2, and bottom is held and burnt platform 3 for fixed hydraulic; Mechanical framework 1 main body adopts A3 shaped steel and sheet material to be welded, square Double water-cooled structure, the burner hearth of resistance to material 2 tops 4 are connected with flange 5, junction increases microwave seal, mechanical framework 1 surface is provided with link plate 6, link plate 6 surface anticorrosion processing, the not only overall appearance of forming device but also prevent the unexpected injury that high temperature causes operating personnel; Hydraulic pressure holds to burn platform 3 by hydraulic power unit 7 and hold burning platform 8 and forms, holding burning platform 8 by hydraulic-driven rises and declines, guarantee traveling comfort and reliability, held burning platform 8 and be arranged with supporting construction 9, effectively prevented from holding burning platform 8 sinkage in use; The burner hearth of resistance to material 2 selects the special resistance to material of multilayer different size assembled, when construction, adopt the seaming mode of exerting pressure, the inner pre-buried ceramic bolt 10 of the burner hearth of resistance to material 2, ceramic platen 11 compresses by the screw rod rivet clasp that is fixed on the burner hearth of resistance to material 2 inside, effectively guarantee planarization, sealing and the reliability of cavity, avoided the burner hearth of resistance to material 2 ftracture, the collapse generation of top phenomenon; Si-Mo rod 12 surroundings hangings arrange, temperature-measuring heat couple 13 stretches into the burner hearth of resistance to material 2 from the burner hearth of resistance to material 2 tops 4, and vavuum pump 14 can forvacuum, realize the Rapid replacement of the burner hearth of resistance to material 2 interior atmosphere; Many group magnetrons 15 are evenly distributed on the burner hearth of resistance to material 2 tops 4, the burner hearth of resistance to material 2 tops 4 are provided with stainless steel device for preventing leakage 16, the burner hearth of resistance to material 2 centers, side arrange infrared radiation thermometer 17, realize the auxiliary heating to different temperatures different product, meet the requirement of high, precision and frontier test or product, made up electrical heating in low-temperature zone with for be heated inhomogeneous deficiency of larger product.
Claims (3)
1. the complex sintered stove of target, mainly by mechanical framework (1), the burner hearth of resistance to material (2), hold and burn platform (3) composition, it is characterized in that: described mechanical framework (1) is console mode outer seal configuration, top is for the fixing burner hearth of resistance to material (2), bottom is held and is burnt platform (3) for fixed hydraulic, the burner hearth of resistance to material (2) top (4) is connected with flange (5), junction increases microwave seal, hydraulic pressure holds to burn platform (3) by hydraulic power unit (7) and hold burning platform (8) and forms, hold to burn under platform (8) and be designed with supporting construction (9), hydraulic power unit (7) drives to hold and burns platform (8) rising and decline, Si-Mo rod (12) is arranged in the hanging of the burner hearth of resistance to material (2) surrounding, temperature-measuring heat couple (13) stretches into the burner hearth of resistance to material (2) from the burner hearth of resistance to material (2) top (4), many group magnetrons (15) are evenly distributed on the burner hearth of resistance to material (2) top (4), realize Microwave-assisted firing, burner hearth (2) center, side is provided with infrared radiation thermometer (17), vavuum pump (14) forvacuum, realize the Rapid replacement of atmosphere in burner hearth.
2. the complex sintered stove of a kind of target according to claim 1, it is characterized in that: described mechanical framework (1) main body adopts A3 shaped steel and sheet material to be welded, square Double water-cooled structure, mechanical framework (1) surface design has link plate (6), link plate (6) surface anticorrosion processing.
3. the complex sintered stove of a kind of target according to claim 1, it is characterized in that: the described burner hearth of resistance to material (2) select multilayer different size resistance to material, adopt the seaming mode of exerting pressure assembled, the inner pre-buried ceramic bolt of the burner hearth of resistance to material (2) (10), ceramic platen (11) compresses by being fixed on the inner screw rod rivet clasp of the burner hearth of resistance to material (2), and the burner hearth of resistance to material (2) top (4) is provided with stainless steel device for preventing leakage (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320618924.9U CN203595389U (en) | 2013-09-27 | 2013-09-27 | Composite sintering furnace for target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320618924.9U CN203595389U (en) | 2013-09-27 | 2013-09-27 | Composite sintering furnace for target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203595389U true CN203595389U (en) | 2014-05-14 |
Family
ID=50676262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320618924.9U Expired - Fee Related CN203595389U (en) | 2013-09-27 | 2013-09-27 | Composite sintering furnace for target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203595389U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN104972218A (en) * | 2015-06-11 | 2015-10-14 | 德清县新高凌不锈钢材料有限公司 | Temperature control device of vacuum brazing furnace |
| CN104792151B (en) * | 2015-04-29 | 2016-08-24 | 宁夏昇力恒真空设备有限公司 | Use the high-temperature vacuum sintering furnace of hydraulic cylinder lowering or hoisting gear |
| CN106735670A (en) * | 2017-01-04 | 2017-05-31 | 青岛蓝光晶科新材料有限公司 | A kind of modified target furnace apparatus and target bonding method |
| CN109530699A (en) * | 2019-01-22 | 2019-03-29 | 东莞市原力无限打印科技有限公司 | A kind of complex sintered device and method of 3D printing metal solid |
-
2013
- 2013-09-27 CN CN201320618924.9U patent/CN203595389U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103542715A (en) * | 2013-09-27 | 2014-01-29 | 合肥高歌热处理应用技术有限公司 | Composite sintering furnace for target material |
| CN104792151B (en) * | 2015-04-29 | 2016-08-24 | 宁夏昇力恒真空设备有限公司 | Use the high-temperature vacuum sintering furnace of hydraulic cylinder lowering or hoisting gear |
| CN104972218A (en) * | 2015-06-11 | 2015-10-14 | 德清县新高凌不锈钢材料有限公司 | Temperature control device of vacuum brazing furnace |
| CN104972218B (en) * | 2015-06-11 | 2017-06-06 | 德清县新高凌不锈钢材料有限公司 | Vacuum brazing stove attemperating unit |
| CN106735670A (en) * | 2017-01-04 | 2017-05-31 | 青岛蓝光晶科新材料有限公司 | A kind of modified target furnace apparatus and target bonding method |
| CN109530699A (en) * | 2019-01-22 | 2019-03-29 | 东莞市原力无限打印科技有限公司 | A kind of complex sintered device and method of 3D printing metal solid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140514 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |