CN103422160A - Sapphire furnace dual-bellow weighing system - Google Patents
Sapphire furnace dual-bellow weighing system Download PDFInfo
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- CN103422160A CN103422160A CN2013103495266A CN201310349526A CN103422160A CN 103422160 A CN103422160 A CN 103422160A CN 2013103495266 A CN2013103495266 A CN 2013103495266A CN 201310349526 A CN201310349526 A CN 201310349526A CN 103422160 A CN103422160 A CN 103422160A
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- bellow
- corrugated tube
- fixed
- vacuum chamber
- seed shaft
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Abstract
A sapphire furnace dual-bellow weighing system comprises a vacuum chamber and a seed shaft; the bottom of the seed shaft is arranged in the vacuum chamber, a seed shaft holder is arranged at the top of the seed shaft, a lower bellow is fixed at the top of the vacuum chamber, a hollow sliding seat is fixed at the top of the lower bellow, an upper bellow is fixed at a position, vertically corresponding to the lower bellow, at the bottom inside the sliding seat, the top of the upper bellow is connected to the bottom of the seed shaft holder, a weighting sensor is fixed at the top of the sliding seat, a weighting connect plate is perpendicularly mounted at the input end of the weighting sensor, and the seed shaft holder is fixed on the weighting connect plate. When the sliding seat drives the seed shaft to lift, the lower bellow is drawn and compressed to deform, disturbance force produced by the lower bellow is beard by the sliding seat, and the weighting sensor is free of affection; when the weight of crystal increases, micro-deformation produced by the weighting sensor due to measurement is counteracted by deformation of the upper bellow, the deformation of the upper bellow is small, weight influence resulted from deformation is negligible, so that highly-accurate measurement can be achieved.
Description
Technical field
The present invention relates to sapphire stove bi-bellow technical field, be specifically related to a kind of sapphire stove bi-bellow weighing system.
Background technology
In KY method sapphire stove crystal growing process, extremely important to the measurement of weight, the brilliant technique of whole length is controlled round weight, and in real time accurate weight measurement has determined the quality that crystal is final substantially.KY method sapphire stove weighing structure is from the crystal growth at present, and the interference that the stretching of corrugated tube produces, to real-time judge crystal actual weight, has produced great difficulty, thereby can't carry out accurate automatic control.
Summary of the invention
The problem existed in order to solve above-mentioned prior art, the object of the present invention is to provide a kind of sapphire stove bi-bellow weighing system, has simple in structurely, easy to adjust, gets rid of external disturbance, the characteristics that precision is high.
For reaching above purpose, the present invention adopts following technical scheme:
A kind of sapphire stove bi-bellow weighing system, comprise vacuum chamber 8, bottom is placed in the seed shaft 7 in vacuum chamber 8, be fixed with seed crystal axle bed 1 on seed shaft 7 tops, in seed crystal axle bed 1, rotary sealing appts is arranged, be fixed with lower corrugated tube 6 on described vacuum chamber 8 tops, be fixed with slide 4 on lower corrugated tube 6 tops, described slide 4 is hollow form, corresponding position be fixed with corrugated tube 5 at slide 4 inner bottom parts and lower corrugated tube Shang Xia 6, upper corrugated tube 5 tops are connected with seed crystal axle bed 1 bottom, the top that is positioned at seed crystal axle bed 1 two ends at slide 4 is fixed with LOAD CELLS 3, be vertically installed with the web plate 2 of weighing on the input terminus of LOAD CELLS 3, seed crystal axle bed 1 is fixed on the web plate 2 of weighing, described vacuum chamber 8, lower corrugated tube 6, the bottom of upper corrugated tube 5 and seed crystal axle bed 1 surrounds vacuum chamber, described seed shaft 7 is positioned at vacuum chamber.
Described LOAD CELLS 3 is positioned at outside vacuum chamber.
The material of described upper corrugated tube 5 and lower corrugated tube 6 is stainless steel.
Compared with prior art, beneficial effect of the present invention is:
1, the present invention is in slide 4 drives seed shaft 7 lifting process, and lower corrugated tube 6 is stretched and compression set, and the disturbing force that lower corrugated tube 6 distortion produce is born by slide 4, can not exert an influence to LOAD CELLS 3.
2, LOAD CELLS 3 is measured the gross weight of the crystal of seed shaft 7 and growth, and in measuring process, when crystal weight increases gradually, LOAD CELLS 3 is offset by upper corrugated tube 5 distortion because measuring the micro-distortion produced.Minimum because of the deformation that upper corrugated tube 5 produces, because the weight that deformation produces is disturbed and can be ignored, thereby reach the purpose of high-acruracy survey.
3, getting rid of under the condition of corrugated tube to the interference of weighing, LOAD CELLS still is arranged on outside vacuum chamber, is convenient to maintenance.
The accompanying drawing explanation
Accompanying drawing is structure principle chart of the present invention.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in drawings, a kind of sapphire stove of the present invention bi-bellow weighing system, comprise vacuum chamber 8, bottom is placed in the seed shaft 7 in vacuum chamber 8, be fixed with seed crystal axle bed 1 on seed shaft 7 tops, in seed crystal axle bed 1, rotary sealing appts is arranged, be fixed with lower corrugated tube 6 on described vacuum chamber 8 tops, be fixed with slide 4 on lower corrugated tube 6 tops, described slide 4 is hollow form, corresponding position be fixed with corrugated tube 5 at slide 4 inner bottom parts and lower corrugated tube Shang Xia 6, upper corrugated tube 5 tops are connected with seed crystal axle bed 1 bottom, the top that is positioned at seed crystal axle bed 1 two ends at slide 4 is fixed with LOAD CELLS 3, be vertically installed with the web plate 2 of weighing on the input terminus of LOAD CELLS 3, seed crystal axle bed 1 is fixed on the web plate 2 of weighing, described vacuum chamber 8, lower corrugated tube 6, the bottom of upper corrugated tube 5 and seed crystal axle bed 1 surrounds vacuum chamber, described seed shaft 7 is positioned at vacuum chamber.
As the preferred embodiment of the present invention, described LOAD CELLS 3 is positioned at outside vacuum chamber, is convenient to maintenance.
As the preferred embodiment of the present invention, the material of described upper corrugated tube 5 and lower corrugated tube 6 is stainless steel.
Principle of work of the present invention is:
Sapphire crystal is in the interior growth of vacuum chamber 8, by seed crystal, with seed shaft 7, be connected, along with the growth of crystal, its weight increased is by seed shaft 7, seed crystal axle bed 1 and the web plate 2 of weighing, conduct to the input terminus of LOAD CELLS 3, thereby realize the measurement of crystal weight.
During sapphire crystal growth, need given certain pulling rate, slide 4 is moved upward and drives seed shaft 1 to move upward, the stressed stretching of lower corrugated tube 6, along with the progressively growth of sapphire crystal, the pulling force that 6 pairs of slides of lower corrugated tube 4 produce increases gradually, and existence fluctuation, but lower corrugated tube 6 tops are stressed on slide 4, the power of generation and fluctuation are offset by slide 4, can not exert an influence to LOAD CELLS 3.When crystal weight increases gradually, LOAD CELLS 3 produces micro-distortion because measuring, and micro-distortion of generation is offset by upper corrugated tube 5 distortion.Minimum because of the deformation that upper corrugated tube 5 produces, because the weight that deformation produces is disturbed and can be ignored, thereby reach the purpose of high-acruracy survey.
Claims (3)
1. a sapphire stove bi-bellow weighing system, comprise vacuum chamber (8), bottom is placed in the seed shaft (7) in vacuum chamber (8), be fixed with seed crystal axle bed (1) on seed shaft (7) top, the seed crystal axle bed has rotary sealing appts in (1), it is characterized in that: on described vacuum chamber (8) top, be fixed with lower corrugated tube (6), be fixed with slide (4) on lower corrugated tube (6) top, described slide (4) is hollow form, be fixed with upper corrugated tube (5) at slide (4) inner bottom part and the upper and lower corresponding position of lower corrugated tube (6), upper corrugated tube (5) top is connected with seed crystal axle bed (1) bottom, the top that is positioned at seed crystal axle bed (1) two ends at slide (4) is fixed with LOAD CELLS (3), be vertically installed with the web plate of weighing (2) on the input terminus of LOAD CELLS (3), seed crystal axle bed (1) is fixed on the web plate of weighing (2), described vacuum chamber (8), lower corrugated tube (6), the bottom of upper corrugated tube (5) and seed crystal axle bed (1) surrounds vacuum chamber, described seed shaft (7) is positioned at vacuum chamber.
2. sapphire stove bi-bellow weighing system according to claim 1, it is characterized in that: described LOAD CELLS (3) is positioned at outside vacuum chamber.
3. sapphire stove bi-bellow weighing system according to claim 1, it is characterized in that: the material of described upper corrugated tube (5) and lower corrugated tube (6) is stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103495266A CN103422160A (en) | 2013-08-12 | 2013-08-12 | Sapphire furnace dual-bellow weighing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013103495266A CN103422160A (en) | 2013-08-12 | 2013-08-12 | Sapphire furnace dual-bellow weighing system |
Publications (1)
| Publication Number | Publication Date |
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| CN103422160A true CN103422160A (en) | 2013-12-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2013103495266A Pending CN103422160A (en) | 2013-08-12 | 2013-08-12 | Sapphire furnace dual-bellow weighing system |
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| CN (1) | CN103422160A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357900A (en) * | 2014-11-28 | 2015-02-18 | 南京晶升能源设备有限公司 | Crystal weighing apparatus applied to single crystal furnace |
| CN105177704A (en) * | 2015-10-23 | 2015-12-23 | 苏州晶特晶体科技有限公司 | High-stability crystal weighing unit for crystal growth furnaces |
| CN105821477A (en) * | 2015-01-10 | 2016-08-03 | 杭州晶智能科技有限公司 | High-precision full-scale range weighing system of sapphire crystal growth equipment by kyropoulos method |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5858088A (en) * | 1997-02-04 | 1999-01-12 | Komatsu Ltd. | Device for lifting crystal bodies |
| CN102443847A (en) * | 2010-10-08 | 2012-05-09 | 住友金属精密科技股份有限公司 | Apparatus for pulling single crystal and apparatus for supporting crucible |
| CN202881451U (en) * | 2012-11-14 | 2013-04-17 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growing furnace |
| CN203462163U (en) * | 2013-08-12 | 2014-03-05 | 西安创联新能源设备有限公司 | Novel weighing system with double corrugated tubes for sapphire furnace |
-
2013
- 2013-08-12 CN CN2013103495266A patent/CN103422160A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5858088A (en) * | 1997-02-04 | 1999-01-12 | Komatsu Ltd. | Device for lifting crystal bodies |
| CN102443847A (en) * | 2010-10-08 | 2012-05-09 | 住友金属精密科技股份有限公司 | Apparatus for pulling single crystal and apparatus for supporting crucible |
| CN202881451U (en) * | 2012-11-14 | 2013-04-17 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growing furnace |
| CN203462163U (en) * | 2013-08-12 | 2014-03-05 | 西安创联新能源设备有限公司 | Novel weighing system with double corrugated tubes for sapphire furnace |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357900A (en) * | 2014-11-28 | 2015-02-18 | 南京晶升能源设备有限公司 | Crystal weighing apparatus applied to single crystal furnace |
| CN105821477A (en) * | 2015-01-10 | 2016-08-03 | 杭州晶智能科技有限公司 | High-precision full-scale range weighing system of sapphire crystal growth equipment by kyropoulos method |
| CN105821477B (en) * | 2015-01-10 | 2017-12-08 | 杭州晶一智能科技有限公司 | The high-precision gamut weighing system of kyropoulos sapphire crystallization equipment |
| CN105177704A (en) * | 2015-10-23 | 2015-12-23 | 苏州晶特晶体科技有限公司 | High-stability crystal weighing unit for crystal growth furnaces |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
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Application publication date: 20131204 |