CN203401618U - Multi-wire cutting machine device - Google Patents
Multi-wire cutting machine device Download PDFInfo
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- CN203401618U CN203401618U CN201320531660.3U CN201320531660U CN203401618U CN 203401618 U CN203401618 U CN 203401618U CN 201320531660 U CN201320531660 U CN 201320531660U CN 203401618 U CN203401618 U CN 203401618U
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- mortar
- filter screen
- pulp piping
- cylinder
- backflow cylinder
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Abstract
The utility model discloses a multi-wire cutting machine device. The multi-wire cutting machine device comprises a cutting chamber, a third mortar pipeline, a backflow cylinder, a second mortar pipeline, a mortar cylinder and a first mortar pipeline. The two ends of the third mortar pipeline are connected with the backflow cylinder and the cutting chamber respectively, the two ends of the second mortar pipeline are connected with the backflow cylinder and the mortar cylinder respectively, and the two ends of the first mortar pipeline are connected with the cutting chamber and the mortar cylinder respectively. The multi-wire cutting machine device further comprises a filter net which is fixedly connected to the third mortar pipeline. The multi-wire cutting machine device is beneficial for reducing the number of times of washing the backflow cylinder, lowering the labor intensity of silicon block cutting, preventing impurities from causing jumping of a steel wire net, prolonging the service life of steel wires and improving the quality of the cutting surface of a silicon chip. The multi-wire cutting machine device is simple in structure, convenient to manufacture and easy to install.
Description
Technical field
The utility model relates to synchronous pulley manufacturing equipment field, particularly relates to a kind of multi-wire saw machine.
Background technology
Multi-wire saw technology is current more advanced silicon chip process technology, by most silicon chip manufacturer in world wide, is adopted.Its principle is the cutting gauze (distance between steel wire is determined by guide roller slot pitch) that forms a level on two or more guide rollers that is wrapped in that a superfine steel wire is parallel to each other, during cutting, guide roller drives gauze to do high-speed motion, the continual mortar (being generally the mixed liquor of PEG and SiC) that contains abrasive material that sprays to gauze of blast nozzle, work stage is moved towards gauze with the direction perpendicular to gauze with the speed of technological requirement simultaneously, gauze is brought abrasive material into workpiece to be processed region workpiece is carried out to grinding, so that the hard brittle materials such as silico briquette are cut into thousands of thin slices.
Yet, in cutting process, may there be the impurity such as steel scrap line, useless silicon bits, useless dust-free paper to enter mortar, these impurity may cause backflow cylinder fault along with mortar enters in backflow cylinder, What is more, and these impurity further enter into the wire jumper that cutting chamber causes steel wire, serious even broken string, causes equipment fault, affects silicon chip cut quality, efficiency and yield rate.
Utility model content
The impurity producing for cutting process in above-mentioned prior art enters mortar, causes backflow cylinder fault, enters the problem that affects steel wire life-span and product quality after cutting chamber, and the utility model provides a kind of multi-wire saw machine.
For the problems referred to above, a kind of multi-wire saw machine that the utility model provides solves problem by following technical essential: a kind of multi-wire saw machine, comprise cutting chamber, the 3rd pulp piping, backflow cylinder, the second pulp piping, mortar jar and the first pulp piping, the two ends of described the 3rd pulp piping connect respectively backflow cylinder and cutting chamber, the two ends of described the second pulp piping connect respectively backflow cylinder and mortar jar, the two ends of described the first pulp piping connect respectively cutting chamber and mortar jar, also comprise filter screen, described filter screen is fixedly connected on the 3rd pulp piping.
Silico briquette to be cut completes cutting in cutting chamber, the mortar using in cutting process is in cutting chamber, in backflow cylinder and mortar jar, circulate, backflow cylinder is for the impurity of sedimentation mortar, to reduce through the first pulp piping, enter in cutting chamber the content of impurity in mortar, the mortar jar arranging is for storing stand-by particle loaded fluid, be arranged on the filter screen on the 3rd pulp piping, for filtering each cutting process, by cutting chamber, enter the steel scrap line in the 3rd pulp piping, useless silicon bits, the impurity such as useless dust-free paper, reduce the content that enters into backflow cylinder impurity, be conducive to reduce the settling amount of impurity in backflow cylinder, the wash number of cylinder thereby minimizing the utility model refluxes in use, also help and reduce in particle loaded fluid circulation the content of impurity in particle loaded fluid.
Further technical scheme is:
On described the 3rd pulp piping, be provided with the groove perpendicular to the 3rd pulp piping axial direction, described filter screen is arranged in groove, and filter screen is socket joint with the 3rd pulp piping and is connected.
Adopt the connected mode of this kind of filter screen and the 3rd pulp piping, be conducive to easily filter screen be taken out after each silico briquette has cut, after cleaning filter screen, filter screen is installed easily.
Described filter screen comprises filter screen body, is the retainer of tubular, handle, and described filter screen body is fixedly connected on the internal face between retainer both ends of the surface, and described handle is fixedly connected on the side of retainer, in the both ends of the surface of retainer, is provided with sealing gasket.
The handle arranging is conducive to operating personnel when taking out filter screen and filter screen is installed and grips filter screen conveniently, and the sealing gasket of setting is conducive to the sealing effectiveness of filter screen and the 3rd pulp piping joint face.
The order number of described filter screen body is within the scope of 40 order to 60 orders, and the material of filter screen body is stainless steel.
The setting that filter screen body order is counted scope be intended to make this physical efficiency of filter screen intercept most of impurity by and do not affect the negotiability of the 3rd pulp piping, the selection of material is intended to prevent in use corrosion of filter screen, and stainless steel has good intensity and hardness, be all conducive to extend the service time of filter screen.
Described cutting chamber comprises guide wheel that cutting chamber housing, quantity are even number, many steel wires and silico briquette folder, the axis of each guide wheel is parallel to each other, each guide wheel is connected with a guide wheel driver respectively, steel wire is being wrapped between each guide wheel of being parallel to each other, and the first pulp piping be positioned at steel wire directly over, described silico briquette folder, guide wheel and steel wire are all positioned at cutting chamber housing.
Guide wheel drives steel wire quick rotation, and meanwhile, the mortar being sprayed by the first pulp piping is attached to steel wire surface, and the particle in mortar serves as bite, and the moving silico briquette of silico briquette clipping moves to steel wire simultaneously, and silico briquette completes cutting when by steel wire; Steel wire, guide wheel and silico briquette folder are arranged in cutting chamber housing, are conducive to prevent that mortar from spilling cutting chamber.
Also comprise backflow cylinder pump group and mortar cylinder pump group, described backflow cylinder pump group is arranged on backflow cylinder, and the outlet of backflow cylinder pump group is connected with the second pulp piping, described mortar cylinder pump group is arranged on mortar jar, and the outlet of mortar cylinder pump group is connected with the first pulp piping.
The backflow cylinder pump group arranging and mortar cylinder pump group by the mortar acting in the mortar in backflow cylinder and mortar jar, respectively the mortar in backflow cylinder is inputted to mortar jar, and are inputted cutting chamber by the mortar in mortar jar respectively.
Also comprise heat exchanger, described heat exchanger is arranged in backflow cylinder.
In silico briquette cutting process, the temperature of mortar can raise, and the heat exchanger of setting is for reducing the temperature of mortar in backflow cylinder, so that the temperature of mortar keeps within the specific limits, prevents the adhesive ability of mortar viscosity variable effect mortar on steel wire.
The utlity model has following beneficial effect:
1, compared to prior art, the filter screen arranging intercepts most of impurity entering in cutting process in mortar and enters backflow cylinder, the alert frequency of cylinder is conducive to reduce to reflux, and the unit interval is deposited in the amount of the impurity in backflow cylinder, be conducive to reduce the number of times that cleans backflow cylinder, reduce the labour intensity of silico briquette cutting.
2, the filter screen arranging intercepts most of impurity entering in cutting process in mortar and enters backflow cylinder, places too much impurity sedimentation on heat exchanger, is conducive to improve the heat transfer rate between heat exchanger and mortar, thereby improves the heat exchange efficiency of heat exchanger.
3, after the filter screen arranging intercepts most of impurity and circulates with mortar, reduced the amount of suspended impurity in mortar, be conducive to reduce the adverse effect of impurity to steel wire and Si wafer quality in silico briquette cutting, be conducive to avoid impurity to cause steel wire net wire jumper, extend steel wire service life and improve silicon chip quality of cut face.
4, the utility model is simple in structure, is convenient to manufacture, and in existing multi-wire saw machine, installs easily.
Accompanying drawing explanation
Fig. 1 is the structural representation of a specific embodiment of a kind of multi-wire saw machine described in the utility model;
Fig. 2 is the structural representation of a specific embodiment of filter screen in a kind of multi-wire saw machine described in the utility model.
In figure, each mark is respectively: 1, cutting chamber housing, 2, guide wheel, 3, steel wire, 4, silico briquette folder, the 5, the 3rd pulp piping, the 6, first pulp piping, 7, mortar cylinder pump group, the 8, second pulp piping, 9, backflow cylinder pump group, 10, backflow cylinder, 11, mortar jar, 12, filter screen, 121, filter screen body, 122, retainer, 123, handle, 13, heat exchanger.
The specific embodiment
Below in conjunction with embodiment, the utility model is described in further detail, but structure of the present utility model is not limited only to following examples.
Embodiment 1:
As depicted in figs. 1 and 2, a kind of multi-wire saw machine, comprise cutting chamber, the 3rd pulp piping 5, backflow cylinder 10, the second pulp piping 8, mortar jar 11 and the first pulp piping 6, the two ends of described the 3rd pulp piping 5 connect respectively backflow cylinder 10 and cutting chamber, the two ends of described the second pulp piping 8 connect respectively backflow cylinder 10 and mortar jar 11, the two ends of described the first pulp piping 6 connect respectively cutting chamber and mortar jar 11, also comprise filter screen 12, described filter screen 12 is fixedly connected on the 3rd pulp piping 5.
Silico briquette to be cut completes cutting in cutting chamber, the mortar using in cutting process is in cutting chamber, circulation in backflow cylinder 10 and mortar jar 11, backflow cylinder 10 is for the impurity of sedimentation mortar, to reduce through the first pulp piping 6, enter in cutting chamber the content of impurity in mortar, the mortar jar 11 arranging is for storing stand-by particle loaded fluid, be arranged on the filter screen 12 on the 3rd pulp piping 5, for filtering each cutting process, by cutting chamber, enter the steel scrap line in the 3rd pulp piping 5, useless silicon bits, the impurity such as useless dust-free paper, reduce the content that enters into backflow cylinder 10 impurity, be conducive to reduce the settling amount of impurity in backflow cylinder 10, the wash number of cylinder 10 thereby minimizing the utility model refluxes in use, also help and reduce in particle loaded fluid circulation the content of impurity in particle loaded fluid.
Embodiment 2:
The present embodiment is further improved on the basis of embodiment 1, as depicted in figs. 1 and 2, on described the 3rd pulp piping 5, be provided with the groove perpendicular to the 3rd pulp piping 5 axial directions, described filter screen 12 is arranged in groove, and filter screen 12 is socket joint with the 3rd pulp piping 5 and is connected.
Adopt the connected mode of this kind of filter screen 10 and the 3rd pulp piping 5, be conducive to easily filter screen 10 be taken out after each silico briquette has cut, after cleaning filter screen 10, filter screen 10 is installed easily.
Described filter screen 12 comprises filter screen body 121, is the retainer 122 of tubular, handle 123, described filter screen body 121 is fixedly connected on the internal face between retainer 122 both ends of the surface, described handle 123 is fixedly connected on the side of retainer 122, in the both ends of the surface of retainer 122, is provided with sealing gasket.
The handle 123 arranging is conducive to operating personnel when taking out filter screen 10 and filter screen 10 is installed and grips filter screen 10 convenience, and the sealing gasket of setting is conducive to the sealing effectiveness of filter screen 10 and the 3rd pulp piping 5 joint faces.
The order number of described filter screen body 121 is within the scope of 40 order to 60 orders, and the material of filter screen body 121 is stainless steel.
The setting that filter screen body 121 orders are counted scope be intended to make filter screen body 121 can intercept most of impurity by and do not affect the negotiability of the 3rd pulp piping 5, the selection of material is intended to prevent in use corrosion of filter screen 10, and stainless steel has good intensity and hardness, be all conducive to extend the service time of filter screen 10.
Described cutting chamber comprises guide wheel 2 that cutting chamber housing 1, quantity are even number, many steel wires 3 and silico briquette folder 4, the axis of each guide wheel 2 is parallel to each other, each guide wheel 2 is connected with a guide wheel driver respectively, steel wire 3 is being wrapped between each guide wheel 2 of being parallel to each other, and the first pulp piping 6 be positioned at steel wire 3 directly over, described silico briquette folder 4, guide wheel 2 and steel wire 3 are all positioned at cutting chamber housing 1.
Guide wheel 2 drives steel wire 3 quick rotation, and meanwhile, the mortar being sprayed by the first pulp piping 6 is attached to steel wire 3 surfaces, and the particle in mortar serves as bite, and silico briquette folder 4 braking silico briquettes are to steel wire 3 motions simultaneously, and silico briquette completes cutting when by steel wire 3; Steel wire 3, guide wheel 2 and silico briquette folder 4 are arranged in cutting chamber shell 1 body, are conducive to prevent that mortar from spilling cutting chamber.
Also comprise backflow cylinder pump group 9 and mortar cylinder pump group 7, described backflow cylinder pump group 9 is arranged on backflow cylinder 10, and the outlet of backflow cylinder pump group 9 is connected with the second pulp piping 8, described mortar cylinder pump group 7 is arranged on mortar jar 11, and the outlet of mortar cylinder pump group 7 is connected with the first pulp piping 6.
The backflow cylinder pump group 9 arranging and mortar cylinder pump group 7 by the mortar acting in the mortar in backflow cylinder 10 and mortar jar 11, respectively the mortar in backflow cylinder 10 is inputted to mortar jar 11, and are inputted cutting chamber by the mortar in mortar jar 11 respectively.
Also comprise heat exchanger 13, described heat exchanger 13 is arranged in backflow cylinder 10.
In silico briquette cutting process, the temperature of mortar can raise, and the heat exchanger 13 of setting is for reducing the temperature of mortar in backflow cylinder 10, so that the temperature of mortar keeps within the specific limits, prevents the adhesive ability of mortar viscosity variable effect mortar on steel wire 3.
Claims (7)
1. a multi-wire saw machine, comprise cutting chamber, the 3rd pulp piping (5), backflow cylinder (10), the second pulp piping (8), mortar jar (11) and the first pulp piping (6), the two ends of described the 3rd pulp piping (5) connect respectively backflow cylinder (10) and cutting chamber, the two ends of described the second pulp piping (8) connect respectively backflow cylinder (10) and mortar jar (11), the two ends of described the first pulp piping (6) connect respectively cutting chamber and mortar jar (11), it is characterized in that, also comprise filter screen (12), described filter screen (12) is fixedly connected on the 3rd pulp piping (5).
2. a kind of multi-wire saw machine according to claim 1, it is characterized in that, on described the 3rd pulp piping (5), be provided with the groove perpendicular to the 3rd pulp piping (5) axial direction, described filter screen (12) is arranged in groove, and filter screen (12) is socket joint with the 3rd pulp piping (5) and is connected.
3. a kind of multi-wire saw machine according to claim 2, it is characterized in that, described filter screen (12) comprises filter screen body (121), is the retainer (122) of tubular, handle (123), described filter screen body (121) is fixedly connected on the internal face between retainer (122) both ends of the surface, described handle (123) is fixedly connected on the side of retainer (122), in the both ends of the surface of retainer (122), is provided with sealing gasket.
4. a kind of multi-wire saw machine according to claim 3, is characterized in that, the order number of described filter screen body (121) is within the scope of 40 order to 60 orders, and the material of filter screen body (121) is stainless steel.
5. a kind of multi-wire saw machine according to claim 1, it is characterized in that, described cutting chamber comprises cutting chamber housing (1), quantity is the guide wheel (2) of even number, many steel wires (3) and silico briquette folder (4), the axis of each guide wheel (2) is parallel to each other, each guide wheel (2) is connected with a guide wheel driver respectively, steel wire (3) is being wrapped between each guide wheel (2) of being parallel to each other, and the first pulp piping (6) be positioned at steel wire (3) directly over, described silico briquette folder (4), guide wheel (2) and steel wire (3) are all positioned at cutting chamber housing (1).
6. a kind of multi-wire saw machine according to claim 1, it is characterized in that, also comprise backflow cylinder pump group (9) and mortar cylinder pump group (7), described backflow cylinder pump group (9) is arranged on backflow cylinder (10), and the outlet of backflow cylinder pump group (9) is connected with the second pulp piping (8), it is upper that described mortar cylinder pump group (7) is arranged on mortar jar (11), and the outlet of mortar cylinder pump group (7) is connected with the first pulp piping (6).
7. according to a kind of multi-wire saw machine described in any one in claim 1 to 6, it is characterized in that, also comprise heat exchanger (13), described heat exchanger (13) is arranged in backflow cylinder (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320531660.3U CN203401618U (en) | 2013-08-29 | 2013-08-29 | Multi-wire cutting machine device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320531660.3U CN203401618U (en) | 2013-08-29 | 2013-08-29 | Multi-wire cutting machine device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203401618U true CN203401618U (en) | 2014-01-22 |
Family
ID=49937563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320531660.3U Expired - Fee Related CN203401618U (en) | 2013-08-29 | 2013-08-29 | Multi-wire cutting machine device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203401618U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104290206A (en) * | 2014-09-18 | 2015-01-21 | 苏州市汇峰机械设备有限公司 | Wire cutting machine mortar device |
| CN107020705A (en) * | 2017-05-24 | 2017-08-08 | 浙江好亚能源股份有限公司 | Monocrystalline silicon piece cuts low consumption mortar device |
| CN107538632A (en) * | 2016-06-24 | 2018-01-05 | 上海新昇半导体科技有限公司 | A kind of linear cutting mortar supply system and method |
| CN108943457A (en) * | 2017-05-24 | 2018-12-07 | 上海新昇半导体科技有限公司 | Mortar feeding mechanism |
| CN108972925A (en) * | 2018-08-28 | 2018-12-11 | 兰凤 | A kind of solar energy-level silicon wafer cutting method |
| CN109049372A (en) * | 2018-08-28 | 2018-12-21 | 兰凤 | A kind of solar energy-level silicon wafer diamond wire saw machine |
-
2013
- 2013-08-29 CN CN201320531660.3U patent/CN203401618U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104290206A (en) * | 2014-09-18 | 2015-01-21 | 苏州市汇峰机械设备有限公司 | Wire cutting machine mortar device |
| CN107538632A (en) * | 2016-06-24 | 2018-01-05 | 上海新昇半导体科技有限公司 | A kind of linear cutting mortar supply system and method |
| CN107020705A (en) * | 2017-05-24 | 2017-08-08 | 浙江好亚能源股份有限公司 | Monocrystalline silicon piece cuts low consumption mortar device |
| CN108943457A (en) * | 2017-05-24 | 2018-12-07 | 上海新昇半导体科技有限公司 | Mortar feeding mechanism |
| CN108972925A (en) * | 2018-08-28 | 2018-12-11 | 兰凤 | A kind of solar energy-level silicon wafer cutting method |
| CN109049372A (en) * | 2018-08-28 | 2018-12-21 | 兰凤 | A kind of solar energy-level silicon wafer diamond wire saw machine |
| CN109049372B (en) * | 2018-08-28 | 2020-10-23 | 安徽航睿电子科技有限公司 | Diamond wire cutting machine for solar-grade silicon wafer |
| CN108972925B (en) * | 2018-08-28 | 2020-10-23 | 扬州宏祥光电科技有限公司 | Solar-grade silicon wafer cutting method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140122 Termination date: 20170829 |