CN203440098U - Silica powder conveying equipment and trichlorosilane synthesizing system with same - Google Patents
Silica powder conveying equipment and trichlorosilane synthesizing system with same Download PDFInfo
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- CN203440098U CN203440098U CN201320404475.8U CN201320404475U CN203440098U CN 203440098 U CN203440098 U CN 203440098U CN 201320404475 U CN201320404475 U CN 201320404475U CN 203440098 U CN203440098 U CN 203440098U
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Abstract
The utility model discloses silica powder conveying equipment and a trichlorosilane synthesizing system with the same. The silica powder conveying equipment comprises a drying tank suitable for drying silica powder and a feeding tank suitable for feeding the silica powder into a synthesizing furnace, wherein the feeding tank is connected with the drying tank; the feeding tank comprises a feeding tank body, a first nitrogen gas feed inlet and a silica powder outlet; a silica powder accommodating space is formed inside the feeding tank body; the first nitrogen gas feed inlet is formed in the feeding tank body and is suitable for feeding nitrogen gas into the silica powder accommodating space; the silica powder outlet is formed in the feeding tank body and is suitable for discharging the silica powder from the silica powder accommodating space. The silica powder conveying equipment is simple and easy to operate, can ensure stable and reliable running of the trichlorosilane synthesizing system and can improve the synthesizing efficiency.
Description
Technical field
The utility model relates to chemical field, particularly, and the system that the utility model relates to silica flour transmission equipment and has its synthesizing trichlorosilane.
Background technology
In trichlorosilane is synthetic, because silica flour hardness is large, serious wear to pipeline, valve, and trichlorosilane synthetic furnace one side has the corrosivess such as HCl, chlorosilane, if silica flour is carried and material or the process choice of feed system are improper, just there will be HCL to play a reversed role strong corrosion occurs, whole system cannot be safely and steadily run, shorten the life-span of silica flour delivery system device, and can greatly increase production cost.Traditional technique generally adopts the feeding manner charging of synthetic furnace middle part, and which silica flour reacts is taken out of synthetic furnace, causes the waste of raw material; Separately in drying process, only adopt external jacket type of heating; Drying effect is not good; And synthetic furnace is generally normal pressure synthesis, in fill process, preventing that HCL from existing some defects on playing a reversed role.
Therefore, the equipment about synthesizing trichlorosilane also has further improvement.
Utility model content
The utility model one of is intended to solve the problems of the technologies described above at least to a certain extent or at least provides a kind of useful business to select.For this reason, an object of the present utility model is the system that proposes a kind of silica flour transmission equipment and have its synthesizing trichlorosilane, this silica flour transmission equipment can reliable and stablely in trichlorosilane building-up process be carried silica flour in synthetic furnace, guarantees the normal operation of the system of synthesizing trichlorosilane.
Aspect one of the present utility model, the utility model proposes a kind of silica flour transmission equipment.According to embodiment of the present utility model, this equipment comprises: drying chamber, and described drying chamber is for dry described silica flour; And charging stock tank, described charging stock tank is connected with described drying chamber, and described charging stock tank is suitable for supplying with silica flour in synthetic furnace, and wherein, described charging stock tank comprises: charging stock tank body, limits silica flour spatial accommodation in described charging stock tank body; The first nitrogen feed mouth, described the first nitrogen feed mouth is arranged on described charging stock tank body, for supplying with nitrogen to described silica flour spatial accommodation; And silica flour outlet, described silica flour outlet is arranged on described charging stock tank body, for discharging silica flour from described silica flour spatial accommodation.
In addition, according to the silica flour transmission equipment of the utility model above-described embodiment, can also there is following additional technical characterictic:
In the utility model, described drying chamber has circulating nitrogen gas-deep fat heating component, and described silica flour is carried out to heat drying, can further improve thus the drying efficiency of silica flour.
In the utility model, between described drying chamber and described charging stock tank, be provided with the first valve.By the switch of valve, can control in charging stock tank and carry silica flour thus, can keep the pressure in charging stock tank simultaneously.
In the utility model, described charging stock tank further comprises: nitrogen feed control unit, and described nitrogen feed control unit is connected with described the first nitrogen feed mouth; And second valve, described the second valve is connected with described silica flour outlet.Can in charging stock tank, pass into nitrogen by nitrogen feed assembly thus, the silica flour in charging stock tank is pressurizeed, but pressure can open above-mentioned the second valve after acquiring a certain degree automatically, to silica flour is transferred out to charging stock tank.
In the utility model, above-mentioned silica flour handling equipment further comprises: the first cartridge filter, described the first cartridge filter is connected with described charging stock tank, for filtering receiving the nitrogen of discharging from described charging stock tank.Can avoid thus the nitrogen of discharging to environment, can avoid the waste of silica flour simultaneously.
In the utility model, above-mentioned silica flour handling equipment further comprises: transmit tank, described transmission tank is for holding the silica flour for the treatment of charging, wherein, described transmission tank has the second nitrogen feed mouth for supplying with nitrogen to described transmission tank, and described transmission tank is connected with described drying chamber.
In the utility model, described transmission tank is connected by pipeline with described drying chamber, and is provided with at least one thruster on described pipeline.According to embodiment of the present utility model, further comprise nitrogen pot, described nitrogen pot is connected with described thruster, the first nitrogen feed mouth and the second nitrogen feed mouth by nitrogen transfer line.Therefore, described thruster adopts nitrogen as propulsion source.Can realize thus concentrated phase and carry, save a large amount of delivering gas.
In the utility model, above-mentioned silica flour transfer equipment further comprises the second cartridge filter, and wherein, described the second cartridge filter is connected with described transmission tank, for the nitrogen of discharging from described transmission tank is filtered.The silica flour of carrying secretly in the nitrogen that can avoid thus discharging pollutes air, and the silica flour obtaining after filtering can also be recycled by the second cartridge filter.
In second aspect of the present utility model, the utility model proposes a kind of system for the synthesis of trichlorosilane, this system comprises: trichlorosilane synthetic furnace, described trichlorosilane synthetic furnace is suitable for utilizing silica flour and hydrogenchloride synthesizing trichlorosilane; Hydrogen chloride gas transfer line, described hydrogen chloride gas transfer line is connected with described trichlorosilane synthetic furnace, for supplying with hydrogen chloride gas to described trichlorosilane synthetic furnace; And foregoing silica flour transmission equipment, described silica flour transmission equipment is connected by described hydrogen chloride gas transfer line with described trichlorosilane synthetic furnace, for supplying with silica flour to described trichlorosilane synthetic furnace, wherein, described hydrogen chloride gas transfer line is connected with the silica flour outlet of described charging stock tank, to utilize hydrogen chloride gas to promote described silica flour, enter described trichlorosilane synthetic furnace, described hydrogen chloride gas transfer line is connected with the bottom feed mouth of described trichlorosilane synthetic furnace.The pressure that simultaneously guarantees charging stock tank is greater than the about 50kpa of feeding line, prevents that charging HCl from playing a reversed role to charging stock tank.
Utilize thus the system of above-mentioned synthesizing trichlorosilane can further improve the combined coefficient of trichlorosilane, and, the silica flour transmission equipment that said system comprises, this equipment can keep the lasting charging of stablizing of silica flour, simultaneously can also be according to the reaction needed in synthetic furnace, silica flour transmission equipment is regulated, to reach, control the inlet amount of silica flour and input speed etc.The operation of system continuous and effective can be improved thus, and then combined coefficient can be improved.
Additional aspect of the present utility model and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present utility model.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present utility model and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is according to the structural representation of an embodiment silica flour transmission equipment of the utility model.
Fig. 2 is according to the structural representation of an embodiment silica flour transmission equipment of the utility model.
Embodiment
Describe embodiment of the present utility model below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, be intended to for explaining the utility model, and can not be interpreted as restriction of the present utility model.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", orientation or the position relationship of indications such as " counterclockwise " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance or the implicit quantity that indicates indicated technical characterictic.Thus, one or more these features can be expressed or impliedly be comprised to the feature that is limited with " first ", " second ".In description of the present utility model, the implication of " a plurality of " is two or more, unless otherwise expressly limited specifically.
In the utility model, unless otherwise clearly defined and limited, the terms such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can understand as the case may be the concrete meaning of above-mentioned term in the utility model.
Aspect one of the present utility model, the utility model proposes a kind of silica flour transmission equipment.Below with reference to Fig. 1-2, specifically describe the silica flour transmission equipment of the utility model embodiment,
According to embodiment of the present utility model, this equipment comprises: drying chamber 100 and charging stock tank 200, charging stock tank 200 is connected with drying chamber 100.
Wherein, drying chamber 100 is for dry silica flour, and charging stock tank 200 is suitable for supplying with silica flour in synthetic furnace.
According to specific embodiment of the utility model, drying chamber 100 has circulating nitrogen gas-deep fat heating component, this assembly is arranged on the longitudinal center portion of drying chamber 100 internal spaces and the position of close drying chamber 100 outer walls inner sides, and this assembly can adopt cycling hot nitrogen and deep fat to carry out heat drying to silica flour thus.Inside and outside bilayer heats middle silica flour, can significantly improve drying efficiency, can also by control, pass into the flow of hot nitrogen, drying temperature is regulated and controled simultaneously, can meet thus the silica flour of difference amount is carried out to fully dry object, to further improve drying efficiency.
According to specific embodiment of the utility model, between drying chamber 100 and charging stock tank 200, by pipeline, be connected, on this pipeline, the first valve can be set.Can reach dried silica flour in drying chamber 100 is delivered in charging stock tank 200 by switch the first valve thus.
According to specific embodiment of the utility model, charging stock tank 200 can also comprise: charging stock tank body 210, nitrogen feed mouth 220 and silica flour outlet 230.In charging stock tank body 210, limit silica flour spatial accommodation, nitrogen feed mouth 220 is arranged on charging stock tank body, and for supplying with nitrogen to silica flour spatial accommodation, silica flour outlet 230 is arranged on charging stock tank body, for discharging silica flour from silica flour spatial accommodation.
According to embodiment of the present utility model, charging stock tank 200 can further include: nitrogen feed control unit 240 and the second valve 250, and nitrogen feed control unit 240 is connected with nitrogen feed mouth 220, and the second valve 250 is connected with silica flour outlet 230.According to specific embodiment of the utility model, the second valve 250 is one-way cock, when the pressure of the second valve 250 inner sides is pressure in charging stock tank 200 during higher than the about 50KPa of second valve outer side of door pressure, and this valve open.When second valve outer side of door pressure is during higher than the pressure of inner side, this valve closes.Silica flour in charging stock tank 200 directionally can be transferred out to charging stock tank 200 thus, can also effectively prevent from that the hydrogen chloride gas in the second valve 250 outsides and chlorosilane from playing a reversed role to enter charging stock tank 200 simultaneously, it is caused to corrosion.
According to embodiment of the present utility model, above-mentioned silica flour transmission equipment can further include: the first cartridge filter 300, the first cartridge filters 300 are connected with charging stock tank 200, for the nitrogen of discharging from charging stock tank 200 is filtered.
According to embodiment of the present utility model, above-mentioned silica flour transmission equipment further comprises: transmit tank 400, transmit tank 400 for holding the silica flour for the treatment of charging, wherein, transmit tank 400 and there is nitrogen feed mouth 410 for supplying with nitrogen to transmitting tank 400, transmit tank 400 and be connected with drying chamber 100.Utilize thus nitrogen to carry out drying treatment for propulsion source is delivered to drying chamber 100 by the silica flour in transmission tank 400.According to specific embodiment of the utility model, can be by regulating the intake of nitrogen control the pressure transmitting in tank 400, make to transmit silica flour in tank 400 enough to pressure so that realizing concentrated phase carries, save a large amount of delivering gas.
According to an embodiment of the present utility model, transmit tank 400 and be connected by pipeline with drying chamber 100.Conventionally the level attitude of drying chamber 100 transmits tank 400, therefore, to the interior conveying silica flour of drying chamber 100, also needs additionally to overcome certain gravity.For this reason, according to specific embodiment of the utility model, on the pipeline being connected with drying chamber 100 at above-mentioned transmission tank 400, be provided with at least one thruster.According to concrete example of the present utility model, further comprise nitrogen pot (not shown), nitrogen pot is connected with thruster, the first nitrogen feed mouth and the second nitrogen feed mouth by nitrogen transfer line.This thruster adopts nitrogen as propulsion source thus, can realize concentrated phase and carry, and saves a large amount of delivering gas, avoids line clogging, to further improve the transport efficiency of silica flour simultaneously.According to concrete example of the present utility model, can on above-mentioned pipeline, at interval of 1.2 meter amperes, fill a thruster, can effectively avoid line clogging thus, can reduce the frictional dissipation to pipeline simultaneously.
According to embodiment of the present utility model, above-mentioned silica flour transmission equipment further comprises the second cartridge filter 500, and wherein, the second cartridge filter 500 is connected with transmission tank 400, for the nitrogen of discharging from transmission tank 400 is filtered.The silica flour of carrying secretly in the nitrogen that can avoid thus discharging is to environment, after filtering, obtaining silica flour can also be recycled simultaneously, according to specific embodiment of the utility model, above-mentioned the first cartridge filter and the second cartridge filter can be merged into a cartridge filter, can save cost thus.According to specific embodiment of the utility model, the function of above-mentioned cartridge filter is also charging stock tank 200 and transmits tank 400 to reduce pressure.
According to an embodiment of the present utility model, below the concrete operation step of above-mentioned silica flour transmission equipment is described in detail, to better understand aforesaid device.
According to specific embodiment of the utility model, first, manually silica flour is added after bag-crusher, open valve silica flour is sent into and transmitted tank 400, when transmitting, when tank 400 is interior occurs high charge level, stop charging.Open nitrogen feed mouth 410 and supply with nitrogen to transmitting in tank 400, pressurize to transmission tank, now should the valve closes arranging between tank 400 and bag-crusher and the second cartridge filter 500 will be transmitted, to guarantee to transmit the pressure in tank 400, by regulating the inlet control pressure of nitrogen in 0.25Mpag left and right.Under this pressure, silica flour is delivered in the drying chamber 100 of eminence by nitrogen, transmits the thruster arranging on pipeline between tank 400 and drying chamber 100 simultaneously and can open, and can guarantee that thus silica flour carries unobstructed in pipeline.When transmitting the low material level of the interior appearance of tank 400, stop carrying, close the valve passing in nitrogen pipeline, open the valve transmitting between tank 400 and the second cartridge filter 500 simultaneously, to transmitting tank 400, reduce pressure, utilize 500 pairs of the second cartridge filters to filter from transmitting the nitrogen of tank 400 interior discharges simultaneously, reclaim the silica flour of wherein carrying secretly.
When silica flour is delivered in drying chamber 100, open circulating hot oil and hot nitrogen is dried silica flour, by controlling hot nitrogen flow, guarantee that in drying chamber, silica flour can be fully dry.After being dried fully, open again drying chamber 100 and charging stock tank 200 between sluice valve, under the effect of gravity, make silica flour enter in charging stock tank 200, when the silica flour material level of charging stock tank 200 reaches requirement (measuring by level gage), close drying chamber 100 and charging stock tank 200 between sluice valve, open the nitrogen feed control unit of charging stock tank 200, close simultaneously feed-pipe 200 is pressurizeed, when the pressure in charging stock tank 200 surpasses the second valve 250 outside pressure 50kpa of charging stock tank 200 bottoms, the second valve 250 is just opened or manual unlocking automatically, and carry silica flour charging (because this technique is from synthetic furnace bottom feed to synthetic furnace, before charging, guarantee enough nitrogen or HCL flow, assurance is delivered to synthetic furnace by silica flour), the speed of charging is carried out pressure adjusting according to the height of synthetic furnace bed to charging stock tank 200.In silica flour course of conveying, adopt corrosion-resistant cast steel to carry, be spaced a distance and use nitrogen to carry out boosting conveying, can realize reliable and stable concentrated phase silica flour and carry.After silica flour is carried, close the conveying that nitrogen feed control unit stops nitrogen, the second valve 250 is closed simultaneously, open the valve between charging stock tank 200 and the first cartridge filter 300, charging stock tank 200 is reduced pressure, the nitrogen of discharging is filtered simultaneously, reclaim the silica flour of wherein carrying secretly.
Above-mentioned silica flour transmission equipment utilizes concentrated phase mode of movement thus, makes device layout simple, and pipe wear is little, and personnel are easy and simple to handle; In synthetic furnace charging, adopt the heating of hot nitrogen fluidisation, guaranteed effective drying effect.
In second aspect of the present utility model, the utility model proposes a kind of system for the synthesis of trichlorosilane, this system specifically comprises: trichlorosilane synthetic furnace 600, hydrogen chloride gas transfer line 700 and silica flour transmission equipment above.
Trichlorosilane synthetic furnace 600 is suitable for utilizing silica flour and hydrogenchloride synthesizing trichlorosilane; Hydrogen chloride gas transfer line 700 is connected with trichlorosilane synthetic furnace 600, for supplying with hydrogen chloride gas to trichlorosilane synthetic furnace; Silica flour transmission equipment is connected by hydrogen chloride gas transfer line 700 with trichlorosilane synthetic furnace 600, for supplying with silica flour to trichlorosilane synthetic furnace.
According to an embodiment of the present utility model, above-mentioned hydrogen chloride gas transfer line 700 is connected with the silica flour outlet 230 of charging stock tank 200, to utilize hydrogen chloride gas to promote silica flour, enters trichlorosilane synthetic furnace.Avoid thus nitrogen to enter trichlorosilane synthetic furnace 600, introduce additional impurities.
According to specific embodiment of the utility model, above-mentioned hydrogen chloride gas transfer line 700 can be connected with the bottom feed mouth of trichlorosilane synthetic furnace 600, silica flour and hydrogenchloride can be entered from trichlorosilane synthetic furnace 600 bottoms thus, make silica flour and hydrogenchloride in trichlorosilane synthetic furnace, be boiling state, so that silica flour and hydrogenchloride fully react.Pressure in charging stock tank 200 is greater than the pressure in hydrogen chloride gas transfer line 700 and trichlorosilane synthetic furnace 600 simultaneously, can effectively avoid material (HCl and the chlorosilane) etching apparatus of playing a reversed role, extension device work-ing life, greatly reduce production cost, guaranteed the continuous and steady operation of whole production system simultaneously.
In the description of this specification sheets, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present utility model or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiment of the present utility model above, be understandable that, above-described embodiment is exemplary, can not be interpreted as restriction of the present utility model, those of ordinary skill in the art can change above-described embodiment in the situation that not departing from principle of the present utility model and aim in scope of the present utility model, modification, replacement and modification.
Claims (10)
1. a silica flour transmission equipment, is characterized in that, comprising:
Be suitable for the drying chamber of dry described silica flour; And
Be suitable for supplying with the charging stock tank of described silica flour in synthetic furnace, described charging stock tank is connected with described drying chamber,
Wherein, described charging stock tank comprises:
Charging stock tank body, limits silica flour spatial accommodation in described charging stock tank body;
The first nitrogen feed mouth, described the first nitrogen feed mouth is arranged on described charging stock tank body, and is suitable for supplying with nitrogen in described silica flour spatial accommodation; And
Silica flour outlet, described silica flour outlet is arranged on described charging stock tank body, and is suitable for discharging silica flour from described silica flour spatial accommodation.
2. equipment according to claim 1, is characterized in that, described drying chamber has circulating nitrogen gas-deep fat heating component.
3. equipment according to claim 1, is characterized in that, between described drying chamber and described charging stock tank, is provided with the first valve.
4. equipment according to claim 1, is characterized in that, described charging stock tank further comprises:
Nitrogen feed control unit, described nitrogen feed control unit is connected with described the first nitrogen feed mouth; And
The second valve, described the second valve is connected with described silica flour outlet,
Wherein, described the second valve is one-way cock.
5. equipment according to claim 1, is characterized in that, further comprises:
Be suitable for the first cartridge filter filtering receive the nitrogen of discharge from described charging stock tank, described the first cartridge filter is connected with described charging stock tank.
6. according to equipment claimed in claim 1, it is characterized in that, further comprise:
Be suitable for holding the transmission tank for the treatment of charging silica flour,
Wherein,
Described transmission tank has the second nitrogen feed mouth that is suitable for supplying with nitrogen in described transmission tank,
Described transmission tank is connected with described drying chamber.
7. equipment according to claim 6, is characterized in that, described transmission tank is connected by pipeline with described drying chamber, and is provided with at least one thruster on described pipeline.
8. equipment according to claim 7, is characterized in that, further comprises nitrogen pot, and described nitrogen pot is connected with described thruster, the first nitrogen feed mouth and the second nitrogen feed mouth by nitrogen transfer line.
9. equipment according to claim 6, is characterized in that, further comprises that the nitrogen being suitable for discharging from described transmission tank filters, reclaims the second cartridge filter of silica flour, and described the second cartridge filter is connected with described transmission tank.
10. for the synthesis of a system for trichlorosilane, it is characterized in that, comprising:
Trichlorosilane synthetic furnace, described trichlorosilane synthetic furnace is suitable for utilizing silica flour and hydrogenchloride synthesizing trichlorosilane;
Hydrogen chloride gas transfer line, described hydrogen chloride gas transfer line is connected with described trichlorosilane synthetic furnace, and is suitable for supplying with hydrogen chloride gas in described trichlorosilane synthetic furnace; And
Silica flour transmission equipment described in claim 1～9 any one, described silica flour transmission equipment is connected by described hydrogen chloride gas transfer line with described trichlorosilane synthetic furnace, and wherein, described hydrogen chloride gas transfer line is connected with the silica flour outlet of described charging stock tank;
Described hydrogen chloride gas transfer line is connected with the bottom feed mouth of described trichlorosilane synthetic furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320404475.8U CN203440098U (en) | 2013-07-08 | 2013-07-08 | Silica powder conveying equipment and trichlorosilane synthesizing system with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320404475.8U CN203440098U (en) | 2013-07-08 | 2013-07-08 | Silica powder conveying equipment and trichlorosilane synthesizing system with same |
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| CN203440098U true CN203440098U (en) | 2014-02-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320404475.8U Expired - Fee Related CN203440098U (en) | 2013-07-08 | 2013-07-08 | Silica powder conveying equipment and trichlorosilane synthesizing system with same |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103408022A (en) * | 2013-07-08 | 2013-11-27 | 昆明冶研新材料股份有限公司 | Silicon powder conveying equipment and system with same for synthesizing trichlorosilane |
| CN105712304A (en) * | 2014-12-02 | 2016-06-29 | 新特能源股份有限公司 | Apparatus for recovering nitrogen having been used for conveying of silicon powder |
| CN106766935A (en) * | 2016-12-19 | 2017-05-31 | 湖南顶立科技有限公司 | A kind of feed arrangement |
| CN110028071A (en) * | 2018-01-12 | 2019-07-19 | 新特能源股份有限公司 | The synthesizer of trichlorosilane |
-
2013
- 2013-07-08 CN CN201320404475.8U patent/CN203440098U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103408022A (en) * | 2013-07-08 | 2013-11-27 | 昆明冶研新材料股份有限公司 | Silicon powder conveying equipment and system with same for synthesizing trichlorosilane |
| CN103408022B (en) * | 2013-07-08 | 2016-03-30 | 昆明冶研新材料股份有限公司 | Silica flour transmission equipment and there is its system of synthesizing trichlorosilane |
| CN105712304A (en) * | 2014-12-02 | 2016-06-29 | 新特能源股份有限公司 | Apparatus for recovering nitrogen having been used for conveying of silicon powder |
| CN105712304B (en) * | 2014-12-02 | 2018-03-13 | 新特能源股份有限公司 | A kind of device for being reclaimed the nitrogen for having conveyed silica flour |
| CN106766935A (en) * | 2016-12-19 | 2017-05-31 | 湖南顶立科技有限公司 | A kind of feed arrangement |
| CN106766935B (en) * | 2016-12-19 | 2019-05-14 | 湖南顶立科技有限公司 | A kind of feeding device |
| CN110028071A (en) * | 2018-01-12 | 2019-07-19 | 新特能源股份有限公司 | The synthesizer of trichlorosilane |
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Granted publication date: 20140219 Termination date: 20160708 |