CN105006444A - Production technology for high-efficiency crystal silicon solar cell piece - Google Patents
Production technology for high-efficiency crystal silicon solar cell piece Download PDFInfo
- Publication number
- CN105006444A CN105006444A CN201510382944.4A CN201510382944A CN105006444A CN 105006444 A CN105006444 A CN 105006444A CN 201510382944 A CN201510382944 A CN 201510382944A CN 105006444 A CN105006444 A CN 105006444A
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- China
- Prior art keywords
- silicon chip
- diffusion
- production technology
- switching mechanism
- decorated basket
- Prior art date
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 74
- 239000010703 silicon Substances 0.000 title claims abstract description 74
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000005516 engineering process Methods 0.000 title claims abstract description 25
- 239000013078 crystal Substances 0.000 title claims abstract description 13
- 238000009792 diffusion process Methods 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 32
- 238000005530 etching Methods 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 13
- 238000007639 printing Methods 0.000 claims abstract description 5
- 238000005245 sintering Methods 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims abstract description 5
- 238000012545 processing Methods 0.000 claims abstract description 4
- 239000010453 quartz Substances 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 238000012546 transfer Methods 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 abstract description 5
- 230000007306 turnover Effects 0.000 abstract 3
- 238000007747 plating Methods 0.000 abstract 1
- 230000006872 improvement Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 235000008216 herbs Nutrition 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a production technology for a high-efficiency crystal silicon solar cell piece. The production technology comprises the following steps: cleaning, texture surface making, diffusion, junction making, etching, film plating, printing, sintering and testing. Silicon chips are transferred to each process by a loading, unloading and transmission mechanism in order, and processing is carried out. The production technology is characterized in that the cleaning, a first turnover mechanism and a first rewinding mechanism are added between the cleaning and texture surface making process and the diffusion and junction making process, and a second rewinding mechanism and a second turnover mechanism are added between the diffusion and junction making process and the etching process. In the production technology, the plurality of turnover mechanisms and rewinding mechanisms are added, the transmission efficiency of silicon chips is raised greatly, the production technology is helpful for automatic production of the diffusion process, the product qualified rate is raised, and the manual cost is saved greatly.
Description
Technical field
The present invention relates to solar-energy photo-voltaic cell production technical field, particularly relate to a kind of production technology of efficient crystal silicon solar batteries sheet.
Background technology
Solar cell is device luminous energy being changed into electric energy, possesses the advantages such as the simple and high reliability of low-carbon (LC), environment friendly and pollution-free, aboundresources, utilization, is more and more utilized.At present, the production technology of crystal silicon solar batteries generally comprises the subsequent techniques such as the detection of silicon chip supplied materials, cleaning and texturing, diffusion, etching, plated film printing, sintering, test, and for enhancing productivity, existing production technology also exists very large room for improvement.
The attached production technology that Figure 1 shows that existing solar-energy photo-voltaic cell, wherein, the silicon chip after making herbs into wool is all that monolithic is monolithically placed on the compartment of the gaily decorated basket, then through a dead lift to diffusing procedure.Before entering diffusion furnace and carrying out diffusion, need silicon chip to transfer to from the gaily decorated basket on quartz boat, because the quality of quartz boat is more crisp, be not suitable for loading silicon chip and transmit on a production line, but quartz boat can be high temperature resistant, can sustain the high temperature in diffusion furnace.In current process, before entering diffusion furnace operation, the silicon chip that the monolithic in each for gaily decorated basket layer is put is become between two back-to-back by manual type, then put into quartz boat go diffusion; Again the silicon chip in quartz boat is passed through manually to become monolithic after diffusion, load the gaily decorated basket, pass to later process.It is lower to there is production efficiency in this mode, easily produces the problem such as fragment and surface contamination.
Summary of the invention
For solving the problems of the technologies described above, the invention provides a kind of production technology of efficient crystal silicon solar batteries sheet, it adds some switching mechanisms and rewinding device in production technology, drastically increase the efficiency of transmission of silicon chip, be conducive to the automated production of diffusion operation and improve the qualification rate of product, substantial saving in cost of labor simultaneously.
The technical solution adopted in the present invention is: a kind of production technology of efficient crystal silicon solar batteries sheet, comprise following operation: cleaning and texturing, diffusion, etching, plated film, printing, sintering and test, silicon chip to be sent to each operation successively and to carry out processing by loading and unloading and process with transport sector, it is characterized in that:
Increase the first switching mechanism and the first rewinding device between described cleaning and texturing operation and diffusion operation, between diffusion operation and etching procedure, increase the second rewinding device and the second switching mechanism;
Silicon chip is sent into the first switching mechanism by the blanking part of described cleaning and texturing operation, and convert silicon chip between two back-to-back mode by the first switching mechanism and be placed on flower in the gaily decorated basket, the gaily decorated basket is carried to diffusion operation by transport sector;
Before silicon chip in the described gaily decorated basket enters diffusion operation, transfer in quartz boat through the first rewinding device, silicon chip keeps back-to-back mode between two to put, quartz boat is sent into and carry out diffusion in diffusion furnace, silicon chip in quartz boat is transferred in the gaily decorated basket by the second rewinding device by the silicon chip after diffusion, and the gaily decorated basket is carried to etching procedure by transport sector;
Before silicon chip in the described gaily decorated basket enters etching procedure, through the second switching mechanism be divided into direction consistent, the silicon chip of monolithic sends into etching procedure.
As preferably, described first switching mechanism is identical with the structure of the second switching mechanism, the silicon chip of monolithic can be converted to the silicon chip placed in back-to-back mode between two, or will convert the silicon chip of monolithic to the silicon chip that back-to-back mode is placed between two.
As preferably, described first rewinding device is identical with the structure of the second rewinding device, can change before and after diffusion operation by with the silicon chip that back-to-back mode is placed between two between the gaily decorated basket and quartz boat.
In production technology of the present invention, silicon chip is placed in the gaily decorated basket in back-to-back mode between two through switching mechanism by the silicon chip after making herbs into wool, diffusing procedure is carried to through transport sector, before entering diffusion furnace, by rewinding device by importing in quartz boat with the silicon chip that back-to-back mode is placed between two, sending into diffusion furnace and carrying out diffusion process.Silicon chip in quartz boat after diffusion, then be transported in the gaily decorated basket through rewinding device, silicon chip remains mode back-to-back.In the material loading part of etching, through switching mechanism by the silicon chip placed in back-to-back mode between two separately, the positive and negative of silicon chip is consistent send in etching machine to etch; Silicon chip after etching is sent in later process, processes further.Adopt production technology of the present invention, drastically increase the efficiency of transmission of silicon chip, while achieving diffusing procedure automated handling silicon chip, effectively control fragment rate, greatly reduce cost of labor, improve treatment effeciency and the quality of silicon chip.
In sum, the present invention has following technique effect: the present invention adds some switching mechanisms and rewinding device in production technology, drastically increase the efficiency of transmission of silicon chip, be conducive to the automated production of diffusing procedure and improve the qualification rate of product, greatly having saved cost of labor simultaneously.
Accompanying drawing explanation
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein:
Fig. 1 is the schematic diagram of the production technology of crystal silicon solar batteries sheet of the prior art;
Fig. 2 is the schematic diagram of the production technology of efficient crystal silicon solar batteries sheet of the present invention.
Embodiment
All features disclosed in this specification, or the step in disclosed all methods or process, except mutually exclusive feature and/or step, all can combine by any way.
Arbitrary feature disclosed in this specification, unless specifically stated otherwise, all can be replaced by other equivalences or the alternative features with similar object.That is, unless specifically stated otherwise, each feature is an example in a series of equivalence or similar characteristics.
Be illustrated in figure 2 a preferred embodiment of the present invention, i.e. a kind of production technology of efficient crystal silicon solar batteries sheet, comprise following operation: cleaning and texturing, diffusion, etching, plated film, printing, sintering and test, silicon chip to be sent to each operation successively and to carry out processing by loading and unloading and process with transport sector, increase the first switching mechanism and the first rewinding device, increase the second rewinding device and the second switching mechanism between diffusion operation and etching procedure between cleaning and texturing operation and diffusion operation.
In the present embodiment, silicon chip is sent into the first switching mechanism by the blanking part of cleaning and texturing operation, and convert silicon chip between two back-to-back mode by the first switching mechanism and be placed on flower in the gaily decorated basket, the gaily decorated basket is carried to diffusion operation by transport sector;
Before silicon chip in the gaily decorated basket enters diffusion operation, transfer in quartz boat through the first rewinding device, silicon chip keeps back-to-back mode between two to put, quartz boat is sent into and carry out diffusion in diffusion furnace, silicon chip in quartz boat is transferred in the gaily decorated basket by the second rewinding device by the silicon chip after diffusion, and the gaily decorated basket is carried to etching procedure by transport sector;
Before silicon chip in the gaily decorated basket enters etching procedure, through the second switching mechanism be divided into direction consistent, the silicon chip of monolithic sends into etching procedure.
As further improvement of this embodiment, first switching mechanism is identical with the structure of the second switching mechanism, the silicon chip of monolithic can be converted to the silicon chip placed in back-to-back mode between two, or the silicon chip of monolithic will be converted to the silicon chip that back-to-back mode is placed between two.
As the another improvement of the present embodiment, the first rewinding device is identical with the structure of the second rewinding device, can change before and after diffusion operation by with the silicon chip that back-to-back mode is placed between two between the gaily decorated basket and quartz boat.
The present invention is not limited to aforesaid embodiment.The present invention expands to any new feature of disclosing in this manual or any combination newly, and the step of the arbitrary new method disclosed or process or any combination newly.
Claims (3)
1. a production technology for efficient crystal silicon solar batteries sheet, comprises following operation: cleaning and texturing, diffusion, etching, plated film, printing, sintering and test, and silicon chip is sent to each operation successively by transport sector and carries out processing process, it is characterized in that:
Increase the first switching mechanism and the first rewinding device between described cleaning and texturing operation and diffusion operation, between diffusion operation and etching procedure, increase the second rewinding device and the second switching mechanism;
Silicon chip is sent into the first switching mechanism by the blanking part of described cleaning and texturing operation, and convert silicon chip between two back-to-back mode by the first switching mechanism and be placed in the gaily decorated basket, the gaily decorated basket is carried to diffusion operation by transport sector;
Before silicon chip in the described gaily decorated basket enters diffusion operation, transfer in quartz boat through the first rewinding device, silicon chip keeps back-to-back mode between two to put, quartz boat is sent into and carry out diffusion in diffusion furnace, silicon chip in quartz boat is transferred in the gaily decorated basket by the second rewinding device by the silicon chip after diffusion, and the gaily decorated basket is carried to etching procedure by transport sector;
Before silicon chip in the described gaily decorated basket enters etching procedure, through the second switching mechanism be divided into direction consistent, the silicon chip of monolithic sends into etching procedure.
2. the production technology of a kind of efficient crystal silicon solar batteries sheet according to claim 1, it is characterized in that: described first switching mechanism is identical with the structure of the second switching mechanism, the silicon chip of monolithic can be converted to the silicon chip placed in back-to-back mode between two, or the silicon chip of monolithic will be converted to the silicon chip that back-to-back mode is placed between two.
3. the production technology of a kind of efficient crystal silicon solar batteries sheet according to claim 1, it is characterized in that: described first rewinding device is identical with the structure of the second rewinding device, can change with the silicon chip that back-to-back mode is placed between two between the gaily decorated basket and quartz boat before and after diffusion operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510382944.4A CN105006444A (en) | 2015-07-03 | 2015-07-03 | Production technology for high-efficiency crystal silicon solar cell piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510382944.4A CN105006444A (en) | 2015-07-03 | 2015-07-03 | Production technology for high-efficiency crystal silicon solar cell piece |
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| Publication Number | Publication Date |
|---|---|
| CN105006444A true CN105006444A (en) | 2015-10-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510382944.4A Pending CN105006444A (en) | 2015-07-03 | 2015-07-03 | Production technology for high-efficiency crystal silicon solar cell piece |
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| Country | Link |
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| CN (1) | CN105006444A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107527850A (en) * | 2017-09-19 | 2017-12-29 | 中建材浚鑫科技有限公司 | The feeding device of solar battery back corrosion |
| CN107910386A (en) * | 2017-11-13 | 2018-04-13 | 嘉兴尚能光伏材料科技有限公司 | The single-side pile noodle producing method of crystal-silicon solar cell |
| CN108281375A (en) * | 2016-03-16 | 2018-07-13 | 浙江潮晨能源科技有限公司 | The structure improved production system for being used to prepare cell piece |
| CN109873054A (en) * | 2019-04-04 | 2019-06-11 | 乐山新天源太阳能科技有限公司 | Black silicon solar cell production line |
| CN110085517A (en) * | 2019-04-02 | 2019-08-02 | 江苏华恒新能源有限公司 | A kind of rectangle polysilicon solar battery slice processing method of the non-equidimension of length and width |
| CN111769064A (en) * | 2020-06-18 | 2020-10-13 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN115663070A (en) * | 2022-11-21 | 2023-01-31 | 拉普拉斯(无锡)半导体科技有限公司 | Silicon wafer processing technology |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201868460U (en) * | 2010-08-26 | 2011-06-15 | 北京市塑料研究所 | Quartz boat lifting device of wafer pusher |
| CN202076306U (en) * | 2011-05-16 | 2011-12-14 | 东莞市启天自动化设备有限公司 | Automatic silicon overturn and folding double-sheet inserting machine |
| CN102437241A (en) * | 2011-12-02 | 2012-05-02 | 百力达太阳能股份有限公司 | Preparation method of solar cell with elimination of printing wave line |
| KR20120128414A (en) * | 2011-05-17 | 2012-11-27 | 주식회사 포틱스 | The wafer picker device for using solar cell wafer transfer system |
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2015
- 2015-07-03 CN CN201510382944.4A patent/CN105006444A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201868460U (en) * | 2010-08-26 | 2011-06-15 | 北京市塑料研究所 | Quartz boat lifting device of wafer pusher |
| CN202076306U (en) * | 2011-05-16 | 2011-12-14 | 东莞市启天自动化设备有限公司 | Automatic silicon overturn and folding double-sheet inserting machine |
| KR20120128414A (en) * | 2011-05-17 | 2012-11-27 | 주식회사 포틱스 | The wafer picker device for using solar cell wafer transfer system |
| CN102437241A (en) * | 2011-12-02 | 2012-05-02 | 百力达太阳能股份有限公司 | Preparation method of solar cell with elimination of printing wave line |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108281375A (en) * | 2016-03-16 | 2018-07-13 | 浙江潮晨能源科技有限公司 | The structure improved production system for being used to prepare cell piece |
| CN107527850A (en) * | 2017-09-19 | 2017-12-29 | 中建材浚鑫科技有限公司 | The feeding device of solar battery back corrosion |
| CN107910386A (en) * | 2017-11-13 | 2018-04-13 | 嘉兴尚能光伏材料科技有限公司 | The single-side pile noodle producing method of crystal-silicon solar cell |
| CN107910386B (en) * | 2017-11-13 | 2020-08-11 | 嘉兴尚能光伏材料科技有限公司 | Single-side suede preparation method of crystalline silicon solar cell |
| CN110085517A (en) * | 2019-04-02 | 2019-08-02 | 江苏华恒新能源有限公司 | A kind of rectangle polysilicon solar battery slice processing method of the non-equidimension of length and width |
| CN109873054A (en) * | 2019-04-04 | 2019-06-11 | 乐山新天源太阳能科技有限公司 | Black silicon solar cell production line |
| CN111769064A (en) * | 2020-06-18 | 2020-10-13 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN111769064B (en) * | 2020-06-18 | 2023-07-14 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN115663070A (en) * | 2022-11-21 | 2023-01-31 | 拉普拉斯(无锡)半导体科技有限公司 | Silicon wafer processing technology |
| CN115663070B (en) * | 2022-11-21 | 2023-08-11 | 拉普拉斯(无锡)半导体科技有限公司 | Silicon wafer processing technology |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20151028 |