CN203484064U - Device for evenly mixing four gases - Google Patents

Device for evenly mixing four gases Download PDF

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Publication number
CN203484064U
CN203484064U CN201320494386.7U CN201320494386U CN203484064U CN 203484064 U CN203484064 U CN 203484064U CN 201320494386 U CN201320494386 U CN 201320494386U CN 203484064 U CN203484064 U CN 203484064U
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CN
China
Prior art keywords
orifice plate
air inlet
pore plate
inlet pipe
inlet plenum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201320494386.7U
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Chinese (zh)
Inventor
仲剑明
宋松林
周旭波
王明明
白守江
祁世申
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XINMI TOWNGAS Co Ltd
Original Assignee
XINMI TOWNGAS Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XINMI TOWNGAS Co Ltd filed Critical XINMI TOWNGAS Co Ltd
Priority to CN201320494386.7U priority Critical patent/CN203484064U/en
Application granted granted Critical
Publication of CN203484064U publication Critical patent/CN203484064U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a device for evenly mixing four gases. The device comprises a shell which is internally provided with a cavity; the shell is internally provided with a first pore plate, a second pore plate, a third pore plate and a fourth pore plate, wherein the first pore plate is parallel to the second pore plate; the third pore plate and the fourth pore plate are arranged between the first pore plate and the second pore plate in parallel; the first pore plate, the second pore plate, the third pore plate and the fourth pore plate are respectively and evenly provided with more than three air holes; the cavity in the shell is divided into a first air inlet chamber, a second air inlet chamber, a third air inlet chamber, a fourth air inlet chamber and a mixed air chamber by the first pore plate, the second pore plate, the third pore plate and the fourth pore plate; the shell is externally provided with a first air inlet pipe, a second air inlet pipe, a third air inlet pipe, a fourth air inlet pipe and a mixed air outlet pipe; the first air inlet pipe, the second air inlet pipe, the third air inlet pipe and the fourth air inlet pipe are respectively provided with an air flow control valve. The device is reasonable in design, simple in structure, safe and reliable, is specially used for evenly mixing four different gases, and is easy to operate, good in mixing effect, high in practicality and easy to popularize and apply.

Description

Four kinds of gas uniform mixing arrangements
Technical field
The utility model relates to a kind of gas mixer, refers more particularly to four kinds of gas uniform mixing arrangements.
Background technology
At present, in the middle of the laboratory of chemical industry, often run into the problem of testing after four kinds of gas with various are evenly mixed, owing to also not having four kinds of gas with various to carry out mixed uniformly device in the middle of laboratory, so just occur that gas mixes inhomogeneous situation unavoidably, cause experiment to occur deviation or error, have influence on the practical property of experiment, therefore, four kinds of mixed uniformly devices of gas with various are needed badly and are resolved.
Utility model content
The utility model is in order to solve weak point of the prior art, and four kinds of gas uniform mixing arrangements of a kind of simple in structure, convenient operation, good mixing effect are provided.
For solving the problems of the technologies described above, the utility model adopts following technical scheme: four kinds of gas uniform mixing arrangements, comprise that inside has the housing of cavity, in housing, be provided with the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate, the first orifice plate and the second orifice plate be arranged in parallel, the 3rd orifice plate and the 4th orifice plate are parallel to be located between the first orifice plate and the second orifice plate, is evenly provided with respectively three above pores on the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate; The first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate are divided into the first inlet plenum, the second inlet plenum, the 3rd inlet plenum, the 4th inlet plenum and mixed air vessel by the cavity in housing, and mixed air vessel is surrounded and formed by the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate;
Housing is provided with the first air inlet pipe being communicated with the first inlet plenum, the second air inlet pipe being communicated with the second inlet plenum, the 3rd air inlet pipe being communicated with the 3rd inlet plenum, the 4th air inlet pipe being communicated with the 4th inlet plenum and the gaseous mixture escape pipe being communicated with mixed air vessel outward, in the first air inlet pipe, the second air inlet pipe, the 3rd air inlet pipe and the 4th air inlet pipe, is respectively equipped with a gas flow regulating valve.
All pores on described the first orifice plate and the second orifice plate are all crisscross arranged, and all pores on described the 3rd orifice plate and the 4th orifice plate are all crisscross arranged.
Described gaseous mixture escape pipe is provided with Pressure gauge.
Adopt technique scheme, the first gas enters into the first inlet plenum by the first air inlet pipe, the second gas enters into the second inlet plenum by the second air inlet pipe, the third gas enters into the 3rd inlet plenum by the 3rd air inlet pipe, and the 4th kind of gas enters into the 4th inlet plenum by the 4th air inlet pipe; The first gas in the first inlet plenum enters into mixed air vessel by the pore on the first orifice plate, the second gas in the second inlet plenum enters into mixed air vessel by the pore on the second orifice plate, the third gas in the 3rd inlet plenum enters into mixed air vessel by the pore on the 3rd orifice plate, and the 4th kind of gas in the 4th inlet plenum enters into mixed air vessel by the pore on the 4th orifice plate.After four kinds of gases fully mix in mixed air vessel, last mist is discharged by gaseous mixture escape pipe.
Electric control gear is controlled the open degree of four gas flow regulating valves, and the volume ratio that four kinds of gases are required respectively according to the rules mixes.All pores on the first orifice plate and the second orifice plate are all crisscross arranged, all pores on the 3rd orifice plate and the 4th orifice plate are all crisscross arranged, resistance in the time of can reducing by four kinds of gases and enter mixed air vessel in mixed air vessel both sides by orifice plate, finally makes four kinds of gases obtain better, mix more equably.Pressure gauge plays the effect of monitoring gaseous mixture escape pipe and mixed air vessel's pressure, thereby guarantees the safety work of mixing arrangement.
The utility model is reasonable in design, simple in structure, safe and reliable, is specially adapted for the even mixing of four kinds of gas with various, easy operating, and good mixing effect, practical, be easy to apply.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
The specific embodiment
As shown in Figure 1, four kinds of gas uniform mixing arrangements of the present utility model, comprise that inside has the housing 1 of cavity, in housing 1, be provided with the first orifice plate 2, the second orifice plate 3, the 3rd orifice plate 4 and the 4th orifice plate 16, the first orifice plate 2 and the second orifice plate 3 be arranged in parallel, the 3rd orifice plate 4 and the 4th orifice plate 16 are parallel to be located between the first orifice plate 2 and the second orifice plate 3, is evenly provided with respectively three above pores 5 on the first orifice plate 2, the second orifice plate 3, the 3rd orifice plate 4 and the 4th orifice plate 16; The first orifice plate 2, the second orifice plate 3, the 3rd orifice plate 4 and the 4th orifice plate 16 are divided into the first inlet plenum 6, the second inlet plenum 7, the 3rd inlet plenum 8, the 4th inlet plenum 17He mixed air vessel 9 by the cavity in housing 1; Mixed air vessel 9 is surrounded and is formed by the first orifice plate 2, the second orifice plate 3, the 3rd orifice plate 4 and the 4th orifice plate 16.
In outer gaseous mixture escape pipe 13, the first air inlet pipe 10, the second air inlet pipe 11, the 3rd air inlet pipe 12 and the 4th air inlet pipe 18 that is provided with the first air inlet pipe 10 being communicated with the first inlet plenum 6, the second air inlet pipe 11 being communicated with the second inlet plenum 7, the 3rd air inlet pipe 12 being communicated with the 3rd inlet plenum 8, the 4th air inlet pipe 18 being communicated with the 4th inlet plenum 17 and is communicated with mixed air vessel 9 of housing 1, be respectively equipped with a gas flow regulating valve 14.
All pores 5 on the first orifice plate 2 and the second orifice plate 3 are all crisscross arranged, and all pores on the 3rd orifice plate 4 and the 4th orifice plate 16 are all crisscross arranged.
Gaseous mixture escape pipe 13 is provided with for monitoring the Pressure gauge 15 of gaseous mixture escape pipe 13He mixed air vessel 9 pressure.
When the utility model is used in work, first operate the open degree that electric control gear is adjusted three gas flow regulating valves 14, the volume ratio that three kinds of gases are required respectively according to the rules mixes.The first gas enters into the first inlet plenum 6 by the first air inlet pipe 10, the second gas enters into the second inlet plenum 7 by the second air inlet pipe 11, the third gas enters into 8, the four kinds of gases of the 3rd inlet plenum by the 3rd air inlet pipe 12 and enters into the 4th inlet plenum 17 by the 4th air inlet pipe 18; The first gas in the first inlet plenum 6 enters into mixed air vessel 9 by the pore 5 on the first orifice plate 2, the second gas in the second inlet plenum 7 enters into mixed air vessel 9 by the pore 5 on the second orifice plate 3, the 4th kind of gas that the third gas in the 3rd inlet plenum 8 enters in mixed air vessel's 9, the four inlet plenums 17 by the pore 5 on the 3rd orifice plate 4 enters into mixed air vessel 9 by the pore 5 on the 4th orifice plate 16.Four kinds of gases are after the interior abundant mixing of mixed air vessel 9, and last mist is discharged by gaseous mixture escape pipe 13.Arrow shown in figure is airflow direction.

Claims (3)

1. four kinds of gas uniform mixing arrangements, it is characterized in that: comprise that inside has the housing of cavity, in housing, be provided with the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate, the first orifice plate and the second orifice plate be arranged in parallel, the 3rd orifice plate and the 4th orifice plate are parallel to be located between the first orifice plate and the second orifice plate, is evenly provided with respectively three above pores on the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate; The first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate are divided into the first inlet plenum, the second inlet plenum, the 3rd inlet plenum, the 4th inlet plenum and mixed air vessel by the cavity in housing, and mixed air vessel is surrounded and formed by the first orifice plate, the second orifice plate, the 3rd orifice plate and the 4th orifice plate;
Housing is provided with the first air inlet pipe being communicated with the first inlet plenum, the second air inlet pipe being communicated with the second inlet plenum, the 3rd air inlet pipe being communicated with the 3rd inlet plenum, the 4th air inlet pipe being communicated with the 4th inlet plenum and the gaseous mixture escape pipe being communicated with mixed air vessel outward, in the first air inlet pipe, the second air inlet pipe, the 3rd air inlet pipe and the 4th air inlet pipe, is respectively equipped with a gas flow regulating valve.
2. four kinds of gas uniform mixing arrangements according to claim 1, is characterized in that: all pores on described the first orifice plate and the second orifice plate are all crisscross arranged, and all pores on described the 3rd orifice plate and the 4th orifice plate are all crisscross arranged.
3. four kinds of gas uniform mixing arrangements according to claim 1 and 2, is characterized in that: described gaseous mixture escape pipe is provided with Pressure gauge.
CN201320494386.7U 2013-08-14 2013-08-14 Device for evenly mixing four gases Expired - Fee Related CN203484064U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320494386.7U CN203484064U (en) 2013-08-14 2013-08-14 Device for evenly mixing four gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320494386.7U CN203484064U (en) 2013-08-14 2013-08-14 Device for evenly mixing four gases

Publications (1)

Publication Number Publication Date
CN203484064U true CN203484064U (en) 2014-03-19

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Application Number Title Priority Date Filing Date
CN201320494386.7U Expired - Fee Related CN203484064U (en) 2013-08-14 2013-08-14 Device for evenly mixing four gases

Country Status (1)

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CN (1) CN203484064U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106457168A (en) * 2014-05-09 2017-02-22 艾克斯特朗欧洲公司 Device and method for providing a process gas mixture to a cvd or pvd coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106457168A (en) * 2014-05-09 2017-02-22 艾克斯特朗欧洲公司 Device and method for providing a process gas mixture to a cvd or pvd coating device

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GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140319

Termination date: 20200814

CF01 Termination of patent right due to non-payment of annual fee