CN202601592U - Diffusion furnace for solar cells - Google Patents
Diffusion furnace for solar cells Download PDFInfo
- Publication number
- CN202601592U CN202601592U CN2012202143650U CN201220214365U CN202601592U CN 202601592 U CN202601592 U CN 202601592U CN 2012202143650 U CN2012202143650 U CN 2012202143650U CN 201220214365 U CN201220214365 U CN 201220214365U CN 202601592 U CN202601592 U CN 202601592U
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- Prior art keywords
- tube
- furnace
- offgas duct
- diffusion furnace
- diffusion
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a diffusion furnace for solar cells. The diffusion furnace comprises a cooling furnace, a quartz furnace tube and an exhaust tube are arranged in the cooling furnace, and the exhaust tube is arranged at the bottom of the cooling furnace. The diffusion furnace is characterized in that the exhaust tube is a double-layer hollow quartz tube or a double-layer vacuum quartz tube, a heating and insulating layer is arranged on the exhaust tube exposed out of the cooling furnace, so that the temperature of the area is increased and the bonding of the exhaust tube with the quartz tube is reduced simultaneously. The diffusion furnace is simple in structure and can effectively solve the problem of blocking of the exhaust tube caused by condensation and deposition of the diffusion reaction products of the exhaust tube; and the improvement of the existing diffusion furnace is simple, only the size of an exhaust discharge connecting tube of a furnace tube requires a change, and other parts do not need any changes.
Description
Technical field
The utility model relates to a kind of solar cell that is used to prepare solar cell and uses diffusion furnace.
Background technology
Diffusion technology is the main technique in the solar cell manufacturing process; The uniformity of diffusion has very big influence with repeated electrical property and consistency of product to battery; And influence the bad main cause of diffusion uniformity is the processing atmosphere instability in the technical process; Fire door poor sealing etc., and because the air-flow that the offgas duct obstruction causes is not smooth, the furnace pressure increase is the main reason that causes processing atmosphere instability and fire door poor sealing.If the boiler tube long term is in the offgas duct blockage, also can occur causing accumulation of deposits in the diffusion furnace because each technological reaction product can't be got rid of totally, cause that impurity increases in the anemostat; Because diffusion product (metaphosphoric acid) has certain corrosiveness to quartz piece, sedimental increase also can increase the corrosion of quartz piece, has shortened the useful life of quartz piece; Deposit increases and also can cause quartz ampoule and offgas duct bonding in the stove, is unfavorable for safeguarding and changing offgas duct, causes the damage of quartz piece to increase.
The offgas duct plugging reason: the reason that causes offgas duct to stop up is that temperature reduces back (less than 73.6 degrees centigrade) coagulating sedimentation because the product of diffusion reaction at high temperature is gaseous state.The offgas duct of existing diffusion furnace is the individual layer quartz ampoule, rapid heat dissipation, and the product of offgas duct diffusion reaction is cooling rapidly, and its coagulated sediment is attached to the offgas duct inner arm, and along with the prolongation of time constantly accumulates, (like Fig. 1) finally results in blockage.200 ℃ of main sediments metaphosphoric acid boiling points (decomposition); 73.6 ℃ of fusing points; ).Especially offgas duct is exposed the part (oval dotted portion among Fig. 1) of analgesic body of heater, and cooling rate is faster, and this position occurs the bonding of offgas duct more easily and stops up.
The utility model content
The utility model problem to be solved is to overcome the defective that prior art exists, and provides a kind of solar cell to use diffusion furnace, and its offgas duct adopts the heat-insulation and heat-preservation structure, and offgas duct is difficult for stopping up.
The utility model solar cell is used diffusion furnace, comprises analgesic body of heater, and Quartz stove tube and offgas duct are set in the analgesic body of heater, and offgas duct is arranged on analgesic bottom of furnace body; It is characterized in that: said offgas duct is double-deck hollow quartz tube.
Further improvement project is: said offgas duct is the double-layer vacuum quartz ampoule.Can further reduce the generation of thermal convection, thereby guarantee pipe inner exhaust gas temperature.
Can also the heat tracing layer be set in the part that said offgas duct is exposed analgesic body of heater.Reduce the bonding of offgas duct and quartz ampoule when increasing this regional temperature.
The utility model, simple in structure, the product coagulating sedimentation that can effectively solve because of the offgas duct diffusion reaction causes the offgas duct blockage problem.The utility model is used for existing diffusion furnace, and remodeling method is simple, and except that boiler tube exhaust emissions tube connector being carried out the size change, other parts are without any need for change.
Description of drawings
Fig. 1 is that the solar energy of prior art is used the diffusion furnace structural representation;
Fig. 2 is that the utility model solar cell is used the diffusion furnace structural representation;
Wherein: the 1st, analgesic body of heater, the 2nd, Quartz stove tube, the 3rd, offgas duct, the 4th, heat tracing layer, the 5th, process gas inlet;
Fig. 3 is the offgas duct profile of the utility model solar cell with diffusion furnace.
Wherein: the 11st, the skin of double-deck hollow quartz tube, the 12nd, the internal layer of double-deck hollow quartz tube.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is elaborated.
Embodiment 1, as shown in Figure 2, solar cell is used diffusion furnace, comprises analgesic body of heater 1, and Quartz stove tube 2 and offgas duct 3 are set in the analgesic body of heater, and offgas duct is arranged on analgesic bottom of furnace body.As shown in Figure 3, said offgas duct is double-deck hollow quartz tube.So-called hollow is meant between skin and the internal layer of double-deck hollow quartz tube to have airtight space.
Embodiment 2, basic identical with embodiment 1, its improvement is that said offgas duct is the double-layer vacuum quartz ampoule.That is: the skin of double-deck hollow quartz tube and the confined space between the internal layer are evacuated.
Embodiment 3, basic identical with embodiment 1 or 2, its improvement is: the part of exposing analgesic body of heater in said offgas duct is provided with the heat tracing layer.Can be to comprise asbestos, between offgas duct and the asbestos heating wire is set, heat in the outside of offgas duct.
Claims (3)
1. a solar cell is used diffusion furnace, comprises analgesic body of heater, and Quartz stove tube and offgas duct are set in the analgesic body of heater, and offgas duct is arranged on analgesic bottom of furnace body; It is characterized in that: said offgas duct is double-deck hollow quartz tube.
2. use diffusion furnace according to the said solar cell of claim 1, it is characterized in that: said offgas duct is the double-layer vacuum quartz ampoule.
3. use diffusion furnace according to claim 1 or 2 said solar cells, it is characterized in that: the part of exposing analgesic body of heater in said offgas duct is provided with the heat tracing layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202143650U CN202601592U (en) | 2012-05-14 | 2012-05-14 | Diffusion furnace for solar cells |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202143650U CN202601592U (en) | 2012-05-14 | 2012-05-14 | Diffusion furnace for solar cells |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202601592U true CN202601592U (en) | 2012-12-12 |
Family
ID=47319119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012202143650U Expired - Fee Related CN202601592U (en) | 2012-05-14 | 2012-05-14 | Diffusion furnace for solar cells |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202601592U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106158710A (en) * | 2016-08-26 | 2016-11-23 | 温州市赛拉弗能源有限公司 | A kind of High temperature diffusion equipment |
| CN107604444A (en) * | 2017-11-06 | 2018-01-19 | 重庆长捷电子有限公司 | A kind of silicon chip heats diffusion furnace |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
-
2012
- 2012-05-14 CN CN2012202143650U patent/CN202601592U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106158710A (en) * | 2016-08-26 | 2016-11-23 | 温州市赛拉弗能源有限公司 | A kind of High temperature diffusion equipment |
| CN106158710B (en) * | 2016-08-26 | 2019-01-08 | 温州市赛拉弗能源有限公司 | A kind of High temperature diffusion equipment |
| CN107604444A (en) * | 2017-11-06 | 2018-01-19 | 重庆长捷电子有限公司 | A kind of silicon chip heats diffusion furnace |
| CN107604444B (en) * | 2017-11-06 | 2023-07-18 | 重庆长捷电子有限公司 | Silicon wafer heating diffusion furnace |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121212 Termination date: 20160514 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |