CN102989300B - Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon - Google Patents

Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon Download PDF

Info

Publication number
CN102989300B
CN102989300B CN201210566331.2A CN201210566331A CN102989300B CN 102989300 B CN102989300 B CN 102989300B CN 201210566331 A CN201210566331 A CN 201210566331A CN 102989300 B CN102989300 B CN 102989300B
Authority
CN
China
Prior art keywords
scraping plate
collecting pit
water collecting
pulp water
waste gas
Prior art date
Application number
CN201210566331.2A
Other languages
Chinese (zh)
Other versions
CN102989300A (en
Inventor
宋东明
宋良杰
方琼
蒋万顺
李才勇
周祖萍
沈宗喜
丁丙恒
章华
邓亮
Original Assignee
昆明冶研新材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昆明冶研新材料股份有限公司 filed Critical 昆明冶研新材料股份有限公司
Priority to CN201210566331.2A priority Critical patent/CN102989300B/en
Publication of CN102989300A publication Critical patent/CN102989300A/en
Application granted granted Critical
Publication of CN102989300B publication Critical patent/CN102989300B/en

Links

Abstract

A kind of waste gas drip washing treatment process of the present invention and device, particularly adopt improved Siemens to produce waste gas drip washing treatment process and the device of polysilicon, in order to process multiple chlorosilane or hydrogen chloride pernicious gas.Belong to the offal treatment field producing polysilicon and produce.This invention be on the basis of experiment to production of polysilicon produce the drip washing process that discarded object carries out, the waste residue form produced by Non-leaching, utilize special treating apparatus, have devised that disposal ability is large, residue separating power strong and adopt machinery to drag for the emission-control equipment of slag.Technique adopts 10-15%NaOH alkali lye drip washing process, carries out drip washing by alkali lye to discarded object, the harmful components chlorosilane/hydrogen chloride in removing discarded object; The waste residue produced comes and goes scrapper conveyor by the full-automatic running vehicle type of one up and down and scrapes into stirring pool, send into novel box type filter press subsequently and carry out Separation of Solid and Liquid, being separated the dry slag obtained send slag field to store up, filtrate gets back to the recycling of eluting column circulatory pool, and the tail gas after purification discharges after reaching discharging standards.<!--1-->

Description

Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon
Technical field
The present invention relates to waste gas drip washing treatment process and equipment that a kind of improved Siemens produces polysilicon, particularly a kind of in order to process multiple chlorosilane or hydrogen chloride pernicious gas waste gas drip washing treatment process.Belong to and produce polysilicon generation offal treatment field.
Background technology
The waste gas elution device that existing known improved Siemens produces polysilicon is by eluting column, spray pump, collects waste liquid pool (in pond, a large amount of slag is many by manually salvaging) separately and form, its spray liquid is based on water or calcium hydroxide, and waste liquid is conveyed into Sewage Disposal and disposes.But collection waste liquid pool produces a large amount of slags is separately by manually salvaging slag, and workload is comparatively large, and will be equipped with special salvaging slag means of transport.
Waste residue moisture content is high and be corrosive, the easy corrosion and damage of transportation facility, transport and manually to drag for slag process comparatively serious to ambient contamination.In lessivation, spray liquid can not recycle, and causes medicament and shower water consumption to strengthen, increases waste liquid generation and production cost.
In addition, such waste gas elution device is without pulp water separation machinery facility, and waste liquid can not recycle.
Summary of the invention
It is not enough that the object of the invention is to overcome above-mentioned prior art, proposes a kind ofly to produce the waste gas produced waste gas drip washing treatment process that carries out of polysilicon and special purpose device to existing improved Siemens.This waste gas drip washing treatment process and special purpose device conveniently can not only realize the mechanically actuated that pulp water is separated, and allow waste liquid repetitive cycling utilize, and solve and manually drag for slag problem, improve waste liquid recycling rate of waterused, improve the disposal ability of emission-control equipment simultaneously.
The technical solution adopted for the present invention to solve the technical problems is: a kind of improved Siemens produces waste gas drip washing treatment process and the device of polysilicon, it is characterized in that adopting NaOH alkali lye to be that leacheate carries out drip washing process to waste gas in eluting column tower body (18), remove the chlorosilane from adopting improved Siemens production polysilicon process in combustion gas or hydrogen chloride harmful components, waste gas after purified treatment is through safe liquid seal tank (22), and waste gas discharges after reaching discharging standards, the leacheate that waste water after purified treatment falls into each eluting column (1) collects ditch (2), leacheate collect ditch (2) waste water collected again aggregation finally flow into pulp water collecting pit (14) in gravity flow mode to shunting in ditch (15), each pulp water collecting pit (14) is equipped with a full-automatic running vehicle type of one up and down and comes and goes scrapper conveyor (4), in pulp water collecting pit (14) by full-automatic up and down integrally running vehicle type come and go scrapper conveyor (4) and waste residue scraped into or collects stirring pool (8), waste residue subsequently in stirring pool (8) is transported to chamber filter press again and carries out Separation of Solid and Liquid, being separated the fixing dry slag obtained send slag field to store up, filtrate is back to circulating water pool (11), reuse for eluting column (1).
Described leacheate pH value is less than or equal to 8, and the NaOH concentration used is 10%-15%.
Described drip washing process is that waste gas enters eluting column (1) from the flue gas leading import (17) of eluting column tower body (18) bottom, through alkali lye spray piping (19), and spiral nozzle (20), the purified treatment of mist eliminator (21) three layers of NaOH leacheate.
Pulp water collecting pit (14) side is backflow ditch (6), and opposite side is shunting ditch (15); Pulp water collecting pit (14) arranges three road screen pack grids, first screen pack grid collects ditch (2) from leacheate to flow automatically to shunting ditch (15), pond is entered by the grid of pulp water collecting pit (14), second screen pack is mounted in the grid of pulp water collecting pit (14) the distance water surface 0.5 meter of, bottom and backflow ditch (6) joint, and third layer screen pack is arranged on 4 backflow ditch grids (9) of backflow ditch inwall.
Pulp water collecting pit (14) medium position and backflow ditch (6) joint, evenly have three outlets, each outlet has a screen pack (5), and water is through being embedded in the backflow of the screen pack grid in pulp water collecting pit (14) medium position wall ditch from flowing into circulating water pool (11).
Wide 1.2 meters × high 0.8 meter of each screen pack (5), screen pack adopts PVC board material to make, and the grid specification of screen pack is 1400 × 1300 perforated sub plate.
Chamber filter press by rack section, filtration fraction, hydraulic system and electrical system four major part form; Rack section is the main body of machine, for supporting filtration, connects other parts, and rack section is built with the sheet frame group be made up of thrust plate, pressure strip, oil cylinder and main fine strain of millet parts; Filtration fraction includes filter plate and filter cloth, first applied to compress sheet frame group by hydraulic system, slip is pressed into sheet frame group by centre, be distributed between each filter plate in sheet frame group, by the pressure that feed pump produces, slip is installed in the filter-cloth filtering in filter plate, due to filter cloth effect, solid is stayed in filter chamber and is formed filter cake, and filtrate is discharged by water nozzle or free flow, realizes the de-liquid method that solid, liquid is separated.
The full-automatic running vehicle type of one up and down comes and goes scrapper conveyor (4) and is made up of controller, motor, two-orbit guide rail (44), two-orbit guide rail planet-cycloid reducer, driving (43), upper scraping plate (49) and lower scraping plate (40), two-orbit guide rail (44) is arranged in the both sides pool wall of pulp water collecting pit (14) respectively, driving (43) is placed on two-orbit guide rail (44), upper scraping plate (49) and lower scraping plate (40) are be connected by hinge with driving a vehicle between (43), the lifting of upper scraping plate (49) and lower scraping plate (40) controls by lifting rope (47), controller by sending advance, retrogressing, lifting, decline four line position travel switch Received signal strength, automatically control driving and come and go and run and be elevated while upper scraping plate (49) and lower scraping plate (40), wherein, when two-orbit guide rail planet-cycloid reducer drives driving to travel forward, controller rises by upper scraping plate (49) and lower scraping plate (40) simultaneously, lower scraping plate (40) leaves pulp water collecting pit (14) bottom and is immersed in underwater, upper scraping plate (49) only has 2/3rds to rise to surface, 1/3rd is immersed in pulp water collecting pit (14) interior underwater, and upper scraping plate (49) will swim in scum silica frost on the water surface and blow into stirring pool (8), when drive a vehicle (43) run to pulp water collecting pit (14) top, all declined by upper scraping plate (49) and lower scraping plate (40) by a two-orbit guide rail planet-cycloid reducer simultaneously, upper scraping plate (49) declines and is all immersed in pulp water collecting pit (14) interior underwater, lower scraping plate (40) also drops to and pulp water collecting pit (14) end contact position, then, driving is driven to do return movement (moving backward) by two-orbit guide rail planet-cycloid reducer, the end slag of pulp water collecting pit (14) is scraped in top, pond recess feeder (16) by lower scraping plate (40), stirring pool (8) is squeezed into again with pump, pulp water collection top is arrived when driving (43) runs, upper scraping plate (49) and lower scraping plate (40) rise simultaneously again, driving (43) is reciprocal back and forth, upper scraping plate (49) and lower scraping plate (40) continue to repeat above-mentioned action.
Be provided with the full-automatic running vehicle type of one up and down in described pulp water collecting pit (14) and come and go scrapper conveyor (4), its automatically up and down one running vehicle type come and go scrapper conveyor (4) and be made up of controller, running driver (41), lifting driving device (42), two-orbit guide rail (44), driving (43), scraper stent (48), upper scraping plate (49) and lower scraping plate (40), travel driving unit (41) provides the power of driving (43) commute movement, the power that lifting driving device (42) proposition upper scraping plate (49) and lower scraping plate (40) rise simultaneously and decline, two-orbit guide rail (44) is arranged on the pool wall top, both sides of pulp water collecting pit (14) respectively, driving (43) integral installation is placed on two-orbit guide rail (44), running driver (41) and lifting driving device (42) are placed in driving (43), following vehicle (43) associated movement, upper scraping plate (49) and lower scraping plate (40) are be connected by hinge with driving a vehicle between (43), rising and the decline of upper scraping plate (49) and lower scraping plate (40) are completed by a lifting rope (47), lifting driving device (42) is connected with lifting rope (47), controller sends the signal that moves forward and backward, driving (43) is done move around or reciprocate along two-orbit guide rail (44) automatically, controller sends the signal rising and decline, upper scraping plate (49) and lower scraping plate (40) promote or down maneuver simultaneously.
The full-automatic running vehicle type of one up and down comes and goes scraper stent (48) in scrapper conveyor (4) and passes through each cleaning shoe (46) chain connection in left and right with between lower scraping plate (40).
This invention waste gas elution device adopts NaOH alkali lye drip washing treatment process, by NaOH alkali lye, drip washing is carried out to waste gas, harmful components chlorosilane/hydrogen chloride in removing waste gas, then make discharging waste gas reach discharging standards through safe liquid seal tank, its chemical equation is as follows:
SiCl 4+H 2O→H 2SiO 3↓+HCl+H 2
SiHCl 3+H 2O→H 2SiO 3↓+HCl+H 2
H 2SiO 3+NaOH→Na 2SiO 3↓+H 2O
H 2SiO 3+NaOH→Na 2SiO 4↓+H 2O
SiCl 4+H 2+O 2→SiO 2↓+HCl
HCl+NaOH→NaCl↓+H 2O
As can be seen from above-mentioned reaction equation: the sediment that collection waste liquid pool waste liquid controls to generate under faintly acid or neutrallty condition is separately metasilicic acid H 2siO 3with silica SiO 2, this type of sediment produces foam-like scum silica frost that a large amount of fine particle formed and wafts and float on the surface, and scum silica frost slag body easily processes; The sediment generated under strongly alkaline conditions is sodium metasilicate Na 2siO 3compound and sodium chloride nacl, jelly or crystalline solid, be greater than the proportion of water than weight average and be deposited at the bottom of pond, not easily machinery drags for slag to this type of sediment.
Waste gas drip washing experimental data
Waste gas drip washing technology controlling and process pH value is less than or equal to 8, and pH value is scum silica frost metasilicic acid and silica at the slag that 6 ~ 8 produce; PH value is less than 6 and waste liquid is squeezed into sewage operation, produces a large amount of scum silica frost metasilicic acid H during this 2siO 3with silica SiO 2; PH value is greater than 8 circulations and enters eluting column drip washing waste gas, guarantees that discharging waste gas is up to standard, produces a small amount of sediment sodium metasilicate Na during this 2siO 3compound and sodium chloride nacl.The slag produced in so independent collection waste liquid pool is the scum silica frost on the water surface in a large number, the sediment bottom pond on a small quantity, these waste residues come and go scrapper conveyor by running vehicle type and scrape into stirring pool with the speed of 3.0 ~ 3.4 meters per minute by the slag of the water surface, basin bottom sediment is scraped into top, pond concavity feeder when scrapper conveyor returns, then stirring pool is squeezed into pump, water then refluxes ditch from flowing into circulating water pool by centre through being embedded in screen pack PVC board 1400 × 1300 perforated sub plate grid in pool wall, then squeezes into eluting column and recycle.
The slag of stirring pool and water are squeezed into chamber filter press by pump and are filtered, and this dry slag enters slag bucket and is transported to stockyard by car, and press filtration water returns circulating water pool.
The waste gas drip washing process unit mechanization degree of improved Siemens production polysilicon of the present invention is high and automatization level is high, and whole device disposal ability is strong, treatment effect good, environmental friendliness, labor strength reduce greatly.Technological operation control, pulp water machinery separation facilities and waste liquid circulation utilize.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is the horizontal layout state diagram of waste gas drip washing treatment process of the present invention and equipment, and wherein black arrow represents water (flow) direction.
Fig. 2 is pulp water collecting pit (14) of the present invention, stirring pool (8), circulating water pool (11), backflow ditch (6) and enter shunting ditch (15) the association structure schematic diagram of pulp water collecting pit and supporting pumping unit plane, wherein black arrow represents water (flow) direction.
Fig. 3 is eluting column tower body (18) of the present invention and drip washing frame structure schematic diagram.
Fig. 4 is the collecting pit of pulp water shown in Fig. 2 (14), stirring pool (8), circulating water pool (11), pulp water collecting pit top concavity feeder (16) and enter shunting ditch (15) the A-A profile of pulp water collecting pit.
Fig. 5 is backwater ditch (6) section of structure of the present invention, and wherein black arrow represents water (flow) direction.
Fig. 6 is pulp water collecting pit (14) of the present invention, backflow ditch (6) and full-automatic up and down integrally running vehicle type come and go scrapper conveyor (4) syndeton generalized section.
Fig. 7 is that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor and completes five kinds of different operating view in a set of salvaging waste residue process.
Fig. 8 is that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor and is arranged in pulp water collecting pit, syndeton schematic diagram between driving, scraper plate, scraper stent.
Fig. 9 is that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor and is arranged on top view in pulp water collecting pit.
Figure 10 is that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor and is arranged on structure side pseudosection in pulp water collecting pit.
Figure 11 is the structural representation that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor middle scraper support.
Figure 12 is the annexation structural representation that the present invention's full-automatic one up and down running vehicle type comes and goes in scrapper conveyor between lower scraping plate and cleaning shoe.
Above-mentioned each number in the figure implication: 1, eluting column, 2, leacheate collects ditch, 3, the grid that ditch enters pond is shunted, 4, the full-automatic running vehicle type of one up and down comes and goes scrapper conveyor, and 5, screen pack, 6, backflow ditch, 7, mixer, 8, stirring pool., 9, backflow ditch grid, 10, supporting pumping unit installation region; 11, circulating water pool, 12., diving slurry pump, 13, detergent circulator or alkali lye centrifugal pump, 14, pulp water collecting pit, 15., shunting ditch; 16, concavity feeder, 17, flue gas leading import, 18, eluting column tower body, 19, alkali lye spray piping, 20, spiral nozzle, 21, mist eliminator, 22, safe liquid seal tank, 23, toxic emission chimney, 40, lower scraping plate, 41, running driver, 42, lifting driving device, 43, driving, 44, two-orbit guide rail, 46, cleaning shoe, 47, lifting rope, 48, scraper stent, 49, upper scraping plate.
Detailed description of the invention
The discarded object that improved Siemens of the present invention produces polysilicon enters off-gas buffer tank storage after collecting, enter the drip washing of eluting column 1 10-15% alkali lye subsequently, harmful components chlorosilane/hydrogen chloride in removing waste gas, the waste gas of discharge is made to reach discharging standards through safe liquid seal tank 22 again, leacheate flows into pulp water collecting pit 14 in gravity flow mode, and the machinery carrying out pulp water is separated.
As described above in relation to figure 3, waste gas enters in eluting column 1 from the flue gas leading 17 that enters bottom eluting column tower body 18, waste gas is in bottom-up flow process, alkaline leacheate drip washing is sprayed by from spiral nozzle 20, discharge from toxic emission chimney 23 after waste gas purification, the waste water that shower is crossed injects bottom leacheate and collects ditch 2, flows in pulp water collecting pit 14 after being finally pooled to the shunting ditch 15 of pulp water collecting pit 14.
In pulp water collecting pit 14, slag comes and goes scrapper conveyor 4 by the full-automatic running vehicle type of one up and down and scrapes into stirring pool with the speed of 3.0 ~ 3.4 meters per minute by water surface slag, the full-automatic running vehicle type of one up and down comes and goes concavity feeder 16 pump scraped by basin bottom slag into top, pond when scrapper conveyor 4 returns and squeezes into stirring pool 8, water then refluxes ditch from flowing into circulating water pool 11 by centre through being embedded in screen pack 5PVC plate 1400 × 1300 perforated sub plate grid in pool wall, then squeezes into eluting column 1 and reuse.The full-automatic running vehicle type of one up and down comes and goes scrapper conveyor 4 primarily of control cabinet, two-orbit guide rail 44, driving 43, scraper plate composition.Be be connected by hinge between scraper plate with driving 43, scraping plate lifting controls by lifting rope 47.Control cabinet automatically controls to drive a vehicle by 4 stroke-limits (advance, retrogressing, lifting, decline) switch Received signal strength and comes and goes the lifting of operation and scraper plate.During operation, two-orbit guide rail planet-cycloid reducer drives driving 43 to advance, promote upper scraping plate 49 to surface and 2/3rds water surface scum silica frost is scraped into stirring pool 8 simultaneously, when running to top, pond, by another one two-orbit guide rail planet-cycloid reducer lower cleaning shoe is lowered to and contacts with at the bottom of pond, then, driving is driven to retreat (returning) by two-orbit guide rail planet-cycloid reducer, scraped by bed mud and squeeze into stirring pool into top, pond concavity feeder 16 with pump, upper scraping plate 49 is then risen on arrival top, pond, driving 43 is advanced and repeated above-mentioned action.
In Fig. 7: 1.-be 2. that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor moment lifting upper scraping plate and lower scraping plate simultaneously, guarantee the state diagram of upper scraping plate in suitable liquid level position.
2.-and be 3. that the upper scraping plate that the present invention's full-automatic one up and down running vehicle type comes and goes in scrapper conveyor advances from pulp water collecting pit one end to the other end, carry out the process schematic scraping upper strata scum silica frost.
3.-and be 4. that the present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor moment and puts down upper scraping plate and lower scraping plate simultaneously, guarantee that lower scraping plate arrives the state diagram of appropriate location.
4.-and be 5. that the lower scraping plate that the present invention's full-automatic one up and down running vehicle type comes and goes in scrapper conveyor retreats from pulp water collecting pit bottom end to the other end, carry out the process schematic scraping bottom waste residue.
The waste residue that waste gas drip washing produces swims in pulp water collecting pit 14 in a large number, and the waste residue that small part proportion is larger is then deposited at the bottom of pond.Each installation track on pool wall limit, pulp water collecting pit 14 both sides, the driving of full-automatic integral type up and down comes and goes scrapper conveyor 4 entirety and is placed on two-orbit guide rail 44 position, does commute and moves.The full-automatic running vehicle type of one up and down comes and goes scrapper conveyor 4 upper and lower two pieces of scraper plates, removes respectively by moving back and forth to upper strata scum silica frost and bottom sediment.
The present invention's full-automatic one up and down running vehicle type comes and goes scrapper conveyor 4 and scrapes slag in two-orbit guide rail 44 precalculated position realization ' coming ' and ' returning ', travel driving unit 41 and lifting driving device 42 are powered to control cabinet by flexible cable power supply mode, are come and gone the lifting moving of operation and scraper plate by four stroke-limits (advance, retreat, promote, decline) switch Received signal strength Automatic Control walking scrapper conveyor.Upper scraping plate 49 and lower scraping plate 40 obtain power by lifting driving device 42 and realize automatically rising and declining, and realize the level height conversion of upper and lower scraper plate, to reduce the resistance of one piece of scraper plate operationally another block scraper plate.Install reductor additional by motor in travel driving unit 41 to obtain power and realize overall the moving around in orbit of scrapper conveyor.Scum silica frost floating for pulp water collecting pit 14 is scraped into tank diameter and concavity feeder 16, then by Pulp pump transport process, thus realize automatic scraping slag.
The driving of full-automatic one up and down comes and goes scrapper conveyor 4 and has separately independently upper scraping plate 49 and lower scraping plate 40, when forward runs, the upper scraping plate 49 of 2/3rds to expose in pulp water collecting pit 14 on the water surface, the whole of lower scraping plate 40 are immersed in underwater in pulp water collecting pit 14, driving 43 drives upper scraping plate 49 and lower scraping plate 40 to move with the speed of 3.0 ~ 3.4 meters per minute simultaneously, and the slag foam swimming in water surface top is scraped in stirring pool 8 by upper scraping plate 49; During return operation, lower scraping plate 40 will drop to bottom pulp water collecting pit 14, the whole of upper scraping plate 49 are immersed in underwater in pulp water collecting pit 14, driving 43 drives upper scraping plate 49 and lower scraping plate 40 to do return movement with the speed of 3.0 ~ 3.4 meters per minute simultaneously and returns, waste residue bottom pulp water collecting pit 14 is scraped in the concavity feeder 16 of termination bottom pulp water collecting pit by lower scraping plate 40, then with pump, the waste residue in concavity feeder 16 is squeezed into stirring pool 8; There is no the water of slag in the middle part of pulp water collecting pit 14, after the ditch 6 that refluxes in the middle part of pulp water collecting pit, certainly flow into repetitive cycling in circulating water pool 11 and utilize.
The pulp water of stirring pool 8 is squeezed into chamber filter press by pump and is filtered, and chamber filter press forms by rack section, filtration fraction (filter plate, filter cloth), hydraulic system and electrical system etc. four are most of.Rack section is the main body of machine, for supporting filtration, connects other parts.It is primarily of parts compositions such as thrust plate, pressure strip, oil cylinder and main fine strains of millet.The principle that filter press work runs is fairly simple, first applied to compress sheet frame group by hydraulic pressure, slip is entered by centre, be distributed between each filter cloth, the pressure produced by means of feed pump filters, and due to the effect of filter cloth, solid is stayed in filter chamber and forms filter cake, filtrate is discharged by water nozzle (free flow), realizes the de-liquid method that solid, liquid is separated.This dry slag enters slag bucket and is transported to stockyard by car, and press filtration water returns circulating water pool 11.
The waste gas elution device list of main equipment that improved Siemens produces polysilicon sees the following form.
Improved Siemens produces the waste gas elution device list of main equipment of polysilicon
The invention has the beneficial effects as follows and by pulp water separation facilities, waste liquid to be recycled.The waste gas drip washing process unit mechanization degree that improved Siemens produces polysilicon is high, and automatization level is high.Whole device disposal ability is strong, treatment effect good, environmental friendliness, labor strength reduce greatly.

Claims (7)

1. the waste gas drip washing treatment process of an improved Siemens production polysilicon, it is characterized in that adopting NaOH alkali lye to be that leacheate carries out drip washing process to waste gas in eluting column tower body (18), remove the chlorosilane from adopting improved Siemens production polysilicon process in combustion gas or hydrogen chloride harmful components, waste gas after purified treatment is through safe liquid seal tank (22), and waste gas discharges after reaching discharging standards, the leacheate that waste water after purified treatment falls into each eluting column (1) collects ditch (2), leacheate collect ditch (2) waste water collected again aggregation finally flow into pulp water collecting pit (14) in gravity flow mode to shunting in ditch (15), each pulp water collecting pit (14) is equipped with a full-automatic running vehicle type of one up and down and comes and goes scrapper conveyor (4), in pulp water collecting pit (14) by full-automatic up and down integrally running vehicle type come and go scrapper conveyor (4) and waste residue scraped into or collects stirring pool (8), waste residue subsequently in stirring pool (8) is transported to chamber filter press again and carries out Separation of Solid and Liquid, being separated the dry slag of solid obtained send slag field to store up, filtrate is back to circulating water pool (11), reuse for eluting column (1),
Described drip washing process is that waste gas enters eluting column (1) from the flue gas leading import (17) of eluting column tower body (18) bottom, through alkali lye spray piping (19), and spiral nozzle (20), mist eliminator (21), the purified treatment of three layers of NaOH leacheate;
The described full-automatic running vehicle type of one up and down comes and goes scrapper conveyor (4) and is made up of controller, running driver (41), lifting driving device (42), two-orbit guide rail (44), driving (43), scraper stent (48), upper scraping plate (49) and lower scraping plate (40), travel driving unit (41) provides the power of driving (43) commute movement, the power that lifting driving device (42) provides upper scraping plate (49) and lower scraping plate (40) to rise simultaneously and decline, two-orbit guide rail (44) is arranged on the pool wall top, both sides of pulp water collecting pit (14) respectively, driving (43) integral installation is placed on two-orbit guide rail (44), running driver (41) and lifting driving device (42) are placed in driving (43), following vehicle (43) associated movement, upper scraping plate (49) and lower scraping plate (40) are be connected by hinge with driving a vehicle between (43), rising and the decline of upper scraping plate (49) and lower scraping plate (40) are completed by a lifting rope (47), lifting driving device (42) is connected with lifting rope (47), controller sends the signal that moves forward and backward, driving (43) is done move around or reciprocate along two-orbit guide rail (44) automatically, controller sends the signal rising and decline, upper scraping plate (49) and lower scraping plate (40) promote or down maneuver simultaneously.
2. improved Siemens produces the waste gas drip washing treatment process of polysilicon according to claim 1, it is characterized in that: the NaOH concentration used is 10%-15%.
3. improved Siemens according to claim 1 produces the waste gas drip washing treatment process of polysilicon, it is characterized in that: pulp water collecting pit (14) side is backflow ditch (6), and opposite side is shunting ditch (15); Pulp water collecting pit (14) arranges three road screen pack grids, first screen pack grid collects ditch (2) from leacheate to flow automatically to shunting ditch (15), pond is entered by the grid of pulp water collecting pit (14), second screen pack is mounted in the grid of pulp water collecting pit (14) the distance water surface 0.5 meter of, bottom and backflow ditch (6) joint, and the 3rd road screen pack is mounted in 4 backflow ditch grids (9) of backflow ditch inwall;
Pulp water collecting pit (14) medium position and backflow ditch (6) joint, evenly have three outlets, each outlet has a screen pack (5), and water is through being embedded in the backflow of the screen pack grid in pulp water collecting pit (14) medium position wall ditch from flowing into circulating water pool (11).
4. improved Siemens according to claim 3 produces the waste gas drip washing treatment process of polysilicon, it is characterized in that: wide 1.2 meters × high 0.8 meter of the screen pack (5) of each outlet of pulp water collecting pit (14) medium position and backflow ditch (6) joint, screen pack adopts PVC board material to make, and the grid specification of screen pack is 1400 × 1300 perforated sub plate.
5. improved Siemens according to claim 1 produces the waste gas drip washing treatment process of polysilicon, it is characterized in that chamber filter press by rack section, filtration fraction, hydraulic system and electrical system four major part form; Rack section is the main body of machine, for supporting filtration, connects other parts, the sheet frame group that rack section is formed built with thrust plate, pressure strip, oil cylinder and main fine strain of millet parts; Filtration fraction includes filter plate and filter cloth, first applied to compress sheet frame group by hydraulic system, slip is pressed into sheet frame group by centre, be distributed between each filter plate in sheet frame group, by the pressure that feed pump produces, slip is installed in the filter-cloth filtering in filter plate, due to filter cloth effect, solid is stayed in filter chamber and is formed filter cake, and filtrate is discharged by water nozzle or free flow, realizes the de-liquid method that solid, liquid is separated.
6. improved Siemens according to claim 1 produces the waste gas drip washing treatment process of polysilicon, it is characterized in that: the full-automatic running vehicle type of one up and down comes and goes scraper stent (48) in scrapper conveyor (4) and passes through each cleaning shoe (46) chain connection in left and right with between lower scraping plate (40).
7. the waste gas drip washing treatment process of an improved Siemens production polysilicon, it is characterized in that adopting NaOH alkali lye to be that leacheate carries out drip washing process to waste gas in eluting column tower body (18), remove the chlorosilane from adopting improved Siemens production polysilicon process in combustion gas or hydrogen chloride harmful components, waste gas after purified treatment is through safe liquid seal tank (22), and waste gas discharges after reaching discharging standards, the leacheate that waste water after purified treatment falls into each eluting column (1) collects ditch (2), leacheate collect ditch (2) waste water collected again aggregation finally flow into pulp water collecting pit (14) in gravity flow mode to shunting in ditch (15), each pulp water collecting pit (14) is equipped with a full-automatic running vehicle type of one up and down and comes and goes scrapper conveyor (4), in pulp water collecting pit (14) by full-automatic up and down integrally running vehicle type come and go scrapper conveyor (4) and waste residue scraped into or collects stirring pool (8), waste residue subsequently in stirring pool (8) is transported to chamber filter press again and carries out Separation of Solid and Liquid, being separated the dry slag of solid obtained send slag field to store up, filtrate is back to circulating water pool (11), reuse for eluting column (1),
Described drip washing process is that waste gas enters eluting column (1) from the flue gas leading import (17) of eluting column tower body (18) bottom, through alkali lye spray piping (19), and spiral nozzle (20), mist eliminator (21), the purified treatment of three layers of NaOH leacheate;
Two-orbit guide rail (44) is arranged in the both sides pool wall of pulp water collecting pit (14) respectively, driving (43) is placed on two-orbit guide rail (44), upper scraping plate (49) and lower scraping plate (40) are be connected by hinge with driving a vehicle between (43), the lifting of upper scraping plate (49) and lower scraping plate (40) controls by lifting rope (47), controller by sending advance, retrogressing, lifting, decline four line position travel switch Received signal strength, automatically control driving and come and go and run and be elevated while upper scraping plate (49) and lower scraping plate (40), wherein, when two-orbit guide rail planet-cycloid reducer drives driving to travel forward, controller rises by upper scraping plate (49) and lower scraping plate (40) simultaneously, lower scraping plate (40) leaves pulp water collecting pit (14) bottom and is immersed in underwater, upper scraping plate (49) only has 2/3rds to rise to surface, 1/3rd is immersed in pulp water collecting pit (14) interior underwater, and upper scraping plate (49) will swim in scum silica frost on the water surface and blow into stirring pool (8), when drive a vehicle (43) run to pulp water collecting pit (14) top, all declined by upper scraping plate (49) and lower scraping plate (40) by a two-orbit guide rail planet-cycloid reducer simultaneously, upper scraping plate (49) declines and is all immersed in pulp water collecting pit (14) interior underwater, lower scraping plate (40) also drops to and pulp water collecting pit (14) end contact position, then, driving is driven to do return movement by two-orbit guide rail planet-cycloid reducer, namely move backward, the end slag of pulp water collecting pit (14) is scraped in top, pond recess feeder (16) by lower scraping plate (40), stirring pool (8) is squeezed into again with pump, pulp water collection top is arrived when driving (43) runs, upper scraping plate (49) and lower scraping plate (40) rise simultaneously again, driving (43) is reciprocal back and forth, upper scraping plate (49) and lower scraping plate (40) continue to repeat above-mentioned action.
CN201210566331.2A 2012-12-24 2012-12-24 Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon CN102989300B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210566331.2A CN102989300B (en) 2012-12-24 2012-12-24 Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210566331.2A CN102989300B (en) 2012-12-24 2012-12-24 Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon

Publications (2)

Publication Number Publication Date
CN102989300A CN102989300A (en) 2013-03-27
CN102989300B true CN102989300B (en) 2015-12-23

Family

ID=47918711

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210566331.2A CN102989300B (en) 2012-12-24 2012-12-24 Improved Siemens produces waste gas drip washing treatment process and the equipment of polysilicon

Country Status (1)

Country Link
CN (1) CN102989300B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103432871A (en) * 2013-09-06 2013-12-11 中国恩菲工程技术有限公司 Elution treatment equipment and process for tail gas generated during production of polycrystalline silicon
CN105084369B (en) * 2014-04-23 2018-02-09 新特能源股份有限公司 A kind of recycling and processing device of chlorine-containing silane waste gas
CN103961963B (en) * 2014-05-07 2016-01-13 太仓东能环保设备有限公司 A kind of systematic dust arrester
CN105327600A (en) * 2014-08-08 2016-02-17 新特能源股份有限公司 Treating apparatus for chlorosilane-containing tail gas produced in polysilicon production process
CN104445512B (en) * 2014-10-30 2016-05-04 安徽国祯环保节能科技股份有限公司 For the removing equipment of municipal sewage plant's anaerobic pond surface scum

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101700466A (en) * 2009-12-11 2010-05-05 乐山乐电天威硅业科技有限责任公司 Process for treating residual liquid and tail gas in polysilicon production by improved Siemens method
CN201492977U (en) * 2009-09-22 2010-06-02 河北科技大学 Reciprocating type oil-residue scraping machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201492977U (en) * 2009-09-22 2010-06-02 河北科技大学 Reciprocating type oil-residue scraping machine
CN101700466A (en) * 2009-12-11 2010-05-05 乐山乐电天威硅业科技有限责任公司 Process for treating residual liquid and tail gas in polysilicon production by improved Siemens method

Also Published As

Publication number Publication date
CN102989300A (en) 2013-03-27

Similar Documents

Publication Publication Date Title
CN100500595C (en) Apparatus for treating sewage containing oil, and processing technique
CN200970587Y (en) Ultrasonic cleaner capable of continuous discharging pollution
CN201240981Y (en) Horizontal rubber belt type vacuum filter
CN202785917U (en) Oily sludge purifying treatment system
CN201848131U (en) Table-flap type multi-stage mud-discharge settling tank applied to sewage treatment
CN102583617B (en) Isolation type multiphase balanced air floatation device
CN103663820B (en) Air-flotation and membrane-filtration purification system
CN203754514U (en) Progressive air flotation device
CN205346900U (en) Oil separator
CN2910324Y (en) Micro solid/liquid separator
CN201082877Y (en) Oil-containing sewage treating apparatus
CN202410243U (en) Oil-water separation device
CN202482103U (en) Ultrasonic air floatation oil removing device
CN2706461Y (en) High efficiency automatic floating oil collector
CN103833098A (en) High efficiency cavitation air flotation precipitation machine
CN102115285A (en) Dimethyl formamide (DMF) waste water purifying process
CN102657968A (en) Arc screen filtering equipment capable of being automatically cleaned
US2827424A (en) Quenching station
CN2675222Y (en) Automatic mud scraping and filter cloth cleaning device of full automatic filter press
CN202729923U (en) Backflow type high-efficiency air-dissolved air flotation device
CN202876507U (en) Horizontal cylindrical grating
CN201395548Y (en) Device for treating suspended sludge of compound alkali-surfactant-polymer oil extraction sewage
CN204400653U (en) A kind of integration air-float oil eliminator
CN202155083U (en) Intelligent driving type mud scraper
CN203866134U (en) Movable type wastewater treatment device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: No. 9, Sanjiang Avenue, Qujing economic and Technological Development Zone, Yunnan Province, Yunnan

Patentee after: Yunnan metallurgical cloud core silicon material Limited by Share Ltd

Address before: 655011 Sanjiang Avenue, Qujing economic and Technological Development Zone, Qujing, Yunnan Province, No. 9

Patentee before: Kunming Yeyan New Material Co., Ltd.