CN202175562U - Fluidized bed reactor - Google Patents
Fluidized bed reactor Download PDFInfo
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- CN202175562U CN202175562U CN2011203005456U CN201120300545U CN202175562U CN 202175562 U CN202175562 U CN 202175562U CN 2011203005456 U CN2011203005456 U CN 2011203005456U CN 201120300545 U CN201120300545 U CN 201120300545U CN 202175562 U CN202175562 U CN 202175562U
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- bed reactor
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- grid distributor
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Abstract
The utility model discloses a fluidized bed reactor comprising a housing on which a silicon powder feed port, an organic raw gas inlet, a nitrogen gas inlet, a hydrogen gas inlet, a hydrogen gas distributor, a heater, a tail gas outlet and a product outlet are formed, wherein the hydrogen gas distributor comprises a distributing plate and a distributing ring connected with the outer margin of the distributing plate through connectors, a plurality of through holes are formed in the thickness direction of the distributing plate, and a gap is formed between the distributing ring and the outer circumference of the distributing plate. Compared with the prior art, owing to the gap formed between the distributing ring and the outer circumference of the distributing plate, the volume of hydrogen gas flowing through the gap is larger than that of hydrogen gas flowing through the through holes during the operation of the fluidized bed reactor, resulting in the formation of a gas flow from the margin to the center of the reactor, so that polycrystalline silicon particles at the margin of the reactor are carried by the gas flow to move to the center of the reactor, which prevents adhesion of polycrystalline silicon particles on the wall of the reactor.
Description
Technical field
The utility model relates to the reaction apparatus technical field, more particularly, relates to a kind of fluidized-bed reactor.
Background technology
As the important preparation raw material of semiconducter device and solar cell, polysilicon is the foundation stone of global electronic industry and photovoltaic industry.Divide according to purity and purposes, polysilicon can be divided into electronic-grade polycrystalline silicon and solar-grade polysilicon.The main method of preparation solar-grade polysilicon is the improvement Siemens Method at present; This method with the silicon plug as the heating and sedimentary carrier; Feed trichlorosilane and hydrogen down in 1050～1150 ℃; Thereby trichlorosilane is become silicon by hydrogen reducing and is deposited on the silicon mandrel surface, and the silicon core finally is grown to the silicon rod that diameter is 100～200mm.For the ease of packed and transported and the preparation silicon ingot and the silicon single-crystal of polysilicon, the polycrystalline silicon rod of method for preparing need be fractured into bulk, thereby has increased contaminated possibility to polysilicon, has increased production cost simultaneously.
In recent years, the fluidized-bed reactor that is used to prepare granular polycrystalline silicon has obtained extensive studies, and this reactor drum can direct production go out qualified granular polycrystalline silicon product, need not product is carried out postorder processing, and energy consumption, cost is all lower.The patent No. is that the american documentation literature of US6007869 has been reported a kind of fluidizer of producing polysilicon; This device utilizes trichlorosilane and hydrogen to carry out the reacted granular polycrystalline silicon; Be specially: utilize the reactor furnace body heater that reactor drum is heated to the required temperature of reaction, hydrogen gets into reactor drum from air chamber through the hydrogen grid distributor, and trichlorosilane gas directly feeds in the reactor drum; Hydrogen contacts with trichlorosilane and generates granular polycrystalline silicon; High-purity silicon powder feeds from the top, and the polysilicon deposition that the reaction back generates obtains the high-purity silicon powder particle on high-purity silicon powder; Derive from the bottom this high-purity silicon powder particle back of growing up, and unreacted gas and high purity granular are expelled to subsequent processing to carry out gas and separate with solid and recycle from the top.
But; In the device of above-mentioned report, be equally distributed owing to be used to feed the through hole of hydrogen in the hydrogen grid distributor, the hydrogen gas stream that gets in the reactor drum is steady; Therefore the granular polycrystalline silicon that in reactor drum, generates is prone on the wall attached to reactor drum, and causing can not continuous production.
The utility model content
In view of this, the technical problem that the utility model will solve is to provide a kind of fluidized-bed reactor, and when utilizing this device to prepare granular polycrystalline silicon, granular polycrystalline silicon is difficult on the wall attached to reactor drum.
In order to solve above technical problem; The utility model provides a kind of fluidized-bed reactor; Comprise housing; Be arranged at silica flour opening for feed, nitrogen inlet, hydrogen inlet, hydrogen distribution apparatus, organic raw material gas distribution tube, well heater, tail gas outlet and products export on the said housing, it is characterized in that
Said hydrogen distribution apparatus comprises grid distributor, through the distribution rings that web member is connected with said grid distributor outer rim, said grid distributor has a plurality of through holes along thickness direction, forms space part between the periphery of said distribution rings and said grid distributor.
Preferably, said web member is 4.
Preferably, said a plurality of through hole is arranged at the center of said grid distributor and all around respectively.
Preferably, the said through-hole aperture that is arranged at the grid distributor center is greater than being arranged at grid distributor through-hole aperture all around.
Preferably, the said grid distributor through hole all around that is arranged at becomes regular hexagon to arrange.
Preferably, the area of said space part is greater than the area of said through hole.
Preferably, said organic raw material gas distribution tube is provided with two rounds, and said hole distributes along the axis direction straight line.
Preferably, said two rounds become 180 degree.
Preferably, an end of said organic raw material gas distribution tube sealing.
The utility model provides a kind of fluidized-bed reactor; Comprise housing; Be arranged at silica flour opening for feed, organic raw material gas inlet, nitrogen inlet, hydrogen inlet, hydrogen distribution apparatus, well heater, tail gas outlet and products export on the said housing; Said hydrogen distribution apparatus comprises grid distributor, through the distribution rings that web member is connected with said grid distributor outer rim, said grid distributor has a plurality of through holes along thickness direction, forms space part between the periphery of said distribution rings and said grid distributor.Compared with prior art; The hydrogen distribution apparatus properly distributed that the utility model adopts hydrogen owing to form space part between the periphery of distribution rings and grid distributor in the hydrogen distribution apparatus of the utility model, the area of this space part is bigger than the area of the through hole of grid distributor; Therefore; The amounts of hydrogen that in the working process of this fluidized-bed reactor, feeds from space part is bigger than the amounts of hydrogen that feeds from through hole, has formed from the air-flow of reactor drum marginal flow to reactor center, thereby has made the polycrysalline silcon that is positioned at reactor drum edge float towards the center of reactor drum with this air-flow; Avoided having realized continuous production on the wall of polycrysalline silcon attached to reactor drum.
Description of drawings
The structural representation of the fluidized-bed reactor that Fig. 1 provides for the utility model embodiment;
The upward view of the hydrogen distribution apparatus that Fig. 2 provides for the utility model embodiment;
The vertical view of the hydrogen distribution apparatus that Fig. 3 provides for the utility model embodiment;
The front view of the hydrogen distribution apparatus that Fig. 4 provides for the utility model embodiment;
Fig. 5 is that A-A among Fig. 1 is to view;
The structural representation of the organic raw material gas distribution tube that Fig. 6 provides for the utility model embodiment.
Embodiment
Carry out clear, intactly description in the face of the technical scheme among the utility model embodiment down, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
The utility model discloses a kind of fluidized-bed reactor; Like Fig. 1, Fig. 2, Fig. 3 and shown in Figure 4; Comprise housing 105; Be arranged at silica flour opening for feed 108, nitrogen inlet 106, hydrogen inlet 102, hydrogen distribution apparatus 103, organic raw material gas distribution tube 104, well heater 107, tail gas outlet 111 and products export 112 on the housing 105; Hydrogen distribution apparatus 103 comprises grid distributor 203, through the distribution rings 201 that web member 202 is connected with grid distributor 203 outer rims, grid distributor 203 has a plurality of through holes along thickness direction, forms space part between the periphery of distribution rings 201 and grid distributor 203.
As shown in Figure 1, hydrogen distribution apparatus 103 is arranged in the housing 105, and housing 105 is divided into hydrogen air chamber 101 and settling pocket 109.In addition, also be provided with explosion-proof relief mouth 110 on the housing 105, explosion-proof relief mouth 110 and tail gas outlet 111 are preferably disposed on the top or the upper lateral part of housing 105.Silica flour opening for feed 108 is preferably disposed on the middle part of housing 105, and wherein, fluidized-bed reactor also preferably includes silica flour feed-pipe 113, and silica flour feed-pipe 113 feeds in the housing 105 through silica flour opening for feed 108.The silica flour opening for feed 108 that is arranged on the housing 105 is preferably 2.The well heater 107 that is arranged on the housing 105 is preferably 2, the well heater 107 preferred electric heaters that adopt.Products export 112 and hydrogen inlet 102 are arranged at the bottom and the side bottom of housing respectively.As shown in Figure 1, hydrogen gets in the hydrogen air chamber 101 through hydrogen inlet 102, and the hydrogen in the hydrogen air chamber gets in the settling pocket 109 through hydrogen distribution apparatus 103 then.Amounts of hydrogen in the hydrogen air chamber 101 that the utility model gets into hydrogen inlet 102 does not have special restriction, can adopt hydrogen feeding amount well known to those skilled in the art, and the hydrogen that feeds from hydrogen inlet 102 has guaranteed air pressure constant of hydrogen air chamber.
Fig. 2, Fig. 3 Fig. 4 are respectively upward view, vertical view and the front view of hydrogen distribution apparatus.The utility model does not have special restriction to the number of the web member that is used to connect grid distributor and distribution rings; Be preferably 4; These 4 web members are 90 degree successively; This web member can adopt web member well known to those skilled in the art, preferably adopts the less web member of volume, can adopt modes such as welding for the mode of connection of web member and grid distributor, distribution rings.The internal diameter of distribution rings and the difference of external diameter are less, and preferred, the difference of internal diameter and external diameter is 0.1～3cm, more preferably 0.5～2cm.
A plurality of through holes of grid distributor 203 preferably are arranged at the center of grid distributor 203 and all around respectively, wherein, are arranged at the aperture of through hole 205 apertures at grid distributor 203 centers greater than the through hole 204 around being distributed in.Be arranged at grid distributor 203 through hole all around and closely arrange the feeding that is used for hydrogen, be preferably regular hexagon, the aperture of each through hole is preferably identical.The aperture that is arranged at grid distributor through hole all around is less, is preferably 0.2～3cm, more preferably 0.5～2cm; The product that the through hole that is arranged at the center is used for fluidized-bed reactor is generated is exported, and preferred, the through hole that will be arranged at the grid distributor center through product output channel 114 is connected with products export 112.The aperture that is arranged at the through hole 205 at grid distributor center preferably increases progressively along axis direction, and is bigger near the aperture of hydrogen air chamber 101 1 ends, less near the aperture of settling pocket 109 1 ends, the smooth output of the product that helps generating.Form space part between the periphery of distribution rings 201 and grid distributor 203, the area of said space part is greater than the area of said through hole.The thickness of distribution rings 201 can be identical with the thickness of grid distributor 203, also can be different.The cross section of the grid distributor 203 that the utility model adopts is preferably circle, and the cross section of distribution rings 201 is preferably annular.
Like Fig. 2, Fig. 3 and shown in Figure 4, owing to forming space part 206 between the periphery of distribution rings 201 in the hydrogen distribution apparatus 103 of the utility model and grid distributor 203, the area of this space part is compared greatly with the area of the through hole of grid distributor.Simultaneously, because the hydrogen gas pressure in the hydrogen air chamber 101 is constant, therefore; In the working process of this fluidized-bed reactor; Because the amounts of hydrogen that space part feeds is bigger than the amounts of hydrogen that feeds from through hole, formed from the air-flow of reactor drum marginal flow, thereby the polycrysalline silcon that is positioned at reactor drum edge floats towards the center of reactor drum with this air-flow to reactor center; On the wall of polycrysalline silcon of having avoided generating, realized continuous production attached to reactor drum.Simultaneously; Because the hydrogen gas pressure in the hydrogen air chamber 101 is a steady state value; Should guarantee that the reaction mass the settling pocket 109 of fluidized-bed reactor was the state of rolling all the time from hydrogen of the through hole of hydrogen distribution apparatus and space part feeding; And can not drop in the hydrogen air chamber, make this fluidized-bed reactor be in normal, safe state all the time.
As shown in Figure 5, fluidized-bed reactor preferably includes organic unstripped gas distribution pipe 104, and the utility model does not have particular restriction to the number of machine unstripped gas distribution pipe 104, is preferably 4.As shown in Figure 6, the organic raw material gas distribution tube is provided with two rounds 601, and hole 601 distributes along the axis direction straight line, and wherein, said two rounds become 180 degree, and this becomes the preferably alignment in the horizontal direction of two rounds of 180 degree.One end of organic raw material gas distribution tube 104 is used for the feeding of organic raw material gas, and the other end is by sealing member 602 sealings, and the organic raw material gas that gets into organic raw material gas distribution tube 104 gets in the fluidized-bed reactor through two rounds.Because organic raw material gas gets in the fluidized-bed reactor through a plurality of holes, helps organic raw material gas and hydrogen and mixes, and makes reaction more abundant, said organic raw material gas is preferably trichlorosilane gas.
In the fluidized-bed reactor working process, the nitrogen that feeds through nitrogen inlet 106 is preferably hot nitrogen, and this hot nitrogen and well heater 107 to the fluidized-bed heating, are worked along both lines jointly, and heat-up time is shorter.Utilize well heater 107 and hot nitrogen to be heated to 900～1050 ℃ for jointly the reactor reaction section, heat used nitrogen and get into next operation through tail gas outlet 111.When reactor drum is heated to 900～1050 ℃ of temperature of reaction; Hydrogen is fed hydrogen air chamber 101 through hydrogen inlet 102; Hydrogen gets in the reactor drum through the distribution of hydrogen distribution apparatus 103; Simultaneously trichlorosilane gas gets into reactor drums through organic raw material gas distribution tube 104 and mixes with hydrogen and carry out chemical reaction SiHCl3+H2 → Si+3HCl; The polysilicon that generates is attached on the high-purity silicon powder of coming in from 108 conveyings of silica flour opening for feed, and particle increases gradually, finally forms required polycrysalline silcon.The hydrogen distribution apparatus properly distributed that the utility model adopts hydrogen; Owing to form space part between the periphery of distribution rings and grid distributor in the hydrogen distribution apparatus of the utility model; The polycrysalline silcon that generates floats towards the center of reactor drum with the hydrogen that gets into through space part; Deposit to outlet for product 112 dischargings through settling pocket 109, realize continuous production.In the production unreacted completely gas get into separation and the recycling that subsequent processings carry out gas-solid by tail gas outlet 111.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (9)
1. a fluidized-bed reactor comprises housing, is arranged at silica flour opening for feed, nitrogen inlet, hydrogen inlet, hydrogen distribution apparatus, organic raw material gas distribution tube, well heater, tail gas outlet and products export on the said housing, it is characterized in that,
Said hydrogen distribution apparatus comprises grid distributor, through the distribution rings that web member is connected with said grid distributor outer rim, said grid distributor has a plurality of through holes along thickness direction, forms space part between the periphery of said distribution rings and said grid distributor.
2. fluidized-bed reactor according to claim 1 is characterized in that, said web member is 4.
3. fluidized-bed reactor according to claim 1 is characterized in that, said a plurality of through holes are arranged at the center of said grid distributor and all around respectively.
4. fluidized-bed reactor according to claim 3 is characterized in that, the said through-hole aperture that is arranged at the grid distributor center is greater than being arranged at grid distributor through-hole aperture all around.
5. fluidized-bed reactor according to claim 3 is characterized in that, the said grid distributor through hole all around that is arranged at becomes regular hexagon to arrange.
6. fluidized-bed reactor according to claim 1 is characterized in that the area of said space part is greater than the area of said through hole.
7. fluidized-bed reactor according to claim 1 is characterized in that, said organic raw material gas distribution tube is provided with two rounds, and said hole distributes along the axis direction straight line.
8. fluidized-bed reactor according to claim 7 is characterized in that, said two rounds become 180 degree.
9. fluidized-bed reactor according to claim 7 is characterized in that, the end sealing of said organic raw material gas distribution tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203005456U CN202175562U (en) | 2011-08-18 | 2011-08-18 | Fluidized bed reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203005456U CN202175562U (en) | 2011-08-18 | 2011-08-18 | Fluidized bed reactor |
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| Publication Number | Publication Date |
|---|---|
| CN202175562U true CN202175562U (en) | 2012-03-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011203005456U Expired - Fee Related CN202175562U (en) | 2011-08-18 | 2011-08-18 | Fluidized bed reactor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103495366A (en) * | 2013-10-15 | 2014-01-08 | 江苏中圣高科技产业有限公司 | Granular polycrystalline silicon fluidized bed reactor |
| CN104096519A (en) * | 2014-07-28 | 2014-10-15 | 中国科学院宁波材料技术与工程研究所 | Fluidized bed reactor and application thereof |
| CN111228103A (en) * | 2020-01-14 | 2020-06-05 | 上海理工大学 | Hand skin care instrument based on fluidized bed principle |
| CN112279256A (en) * | 2020-10-23 | 2021-01-29 | 淮阴工学院 | Trichlorosilane fluidized bed reactor |
-
2011
- 2011-08-18 CN CN2011203005456U patent/CN202175562U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103495366A (en) * | 2013-10-15 | 2014-01-08 | 江苏中圣高科技产业有限公司 | Granular polycrystalline silicon fluidized bed reactor |
| CN104096519A (en) * | 2014-07-28 | 2014-10-15 | 中国科学院宁波材料技术与工程研究所 | Fluidized bed reactor and application thereof |
| CN104096519B (en) * | 2014-07-28 | 2017-09-12 | 中国科学院宁波材料技术与工程研究所 | Fluidized-bed reactor and its application |
| CN111228103A (en) * | 2020-01-14 | 2020-06-05 | 上海理工大学 | Hand skin care instrument based on fluidized bed principle |
| CN112279256A (en) * | 2020-10-23 | 2021-01-29 | 淮阴工学院 | Trichlorosilane fluidized bed reactor |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120328 Termination date: 20160818 |
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| CF01 | Termination of patent right due to non-payment of annual fee |