CN203530430U - Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment - Google Patents
Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment Download PDFInfo
- Publication number
- CN203530430U CN203530430U CN201320596515.3U CN201320596515U CN203530430U CN 203530430 U CN203530430 U CN 203530430U CN 201320596515 U CN201320596515 U CN 201320596515U CN 203530430 U CN203530430 U CN 203530430U
- Authority
- CN
- China
- Prior art keywords
- equipment
- detection device
- tubular pecvd
- feeding detection
- photoelectric switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses a feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. The feeding detection device comprises a feeding hole formed on a housing, wherein a transmitter and a receiver of a correlation type photoelectric switch are fixed on the housing at the two sides of the feeding hole, respectively; a controller of the correlation type photoelectric switch is electrically connected with a programmable controller of the tubular PECVD equipment. The feeding detection device of the tubular PECVD equipment is characterized in that the correlation type photoelectric switch is utilized to control the loading action of the equipment, a graphite boat is located in the optical propagation path of the correlation type photoelectric switch after being pushed into the equipment from the loading material, and at this moment, a loading manipulator is triggered to be started to carry out subsequent operation. Full automatic operation of the whole process is realized due to the use of the feeding detection device of the tubular PECVD equipment, so that the automation degree of the equipment is increased and the workforce is liberated; furthermore, the production efficiency is improved.
Description
Technical field
The utility model relates to field of semiconductor processing, is specifically related to a kind of tubular type PECVD charging detector.
Background technology
PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, it is plasma reinforced chemical meteorology deposition apparatus, for silicon chip is carried out to plated film, it comprises loading and unloading district, body of heater, pumped vacuum systems and Controlling System, silicon chip is contained in graphite boat, by loading and unloading district, enter body of heater and carry out plated film, graphite boat is unloaded in plated film Hou loading and unloading district.The charging link of existing installation is manually to control, and the dolly that loads graphite boat is pushed into opening for feed, makes graphite boat be positioned at the below of charging feeding manipulator, and then manually Push switch feeding manipulator automatic capturing graphite boat enters automatic operation flow process.Whole operating process needs manual intervention, can not accomplish fully automated, affects production efficiency.
Summary of the invention
The technical problems to be solved in the utility model is to provide a kind of tubular type PECVD charging detector, can detect workpiece and whether be positioned at charging feeding manipulator below, and then complete automatic feed operation, has improved automation degree of equipment, and then has improved production efficiency.
The utility model is achieved through the following technical solutions:
Tubular type PECVD equipment charging detector, comprise the opening for feed being opened on housing, on two side bodies of described opening for feed, be fixed with respectively projector and the receptor of correlation optoelectronic switch, the controller of described correlation optoelectronic switch is electrically connected to the programmable logic controller of tubular type PECVD equipment.
The further improvement project of the utility model is that the propagation path of light of described correlation optoelectronic switch is through the material loading holding fix of workpiece.
The further improvement project of the utility model is, described projector is infrared transmitting tube, and described receptor is photosensitive stripe shape receptor
Compared to the prior art the utility model has the following advantages:
The utility model utilizes the material loading action of correlation optoelectronic switch operating device, and graphite boat is positioned on the propagation path of light of correlation optoelectronic switch from feeding port puopulsion equipment, now triggers feeding manipulator startup and enters subsequent operations.Use of the present utility model realizes the full-automatic operation of whole operation, has improved the level of automation of equipment and has liberated labor force, and then improved production efficiency.
Accompanying drawing explanation
Fig. 1 is the utility model plan structure sectional view.
Embodiment
Tubular type PECVD equipment charging detector as shown in Figure 1, comprise the opening for feed 1 being opened on housing, on two side bodies of opening for feed 1, be fixed with respectively projector 2 and the receptor 3 of correlation optoelectronic switch, wherein the controller of correlation optoelectronic switch is electrically connected to the programmable logic controller of tubular type PECVD equipment.
The realization of the present embodiment need to meet the propagation path of light (in figure shown in dotted line) of correlation optoelectronic switch through the material loading holding fix of workpiece, and projector 2 is infrared transmitting tube, and receptor 3 is photosensitive stripe shape receptor.When to be processed when workpiece is pushed into feeding manipulator with dolly below like this, just intercepted the infrared rays of projector, triggered the starting switch of feeding manipulator, completed automatic start-up operation, docked and realize unattended operation with equipment subsequent operations.
Claims (3)
1. tubular type PECVD equipment charging detector, comprise the opening for feed (1) being opened on apparatus casing, it is characterized in that: on two side bodies of described opening for feed (1), be fixed with respectively projector (2) and the receptor (3) of correlation optoelectronic switch, the controller of described correlation optoelectronic switch is electrically connected to the programmable logic controller of tubular type PECVD equipment.
2. tubular type PECVD equipment charging detector as claimed in claim 1, is characterized in that: the propagation path of light of described correlation optoelectronic switch is through the material loading holding fix of workpiece.
3. tubular type PECVD equipment charging detector as claimed in claim 1, is characterized in that: described projector (2) is infrared transmitting tube, and described receptor (3) is photosensitive stripe shape receptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320596515.3U CN203530430U (en) | 2013-09-26 | 2013-09-26 | Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320596515.3U CN203530430U (en) | 2013-09-26 | 2013-09-26 | Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203530430U true CN203530430U (en) | 2014-04-09 |
Family
ID=50416662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320596515.3U Expired - Fee Related CN203530430U (en) | 2013-09-26 | 2013-09-26 | Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203530430U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018103678A1 (en) * | 2016-12-07 | 2018-06-14 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat side discharging mechanism provided with inverted wafer detection device |
-
2013
- 2013-09-26 CN CN201320596515.3U patent/CN203530430U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018103678A1 (en) * | 2016-12-07 | 2018-06-14 | 深圳市捷佳伟创新能源装备股份有限公司 | Graphite boat side discharging mechanism provided with inverted wafer detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6714005B2 (en) | Charging station for mobile devices with solar panels | |
| CN203530430U (en) | Feeding detection device of tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment | |
| CN105515509A (en) | Solar module cleaning method | |
| CN105728243A (en) | Device and method for moisture preservation of photoresist sprayer | |
| CN105006444A (en) | Production technology for high-efficiency crystal silicon solar cell piece | |
| CN105304520A (en) | Wafer scheduling method and system | |
| CN203466172U (en) | Gas filling device with flow control for wafer carrier | |
| US10161033B2 (en) | Method for cleaning load port of wafer processing apparatus | |
| CN103295940B (en) | A kind of metal film peels off the automatic liquid supply system of cleaning equipment | |
| CN102299050A (en) | Wafer position detection device | |
| CN204223775U (en) | One picks can system | |
| CN104607647A (en) | Continuous collecting device of ultrafine metal powder production equipment | |
| CN100587907C (en) | Method for detecting releasing degree of semiconductor chip from electrostatic chuck | |
| CN203417877U (en) | Automatic cleaning device used for detecting surface defects of rolling element | |
| CN203034145U (en) | Diffusion cantilever furnace and silicon wafer holder thereof | |
| CN206266705U (en) | A kind of Tubular PECVD device charging detector | |
| CN205199955U (en) | Ware is relayed to adjustable control by temperature change capsule | |
| CN203865304U (en) | Automatic dust-free feeding mechanism for powder processing | |
| CN204384128U (en) | Automatic feeding device | |
| CN103594409A (en) | Device for absorbing silicon wafers in batches | |
| CN202148020U (en) | Automatic feeding device for milk powder production | |
| CN206951662U (en) | The Self-cleaning system of solar cell module | |
| CN219303692U (en) | PSG removing device for silicon wafer | |
| CN206076277U (en) | A kind of moisture film device of controllable dropping liquid | |
| CN104474756A (en) | Filtration-washing-drying integrated machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140409 Termination date: 20170926 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |