CN203562390U - Monitoring device for ion implanter and ion implanter system - Google Patents
Monitoring device for ion implanter and ion implanter system Download PDFInfo
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- CN203562390U CN203562390U CN201320794296.XU CN201320794296U CN203562390U CN 203562390 U CN203562390 U CN 203562390U CN 201320794296 U CN201320794296 U CN 201320794296U CN 203562390 U CN203562390 U CN 203562390U
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Abstract
The utility model discloses a monitoring device for an ion implanter and an ion implanter system. The monitoring device comprises an operation panel and an oscilloscope, wherein the operation panel comprises an input portion and an output portion, the input portion comprises a signal input end and a waveform control input end, the output portion comprises a first channel signal output end and a second channel signal output end, the oscilloscope comprises a first information channel connected with the first channel signal output end and a second information channel connected with the second channel signal output end. By the aid of the monitoring device, precise and reliable monitoring can be realized.
Description
Technical field
The utility model relates to the supervising device of the ion implantor using in a kind of semiconductor production field and has the ion implantation machine system of this ionic monitoring device.
Background technology
Implantation is a very important technology during integrated circuit is manufactured, utilize ion implantor to realize semi-conductive doping, be about to change its conductive characteristic in the mode Implanted Silicon semiconductor crystal of specific foreign atom with ion acceleration and also finally form transistor arrangement.For ion implantor, the control of ion implantor uniformity is one of key technology of implanter.The principle of this technology is with device, ion equably, to be accurately injected into whole wafer surface by the dosage of setting based on various control and method of measurement, as horizontal direction and vertical direction all adopt electric scanning mode, the size of the scanning voltage by real-time change horizontal and vertical direction changes ion beam and moves horizontally speed and vertical translational speed, thereby changes the distribution density of injecting ion.
Line implanter in the 350D that has the production of U.S. Varian company commonly using in semiconductor production line at present, this implanter carries the supervising device of a small size CRT monitor as line waveform, this display can be seen 1/X(X waveform), 1/Y(Y waveform) and the Li Sa of X/Y(X and Y educate waveform) waveform, but can not see X(+/-), Y(+/-) triangular wave waveform.Modified model line waveform supervising device afterwards, wherein increase see X(+/-), Y(+/-) the function of triangular wave waveform, but corresponding frequency is nonadjustable, can not see the multiple continuous wave under the multicycle, also cannot see X(+/-) or Y(+/-) the Li Sa of reciprocal triangular wave educate figure.In addition, also have one improved implanter on 350D, its display equipment has the general oscilloscope of one, but its oscilloscope can only be seen continuous wave, fail to see single X or Y bundle waveform, also cannot see simultaneously X(+/-) or Y(+/-) the Li Sa of reciprocal triangular wave educate figure.
In sum, ion implantor need to adopt line waveform supervising device to control the uniformity of ion implantor, but the supervising device of existing ion implantor cannot be observed various waveforms all sidedly, for example cannot see X(+/-) or Y(+/-) the Li Sa of reciprocal triangular wave educate figure, therefore cannot find in time the distortion variation of triangular wave itself, thereby cannot do comprehensively monitoring to the quality of product, the stability of product quality is still waited to improve.
Utility model content
In order to overcome the deficiency of the waveform supervising device that prior art intermediate ion implanter uses, the utility model provides a kind of supervising device for ion implantor, supervising device comprises guidance panel and oscilloscope, and wherein, guidance panel comprises input part and efferent; Input part comprises signal input part and Waveform Control input; Efferent comprises the first channel signals output and the second channel signals output; Oscilloscope comprises the first channel and the second channel that is connected the second channel signals output that connect the first channel signals output.Preferably, oscilloscope is the general-purpose oscilloscope with X-Y input pattern.
According to an aspect of the present utility model, signal input part comprises the Five-terminals of the 4th terminal of Y-scan electrode plate triangular wave feedback signal of the first terminal of the X+ scan electrode plate triangular wave feedback signal of inputting ion implantor, X-scan electrode plate triangular wave feedback signal second terminal of input ion implantor, the 3rd terminal of inputting the Y+ scan electrode plate triangular wave feedback signal of ion implantor, input ion implantor and the line analog signal of the Dose Controller of input ion implantor.
According to another aspect of the present utility model, the guidance panel of supervising device comprises the waveform switch switch portion of switching with 1/X, 1/Y and X/Y waveform, and waveform switch switch portion is provided with described Waveform Control input.
According to another aspect of the present utility model, Waveform Control input comprises and connects respectively J, the H that waveform control signal is provided in ion implantor, first end, the second end and the 3rd end of K Signal connector.Correspondingly, the guidance panel of supervising device comprises the waveform switch switch portion that first end, the second end and the 3rd end to Waveform Control input switches, thereby make to control and switch between 1/X, 1/Y and X/Y waveform, when waveform switch switch portion makes J Signal connector be communicated with K Signal connector, 1/X waveform is output, when waveform switch switch portion makes H Signal connector be communicated with K Signal connector, 1/Y waveform is output, when waveform switch switch portion disconnects K Signal connector simultaneously with J Signal connector and H Signal connector, X/Y waveform is output.
According to another aspect of the present utility model, the guidance panel of supervising device comprises the signal shift switch portion of switching with input signal, the switching that elects from the line analog signal of the Dose Controller of X+ scan electrode plate triangular wave feedback signal, X-scan electrode plate triangular wave feedback signal, Y+ scan electrode plate triangular wave feedback signal, Y-scan electrode plate triangular wave feedback signal and the ion implantor of ion implantor of this signal shift switch portion, and by signals selected the first channel signals output and the second channel signals output of outputing to.More specifically, supervising device is arranged to output to the signal of described the first channel signals output can be in X+ scan electrode plate triangular wave feedback signal, X-scan electrode plate triangular wave feedback signal, in Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal, switch arbitrarily, the signal that outputs to described the second channel signals output can be in X-scan electrode plate triangular wave feedback signal, Y+ scan electrode plate triangular wave feedback signal, in the line analog signal of the Dose Controller of Y-scan electrode plate triangular wave feedback signal and ion implantor, switch arbitrarily.
According to another aspect of the present utility model, between input part and efferent, be connected with waveform and signal shift switch group, waveform and signal shift switch device comprise: the first switches set, and the first switches set has: the first switching part that X+ scan electrode plate triangular wave feedback signal and X-scan electrode plate triangular wave feedback signal are switched and the second switching part that Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched; Second switch group, second switch group has: the second switching part that the output of the first switching part that 1/X and 1/Y waveform are switched, the output of the first switching part to the first switches set and the second switching part of the first switches set switches, the 3rd switching part that X+ scan electrode plate triangular wave feedback signal and Y+ scan electrode plate triangular wave feedback signal are switched and the 4th switching part that X-scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched; The 3rd switches set, the 3rd switches set has: the 3rd switching part that the second switching part that the output of the first switching part switching with X/Y waveform to the 1/X being selected by the first switching part of second switch group or 1/Y waveform, the output of the second switching part to second switch group and the first switching part of the first switches set switches and the output of the beam current signal of Dose Controller to ion implantor and the second switching part of the first switches set switch; And the 4th switches set, the 4th switches set has: the first switching part that the output of the output of the second switching part to the 3rd switches set and the 3rd switching part of second switch group switches, the output of the first switching part of the 4th switches set is the second switching part that the output of the first channel signals output and the output of the 3rd switching part to the 3rd switches set and the 4th switching part of second switch group switches, and the output of the second switching part of the 4th switches set is the second channel signals output.Particularly, when Waveform Control input comprises the first end that connects respectively J, H that waveform control signal is provided in ion implantor, K Signal connector, the second end and the 3rd end, the first switching part of second switch group switches between first end and the second end, and output and the 3rd end that the first switching part of the 3rd switches set is arranged to first switching part that can make second switch group are communicated with or disconnect.
According to another aspect of the present utility model, between input part and efferent, be connected with waveform and signal shift switch group, waveform and signal shift switch device comprise: the first switches set, the first switches set has: the first switching part that X+ scan electrode plate triangular wave feedback signal and X-scan electrode plate triangular wave feedback signal are switched, the second switching part that Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched, the 3rd switching part that X+ scan electrode plate triangular wave feedback signal and Y+ scan electrode plate triangular wave feedback signal number are switched, the 4th switching part switching with X-scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal, second switch group, second switch group has: the 3rd switching part that switch the second switching part that the efferent of two contacts of the output of the first switching part that 1/X, 1/Y and X/Y waveform are switched, the first switching part to the first switches set and the second switching part of the first switches set switches and the output of the second switching part to the first switches set and two contacts of beam current signal, and the 3rd switches set, the 3rd switches set has: the second switching part that the output of the first switching part that the output of the output of the second switching part to second switch group and the 3rd switching part of the first switches set switches and the output of the 3rd switching part to second switch group and the 4th switching part of the first switches set switches, wherein the output of the first switching part of the 3rd switches set is as the first channel signals output, and the output of the second switching part of the 3rd switches set is as the second channel signals output.Particularly, when control input end comprises the first end that connects respectively J, H that waveform control signal is provided in ion implantor, K Signal connector, the second end and the 3rd end, the first switching part of second switch group is set to make the 3rd end be communicated with or both disconnect with first end or the second end separately with first end or the second end.
According to another aspect of the present utility model, a kind of ion implantation machine system can have above-mentioned supervising device.Ion implantor preferably comprises provides J, the H of 1/X, 1/Y and X/Y waveform switch, K Signal connector.
According to supervising device of the present utility model, can be connected on existing ion implantor, if can save, adopt the expensive expense of original-pack waveform supervising device.Moreover, original X, the single line waveform of Y and X, the single triangular wave that feedback is amplified in Y scanning still can effectively show, increased X simultaneously, the continuous wave of Y scanning triangular wave and X(+/-) or Y(+/-) the Li Sa of reciprocal triangular wave educate figure and check miscellaneous function, thereby can find in time to amplify to scan control the variation of controlling relevant corresponding device performance parameter, these two inspections just can complete in tens seconds, this can be used as every batch of product and carries out before Implantation, routine inspection afterwards or in injection process, thereby avoid the product quality risk causing thus, greatly improve the stability of scan uniformity parameter values index and scan uniformity parameter values itself.
Accompanying drawing explanation
Fig. 1 shows the system block diagram being connected with according to the ion implantor of supervising device of the present utility model.
Fig. 2 is the line schematic diagram according to the switches set arranging in the guidance panel of the first embodiment of the present utility model.
Fig. 3 is the line schematic diagram according to the switches set arranging in the guidance panel of the second embodiment of the present utility model.
Embodiment
Below in conjunction with specific embodiments and the drawings, the utility model is described in further detail; set forth in the following description more details so that fully understand the utility model; but the utility model obviously can be implemented with the ion implantor of other type of the multiple different electric scanning modes of employing that are different from this description; those skilled in the art can do similar popularization, deduction according to practical situations without prejudice to the utility model intension in the situation that, therefore should be with the content constraints of this specific embodiment protection range of the present utility model.
Fig. 1 shows the system block diagram according to ion implantor of the present utility model.Ion implantor itself is known, horizontal direction (X) and vertical direction (Y) all adopt the mode of electric scanning to control, exportable triangular signal X+, X-, Y+ and the Y-feeding back after amplifying from sweep amplifier of this ion implantor, and can export the line analog signal from the Dose Controller in implanter.In addition, ion implantor also comprises J, H, K Signal connector, and wherein J Signal connector has and controls the function, the H Signal connector that show 1/X waveform and have to control and show that the function of 1/Y waveform and K Signal connector provide the switching signal of 1/X, 1/Y and X/Y waveform.Particularly, J, H, K Signal connector is in 350D ion implantor, by SETUP FLAG FARADAY(, faraday's flag that beam parameters is used is set before injecting implanter is normal) joint of control signal is provided while monitoring line waveform, K Signal connector is for when line is switched to SETUP FLAG FARADAY, there is the input of 15VDC voltage, J Signal connector is to be communicated with to obtain the signal source output of 15VDC voltage control Y triangular wave waveform generator with K Signal connector, its Y-signal is turn-offed, thereby only have X triangular wave waveform to have output, can obtain like this waveform of wire clearly of X, it is the middle line waveform of X level on circular faraday's flag, rather than during as normal injection, X and Y all open, appreciable is the envelope diagram of X waveform in the stack of Y vertical direction diverse location.In like manner H Signal connector is to be communicated with to obtain the signal source output of 15VDC voltage control X triangular wave waveform generator with K Signal connector, its X signal is turn-offed, thereby only have Y triangular wave waveform to have output, can obtain like this waveform of wire clearly of Y, it is Y vertical middle line waveform on circular faraday's flag, rather than during as normal injection, X and Y all open, can see the stack envelope diagram of X waveform contracting collection in Y-direction relevant position.If J Signal connector and H Signal connector are not all communicated with K Signal connector, the signal of X and Y triangular wave waveform generator is exported simultaneously, can see that the Li Sa of X and Y educates waveform.
This ion implantor with according to supervising device of the present utility model electrical connection, supervising device is mainly comprised of two parts: guidance panel 100 and oscilloscope 200.Wherein, guidance panel 100 mainly comprises switching device, for waveform and input signal are carried out to switching controls.The oscilloscope of use in supervising device of the present utility model is the general-purpose oscilloscope with X-Y input pattern.
The guidance panel 100 of supervising device comprises input part and efferent, and switching device is connected between input part and efferent, selectively input signal is delivered to efferent from input part.Input part comprises again signal input part and Waveform Control input.Signal input part in input part by input from X+, the X-of the scan electrode plate triangular wave feedback sources of ion implantor, Y+, Y-signal and from the line analog signal of the Dose Controller of ion implantor, particularly, signal input part can comprise the 3rd terminal, the input ion implantor of the Y+ signal of X-signal the second terminal, the input ion implantor of the first terminal, the input ion implantor of the X+ signal of inputting ion implantor Y-the 4th terminal and from the Five-terminals of the line analog signal of the Dose Controller of ion implantor.In addition, the Waveform Control input in input part is for connecting J, H, the K Signal connector of ion implantor, and specifically, Waveform Control input comprises J, the H that connects respectively ion implantor, first end, the second end and the 3rd end of K Signal connector.On the other hand, the efferent of guidance panel 100 comprises the first channel output and the second channel output, is connected respectively with two channels of general-purpose oscilloscope 200.
The first embodiment
Fig. 2 shows the line schematic diagram according to the switching device arranging in the guidance panel of the first embodiment of the present utility model.Below, the configuration of the waveform in the guidance panel of the first embodiment and signal shift switch device is described in detail.
The guidance panel of the first embodiment specifically comprises four groups of switches set, in Fig. 2 respectively with a(the first switches set), b(second switch group), c(the 3rd switches set), d(the 4th switches set) represent, each switches set also comprises several switching parts, and the switching part acquiescence in every group is interlock.
The first switches set a has: the first switching part that X+ input signal and X-input signal are switched 1. and the second switching part that Y+ input signal and Y-input signal are switched 2..
Second switch group b has: the second switching part that the output of the output of first switching part of the first switching part that 1/X and 1/Y waveform are switched 1., to the first switches set and the second switching part of the first switches set switches 2., the 3rd switching part that X+ input signal and Y+ input signal are switched 3. and the 4th switching part that X-input signal and Y-input signal are switched 4..
The 3rd switches set c has: the 3rd switching part that the output of second switching part of the second switching part that the output of the first switching part that the 1/X to the first switching part selection by second switch group or 1/Y waveform and X/Y waveform switch, the output of the second switching part to second switch group and the first switching part of the first switches set switches 2. with to the beam current signal from Dose Controller and the first switches set switches 3..
The 4th switches set d has: the first switching part that the output of the output of the second switching part to the 3rd switches set and the 3rd switching part of second switch group switches 1., the output of the first switching part of the 4th switches set be the second switching part of switching of the output of the first channel signals output and the output of the 3rd switching part to the 3rd switches set and the 4th switching part of second switch group 2., the output of the second switching part of the 4th switches set is the second channel signals output.
In above-mentioned diverter switch group, when Waveform Control input comprises the first end that connects respectively J, H that waveform control signal is provided in ion implantor, K Signal connector, the second end and the 3rd end, the first switching part of second switch group switches between first end and the second end, and output and the 3rd end that the first switching part of the 3rd switches set is arranged to first switching part that can make second switch group are communicated with or disconnect.
Following table 1 is the function declaration of each input contact in Fig. 2:
Table 1
Following table 2 is the function of each switching part in each switches set in Fig. 2:
Table 2
According to above table 1 and table 2, can find out according to the line waveform supervising device that implanter uniformity is controlled of the first embodiment adopts four switches set to realize switching and the control of signal, wherein J, H, K Signal connector are for controlling the cutting-off controlling to X, Y waveform, to show the single line waveform of X, Y.X+, X-, Y+, Y-are the triangular signals feeding back after amplifying from sweep amplifier, can check by conventional general-purpose oscilloscope the waveform of each triangular wave, impressed frequency signal while showing line waveform source can be provided simultaneously, and B.C. is the line analog signal from Dose Controller, as outer frequency signal source, with X/Y, show that mould shows combination with X+ or X-, Y+ or Y-respectively, just can show single X, Y beam current signal waveform.X+, X-, Y+, Y-regulate by the frequency signal that carries of general-purpose oscilloscope, just can show single triangular signal, or multiple continuous wave waveforms.By the switching of four groups of switches, the Li Sa that also can obtain X+ and X-, Y+ and Y-educates figure.
The second embodiment
Fig. 3 shows the line schematic diagram according to the switching device arranging in the guidance panel of the second embodiment of the present utility model.Below, the configuration of the waveform in the guidance panel of the second embodiment and signal shift switch device is described in detail.
Different from the guidance panel of the first embodiment, switching device in the guidance panel of the second embodiment specifically comprises three groups of switches set, in figure respectively with a(the first switches set), b(second switch group), c(the 3rd switches set) represent, each switches set also comprises several switching parts, and the multiple switching part acquiescences in each switches set are interlocks.
The first switches set a has: the first switching part that X+ and X-input signal are switched 1., the second switching part that Y+ and Y-input signal are switched 2., the 3rd switching part that X+ and Y+ input signal are switched 3. and the 4th switching part that X-and Y-input signal are switched 4..
Second switch group b has: the 3rd switching part that switch the output of second switching part of the second switching part that two contacts of output of first switching part of the first switching part that 1/X, 1/Y and X/Y waveform are switched 1., to the first switches set and the output of the second switching part of the first switches set switch 2., to the first switches set and two contacts of beam current signal 3..
The 3rd switches set c has: the second switching part that the output of the output of three switching part of the first switching part that the output of the output of the second switching part to second switch group and the 3rd switching part of the first switches set switches 1. with to second switch group and the 4th switching part of the first switches set switches 2.; Wherein the output of the first switching part of the 3rd switches set is as the first channel signals output, and the output of the second switching part of the 3rd switches set is as the second channel signals output.
Particularly, when Waveform Control input comprises the first end that connects respectively J, H that waveform control signal is provided in ion implantor, K Signal connector, the second end and the 3rd end, the first switching part of second switch group is set to make the 3rd end to be communicated with or both to disconnect with first end or the second end separately with first end or the second end respectively, thereby waveform is switched.
Following table 3 is the function declaration of each input contact in Fig. 3:
Table 3
Following table 4 is the function of each switching part in each switches set in Fig. 3:
Table 4
According to above table 3 and table 4, can find out according to the line waveform supervising device that implanter uniformity is controlled of the second embodiment adopts three switches set to realize switching and the control of signal, wherein J, H, K Signal connector are for controlling the cutting-off controlling to X, Y waveform, to show the single line waveform of X, Y.X+, X-, Y+, Y-are the triangular signals feeding back after amplifying from sweep amplifier, can check by oscilloscope the waveform of each triangular wave, impressed frequency signal while showing line waveform source can be provided simultaneously, and B.C. is the line analog signal from Dose Controller, originate as outer frequency signal with X+ or X-, Y+ or Y-respectively, just can show single X, Y beam current signal waveform.X+, X-, Y+, Y-regulate by the frequency signal that carries of general-purpose oscilloscope, just can show single triangular signal, or multiple continuous wave waveforms.By the switching of three groups of switches, the Li Sa that also can obtain X+ and X-, Y+ and Y-educates figure.
The switching device of the guidance panel of above two embodiment specifically can be realized by the form of push-button switch on guidance panel, original X, the single line waveform of Y and X, the single triangular wave that feedback is amplified in Y scanning still can effectively show, increased X simultaneously, the continuous wave of Y scanning triangular wave and Li Sa educate figure and check miscellaneous function, thereby can find in time to amplify to scan control the variation of controlling relevant corresponding device performance parameter, these two inspections just can complete in tens seconds, this can be used as every batch of product and carries out before Implantation, routine inspection afterwards or in injection process, thereby avoid the product quality risk causing thus, greatly improve the stability of scan uniformity parameter values index and scan uniformity parameter values itself.
Although the utility model with preferred embodiment openly as above, it is not for limiting the utility model, and any those skilled in the art, not departing from spirit and scope of the present utility model, can make possible variation and modification.Therefore, any modification of above embodiment being done according to technical spirit of the present utility model, does not all depart from the content of technical solutions of the utility model.
Claims (14)
1. for a supervising device for ion implantor, described supervising device comprises guidance panel and oscilloscope, it is characterized in that,
Described guidance panel comprises input part and efferent;
Described input part comprises signal input part and Waveform Control input;
Described efferent comprises the first channel signals output and the second channel signals output;
Described oscilloscope comprises the first channel and the second channel that is connected the second channel signals output that connect the first channel signals output.
2. supervising device as claimed in claim 1, is characterized in that, described oscilloscope is the general-purpose oscilloscope with X-Y input pattern.
3. supervising device as claimed in claim 1, it is characterized in that, described signal input part comprises the Five-terminals of the 4th terminal of Y-scan electrode plate triangular wave feedback signal of the first terminal of the X+ scan electrode plate triangular wave feedback signal of inputting ion implantor, X-scan electrode plate triangular wave feedback signal second terminal of input ion implantor, the 3rd terminal of inputting the Y+ scan electrode plate triangular wave feedback signal of ion implantor, input ion implantor and the line analog signal of the Dose Controller of input ion implantor.
4. supervising device as claimed in claim 1, is characterized in that, the described guidance panel of described supervising device comprises the waveform switch switch portion of switching with 1/X, 1/Y and X/Y waveform, and described waveform switch switch portion is provided with described Waveform Control input.
5. supervising device as claimed in claim 1, is characterized in that, described Waveform Control input comprises and connects respectively J, the H that waveform control signal is provided in ion implantor, first end, the second end and the 3rd end of K Signal connector.
6. supervising device as claimed in claim 5, it is characterized in that, the described guidance panel of described supervising device comprises the first end to described Waveform Control input, the waveform switch switch portion that the second end and the 3rd end switch, thereby make at 1/X, between 1/Y and X/Y waveform, control and switch, when waveform switch switch portion makes J Signal connector be communicated with K Signal connector, 1/X waveform is output, when waveform switch switch portion makes H Signal connector be communicated with K Signal connector, 1/Y waveform is output, when waveform switch switch portion disconnects K Signal connector simultaneously with J Signal connector and H Signal connector, X/Y waveform is output.
7. supervising device as claimed in claim 1, it is characterized in that, the described guidance panel of described supervising device comprises the signal shift switch portion of switching with input signal, described switch portion is from the X+ scan electrode plate triangular wave feedback signal of ion implantor, X-scan electrode plate triangular wave feedback signal, Y+ scan electrode plate triangular wave feedback signal, switching elects in the line analog signal of the Dose Controller of Y-scan electrode plate triangular wave feedback signal and ion implantor, and by signals selected described the first channel signals output and described the second channel signals output of outputing to.
8. supervising device as claimed in claim 7, it is characterized in that, described supervising device is arranged to output to the signal of described the first channel signals output can be in X+ scan electrode plate triangular wave feedback signal, X-scan electrode plate triangular wave feedback signal, in Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal, switch arbitrarily, the signal that outputs to described the second channel signals output can be in X-scan electrode plate triangular wave feedback signal, Y+ scan electrode plate triangular wave feedback signal, in the line analog signal of the Dose Controller of Y-scan electrode plate triangular wave feedback signal and ion implantor, switch arbitrarily.
9. supervising device as claimed in claim 1, is characterized in that, is connected with waveform and signal shift switch device between described input part and described efferent, and described waveform and signal shift switch device comprise:
The first switches set, described the first switches set has:
The first switching part that X+ scan electrode plate triangular wave feedback signal and X-scan electrode plate triangular wave feedback signal are switched and
The second switching part that Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched;
Second switch group, described second switch group has:
The first switching part that 1/X and 1/Y waveform are switched,
The second switching part of the second switching part that the output of the output of the first switching part to the first switches set and the second switching part of the first switches set switches,
The 3rd switching part that X+ scan electrode plate triangular wave feedback signal and Y+ scan electrode plate triangular wave feedback signal are switched and
The 4th switching part that X-scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched;
The 3rd switches set, described the 3rd switches set has:
The first switching part that the 1/X being selected by the first switching part of second switch group or 1/Y waveform and X/Y waveform are switched,
The second switching part that the output of the output of the second switching part to second switch group and the first switching part of the first switches set switches and
The 3rd switching part that the output of the second switching part to beam current signal and the first switches set switches; And
The 4th switches set, described the 4th switches set has:
The first switching part that the output of the output of the second switching part to the 3rd switches set and the 3rd switching part of described second switch group switches, the output of the first switching part of the 4th switches set be the first channel signals output and
The second switching part that the output of the output of the 3rd switching part to the 3rd switches set and the 4th switching part of second switch group switches, the output of the second switching part of described the 4th switches set is the second channel signals output.
10. supervising device as claimed in claim 9, it is characterized in that, described Waveform Control input comprises and connects respectively J, the H that waveform control signal is provided in ion implantor, first end, the second end and the 3rd end of K Signal connector, the first switching part of described second switch group switches between first end and the second end, and output and the 3rd end that the first switching part of described the 3rd switches set is arranged to first switching part that can make second switch group are communicated with or disconnect.
11. supervising devices as claimed in claim 1, is characterized in that, are connected with waveform and signal shift switch device between described input part and described efferent, and described waveform and signal shift switch device comprise:
The first switches set, described the first switches set has:
The first switching part that X+ scan electrode plate triangular wave feedback signal and X-scan electrode plate triangular wave feedback signal are switched,
The second switching part that Y+ scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched,
The 3rd switching part that X+ scan electrode plate triangular wave feedback signal and Y+ scan electrode plate triangular wave feedback signal number are switched and
The 4th switching part that X-scan electrode plate triangular wave feedback signal and Y-scan electrode plate triangular wave feedback signal are switched;
Second switch group, described second switch group has:
The first switching part that 1/X, 1/Y and X/Y waveform are switched,
The second switching part that the efferent of two contacts of the output of the first switching part to the first switches set and the second switching part of the first switches set switches,
The 3rd switching part that switch the output of the second switching part to the first switches set and two contacts of beam current signal; And
The 3rd switches set, described the 3rd switches set has:
The first switching part that the output of the output of the second switching part to the 3rd switches set and the 3rd switching part of the first switches set switches and
The second switching part that the output of the output of the 3rd switching part to the 3rd switches set and the 4th switching part of the first switches set switches, wherein the output of the first switching part of the 3rd switches set is as the first channel signals output, and the output of the second switching part of the 3rd switches set is as the second channel signals output.
12. supervising devices as claimed in claim 11, it is characterized in that, it is characterized in that, described Waveform Control input comprises and connects respectively J, the H that waveform control signal is provided in ion implantor, first end, the second end and the 3rd end of K Signal connector, and the first switching part of described second switch group is set to make the 3rd end be communicated with or both disconnect with first end and the second end separately with first end or the second end.
13. 1 kinds of ion implantation machine systems, described ion implantation machine system comprises ion implantor, the supervising device as described in any one in claim 1-12 is connected on ion implantor.
14. ion implantation machine systems as claimed in claim 13, is characterized in that, described ion implantor comprises provides J, the H of 1/X, 1/Y and X/Y waveform switch, K Signal connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320794296.XU CN203562390U (en) | 2013-12-04 | 2013-12-04 | Monitoring device for ion implanter and ion implanter system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320794296.XU CN203562390U (en) | 2013-12-04 | 2013-12-04 | Monitoring device for ion implanter and ion implanter system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106206231A (en) * | 2016-07-29 | 2016-12-07 | 上海华力微电子有限公司 | Ion implantation device and monitoring method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106206231A (en) * | 2016-07-29 | 2016-12-07 | 上海华力微电子有限公司 | Ion implantation device and monitoring method |
| CN106206231B (en) * | 2016-07-29 | 2018-08-24 | 上海华力微电子有限公司 | ion implantation device and monitoring method |
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