CN203569182U - 双腔室真空制膜设备 - Google Patents
双腔室真空制膜设备 Download PDFInfo
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- CN203569182U CN203569182U CN201320606145.7U CN201320606145U CN203569182U CN 203569182 U CN203569182 U CN 203569182U CN 201320606145 U CN201320606145 U CN 201320606145U CN 203569182 U CN203569182 U CN 203569182U
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Application Number | Priority Date | Filing Date | Title |
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CN201320606145.7U CN203569182U (zh) | 2013-09-29 | 2013-09-29 | 双腔室真空制膜设备 |
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CN201320606145.7U CN203569182U (zh) | 2013-09-29 | 2013-09-29 | 双腔室真空制膜设备 |
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CN203569182U true CN203569182U (zh) | 2014-04-30 |
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CN201320606145.7U Expired - Lifetime CN203569182U (zh) | 2013-09-29 | 2013-09-29 | 双腔室真空制膜设备 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103498131A (zh) * | 2013-09-29 | 2014-01-08 | 青岛赛瑞达电子装备股份有限公司 | 双腔室真空制膜设备 |
CN107385408A (zh) * | 2017-07-24 | 2017-11-24 | 京东方科技集团股份有限公司 | 膜厚测试装置及方法、蒸镀设备 |
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2013
- 2013-09-29 CN CN201320606145.7U patent/CN203569182U/zh not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103498131A (zh) * | 2013-09-29 | 2014-01-08 | 青岛赛瑞达电子装备股份有限公司 | 双腔室真空制膜设备 |
CN107385408A (zh) * | 2017-07-24 | 2017-11-24 | 京东方科技集团股份有限公司 | 膜厚测试装置及方法、蒸镀设备 |
US11092429B2 (en) | 2017-07-24 | 2021-08-17 | Boe Technology Group Co., Ltd. | Film thickness test apparatus and method and vapor deposition device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211217 Address after: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. Address before: 266000 No. 10, Tongchuan Road, Licang District, Qingdao, Shandong Patentee before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 214000 three comma maker spaces in the east of 1 / F, building 6, Ruiyun, No. 99, Furong Zhongsan Road, Xishan District, Wuxi City, Jiangsu Province Patentee before: Sairuida intelligent electronic equipment (Wuxi) Co.,Ltd. |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20140430 |