CN203494366U - Equipment for leaching tail gas produced in polycrystalline silicon production - Google Patents

Equipment for leaching tail gas produced in polycrystalline silicon production Download PDF

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Publication number
CN203494366U
CN203494366U CN201320555213.1U CN201320555213U CN203494366U CN 203494366 U CN203494366 U CN 203494366U CN 201320555213 U CN201320555213 U CN 201320555213U CN 203494366 U CN203494366 U CN 203494366U
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China
Prior art keywords
tail gas
neutralization chamber
drip washing
slag
hydrolytic tank
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Expired - Lifetime
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CN201320555213.1U
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Chinese (zh)
Inventor
陈希勇
叶绍成
张志刚
杨永亮
严大洲
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China ENFI Engineering Corp
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China ENFI Engineering Corp
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Abstract

The utility model provides equipment and a process for leaching tail gas produced in polycrystalline silicon production. The leaching equipment comprises a tail gas leaching tower, a hydrolysis tank, a neutralization tank and a slag scraper, wherein the tail gas leaching tower is used for leaching the tail gas; the hydrolysis tank is connected with the tail gas leaching tower and is used for containing wastewater discharged from the tail gas leaching tower; the neutralization tank is connected with the hydrolysis tank; the slag scraper is movably arranged above the hydrolysis tank and is used for automatically scraping slag floating on the surface of the wastewater in the hydrolysis tank into the neutralization tank. According to the equipment and the process, the slag which is generated when the tail gas produced in a polycrystalline silicon production process is leached and floats on the surface of the wastewater can be effectively and automatically treated, a low-efficiency manual fishing collection mode for a conventional process is replaced, and the labor intensity of a worker is reduced.

Description

Produce the drip washing treatment facility of the tail gas of polysilicon generation
Technical field
The utility model relates to technical field of polysilicon production, relates to particularly a kind of drip washing treatment facility of producing the tail gas of polysilicon generation.
Background technology
The tail gas that utilizes trichlorosilane reduction to generate to produce in polysilicon process conventionally need to be after water wash qualified discharge.But, a large amount of slag (SiO of useless water float after drip washing 2, be commonly called as Bai Tan ?).The very little genus nanoscale of particle diameter of slag, the firm drip washing of water gets off to swim in the water surface.A large amount of slags often stops up water pump and pipeline in course of conveying.For this reason, adopt at present artificial mode of salvaging to collect the slag in waste water.Yet adopt artificial salvaging, artificial conveyance, required workman is more, and labor strength is larger, and work situation is poor, and requisite space is large.
The drip washing treatment facility of the tail gas that thus, production polysilicon produces haves much room for improvement.
Utility model content
The utility model is intended to solve at least to a certain extent one of above-mentioned technical problem of the prior art.For this reason, the purpose of this utility model is to propose a kind of drip washing treatment facility of producing the tail gas of polysilicon generation.Utilization, according to the equipment of the utility model embodiment, can be processed the tail gas that production of polysilicon produces effectively, has improved the efficiency that polysilicon tail gas is processed, and has saved hand labor intensity, has improved work situation.
According to the embodiment of the utility model first aspect, proposed a kind of drip washing treatment facility of producing the tail gas of polysilicon generation, having comprised: for the tail gas eluting column of drip washing tail gas; Hydrolytic tank, described hydrolytic tank is connected with described tail gas eluting column, for receiving the waste water of discharging from described tail gas eluting column; Neutralization chamber, described neutralization chamber is connected with described hydrolytic tank; And Slag Scraping Device, described Slag Scraping Device is arranged on described hydrolytic tank top movably, for the slag of the waste water surface flotation in described hydrolytic tank is scraped in described neutralization chamber.
The drip washing treatment facility of the tail gas producing according to the production polysilicon of the utility model embodiment, the slag that swims in waste water surface that the tail gas automatically producing in process for producing polysilicon process generates through drip washing, not only can effectively collect produced waste residue, improved the efficiency that polysilicon tail gas is processed, and thoroughly changed traditional handicraft and adopted the artificial poor efficiency collection mode of salvaging, improved workman's highly intensive labour.
Preferably, in described neutralization chamber, be provided with agitating device.Can improve thus efficiency and the effect of neutralization reaction.
Preferably, described agitating device stretches into described neutralization chamber downwards from the top of described neutralization chamber.
Preferably, the bottom of described neutralization chamber is provided with slag notch, and described slag notch is connected with pulp pump.
The bottom that is deposited in neutralization chamber through the waste residue of neutralization reaction, is provided with slag notch by the bottom at described neutralization chamber, and utilizes the pulp pump of described slag notch connection can effectively shift the waste residue through neutralization, thereby is conducive to the follow-up further processing to waste residue.
The drip washing treatment facility of the tail gas that preferably, described production polysilicon produces further comprises the filter press being connected with described pulp pump.
Because the waste residue through neutralization reaction contains moisture, utilize the filter press being connected with pulp pump the waste residue through neutralisation treatment can be delivered to filter press through pulp pump and carry out processed, thereby effectively improve the efficiency of processing waste residue.
Preferably, described neutralization chamber and described hydrolytic tank are integrally formed.Thus, after can being fully hydrolyzed in hydrolytic tank, the production polysilicon tail gas of drip washing directly by Slag Scraping Device, the nanoscale waste residue of floating on water is transferred in the neutralization chamber being integrally formed, avoided retaining and losing of middle waste residue, can as much as possible the waste residue producing through hydrolysis in this device systems be carried out to neutralization reaction, and then improve the treatment effeciency of producing polysilicon tail gas.
Preferably, described neutralization chamber top is provided with for lime automatic powder adding being added to the nertralizer adding set in neutralization chamber.
In neutralization chamber, be to utilize neutralization reaction that nertralizer lime and the waste residue generating through hydrolysis carry out, by the nertralizer adding set arranging, can nertralizer lime evenly be added in neutralization chamber effectively in, thereby improve the efficiency that neutralization reaction is carried out.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is according to the schematic diagram of the drip washing treatment facility of the tail gas of the production polysilicon generation of the utility model embodiment.
Fig. 2 is according to the schematic flow sheet of the drip washing treatment process of the tail gas of the production polysilicon generation of the utility model embodiment.
Reference numeral: 100: tail gas eluting column; 200: hydrolytic tank; 300: neutralization chamber; 400: Slag Scraping Device; 500: agitating device; 600: slag notch; 700: nertralizer adding set.
The specific embodiment
Describe embodiment of the present utility model below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In the utility model, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or be integral; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, can understand as the case may be the concrete meaning of above-mentioned term in the utility model.
In the utility model, unless otherwise clearly defined and limited, First Characteristic Second Characteristic it " on " or D score can comprise that the first and second features directly contact, also can comprise that the first and second features are not directly contacts but contact by the other feature between them.And, First Characteristic Second Characteristic " on ", " top " and " above " comprise First Characteristic directly over Second Characteristic and oblique upper, or only represent that First Characteristic level height is higher than Second Characteristic.First Characteristic Second Characteristic " under ", " below " and " below " comprise First Characteristic under Second Characteristic and tiltedly, or only represent that First Characteristic level height is less than Second Characteristic.
First the drip washing treatment facility of the tail gas producing according to the production polysilicon of the utility model embodiment is described with reference to figure 1 below.The drip washing treatment facility of the tail gas producing according to the production polysilicon of the utility model embodiment comprises: tail gas eluting column 100, hydrolytic tank 200, neutralization chamber 300 and Slag Scraping Device 400.
Tail gas eluting column 100 produces for drip washing the tail gas that polysilicon produces, and for example the tail gas import of tail gas eluting column 100 can be connected with the tail gas outlet of reacting furnace (not shown).
Hydrolytic tank 200 is connected with tail gas eluting column 100, for receiving the waste water of discharging from tail gas eluting column 100.Here, be connected and should make broad understanding, as long as the waste water that tail gas eluting column 100 is discharged can be transported to hydrolytic tank 200, for example the wastewater discharge pipe of tail gas eluting column 100 can directly be inserted in hydrolytic tank 200, or the waste water that tail gas eluting column 100 is discharged flows in hydrolytic tank 200 by raceway groove.
Neutralization chamber 300 is connected with hydrolytic tank 200.Slag Scraping Device 400 is arranged on hydrolytic tank 200 tops movably, so that the slag of the waste water surface flotation in hydrolytic tank 200 is scraped in neutralization chamber 300.For example, at the top of hydrolytic tank 200, guide rail is set, Slag Scraping Device 400 is removable along guide rail, and the scum board of Slag Scraping Device 400 extend in hydrolytic tank 200, so that the slag of waste water surface flotation is scraped in neutralization chamber 300.Preferably, a plurality of Slag Scraping Devices 400 can be set, a plurality of Slag Scraping Devices 400 can move abreast.
The drip washing treatment facility of the tail gas producing according to the production polysilicon of the utility model embodiment, effectively automatically, the slag that swims in waste water surface that the tail gas producing in process for producing polysilicon process generates through drip washing, not only can effectively collect produced waste residue, improved the efficiency that polysilicon tail gas is processed, and thoroughly changed traditional handicraft and adopted the artificial poor efficiency collection mode of salvaging, improved workman's highly intensive labour.
According to embodiment of the present utility model, the position of neutralization chamber 300 is also not particularly limited, as long as the slag that can receive Slag Scraping Device 400 to collect from hydrolytic tank 200.According to concrete example of the present utility model, neutralization chamber 300 is arranged on the downstream of hydrolytic tank 200, and neutralization chamber 300 and hydrolytic tank 200 be integrally formed, for example, by partition wall, a pond is separated out to neutralization chamber 300 and hydrolytic tank 200.
Thus, after can being fully hydrolyzed in hydrolytic tank, the production polysilicon tail gas of drip washing directly by Slag Scraping Device, the nanoscale waste residue of floating on water is scraped in neutralization chamber, avoid retaining and losing of middle waste residue, improved the treatment effeciency of producing polysilicon tail gas.
In concrete examples more of the present utility model, in neutralization chamber 300, be provided with agitating device 500, agitating device 500 stretches into neutralization chamber 300 downwards from the top of neutralization chamber 300.By agitating device, can improve efficiency and the effect of neutralization chamber 300 inner neutralization reactions.
In another concrete example of the present utility model, the bottom of neutralization chamber 300 is provided with slag notch 600, and slag notch 600 is connected with pulp pump.Through the waste residue of neutralization reaction, be deposited in the bottom of neutralization chamber 300, by pulp pump, from slag notch 600, discharge waste residue, so that waste residue is carried out to subsequent treatment.
According in embodiment more of the present utility model, preferably, neutralization chamber 300 tops are provided with for lime automatic powder adding being added to the nertralizer adding set 700 in neutralization chamber 300, and nertralizer adding set 700 can automatically join lime in neutralization chamber 300.According to embodiment of the present utility model, can further be provided for controlling the control module that nertralizer adding set 700 adds the flow of nertralizer, with control in the unit interval, add in and dosage, thereby control the degree that neutralization reaction is carried out, thereby not only improve the efficiency of neutralization reaction and guarantee that the safety of neutralization reaction carries out, avoid producing local vigorous reaction and the danger that causes.
According to embodiment of the present utility model, the waste residue of discharging in neutralization chamber 300 can be delivered to the processing that Fei Gu treatment plant meets environmental emission standard.Preferably, first the waste residue of discharging from the slag notch 600 of neutralization chamber 300 by pulp pump is carried out to processed, so that the moisture of going out in waste residue.For example, can utilize the filter press being connected with described pulp pump to carry out processed.
In order to make those skilled in the art have clearer understanding to said system and to understand the drip washing treatment facility of the tail gas that production polysilicon provided by the utility model produces, below with reference to Fig. 2 and describe the drip washing treatment process of the tail gas producing according to the production polysilicon of the utility model embodiment in conjunction with Fig. 1.But it should be noted that those skilled in the art can also utilize the said equipment of the present utility model to propose the drip washing processing method that other produce the tail gas of polysilicon generation; or following drip washing processing method of producing the tail gas of polysilicon generation of the present utility model is modified and improved; within not departing from the scope of the utility model said system main thought, these all should be included in protection domain of the present utility model.
The drip washing treatment process of the tail gas producing according to the production polysilicon of the utility model embodiment comprises the following steps: to producing the tail gas of polysilicon generation, carry out drip washing; The waste water that drip washing is obtained is transported to hydrolytic tank; Utilize Slag Scraping Device that the slag of the waste water surface flotation in hydrolytic tank is automatically scraped in neutralization chamber; With in neutralization chamber, throw in lime with in and slag in neutralization chamber.
The drip washing treatment process of the tail gas producing according to the production polysilicon of the utility model embodiment, the slag that swims in waste water surface that the tail gas effectively automatically producing in process for producing polysilicon process generates through drip washing, not only can effectively collect produced waste residue thus, improved the efficiency that polysilicon tail gas is processed, and thoroughly changed traditional handicraft and adopted the artificial poor efficiency collection mode of salvaging, improved workman's highly intensive labour.
More specifically, first the tail gas of producing polysilicon be leached in tail gas eluting column, and the waste water that drip washing produces is discharged in hydrolytic tank by tail gas eluting column, and waste water surface flotation has a large amount of slags; Waste water hydrolysis through the sufficient time in hydrolytic tank 200 also can produce a large amount of slags and swim in hydrolytic tank surface.
Driving Slag Scraping Device moves, thereby the slag that swims in waste water surface is scraped and is positioned at the dirty neutralization chamber of hydrolytic tank.Utilize Slag Scraping Device efficiently automatically to collect to swim in the very little nano level slag of genus of particle diameter on hydrolytic tank surface; and avoided conveyance conduit is set and the water pump that easily causes and the blockage problem of pipeline; also saved the labour that Traditional Man is salvaged collection mode; and then improved the efficiency of process for producing polysilicon tail gas; save manpower, and reached the object of protection of the environment.
According to embodiment of the present utility model, the drip washing treatment process of the tail gas that described production polysilicon produces further comprises the slag after neutralization is transported to the solid processing of give up after filter press dehydration; With the waste water in hydrolytic tank delivered to waste water treatment plant process.Thus, processing and utilizing filter press carries out the waste residue of processed effectively, and because this waste residue has passed through neutralisation treatment, can meet the requirement of environmental protection to its solid processing of giving up; In addition the waste water in hydrolytic tank is delivered to waste water treatment plant and processed the object that can reach Efficient Cycle utilization, saved the energy.
In embodiment more of the present utility model, in and in the process of slag, stir simultaneously, to improve efficiency and the effect of neutralization.
In the description of this description, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present utility model or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, to the schematic statement of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.In addition, those skilled in the art can engage the different embodiment that describe in this description or example and combine.
Although illustrated and described embodiment of the present utility model above, be understandable that, above-described embodiment is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art can change above-described embodiment in scope of the present utility model, modification, replacement and modification.

Claims (7)

1. a drip washing treatment facility of producing the tail gas of polysilicon generation, is characterized in that, comprising:
Tail gas eluting column for drip washing tail gas;
Hydrolytic tank, described hydrolytic tank is connected with described tail gas eluting column, for receiving the waste water of discharging from described tail gas eluting column;
Neutralization chamber, described neutralization chamber is connected with described hydrolytic tank; With
Slag Scraping Device, described Slag Scraping Device is arranged on described hydrolytic tank top movably, for the slag of the waste water surface flotation in described hydrolytic tank is automatically scraped in described neutralization chamber.
2. the drip washing treatment facility of the tail gas that production polysilicon according to claim 1 produces, is characterized in that, in described neutralization chamber, is provided with agitating device.
3. the drip washing treatment facility of the tail gas that production polysilicon according to claim 2 produces, is characterized in that, described agitating device stretches into described neutralization chamber downwards from the top of described neutralization chamber.
4. the drip washing treatment facility of the tail gas producing according to the production polysilicon described in any one in claim 3, is characterized in that, the bottom of described neutralization chamber is provided with slag notch, and described slag notch is connected with pulp pump.
5. the drip washing treatment facility of the tail gas that production polysilicon according to claim 4 produces, is characterized in that, also comprises the filter press being connected with described pulp pump.
6. the drip washing treatment facility of the tail gas producing according to the production polysilicon described in any one in claim 1-5, is characterized in that, described neutralization chamber and described hydrolytic tank are integrally formed.
7. the drip washing treatment facility of the tail gas producing according to the production polysilicon described in claim 6, is characterized in that, described neutralization chamber top is provided with for lime automatic powder adding being added to the nertralizer adding set in neutralization chamber.
CN201320555213.1U 2013-09-06 2013-09-06 Equipment for leaching tail gas produced in polycrystalline silicon production Expired - Lifetime CN203494366U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103432871A (en) * 2013-09-06 2013-12-11 中国恩菲工程技术有限公司 Elution treatment equipment and process for tail gas generated during production of polycrystalline silicon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103432871A (en) * 2013-09-06 2013-12-11 中国恩菲工程技术有限公司 Elution treatment equipment and process for tail gas generated during production of polycrystalline silicon

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