CN203461823U - Polycrystalline-silicon fluidized bed reactor - Google Patents
Polycrystalline-silicon fluidized bed reactor Download PDFInfo
- Publication number
- CN203461823U CN203461823U CN201320485019.0U CN201320485019U CN203461823U CN 203461823 U CN203461823 U CN 203461823U CN 201320485019 U CN201320485019 U CN 201320485019U CN 203461823 U CN203461823 U CN 203461823U
- Authority
- CN
- China
- Prior art keywords
- bed reactor
- silicon
- shell
- gas distributor
- polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Silicon Compounds (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Abstract
The utility model provides a polycrystalline-silicon fluidized bed reactor. The polycrystalline-silicon fluidized bed reactor comprises a shell, and is characterized in that a conical gas distributor is arranged inside the shell, an expanding section is arranged in the upside of the interior of the shell, and a cyclone separator is arranged in the upside of the interior of the shell; a feed inlet and a tail gas outlet are formed in the top of the shell; a product particulate silicon discharge outlet is formed in the bottom of the shell. The gas distributor is a conical distribution plate and has a hemicone angle of 30 degrees to 60 degrees. A detachable air cap is arranged on the gas distributor. A technological gas inlet buffer cavity is formed below the gas distributor. The hemicone angle of the expanding section ranges from 10 degrees to 60 degrees. The cyclone separator is built-in. An outlet of the cyclone separator is connected with the tail gas outlet. A backflushing opening is formed inside the product particulate silicon discharge outlet. By utilizing the polycrystalline-silicon fluidized bed reactor, the reaction time of a reactive material in the reactor can be prolonged, the loss of particulate silicon can be decreased, and the polycrystalline-silicon fluidized bed reactor has the advantages of being high in reaction efficiency, continuable, stable, efficient, and stable in the quality of finished products.
Description
Technical field
The present invention relates to a kind of Novel fluidization bed bioreactor, be specifically related to a kind of novel silane that utilizes and decompose the fluidized-bed reactor of manufacturing polysilicon.
Background technology
Fluidization is that U.S. Union Carbide company in 1981 researches and develops successful polycrystalline silicon preparing process, and through development for a long time, its technology and reaction unit have had significant progress.Along with the growth of world's photovoltaic industry to low-cost polysilicon demand, fluidization receives the concern of industry.The advantage of fluidized-bed process is: 1. energy consumption is low, production cost is low; 2. can produce continuously; 3. reactant gases can be recycled, and polysilicon yield is high.Adopt the granular silicon grain of this explained hereafter can be directly used in the production of silicon single crystal and polycrystal silicon ingot; It is during for monocrystalline silicon growing, and the quartz crucible charge amount of same volume increases approximately 40% than bulk silicon material, can reduce pulling single crystal silicon cost; Granular polycrystalline silicon can flow directly into quartz crucible by charging tube in addition, without feeding and be exposed under ambiance as bulk silicon being manual, has effectively avoided pollution, has improved charging efficiency.
The granular polycrystalline silicon that fluidization is produced has plurality of advantages, but be limited at present that technical difficulty is large, Controlling System is complicated, production security and the technology barrier that is difficult to go beyond due to high wearing and tearing that cause to equipment of silica flour hardness etc., settleed one by one after above technical barrier, grain silicon fluidization will obtain significant progress and popularization.
Application number is that 201210251718 patent documentation has been set forth a kind of polysilicon fluidized-bed reactor, provided basic fluidized-bed structure, but the separated cleaning apparatus of not mentioning the rear tail gas of reaction, the present utility model has been set forth a kind of Novel polycrystalline silicon fluidized-bed reactor with gas-solid separating device.
Utility model content
Polysilicon fluidized-bed reactor provided by the invention, object is to realize the continuous production of polysilicon, and reduces in process of production the loss of material and the difficulty of bringing to follow-up dedusting.
A kind of polysilicon fluidized-bed reactor that the present utility model provides comprises: housing, described enclosure interior is provided with conical carrying material and meets the gas distributor that fluidisation distributes and requires, in described housing, top is provided with expanding reach, and above in housing, arranges that cyclonic separator is to carry out separation to gas-solid material; In described case top, be furnished with opening for feed and tail gas outlet, at described housing bottom, be provided with product particle silicon discharge port.
Preferably, described gas distributor is conical distribution plate, and its semi-cone angle is 30 °～60 °.
Further, on described gas distributor, arrange blast cap; This blast cap is detachable hood type, can realize and changing or the setting that distributes according to actual needs.
Further, described gas distributor below is provided with process gas air inlet cushion chamber; Make tolerance and the gas velocity distribution of reactant gases, meet the regularity of distribution of bed pressure drop.
Further, the outlet of cyclonic separator is connected with tail gas outlet.
Further, in described grain silicon discharge port inside, be provided with back blow port, this structure can extend the reaction times of reaction mass in reactor, improves the yield rate of reaction efficiency and granular polycrystalline silicon.
As a kind of preferred version of the present utility model, expanding reach semi-cone angle is 10 °～60 °, and the semi-cone angle of expanding reach is preferably and is less than 45 °, and cyclonic separator adopts built-in form.
Feature of the present utility model is the tail gas that can purify fluidized-bed reactor, reduces the significant loss of grain silicon, increases the output of fluidized-bed, improves grain silicon quality product.
Accompanying drawing explanation
Fig. 1 is the structure iron of the polysilicon fluidized-bed reactor that provides of the utility model.
In figure: 1. product particle silicon discharge port, 2. back blow port, 3. process gas cushion chamber, 4. process gas inlet mouth, 5. gas distributor, 6. housing, 7. expanding reach, 8. cyclonic separator, 9. opening for feed, 10. tail gas outlet.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described.
As shown in Figure 1, the utility model polysilicon fluidized-bed reactor, comprise fluidized-bed reactor housing 6, described fluidized-bed reactor shell 6 bottoms are provided with process gas inlet mouth 4, described fluidized-bed reactor housing is provided with product particle silicon discharge port 1 under 6 bottoms, in described product particle silicon discharge port 1 inside, is provided with back blow port 2; Described gas distributor 5 has formed process gas cushion chamber 3 with described fluidized-bed reactor shell 6; Described reactor shell 6 tops are provided with expanding reach 7; In described expanding reach 7, be provided with cyclonic separator 8, the outlet of cyclonic separator 8 is connected with tail gas outlet 10; At described reactor shell 6 tops, be provided with opening for feed 9 and tail gas outlet 10, opening for feed 9 and tail gas outlet 10 are in staggered distribution.
By SiH
4with carrier gas H
2gas mixture enters process gas cushion chamber 3 as process gas by process gas inlet mouth 4, and after buffering, gas enters reactor shell 6 by blast cap on gas distributor 5, and seed silicon grain enters shell of reactor 6, SiH by top fed mouth 9
4gas is at the interior generation decomposition reaction of reactor shell 6: SiH
4-Si+2H
2, the Si decompositing is deposited on the seed silicon face that enters reactor shell 6, and seed silicon particle diameter is constantly grown up to product particle silicon, and product particle silicon is collected by product particle silicon discharge port 1, passes into the H that purity is 6N in back blow port 2
2; After reaction, tail gas is being discharged by tail gas outlet 10 after expanding reach 7 and cyclonic separator 8 are isolated the silica flour in tail gas.
In the above embodiment, preferred, expanding reach semi-cone angle is for being less than 45 °, and cyclonic separator is built-in form.Such structure can also effectively reduce the loss of granular silicon feedstock and reduce the difficulty of bringing to follow-up workshop section tails dedusting.
Claims (8)
1. polysilicon fluidized-bed reactor, comprises housing, it is characterized in that, described enclosure interior is provided with conical gas distributor, and in described housing, top is provided with expanding reach, and in described housing, top arranges cyclonic separator; Described case top is provided with opening for feed and tail gas outlet; At described housing bottom, be provided with product particle silicon discharge port.
2. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: described gas distributor is conical distribution plate, and its semi-cone angle is 30 °～60 °.
3. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: on described gas distributor, be furnished with detachable hood type.
4. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: described gas distributor below is provided with process gas air inlet cushion chamber.
5. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: described expanding reach semi-cone angle is 10 °～60 °.
6. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: described cyclonic separator is built-in form.
7. polysilicon fluidized-bed reactor according to claim 6, is characterized in that: the outlet of described cyclonic separator is connected with tail gas outlet.
8. polysilicon fluidized-bed reactor according to claim 1, is characterized in that: described product particle silicon discharge port inside is provided with back blow port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485019.0U CN203461823U (en) | 2013-08-08 | 2013-08-08 | Polycrystalline-silicon fluidized bed reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320485019.0U CN203461823U (en) | 2013-08-08 | 2013-08-08 | Polycrystalline-silicon fluidized bed reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203461823U true CN203461823U (en) | 2014-03-05 |
Family
ID=50174199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320485019.0U Expired - Fee Related CN203461823U (en) | 2013-08-08 | 2013-08-08 | Polycrystalline-silicon fluidized bed reactor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203461823U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107715815A (en) * | 2017-11-01 | 2018-02-23 | 宁波工程学院 | A kind of granular polycrystalline silicon fluid bed process units of sound wave auxiliary |
-
2013
- 2013-08-08 CN CN201320485019.0U patent/CN203461823U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107715815A (en) * | 2017-11-01 | 2018-02-23 | 宁波工程学院 | A kind of granular polycrystalline silicon fluid bed process units of sound wave auxiliary |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101780956B (en) | Method and device for preparing high purity polysilicon particles by using fluid bed reactor | |
| CN103787336B (en) | The method producing high purity granular silicon | |
| CN109277057A (en) | A kind of reactor assembly producing granular materials and method | |
| CN102671581B (en) | Method and reactor for producing particle materials | |
| CN101318654A (en) | Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor | |
| JP2016521246A (en) | Reactor for producing polycrystalline silicon and a method for removing a silicon-containing layer on components of such a reactor | |
| CN101696013B (en) | Method and device for producing polysilicon by using plasma assisting fluidized bed process | |
| CN103213989B (en) | Polysilicon granule preparation system and preparation method | |
| CN101372317B (en) | Method for producing high quality nanometer oxide by gas phase method | |
| CN102502646A (en) | Equipment and method for preparing polysilicon by fast circulating fluidized bed-based chemical vapor deposition | |
| CN203461823U (en) | Polycrystalline-silicon fluidized bed reactor | |
| CN103449442B (en) | System for preparing polysilicon granules in fluidized bed and process for preparing polysilicon by using same | |
| CN202175562U (en) | Fluidized bed reactor | |
| CN102530951B (en) | Produce method and the device of granular polycrystalline silicon | |
| CN203484138U (en) | Polysilicon fluidized bed reactor | |
| CN103495366B (en) | Granulated polycrystalline silicon fluidized-bed reactor | |
| CN202007139U (en) | Fluidized bed reactor for preparing granular polycrystalline silicon | |
| CN114132933A (en) | Granular silicon production method and system | |
| JPH06127916A (en) | Production of spherical high-purity polycrystalline silicon | |
| CN102205222A (en) | Fluidized bed reactor device for preparing polysilicon | |
| CN205892763U (en) | A fluidized bed reactor for preparing granule silicon | |
| CN201914923U (en) | Silica powder distributor for trichlorosilane synthesizer | |
| CN202099066U (en) | Device for preparing silicane | |
| CN217120207U (en) | Storage type fluidized bed reactor for producing organic silicon monomer | |
| CN109879287B (en) | Preparation device and method for granular polycrystalline silicon |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140305 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |