CN203589446U - Cladding light filtering device for double-clad fiber laser - Google Patents
Cladding light filtering device for double-clad fiber laser Download PDFInfo
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- CN203589446U CN203589446U CN201320649394.4U CN201320649394U CN203589446U CN 203589446 U CN203589446 U CN 203589446U CN 201320649394 U CN201320649394 U CN 201320649394U CN 203589446 U CN203589446 U CN 203589446U
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- 238000005253 cladding Methods 0.000 title claims abstract description 36
- 238000001914 filtration Methods 0.000 title claims abstract description 30
- 239000000835 fiber Substances 0.000 title claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 59
- 239000000463 material Substances 0.000 claims abstract description 38
- 239000004020 conductor Substances 0.000 claims abstract 3
- 229910052710 silicon Inorganic materials 0.000 claims description 54
- 239000010703 silicon Substances 0.000 claims description 54
- 239000013307 optical fiber Substances 0.000 claims description 52
- 238000005530 etching Methods 0.000 claims description 16
- 230000007797 corrosion Effects 0.000 claims description 9
- 238000005260 corrosion Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 239000000377 silicon dioxide Substances 0.000 claims 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 1
- 239000004038 photonic crystal Substances 0.000 claims 1
- 150000002910 rare earth metals Chemical class 0.000 claims 1
- 229920000728 polyester Polymers 0.000 abstract description 15
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 13
- 238000002360 preparation method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 239000003292 glue Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- -1 rare-earth ions Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model provides a cladding light filtering device for a double-clad fiber laser, which comprises an upper heat conducting assembly and a lower heat conducting assembly. The upper heat conducting assembly and the lower heat conducting assembly are completely identical to each other. The upper heat conducting assembly is provided with grooves along the length direction thereof. Upper silicon chips are pasted to be embedded in the grooves of the upper heat conducting assembly by means of heat conducting materials. The upper silicon chips are provided with etch grooves along the length directions thereof. The outer cladding layers of double-clad fibers are stripped off and then the outsides of the double-clad fibers are coated with high-refractive-index materials. After that, the double-clad fibers are placed in the etch grooves of the lower heat conducting assembly and are pasted onto the upper heat conducting assembly as a whole. According to the technical scheme of the utility model, when the pump light is transmitted through the inner cladding layers of the double-clad fibers and passes through the above device, the pump light leaks to the outside through the high-refractive-index polyester material to enter the silicon chips in the etch grooves. Therefore, the pump light is well absorbed by the silicon chips and is free from being reflected back to the high-refractive-index polyester material to cause the secondary absorption and the temperature rise. The heat generated by the silicon chips can be conducted to the outside by means of the heat conducting assemblies. In this way, the stable operation and the output performance of double-clad amplifiers can be ensured, and the service life thereof is prolonged.
Description
Technical field
The utility model relates to the cladding light filtering device of double-clad optical fiber laser, refers to especially the cladding light filtering device of double-clad optical fiber laser and amplifier out, device junction.
Technical background
The 1980s, along with the development of semiconductor laser technique and optical fiber technology of preparing, double-clad optical fiber laser has obtained development fast.At present, high-power double cladding optical fiber laser has been realized the power stage of single mode single fiber myriawatt level.It is widely used in fields such as industrial processes, medical treatment, detection, military affairs.High-capacity optical fiber laser is using rear-earth-doped doubly clad optical fiber as gain media, and rear-earth-doped doubly clad optical fiber, with inner cladding transmission multimode pump light, transmits single module lasing light with fibre core.When the multimode pump light transmitting in inner cladding passes through fibre core, by doping with rare-earth ions wherein, absorbed and produce to swash and penetrate light.Swash penetrate light in fibre core with single mode transport, by increasing pump power, can obtain high-power single module lasing light output.Because the length of rear-earth-doped doubly clad optical fiber is certain, therefore, the pump light transmitting in inner cladding finally always has some by the doping with rare-earth ions in fibre core, not absorbed.If these remaining pump lights enter laser output device, can cause damage to output device, and then damage whole laser, therefore, and at the front end of laser output device, need to be by remaining pump light filtering.Take the double-clad optical fiber laser of power output 1000W as example, the pumping light power needing is approximately 1700W, if these pump lights have 1% not to be absorbed, residual pump light just reaches 17W, and this will cause damage to doubly clad optical fiber itself and output device.
The pump light filtering device that high-power double cladding optical fiber laser adopts at present, that the low-refraction overlay of doubly clad optical fiber is divested mostly, coating is with high index of refraction glue, make pump light in inner cladding by leaking out in high index of refraction glue, and this section of optical fiber of coating high index of refraction glue is placed in heat-conductive assembly.This method can well filter out the pump light in inner cladding, and still, problem is not consider the processing of the pump light to filtering out, and does not consider that heat-conductive assembly is to pumping reflection of light.This section of optical fiber of filtering pump light is placed in heat-conductive assembly conventionally, and the selected Heat Conduction Material of heat-conductive assembly is metal, metal pair pump light has high reflectivity, this can make the pump light of filtering be reflected back toward again in optical fiber, cause the double absorption of high index of refraction coating material to pump light, high index of refraction coating material temperature is further raise, thereby cause that system works is unstable even burns.
Summary of the invention
For the heat-conductive assembly solving in prior art pump light filtering device reflects pump light, thus the problem that causes high index of refraction coating material to damage.The utility model provides one both can conduct heat, can absorb again by the cladding light filtering device of the double-clad optical fiber laser of filtering pump light.
The cladding light filtering device of the double-clad optical fiber laser that the utility model provides, comprise heat-conductive assembly 1 and with upper heat-conductive assembly 1 shape, structure, the identical lower heat-conductive assembly of size; Upper heat-conductive assembly 1 is a cuboid, and a surperficial center of cuboid is fluted 6 along its length, and the shape of upper silicon chip 2 is identical with groove 6, and upper silicon chip 2 is pasted by Heat Conduction Material in the groove 6 that is embedded in upper heat-conductive assembly 1; The material of upper heat-conductive assembly 1 and lower heat-conductive assembly is metallic copper or aluminium; The centre of surface of upper silicon chip 2 has etching tank 3 along its length;
Upwards, the outside that divests the doubly clad optical fiber 5 of surrounding layer is coated with in the etching tank of lower silicon slice that high-index material 4 is placed on lower heat-conductive assembly the groove of lower heat-conductive assembly; Upper heat-conductive assembly 1 groove is placed in downwards above lower heat-conductive assembly, and by Heat Conduction Material, upper heat-conductive assembly 1 and lower heat-conductive assembly, and upper silicon chip 2 is pasted into as a whole with lower silicon slice.
The preparation method of the cladding light filtering device of double-clad optical fiber laser, its step and condition are as follows:
i,the preparation of silicon chip:
(1) silicon chip in selection;
(2) upper silicon chip is carried out to wet-oxygen oxidation and form SiO
2layer, oxidation furnace temperature is 1100 ℃, oxidization time 1 hour, 95 ℃ of water temperatures, oxygen flow 2L/min;
(3) by photoetching process, remove upper silicon chip and place the SiO of doubly clad optical fiber etching tank corresponding position
2, form a rectangular bar shaped without SiO
2region;
4, adopt Tetramethylammonium hydroxide to carry out anisotropic etch to upper silicon chip, corrosive liquid concentration is 30%wt, and corrosion temperature is 80 ℃, and corrosion rate approximately 0.8 μ m/min forms and places doubly clad optical fiber etching tank;
5, with HF acid solution, remove the SiO of upper silicon chip surface
2, complete the preparation of placing doubly clad optical fiber etching tank;
6. upper silicon chip 2 is pasted by Heat Conduction Material in the groove 6 that is embedded in upper heat-conductive assembly 1;
iI,the outer coat of doubly clad optical fiber divest and apply high index of refraction polyester material:
(1) with peeling plier or the hot stripper of fiber coating layer, the low-refraction overlay of doubly clad optical fiber is divested, form the doubly clad optical fiber that divests surrounding layer;
(2) with the clean doubly clad optical fiber that divests surrounding layer of alcohol;
(3) with optical fiber coating machine, on the doubly clad optical fiber that divests surrounding layer, apply one deck high index of refraction polyester material;
iII,the preparation of cladding light filtering device:
Upwards, the outside that divests the doubly clad optical fiber 5 of surrounding layer is coated with in the etching tank that high-index material 4 is placed on lower heat-conductive assembly silicon chip the groove of lower heat-conductive assembly; Upper heat-conductive assembly 1 groove is placed in downwards above lower heat-conductive assembly, and by Heat Conduction Material, upper heat-conductive assembly 1 and lower heat-conductive assembly, and upper silicon chip 2 is pasted into as a whole with lower silicon slice.
The cladding light filtering device of double-clad optical fiber laser of the present utility model can also be used for the amplifier of double-clad optical fiber laser.
beneficial effect:the cladding light filtering device of double-clad optical fiber laser of the present utility model, overcomes the heat-conductive assembly having passed in system pump light filtering device pump light is reflected, thereby causes the problem of high index of refraction coating material damage.Provide one both can conduct heat, can absorb again by the cladding light filtering device of the double-clad optical fiber laser of filtering pump light.When transmitting in the inner cladding of pump light at doubly clad optical fiber and passing through this device, pump light is by leaking out in high index of refraction polyester material, the pump light leaking out enters into silicon slice corrosion groove, because silicon chip has good absorption to pump light, therefore, the pump light being leaked in silicon slice corrosion groove through high index of refraction polyester material by inner cladding can be absorbed by silicon chip, can not be reflected back again in high index of refraction polyester material, in high index of refraction polyester material, there will be no the double absorption of pump light, the temperature of high index of refraction polyester material can further not raise, guaranteed the steady operation of system.After silicon chip absorptive pumping light, heat increases, and temperature raises, and the heat of its generation conducts by heat-conductive assembly, guarantees steady operation and the output performance of double-clad optical fiber laser and amplifier, increases the service life.Preparation method is simple for this device, is applicable to batch production.
Accompanying drawing explanation
The cladding light filtering device structural representation of Fig. 1 double-clad optical fiber laser of the present utility model
The cladding light filtering device preparation flow schematic diagram of Fig. 2 double-clad optical fiber laser of the present utility model.
Embodiment
embodiment 1as shown in Figure 1, the cladding light filtering device of double-clad optical fiber laser comprise heat-conductive assembly 1 and with upper heat-conductive assembly 1 shape, structure, the identical lower heat-conductive assembly of size; Upper heat-conductive assembly 1 is a cuboid, and a surperficial center of cuboid is fluted 6 along its length, and the shape of upper silicon chip 2 is identical with groove 6, and upper silicon chip 2 is pasted by Heat Conduction Material in the groove 6 that is embedded in upper heat-conductive assembly 1; The material of upper heat-conductive assembly and lower heat-conductive assembly is metallic copper or aluminium; The centre of surface of upper silicon chip 2 has etching tank 3 along its length;
Upwards, the outside that divests the doubly clad optical fiber 5 of surrounding layer is coated with in the etching tank that high-index material 4 is placed on lower heat-conductive assembly silicon chip the groove of lower heat-conductive assembly; Upper heat-conductive assembly 1 groove is placed in downwards above lower heat-conductive assembly, and by Heat Conduction Material, upper heat-conductive assembly 1 and lower heat-conductive assembly, and upper silicon chip 2 is pasted into as a whole with lower silicon slice.
As shown in Figure 2, the preparation method of the cladding light filtering device of double-clad optical fiber laser, its step and condition are as follows:
(1) select silicon chip 2 on N-shaped, p-type or intrinsic <100> crystal orientation;
(2) silicon chip 2 is carried out to wet-oxygen oxidation and form SiO
2layer 7, oxidation furnace temperature is 1100 ℃, oxidization time 1 hour, 95 ℃ of water temperatures, oxygen flow 2L/min;
(3) by photoetching process, remove the SiO of upper silicon chip 2 etching tank 3 corresponding positions
2, form a rectangular bar shaped without SiO
2region 8;
4, adopt Tetramethylammonium hydroxide to carry out anisotropic etch to upper silicon chip 2, corrosive liquid concentration is 30%wt, and corrosion temperature is 80 ℃, and corrosion rate approximately 0.8 μ m/min forms etching tank 3; The cross section of etching tank 3 is trapezoidal or V-arrangement; Making the cross section of the etching tank of silicon chip 2 and lower silicon slice formation is hexagon or rhombus.
5, with HF acid solution, remove the SiO of silicon chip surface
2, complete the preparation of etching tank 3;
6. upper silicon chip 2 is pasted by Heat Conduction Material in the groove 6 that is embedded in upper heat-conductive assembly 1;
iI,the outer coat of doubly clad optical fiber divest and apply high index of refraction polyester material:
(1) with peeling plier or the hot stripper of fiber coating layer, the low-refraction overlay of doubly clad optical fiber is divested, form the doubly clad optical fiber 5 that divests surrounding layer;
(2) with the clean doubly clad optical fiber 5 that divests surrounding layer of alcohol;
(3) with optical fiber coating machine, on the doubly clad optical fiber 5 that divests surrounding layer, apply one deck high index of refraction polyester material 4;
iII,the preparation of cladding light filtering device:
Upwards, the outside that divests the doubly clad optical fiber 5 of surrounding layer is coated with in the etching tank 3 that high-index material 4 is placed on lower heat-conductive assembly silicon chip the groove of lower heat-conductive assembly; Upper heat-conductive assembly 1 groove is placed in downwards above lower heat-conductive assembly, and by Heat Conduction Material, upper heat-conductive assembly 1 and lower heat-conductive assembly, and upper silicon chip 2 is pasted into as a whole with lower silicon slice.
The pump light that the cladding light filtering device of the double-clad optical fiber laser obtaining transmits in the inner cladding of doubly clad optical fiber 5 that divests surrounding layer is leaked in silicon slice corrosion groove 3 by high index of refraction polyester material 4, then by silicon chip 2, absorbed, can not be reflected back toward in high index of refraction polyester material 4, prevented the double absorption of pump light in high index of refraction polyester material 4, thereby the temperature of high index of refraction polyester material 4 can further not increased, guaranteed the stability of system.After silicon chip 2 absorptive pumping light, heat increases, temperature rise, and the heat of its increase conducts from heat-conductive assembly 1.
Claims (5)
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320649394.4U CN203589446U (en) | 2013-10-22 | 2013-10-22 | Cladding light filtering device for double-clad fiber laser |
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| CN201320649394.4U CN203589446U (en) | 2013-10-22 | 2013-10-22 | Cladding light filtering device for double-clad fiber laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103606805A (en) * | 2013-10-22 | 2014-02-26 | 长春理工大学 | Cladding light filtering device of double-cladding optical fiber laser and preparation method of cladding light filtering device |
| CN104332811A (en) * | 2014-08-28 | 2015-02-04 | 清华大学 | Optical-fiber laser oscillation system |
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2013
- 2013-10-22 CN CN201320649394.4U patent/CN203589446U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103606805A (en) * | 2013-10-22 | 2014-02-26 | 长春理工大学 | Cladding light filtering device of double-cladding optical fiber laser and preparation method of cladding light filtering device |
| CN104332811A (en) * | 2014-08-28 | 2015-02-04 | 清华大学 | Optical-fiber laser oscillation system |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140507 Termination date: 20151022 |
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| EXPY | Termination of patent right or utility model |