CN203443900U - Substrate detection device - Google Patents
Substrate detection device Download PDFInfo
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- CN203443900U CN203443900U CN201320362852.6U CN201320362852U CN203443900U CN 203443900 U CN203443900 U CN 203443900U CN 201320362852 U CN201320362852 U CN 201320362852U CN 203443900 U CN203443900 U CN 203443900U
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Abstract
The utility model discloses a substrate detection device which comprises a checking part, a measuring part and a judging part, wherein the checking part and the measuring part are arranged side by side; the checking part is used for checking a substrate to check out a defect and comprises image acquisition modules for acquiring a grey scale value of the substrate and a first bracket for carrying the image acquisition modules; the measuring part is used for measuring the defect of the substrate and comprises an image measurement module for acquiring a feature value of the substrate and a second bracket for carrying the image measurement module; the judging part is connected with the checking part and the measuring part respectively; the measuring part is used for measuring a feature value of the defected position determined by the checking part and judging the grade of the defect according to the feature value of the defected position. According to the substrate detection device, checking equipment and measuring equipment are integrated, rather than being separated in the conventional structure; the grade of the defect can be automatically judged according to a corresponding relation between the grey scale value of the defected position and the feature value of the substrate; therefore, the judgment time is saved, and an error caused by manual judgment can be reduced.
Description
Technical field
The utility model relates to a kind of substrate detection apparatus, and described pick-up unit integrates inspection, measures and judge defect function.
Background technology
Color membrane substrates is the key component of liquid crystal flat panel display (Liquid Crystal Display) colorize.Liquid crystal flat panel display is non-active luminous assembly, the demonstration of its color must see through inner backlight module (penetrating type LCD) or outside environment incident light (reflection-type or semi penetration type LCD) provides light source, the drive IC of arranging in pairs or groups again and liquid crystal are controlled and are formed GTG demonstration, R, the G, the B color layer that then see through colored filter provide form and aspect, form colored display frame.The basic structure of color membrane substrates is by glass substrate 01, black matrix" 02, color resin layer 03, protective seam 04, and the color film substrate structure of general penetrating LCD as shown in Figure 1.
Color membrane substrates inevitably can produce gross imperfection in process of production, and the formation of defect is the inhomogeneity due to thickness.Due to PR film (photoresist on color membrane substrates, photoresist, be the color resin layer in color membrane substrates) color anomaly that causes of uneven thickness one, weight differs, the defect of menace level also can affect color membrane substrates product quality, once therefore finding that there is defect just need to carry out the judgement of defect rank immediately.General defect rank is to exist abnormal degree to judge according to the characteristic value of the characteristic value of defect area and normal region.Conventional defect rank decision method is that defect inspection machine check goes out after defect at present, the detection of taking away again after production completes, is mainly the measurement of carrying out characteristic value, then judges defect rank according to the measurement result of characteristic value, judgement flow process roughly as shown in Figure 2, specifically comprises the following steps:
S1, checkout facility are found defect;
S2, measuring equipment are measured defect;
S3, slip-stick artist judge defect according to measurement data.
The defect rank decision method of above-mentioned routine is not only wasted the plenty of time but also is easily occurred bad in batches.Two equipment that separate while checking defect, measurement defect, and check and can only find defect, measure the effect of only playing simple DATA REASONING, and judge that defect is according to the characteristic value data of check result and measurement, to carry out artificial judgement by slip-stick artist, because artificial decision process is to judge according to slip-stick artist's experience, very easily there is error, last defect rank is judged and also will be produced comparatively serious impact, and artificially decision process need expend the long period, be difficult to improve the speed of judging defect rank.
Utility model content
(1) technical matters that will solve
For above-mentioned defect, the technical problems to be solved in the utility model is how the integration of equipments of determining defects to be integrated, and reduces the generation of bad product as far as possible, defect rank is judged automatically simultaneously, improves the efficiency of judging defect rank.
(2) technical scheme
For addressing the above problem, the utility model provides a kind of substrate detection apparatus, specifically comprises: inspection portion, measurement section and detection unit;
Described inspection portion and described measurement section are set up in parallel, wherein said inspection portion is for checking and detect defect to described substrate, comprise image capture module and for the first support of load image acquisition module, described image capture module obtains the gray-scale value of substrate;
Described measurement section is for measuring the defect of described substrate, comprises image measurement module and for the second support of load image measurement module, described image measurement module is obtained the characteristic value of substrate;
Described detection unit is connected with described measurement section with described inspection portion respectively, defective locations is determined according to gray-scale value in described inspection portion, described detection unit is given described measurement section by described defective locations communication, described measurement section is carried out characteristic value to described defective locations and is measured defective locations characteristic value, and described detection unit is judged the grade of defect again according to described defective locations characteristic value.
Further, described substrate detection apparatus also comprises:
Board, described the first support and described the second support are all inverse u shape and are fixed on described board;
Described the first support and/or described the second support include two legs and a support bar, the two ends of described support bar are fixedly connected with the upper end of described two legs, the lower end of described two legs is fixedly mounted on described board, described image capture module is arranged on the support bar of described the first support, and described image measurement module is arranged on the support bar of described the second support.
Further, described detection unit comprises communication module and determination module, and described communication module is connected with the image capture module of described inspection portion and the image measurement module of described measurement section respectively.
Further, described image capture module comprises at least one charge coupled cell imageing sensor, and described image measurement module comprises at least one charge coupled cell imageing sensor.
Further, described image capture module comprises three charge coupled cell imageing sensors, and described image capture module is fixedly installed on the support bar of described the first support; Described image measurement module comprises a charge coupled cell imageing sensor, and described image measurement module is arranged on the support bar of described the second support movably, and described image measurement module can move along the support bar of described the second support.
Further, described substrate detection apparatus also comprises:
Transmission unit, is set in parallel on described board, can on described board, move forward and backward, for carrying with transmit substrate to be detected.
Further, described board periphery is provided with scale, and the scale on described board is compared with the substrate edges being placed on described transmission unit, sets up the corresponding relation of substrate coordinate and board coordinate.
Further, charge coupled cell imageing sensor in described inspection portion obtains the image of described substrate, according to the difference between the gray-scale value of described defective locations and the gray-scale value of described substrate normal region, determine defective locations, and the gray-scale value of described defective locations and described defective locations is sent to described determination module by described communication module.
Further, described detection unit is given described measurement section by described defective locations communication, charge coupled cell imageing sensor in described measurement section carries out characteristic value measurement to described defective locations, obtain described defective locations characteristic value, and described defective locations characteristic value is sent to described determination module by described communication module again.
Further, described determination module is determined defect rank according to the difference between the characteristic value of normal region on described defective locations characteristic value and described substrate, and according to the corresponding relation building database of the gray-scale value of described defective locations and described defective locations characteristic value, defective locations characteristic value and described defect rank in described database have matching relationship.
(3) beneficial effect
The utility model proposes a kind of substrate detection apparatus, change existing pick-up unit and will check and measure the structure of independent design, by defect inspection equipment and defectoscopy integration of equipments one, by the gray-scale value of defective locations and the corresponding relation of substrate properties value, complete the automatic judgement to defect rank, minimizing is because waiting for the production line free time causing, improve the production capacity of production line, can also reduce the error due to artificial judgement generation, improve the precision of judging.
Accompanying drawing explanation
Fig. 1 is color film substrate structure schematic diagram;
Fig. 2 judges the method flow diagram of defect in prior art;
Fig. 3 is the structural representation of a kind of substrate detection apparatus of the utility model;
Fig. 4 is the structural representation of inspection portion in a kind of substrate detection apparatus of the utility model;
Fig. 5 is the structural representation of measurement section in a kind of substrate detection apparatus of the utility model;
Fig. 6 is the schematic diagram of board upper surface in the utility model.
Wherein respectively number representative structure as follows:
01, glass substrate, 02, black matrix", 03, color resin layer, 04, protective seam,, 10, inspection portion, 20, measurement section, the 11, first support, 12, image capture module, the 21, second support, 22, image measurement module, 40, board, 50, transmission unit.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used for illustrating the utility model, but are not used for limiting scope of the present utility model.
A kind of substrate detection apparatus is provided in the utility model embodiment, has formed structural representation as shown in Figure 3, specifically comprised:
Detection unit is connected with measurement section 20 with inspection portion 10 respectively, defective locations is determined according to gray-scale value in inspection portion 10, detection unit by defective locations communication to measurement section 20,20 pairs of defective locations of measurement section carry out characteristic value and measure defective locations characteristic value, and detection unit is judged the grade of defect again according to defective locations characteristic value.Detection unit comprises communication module and determination module, and communication module is connected with the image capture module 12 of inspection portion 10 and the image measurement module 22 of measurement section 20 respectively.
The substrate detection apparatus that the present embodiment provides also comprises: board 40, the first support 11 and the second support 21 are all inverse u shape and are fixed on board 40, the first support 11 and the second support 21 include two legs and a support bar, the two ends of support bar are fixedly connected with the upper end of two legs, and the lower end of two legs is fixedly mounted on board 40.Image capture module 12 is arranged on the support bar of the first support 11, comprises at least one charge coupled cell imageing sensor.Preferably scheme is that image capture module 12 comprises three charge coupled cell imageing sensors in the present embodiment, can realize the comprehensive inspection of substrate on base station 40, and image capture module 12 is fixedly installed on the support bar of the first support 11.Image measurement module 22 is arranged on the support bar of the second support 21, comprises at least one charge coupled cell imageing sensor.Preferably scheme is that image measurement module 22 comprises a charge coupled cell imageing sensor in the present embodiment, and be arranged at movably on the support bar of the second support 21, can move along the support bar of the second support 21, to facilitate after determining defective locations, in time defective locations place is carried out to the measurement of characteristic value.It should be noted that the first support of using in the present embodiment and the Main Function of the second support are load image acquisition module and image measurement module, lower end is fixed on board, and the height of the first support and the second support can also lifting.
The substrate detection apparatus that the present embodiment provides also comprises: transmission unit 50, be set in parallel on board 40, can on board 40, move forward and backward, for carrying with transmit substrate to be detected, transmission unit 50 can be independent design with board 40, can also be the structure that is designed to integral type.Transmission unit 50 on board 40 drives substrate to move along fore-and-aft direction, thereby guarantees in the scope of substrate each region on board 40 in checking and measuring.Board 40 peripheries are provided with scale, and the scale on board 40 is compared with the substrate edges being placed on transmission unit 50, sets up the corresponding relation of substrate coordinate and board coordinate, and the schematic diagram of board upper surface as shown in Figure 6.By image capture module 12, catch image, according to gray-scale value, find out the border of substrate, set up the corresponding relation of substrate coordinate and board coordinate, to facilitate, subsequent substrate is measured.
Charge coupled cell imageing sensor in inspection portion 10 obtains the image of substrate, according to the difference between the gray-scale value of defective locations and the gray-scale value of substrate normal region, determine defective locations, obtain the gray-scale value of defective locations, and the gray-scale value of defective locations and defective locations is sent to determination module by communication module.Determination module is transferred to measurement section 20 by the definite defective locations in inspection portion 10, charge coupled cell imageing sensor in measurement section 20 carries out characteristic value measurement to defective locations on substrate, obtain defective locations characteristic value, and this defective locations characteristic value is sent to determination module by communication module again.Determination module is determined defect rank according to the difference between the characteristic value of normal region on defective locations characteristic value and substrate, whether and it is qualified to judge this substrate, and according to the corresponding relation building database of the gray-scale value of defective locations and defective locations characteristic value, defective locations characteristic value and defect rank in database have matching relationship.
Wherein determination module is judged based on computing machine, inspection portion just sends to determination module by defective locations after determining defective locations, determination module is determined the particular location that defect exists on color membrane substrates after receiving the definite defective locations in inspection portion, send defective locations to measurement section again, measurement section is carried out characteristic value measurement with regard to no longer needing to the monoblock region of substrate, and only need to find defective locations, and image measurement module is located to defective locations place by the second support-moving, defective locations place is carried out to characteristic value measurement.Wherein characteristic value is one of color membrane substrates product main performance index, the characteristic value of measuring comprises: BM(Black Matrix, black matrix) technique is film thickness value, RGB(is red, green, blue resins) technique is thickness and chromatic value, OC(Overcoat, flatness layer), PS(Post Spacer, chock insulator matter) technique is film thickness value.Complete after the measurement of such one group of defect location and characteristic value, just by the corresponding relation of the gray-scale value of this group defective locations and defect characteristics value, and the matching relationship of defect characteristics value and defect rank adds in database.
It should be noted that this database can in use add gradually above-mentioned corresponding relation and matching relationship and set up, can be also that data source in database is directly used when abundant.If database is to use in the process of setting up, when detection unit receives the gray-scale value of defective locations again, the gray-scale value of existing defective locations in the gray-scale value of the defective locations of reception and database is contrasted, if there is the gray-scale value of the defective locations identical with the gray-scale value of the defective locations receiving in database, direct according to the gray-scale value of the defective locations in database with and determine defect rank with the matching relationship of defect rank, otherwise also need to receive the measurement section characteristic value corresponding with the gray-scale value of this defective locations, determine new defect rank, and the gray-scale value of the defective locations of reception and new defect rank are added in database.After Database, the gray-scale value that detection unit just can provide according to inspection portion directly determines the grade of defect according to the matching relationship of the corresponding relation of the gray-scale value of defective locations in database and defective locations characteristic value and defective locations characteristic value and defect rank, characteristic value data without measurement section, improve the judgement speed of defect, save time, reduce defective products and occur.
Simultaneously in order to improve arithmetic speed, the computing machine that determination module goes out can be distributed to many computing machines by the gray-scale value obtaining and characteristic value and process simultaneously, the matching relationship of the corresponding relation of the gray-scale value of defective locations and defective locations characteristic value and defective locations characteristic value and defect rank is saved in database, when checking out defect, can directly judge, save the plenty of time.
A kind of substrate detection equipment that the present embodiment provides, changed and in prior art, checked defect and measure defect and divide the structure being arranged, design a kind of will inspection, the equipment that the function of measuring and judging is integrated in one, can carry out grade judgement to defect, by the gray-scale value of defective locations and the corresponding relation of substrate properties value, complete the automatic judgement to defect rank, both saved the judgement time, the gross imperfection of energy Rapid Detection color membrane substrates, minimizing is because waiting for the production line free time causing, improve the production capacity of production line, can also reduce the error of judging generation due to artificial, improve the precision of judging.
Above embodiment is only for illustrating the utility model; and be not limitation of the utility model; the those of ordinary skill in relevant technologies field; in the situation that not departing from spirit and scope of the present utility model; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (10)
1. a substrate detection apparatus, is characterized in that, specifically comprises: inspection portion, measurement section and detection unit;
Described inspection portion and described measurement section are set up in parallel, wherein said inspection portion is for checking and detect defect to described substrate, comprise image capture module and for the first support of load image acquisition module, described image capture module obtains the gray-scale value of substrate;
Described measurement section is for measuring the defect of described substrate, comprises image measurement module and for the second support of load image measurement module, described image measurement module is obtained the characteristic value of substrate;
Described detection unit is connected with described measurement section with described inspection portion respectively, defective locations is determined according to gray-scale value in described inspection portion, described detection unit is given described measurement section by described defective locations communication, described measurement section is carried out characteristic value to described defective locations and is measured defective locations characteristic value, and described detection unit is judged the grade of defect again according to described defective locations characteristic value.
2. substrate detection apparatus according to claim 1, is characterized in that, described substrate detection apparatus also comprises:
Board, described the first support and described the second support are all inverse u shape and are fixed on described board;
Described the first support and/or described the second support include two legs and a support bar, the two ends of described support bar are fixedly connected with the upper end of described two legs, the lower end of described two legs is fixedly mounted on described board, described image capture module is arranged on the support bar of described the first support, and described image measurement module is arranged on the support bar of described the second support.
3. substrate detection apparatus according to claim 1 and 2, is characterized in that, described detection unit comprises communication module and determination module, and described communication module is connected with the image capture module of described inspection portion and the image measurement module of described measurement section respectively.
4. substrate detection apparatus according to claim 3, is characterized in that, described image capture module comprises at least one charge coupled cell imageing sensor, and described image measurement module comprises at least one charge coupled cell imageing sensor.
5. substrate detection apparatus according to claim 4, is characterized in that, described image capture module comprises three charge coupled cell imageing sensors, and described image capture module is fixedly installed on the support bar of described the first support; Described image measurement module comprises a charge coupled cell imageing sensor, and described image measurement module is arranged on the support bar of described the second support movably, and described image measurement module can move along the support bar of described the second support.
6. substrate detection apparatus according to claim 2, is characterized in that, described substrate detection apparatus also comprises:
Transmission unit, is set in parallel on described board, can on described board, move forward and backward, for carrying with transmit substrate to be detected.
7. substrate detection apparatus according to claim 6, is characterized in that, described board periphery is provided with scale, and the scale on described board is compared with the substrate edges being placed on described transmission unit, sets up the corresponding relation of substrate coordinate and board coordinate.
8. substrate detection apparatus according to claim 4, it is characterized in that, charge coupled cell imageing sensor in described inspection portion obtains the image of described substrate, according to the difference between the gray-scale value of described defective locations and the gray-scale value of described substrate normal region, determine defective locations, and the gray-scale value of described defective locations and described defective locations is sent to described determination module by described communication module.
9. substrate detection apparatus according to claim 8, it is characterized in that, described detection unit is given described measurement section by described defective locations communication, charge coupled cell imageing sensor in described measurement section carries out characteristic value measurement to described defective locations, obtain described defective locations characteristic value, and described defective locations characteristic value is sent to described determination module by described communication module again.
10. substrate detection apparatus according to claim 8 or claim 9, it is characterized in that, described determination module is determined defect rank according to the difference between the characteristic value of normal region on described defective locations characteristic value and described substrate, and according to the corresponding relation building database of the gray-scale value of described defective locations and described defective locations characteristic value, defective locations characteristic value and described defect rank in described database have matching relationship.
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| CN201320362852.6U CN203443900U (en) | 2013-06-24 | 2013-06-24 | Substrate detection device |
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| CN201320362852.6U CN203443900U (en) | 2013-06-24 | 2013-06-24 | Substrate detection device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107402218A (en) * | 2017-09-25 | 2017-11-28 | 武汉华星光电技术有限公司 | Microdefect detection method, device and the equipment of CF substrates |
| CN108291879A (en) * | 2016-05-18 | 2018-07-17 | 韩国机械研究院 | Base board defect detecting device and utilize its detection method |
| CN109387525A (en) * | 2017-08-09 | 2019-02-26 | 苏州精濑光电有限公司 | On a kind of film in film defect determination method |
| CN109444172A (en) * | 2018-12-13 | 2019-03-08 | 苏州卓融新能源科技有限公司 | A kind of automatic optical detection device and its method suitable for artificial intelligence detection PCB |
-
2013
- 2013-06-24 CN CN201320362852.6U patent/CN203443900U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108291879A (en) * | 2016-05-18 | 2018-07-17 | 韩国机械研究院 | Base board defect detecting device and utilize its detection method |
| CN109387525A (en) * | 2017-08-09 | 2019-02-26 | 苏州精濑光电有限公司 | On a kind of film in film defect determination method |
| CN107402218A (en) * | 2017-09-25 | 2017-11-28 | 武汉华星光电技术有限公司 | Microdefect detection method, device and the equipment of CF substrates |
| CN109444172A (en) * | 2018-12-13 | 2019-03-08 | 苏州卓融新能源科技有限公司 | A kind of automatic optical detection device and its method suitable for artificial intelligence detection PCB |
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Granted publication date: 20140219 |