CN203474890U

CN203474890U - Furnace tube sealing structure applied to crystalline silicon photovoltaic cell PECVD (Plasma Enhanced Chemical Vapor Deposition) device

Info

Publication number: CN203474890U
Application number: CN201320548250.XU
Authority: CN
Inventors: 孙良欣; 岳树民
Original assignee: GIGA SOLAR HOLDING Co Ltd
Current assignee: GIGA SOLAR HOLDING Co Ltd
Priority date: 2013-09-04
Filing date: 2013-09-04
Publication date: 2014-03-12
Anticipated expiration: 2023-09-04

Abstract

The utility model relates to a furnace tube sealing structure applied to a crystalline silicon photovoltaic cell PECVD (Plasma Enhanced Chemical Vapor Deposition) device, belonging to the technical field of PECVD devices for producing crystalline silicon photovoltaic cells. One end of a heating furnace body is connected with a furnace door, a quartz tube is connected into a cavity of the heating furnace body, the other end of the heating furnace body is connected with a furnace tail, a gasket is connected to the end face of the inner side of the furnace tail, a water cooling pipe is connected to the end face of the inner side of the gasket, a first sealing ring is connected between the end face of the quartz tube and the gasket, and a second sealing ring is connected between the axial face of the quartz tube and the gasket. According to the furnace tube sealing structure, the two sealing rings at the axial face and the end face are arranged at positions in which the quartz tube is in contact with the furnace door or furnace tail; the newly added sealing ring at the end face plays a sealing role, and can be used as a buffer between the quartz tube and a metal end cover so that hard contact can be effectively prevented in installation and furnace body warming deformation processes; and the two sealing rings are closer to the water cooling pipe of the end cover, can work at a lower temperature, and can be prolonged in service life.

Description

A kind of boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment

Technical field

The utility model relates to a kind of boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment, belongs to the PECVD equipment technical field of crystal silicon photovoltaic battery production.

Background technology

Sun power is the inexhaustible renewable energy sources of the mankind, and it does not produce any environmental pollution, is the energy cleaning completely.It is that development in recent years is the fastest that solar radiation can transform electric energy, one of most active research, and people develop and have developed dissimilar solar cell and also claim photovoltaic cell.Its unique advantage of photovoltaic cell, surpasses the resources such as wind energy, water energy, Geothermal energy, nuclear energy, is expected to become the main pillar of following supply of electric power.

PECVD is plasma enhanced CVD equipment, is to utilize high frequency electric source glow discharge to produce the technology that plasma body is exerted one's influence to chemical vapor deposition processes.The density of electronics and ion reaches 109～1012/cm3, and mean electron energy can reach 1～10ev.Because plasma body exists, promote gas molecule decomposition, chemical combination, excite and ionize, promote the generation of reaction active groups, thereby reduce depositing temperature.PECVD is film forming within the scope of 200 ℃～500 ℃, much smaller than other CVD film forming within the scope of 700 ℃～950 ℃.Due under ammonia condition, improved the diffusibility of active gene, thereby improved the speed of growth and the homogeneity of film.In deposition process, because a large amount of hydrogen exists, play surface passivation effect.In solar cell industry, mainly with PECVD equipment, carry out deposit silicon nitride antireflective passive film at present, this equipment is the key equipment of producing crystal silicon photovoltaic battery.

Pecvd process need to carry out under high temperature, vacuum, clean environment, and this environment forms by using silica tube and managing sealed at both ends lid.The sealing cover (fire door and stove tail flange) at pipe two ends is stainless steel, manages as quartzy material.Due to the demand of technique vacuum, between silica tube and sealed at both ends lid, need to seal completely.

The sealed structure of current this part of PECVD equipment that can purchase on the market mainly adopts axial plane sealed structure.Although sealing effectiveness still can, but exist the hard of end face to contact due between end cap and silica tube, in installation and debugging process, easily cause the stress concentration of partial end-face, and the stress raisers that cause in body of heater elevated temperature deformation process, these all may cause the cracking of silica tube to damage.We have proposed the novel sealing structure that a kind of novel end face is combined with axial plane thus.

Summary of the invention

The problem that easily causes silica tube cracking in order to solve original sealed structure, the utility model provides a kind of boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment, possesses soft contact, assembles the plurality of advantages such as simple, easy to maintenance, stopping property is strong.

A kind of boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment, one end of heating furnace body connects fire door, in the cavity of heating furnace body, connect silica tube, the other end of heating furnace body connects stove tail, the inner side end of stove tail connects packing ring, the inner side end of packing ring has water cooled pipeline, and the end face of silica tube has the first sealing-ring between being connected with packing ring, and the axial plane of silica tube has the second sealing-ring between being connected with packing ring.

Silica tube of the present utility model and fire door or stove tail contact site possess the double seal circle of axial plane and end face;

Newly-increased end-face seal ring not only plays sealing function, can be used as the buffering between silica tube and metal end simultaneously, in installation and body of heater elevated temperature deformation process, can effectively avoid hard contact;

Two sealing-rings all with end cap water cooled pipeline close together, can work at a lower temperature, can extend sealing-ring work-ing life.

Accompanying drawing explanation

When considered in conjunction with the accompanying drawings, by the detailed description with reference to below, can more completely understand better the utility model and easily learn wherein many advantages of following, but accompanying drawing described herein is used to provide further understanding of the present utility model, form a part of the present utility model, schematic description and description of the present utility model is used for explaining the utility model, do not form improper restriction of the present utility model, as schemed wherein:

Fig. 1 is typical PECVD boiler tube sectional view.

Fig. 2 is conventional sealed structure sectional view.

Fig. 3 is the utility model sealed structure sectional view.

As shown in Figure 1, Figure 2, Figure 3 shows, in figure, each numbering institute corresponding content is as follows:

Fire door 1; Silica tube 2; Heating furnace body 3; Stove tail 4; Axial plane sealing 5; The hard point of contact 6 of metal and quartz; Mechanical seal 7; Water cooled pipeline 8.

Below in conjunction with drawings and Examples, the utility model is further illustrated.

Embodiment

Obviously, the modifications and variations such as size change, position change, material replacing that those skilled in the art do based on aim of the present utility model belong to protection domain of the present utility model.

A kind of boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment, one end of heating furnace body 3 connects fire door 1, in the cavity of heating furnace body 3, connect silica tube 2, the other end of heating furnace body 3 connects stove tail 4, the inner side end that it is characterized in that stove tail 4 connects packing ring, and the inner side end of packing ring has water cooled pipeline 8, between the end face 7 of silica tube 2 is connected with packing ring, has the first sealing-ring, between being connected with packing ring, the axial plane 5 of silica tube 2 has the second sealing-ring

The sealing-ring of end face 7 has not only played sealing function, simultaneously as the buffering between silica tube and metal fire door or stove tail, can effectively avoid producing the hard point of contact 6 of metal and quartz in installation and body of heater elevated temperature deformation process;

The first sealing-ring and the second sealing-ring all with water cooled pipeline 8 close together, can work at a lower temperature, can extend sealing-ring work-ing life.

As mentioned above, embodiment of the present utility model is explained, but as long as not departing from fact inventive point of the present utility model and effect can have a lot of distortion, this will be readily apparent to persons skilled in the art.Therefore, within such variation is also all included in protection domain of the present utility model.

Claims

1. a boiler tube sealed structure that is applied to crystal silicon photovoltaic battery PECVD equipment, one end of heating furnace body connects fire door, in the cavity of heating furnace body, connect silica tube, the other end of heating furnace body connects stove tail, the inner side end that it is characterized in that stove tail connects packing ring, the inner side end of packing ring has water cooled pipeline, and the end face of silica tube has the first sealing-ring between being connected with packing ring, and the axial plane of silica tube has the second sealing-ring between being connected with packing ring.