CN203426079U - Cleaning device - Google Patents
Cleaning device Download PDFInfo
- Publication number
- CN203426079U CN203426079U CN201320456546.9U CN201320456546U CN203426079U CN 203426079 U CN203426079 U CN 203426079U CN 201320456546 U CN201320456546 U CN 201320456546U CN 203426079 U CN203426079 U CN 203426079U
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- CN
- China
- Prior art keywords
- cleaning device
- scraper
- dust cover
- electrode
- rotating disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model provides a cleaning device. The cleaning device comprises a dust cover, a round guide rail, a scraper, a rolling shaft, a rotating disk and an operating rod, wherein the round guide rail is arranged on the inner wall of the dust cover; the rotating disk is arranged on the round guide rail through the rolling shaft; the scraper is arranged on the rotating disk; one end of the operating rod is connected with the rotating disk, and the other end of the operating rod stretches out of the dust cover. An electrode is covered by the dust cover, the rotating disk can be driven by shaking the operating rod, the rotating disk can rotate on the round guide rail through the rolling shaft, and the scraper can be driven to do uniform-force cleaning along a groove of the electrode; pollutant accumulated in the groove at the edge of the electrode can be completely cleaned as the scraper can rotate in uniform speed; meanwhile, the electrode is completely covered by the dust cover, thus the pollutant scrapped by the scraper cannot fall on other areas of a reaction chamber, and the cleanliness of the reaction chamber after being cleaned can be ensured.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of cleaning device.
Background technology
In semiconductor production process, wafer is positioned on the electrode (or electronics sucker) in reaction chamber conventionally, when carrying out deposit film or etched film, inevitably have thin film deposition or be scattered in electrode (or electronics sucker) above, cause electrode contaminated.In order to guarantee the cleanliness factor of reaction chamber, need regularly electrode to be cleared up, remove the pollutant of accumulation.
Please refer to Fig. 1, described electrode 10 is discoid, and its edge is provided with groove 11, is convenient to described electrode 10 to be arranged in reaction chamber; When pollutant is accumulated in described electrode 10 surface, also have in the groove 11 that pollutant is accumulated in described electrode 10 edges.Therefore,, when described electrode 10 is carried out to periodic cleaning, just need to clear up the groove 11 at described electrode 10 edges.Available technology adopting is used 20 pairs of described grooves 11 of ceramic pen to clear up manually, concrete, with described ceramic pen 20, gently scrape the groove 11 at described electrode 10 edges, the pollutant adhering to is above come off, when using described ceramic pen 20 gently to scrape described groove 11, also make as much as possible vaccum suction pipe 30 aim at the pollutant coming off simultaneously, when cleaning, absorb pollutant, with anti-pollution whole reaction chamber; Then, then with speckling with non-dust cloth described electrode 10 is cleaned.
Yet, due to artificial need while using 20 pairs of described electrodes 10 of ceramic pen to clear up carefully can not scratch described in electrode 10, therefore very consuming time; Moreover, reaction chamber limited space, ceramic pen 20 can not arbitrarily be shifted one's position at reaction chamber, easily causes the dynamics when scraping described electrode 10 inhomogeneous, edge groove 11 at described electrode 10 is understood the pollutant of residual thin layer to some extent, easily polluting wafer.
Utility model content
The purpose of this utility model is to provide a kind of cleaning device, can clear up completely the groove on electrode, and can not pollute reaction chamber.
To achieve these goals, the utility model proposes a kind of cleaning device, it is characterized in that, comprising:
Dust cover, circular guideway, scraper, the axis of rolling, rotating disc and action bars; Described circular guideway is arranged on the inwall of described dust cover; Described rotating disc is arranged on described circular guideway by the described axis of rolling; Described scraper is arranged on described rotating disc; Described action bars one end is connected with described rotating disc, and the other end extends to outside described dust cover.
Further, described scraper comprises handle of a knife and cutter head, and described cutter head is arranged on one end of handle of a knife, and the other end of handle of a knife is connected with described rotating disc.
Further, described scraper is two, is separately positioned on the two ends of described rotating disc diameter.
Further, the material of described scraper is pottery.
Further, described cleaning device also comprises vaccum suction pipe, and described vaccum suction pipe is connected with described dust cover.
Further, the material of described vaccum suction pipe is high pressure resistant transparent pressure particle board.
Further, described cleaning device also comprises scrapers adjustment devices, and described scrapers adjustment devices one end is connected with scraper, and the other end stretches out outside described dust cover.
Further, the material of described scrapers adjustment devices is stainless steel.
Further, the material of described dust cover is high pressure resistant transparent pressure particle board.
Further, the material of described circular guideway and the axis of rolling is high hardness wear-resisting steel.
Further, the material of described action bars is stainless steel.
Further, the material of described rotating disc is high pressure resistant transparent pressure particle board.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: dust cover is covered to electrode, shake action bars driven rotary dish, described rotating disc can rotate by the axis of rolling on circular guideway, drive scraper to carry out even power cleaning along the groove of electrode, because scraper can uniform rotation, thereby the pollutant being accumulated in electrode edge groove can be removed completely, simultaneously because dust cover is completely according to electrode, therefore the pollutant that scraper scrapes can not be lost in other regions of reaction chamber, can guarantee to clear up the cleanliness factor of rear reaction chamber.
Accompanying drawing explanation
Fig. 1 is the structural representation of prior art clearing electrode;
Fig. 2 is the structural representation of cleaning device in the utility model one embodiment;
Fig. 3 is the structural representation of scraper in the utility model one embodiment.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the cleaning device the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 2, the utility model proposes a kind of cleaning device, it is characterized in that, described cleaning device comprises:
Please refer to Fig. 3, in the present embodiment, described scraper 210 comprises handle of a knife 212 and cutter head 211, described cutter head 211 is arranged on one end of handle of a knife 212, the other end of handle of a knife 212 is connected with described rotating disc 250, and wherein, the size of groove is mated or be slightly less than to the size of described cutter head 211 and the groove size of electrode edge, wherein, the material of described scraper 210 is pottery.
In the present embodiment, described cleaning device also comprises scrapers adjustment devices 270, described scrapers adjustment devices 270 one end are connected with described scraper 210, the other end stretches out outside described dust cover 220, described scrapers adjustment devices is for finely tuning the position of described scraper 210, thereby can be more the groove part of accurate aligning electrodes, wherein, the material of stating scrapers adjustment devices 270 is stainless steel.
In the present embodiment, described cleaning device also comprises vaccum suction pipe 280, described vaccum suction pipe 280 is connected with described dust cover 220, when 210 pairs of grooves of described scraper are cleared up, pollutant under cleaning just can be absorbed by described vaccum suction pipe 280, further prevents contaminants reaction chamber; Preferably, the material of described vaccum suction pipe 280 is high pressure resistant transparent pressure particle board.
In the present embodiment, the material of described dust cover 220 is high pressure resistant transparent pressure particle board; The material of described circular guideway 230 and the axis of rolling 260 is high hardness wear-resisting steel; The material of described action bars 240 is stainless steel; The material of described rotating disc 250 is high pressure resistant transparent pressure particle board.
In concrete use, described electrode 100 is placed in described dust cover 220, make the groove part of described scraper 210 in described electrode 100, regulate described scrapers adjustment devices 270, make described scraper 210 aim at the groove part of described electrode 100, open described vaccum suction pipe 280, then, slowly rotate described action bars 240, drive described rotating disc 250 to rotate on described circular guideway 230, described scraper 210 carries out even power cleaning along the groove of described electrode 100, the pollutant of accumulation is peeled off from groove, and finally by described vaccum suction pipe 280, absorb, reach the object of clearing up described electrode groove internal contamination thing completely.
To sum up, in the cleaning device providing at the utility model embodiment, dust cover is covered to electrode, shake action bars driven rotary dish, described rotating disc can rotate by the axis of rolling on circular guideway, drive scraper to carry out even power cleaning along the groove of electrode, because scraper can uniform rotation, thereby the pollutant being accumulated in electrode edge groove can be removed completely, simultaneously because dust cover is completely according to electrode, therefore the pollutant that scraper scrapes can not be lost in other regions of reaction chamber, can guarantee to clear up the cleanliness factor of rear reaction chamber.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; within not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (9)
1. a cleaning device, is characterized in that, comprising:
Dust cover, circular guideway, scraper, the axis of rolling, rotating disc and action bars; Described circular guideway is arranged on the inwall of described dust cover; Described rotating disc is arranged on described circular guideway by the described axis of rolling; Described scraper is arranged on described rotating disc; Described action bars one end is connected with described rotating disc, and the other end extends to outside described dust cover.
2. cleaning device as claimed in claim 1, is characterized in that, described scraper comprises handle of a knife and cutter head, and described cutter head is arranged on one end of handle of a knife, and the other end of handle of a knife is connected with described rotating disc.
3. cleaning device as claimed in claim 2, is characterized in that, described scraper is two, is separately positioned on the two ends of described rotating disc diameter.
4. cleaning device as claimed in claim 3, is characterized in that, the material of described scraper is pottery.
5. cleaning device as claimed in claim 1, is characterized in that, described cleaning device also comprises vaccum suction pipe, and described vaccum suction pipe is connected with described dust cover.
6. cleaning device as claimed in claim 1, is characterized in that, described cleaning device also comprises scrapers adjustment devices, and described scrapers adjustment devices one end is connected with scraper, and the other end stretches out outside described dust cover.
7. cleaning device as claimed in claim 6, is characterized in that, the material of described scrapers adjustment devices is stainless steel.
8. cleaning device as claimed in claim 1, is characterized in that, the material of described circular guideway and the axis of rolling is high hardness wear-resisting steel.
9. cleaning device as claimed in claim 1, is characterized in that, the material of described action bars is stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320456546.9U CN203426079U (en) | 2013-07-29 | 2013-07-29 | Cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320456546.9U CN203426079U (en) | 2013-07-29 | 2013-07-29 | Cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203426079U true CN203426079U (en) | 2014-02-12 |
Family
ID=50055141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320456546.9U Expired - Fee Related CN203426079U (en) | 2013-07-29 | 2013-07-29 | Cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203426079U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110355916A (en) * | 2019-08-21 | 2019-10-22 | 浙江三力士智能装备制造有限公司 | The disassembly module of full-automatic film-covering machine and its provision for disengagement |
| CN112845440A (en) * | 2021-03-24 | 2021-05-28 | 深圳市盛兆商贸有限公司 | Small-size inner wall cleaning device of paint kettle is air-dried to portable abandonment |
-
2013
- 2013-07-29 CN CN201320456546.9U patent/CN203426079U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110355916A (en) * | 2019-08-21 | 2019-10-22 | 浙江三力士智能装备制造有限公司 | The disassembly module of full-automatic film-covering machine and its provision for disengagement |
| CN110355916B (en) * | 2019-08-21 | 2024-04-09 | 浙江三力士智能装备制造有限公司 | Dismounting module and dismounting device of full-automatic film sleeving machine |
| CN112845440A (en) * | 2021-03-24 | 2021-05-28 | 深圳市盛兆商贸有限公司 | Small-size inner wall cleaning device of paint kettle is air-dried to portable abandonment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140212 Termination date: 20190729 |