CN203462163U - Novel weighing system with double corrugated tubes for sapphire furnace - Google Patents
Novel weighing system with double corrugated tubes for sapphire furnace Download PDFInfo
- Publication number
- CN203462163U CN203462163U CN201320490333.8U CN201320490333U CN203462163U CN 203462163 U CN203462163 U CN 203462163U CN 201320490333 U CN201320490333 U CN 201320490333U CN 203462163 U CN203462163 U CN 203462163U
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- China
- Prior art keywords
- corrugated tube
- fixed
- seed crystal
- vacuum chamber
- weighing
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Abstract
The utility model discloses a novel weighing system with double corrugated tubes for a sapphire furnace. The novel weighing system comprises a vacuum chamber and a seed crystal shaft with a bottom end which is arranged in the vacuum chamber, wherein a seed crystal shaft seat is fixed at the top end of the seed crystal shaft; a lower corrugated tube is fixed at the top end of the vacuum chamber; a slide seat which is hollow is fixed at the top end of the lower corrugated tube; an upper corrugated tube is fixed at the inner bottom of the slide seat and corresponds to the lower corrugated tube in the vertical direction; the top end of the upper corrugated tube is connected with the bottom end of the seed crystal shaft seat; a weighing sensor is fixed at the top of the slide seat; a weighing connection plate is vertically installed on the input end of the weighing sensor; and the seed crystal shaft seat is fixed on the weighing connection plate. When the seed crystal shaft is driven to go up and down by the slide seat, the lower corrugated tube is stretched and compressed to deform, the interference force generated by the lower corrugated tube is borne by the slide seat and does not influence the weighing sensor, and when the weight of a crystal is gradually increased, the micro-deformation generated by the weighing sensor due to measurement is counteracted by the deformation of the upper corrugated tube, the deformation of the upper corrugated tube is extremely small, and the weight interference generated by the deformation can be ignored, thus reaching the purpose of high-accuracy measurement.
Description
Technical field
The utility model relates to sapphire stove bi-bellow technical field, is specifically related to a kind of sapphire stove bi-bellow Novel weighing system.
Background technology
In KY method sapphire stove crystal growing process, extremely important to the measurement of weight, the brilliant technique of whole length is all to control round weight, and in real time accurate weight measurement has determined the quality that crystal is final substantially.KY method sapphire stove weighing structure is from crystal growth at present, and the interference that the stretching of corrugated tube produces, to real-time judge crystal actual weight, has produced great difficulty, thereby cannot carry out accurate automatic control.
Summary of the invention
The problem existing in order to solve above-mentioned prior art, the purpose of this utility model is to provide a kind of sapphire stove bi-bellow Novel weighing system, has simple in structurely, easy to adjust, gets rid of external disturbance, the feature that precision is high.
For reaching above object, the utility model adopts following technical scheme:
A kind of sapphire stove bi-bellow Novel weighing system, comprise vacuum chamber 8, bottom is placed in the seed shaft 7 in vacuum chamber 8, on seed shaft 7 tops, be fixed with seed crystal axle bed 1, in seed crystal axle bed 1, there is rotary sealing appts, on described vacuum chamber 8 tops, be fixed with lower corrugated tube 6, on lower corrugated tube 6 tops, be fixed with slide 4, described slide 4 is hollow form, at slide 4 inner bottom parts and lower corrugated tube, Shang Xia 6, be fixed with corrugated tube 5 in corresponding position, upper corrugated tube 5 tops are connected with seed crystal axle bed 1 bottom, the top that is positioned at seed crystal axle bed 1 two ends at slide 4 is fixed with LOAD CELLS 3, on the input terminus of LOAD CELLS 3, be vertically installed with the web plate 2 of weighing, seed crystal axle bed 1 is fixed on weighs on web plate 2, described vacuum chamber 8, lower corrugated tube 6, the bottom of upper corrugated tube 5 and seed crystal axle bed 1 surrounds vacuum chamber, described seed shaft 7 is positioned at vacuum chamber.
Described LOAD CELLS 3 is positioned at outside vacuum chamber.
Described upper corrugated tube 5 and the material of lower corrugated tube 6 are stainless steel.
Compared with prior art, the beneficial effects of the utility model are:
1, the utility model drives in seed shaft 7 lifting process at slide 4, and lower corrugated tube 6 is stretched and compression set, and the disturbing force that lower corrugated tube 6 distortion produce is born by slide 4, can not exert an influence to LOAD CELLS 3.
2, LOAD CELLS 3 is measured the gross weight of the crystal of seed shaft 7 and growth, and in measuring process, when crystal weight increases gradually, LOAD CELLS 3 is offset by upper corrugated tube 5 distortion because measuring the micro-distortion producing.Minimum because of the deformation that upper corrugated tube 5 produces, the weight producing because of deformation is disturbed negligible, thereby reaches the object of high-acruracy survey.
3, getting rid of corrugated tube to weighing under the condition of disturbing, LOAD CELLS is still arranged on outside vacuum chamber, is convenient to maintenance.
Accompanying drawing explanation
Accompanying drawing is the utility model structure principle chart.
Embodiment
Below in conjunction with drawings and the specific embodiments, the utility model is described in further detail.
As shown in drawings, a kind of sapphire stove of the utility model bi-bellow Novel weighing system, comprise vacuum chamber 8, bottom is placed in the seed shaft 7 in vacuum chamber 8, on seed shaft 7 tops, be fixed with seed crystal axle bed 1, in seed crystal axle bed 1, there is rotary sealing appts, on described vacuum chamber 8 tops, be fixed with lower corrugated tube 6, on lower corrugated tube 6 tops, be fixed with slide 4, described slide 4 is hollow form, at slide 4 inner bottom parts and lower corrugated tube, Shang Xia 6, be fixed with corrugated tube 5 in corresponding position, upper corrugated tube 5 tops are connected with seed crystal axle bed 1 bottom, the top that is positioned at seed crystal axle bed 1 two ends at slide 4 is fixed with LOAD CELLS 3, on the input terminus of LOAD CELLS 3, be vertically installed with the web plate 2 of weighing, seed crystal axle bed 1 is fixed on weighs on web plate 2, described vacuum chamber 8, lower corrugated tube 6, the bottom of upper corrugated tube 5 and seed crystal axle bed 1 surrounds vacuum chamber, described seed shaft 7 is positioned at vacuum chamber.
As preferred implementation of the present utility model, described LOAD CELLS 3 is positioned at outside vacuum chamber, is convenient to maintenance.
As preferred implementation of the present utility model, described upper corrugated tube 5 and the material of lower corrugated tube 6 are stainless steel.
Principle of work of the present utility model is:
Sapphire crystal is in the interior growth of vacuum chamber 8, by seed crystal, be connected with seed shaft 7, along with the growth of crystal, its weight increasing is by seed shaft 7, seed crystal axle bed 1 and the web plate 2 of weighing, conduct to the input terminus of LOAD CELLS 3, thereby realize the measurement of crystal weight.
During sapphire crystal growth, need given certain pulling rate, slide 4 is moved upward and drive seed shaft 1 to move upward, the stressed stretching of lower corrugated tube 6, along with the progressively growth of sapphire crystal, the pulling force that 6 pairs of slides of lower corrugated tube 4 produce increases gradually, and existence fluctuation, but lower corrugated tube 6 tops are stressed on slide 4, the power of generation and fluctuation are offset by slide 4, can not exert an influence to LOAD CELLS 3.When crystal weight increases gradually, LOAD CELLS 3 produces micro-distortion because measuring, and micro-distortion of generation is offset by upper corrugated tube 5 distortion.Minimum because of the deformation that upper corrugated tube 5 produces, the weight producing because of deformation is disturbed negligible, thereby reaches the object of high-acruracy survey.
Claims (3)
1. a sapphire stove bi-bellow Novel weighing system, comprise vacuum chamber (8), bottom is placed in the seed shaft (7) in vacuum chamber (8), on seed shaft (7) top, be fixed with seed crystal axle bed (1), seed crystal axle bed has rotary sealing appts in (1), it is characterized in that: on described vacuum chamber (8) top, be fixed with lower corrugated tube (6), on lower corrugated tube (6) top, be fixed with slide (4), described slide (4) is hollow form, at slide (4) inner bottom part and the upper and lower corresponding position of lower corrugated tube (6), be fixed with upper corrugated tube (5), upper corrugated tube (5) top is connected with seed crystal axle bed (1) bottom, the top that is positioned at seed crystal axle bed (1) two ends at slide (4) is fixed with LOAD CELLS (3), on the input terminus of LOAD CELLS (3), be vertically installed with the web plate of weighing (2), seed crystal axle bed (1) is fixed on the web plate of weighing (2), described vacuum chamber (8), lower corrugated tube (6), the bottom of upper corrugated tube (5) and seed crystal axle bed (1) surrounds vacuum chamber, described seed shaft (7) is positioned at vacuum chamber.
2. sapphire stove bi-bellow Novel weighing system according to claim 1, is characterized in that: described LOAD CELLS (3) is positioned at outside vacuum chamber.
3. sapphire stove bi-bellow Novel weighing system according to claim 1, is characterized in that: described upper corrugated tube (5) and the material of lower corrugated tube (6) are stainless steel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320490333.8U CN203462163U (en) | 2013-08-12 | 2013-08-12 | Novel weighing system with double corrugated tubes for sapphire furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320490333.8U CN203462163U (en) | 2013-08-12 | 2013-08-12 | Novel weighing system with double corrugated tubes for sapphire furnace |
Publications (1)
Publication Number | Publication Date |
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CN203462163U true CN203462163U (en) | 2014-03-05 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201320490333.8U Expired - Fee Related CN203462163U (en) | 2013-08-12 | 2013-08-12 | Novel weighing system with double corrugated tubes for sapphire furnace |
Country Status (1)
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103422160A (en) * | 2013-08-12 | 2013-12-04 | 西安创联新能源设备有限公司 | Sapphire furnace dual-bellow weighing system |
-
2013
- 2013-08-12 CN CN201320490333.8U patent/CN203462163U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103422160A (en) * | 2013-08-12 | 2013-12-04 | 西安创联新能源设备有限公司 | Sapphire furnace dual-bellow weighing system |
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140305 Termination date: 20190812 |
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CF01 | Termination of patent right due to non-payment of annual fee |