CN203357184U - Polycrystalline silicon C-corner hairbrush polishing machine - Google Patents

Polycrystalline silicon C-corner hairbrush polishing machine Download PDF

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Publication number
CN203357184U
CN203357184U CN 201320346755 CN201320346755U CN203357184U CN 203357184 U CN203357184 U CN 203357184U CN 201320346755 CN201320346755 CN 201320346755 CN 201320346755 U CN201320346755 U CN 201320346755U CN 203357184 U CN203357184 U CN 203357184U
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CN
China
Prior art keywords
polysilicon
hairbrush
polishing machine
rolling disc
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201320346755
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Chinese (zh)
Inventor
吴建飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NANTONG ZONGYI NOVEL MATERIALS Co Ltd
Original Assignee
NANTONG ZONGYI NOVEL MATERIALS Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by NANTONG ZONGYI NOVEL MATERIALS Co Ltd filed Critical NANTONG ZONGYI NOVEL MATERIALS Co Ltd
Priority to CN 201320346755 priority Critical patent/CN203357184U/en
Application granted granted Critical
Publication of CN203357184U publication Critical patent/CN203357184U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a polycrystalline silicon C-corner hairbrush polishing machine. A plurality of hairbrushes are utilized to replace original grinding wheels to polish polycrystalline silicon, wherein the hairbrushes are arranged on a rotary table of the machine in an annular array mode. Compared with an original polishing technology, according to the scheme, the quality of products is improved, the defective rate of the products is reduced, and good social benefits are achieved.

Description

A kind of polysilicon C angle brush polishing machine
Technical field
The utility model relates to a kind of polysilicon C angle brush polishing machine, belongs to the polycrystalline silicon material manufacture field.
Background technology
Polycrystalline silicon rod is after grinding wheel chamfering, and edge surface has angle burr to collapse limit crack or other defect are even arranged, and edge surface is more coarse, needs other operation to carry out polishing to it, and traditional glossing precision can't guarantee, and quality of finish is not high yet.
The utility model content
The utility model replaces the emery wheel mechanism of traditional beveler by a hairbrush, thereby realizes the polishing of the high accuracy high smooth degree at polysilicon C angle.
The utility model is realized by the following method:
A kind of polysilicon C angle brush polishing machine, for the processing polysilicon of polishing; Comprise V-shaped groove, rubbing head, turning cylinder, described rubbing head is arranged on the bottom of V-shaped groove, and the clutch end of rubbing head and turning cylinder is connected, and described rubbing head comprises rolling disc and hairbrush, described hairbrush is arranged on rolling disc, and described rolling disc is fixedly connected with turning cylinder.
As further innovation of the present utility model, a kind of polysilicon C angle brush polishing machine, described hairbrush comprises column bottom support bracket and brush, described brush is fixedly connected with rolling disc by the column bottom support bracket.
As further innovation of the present utility model, be provided with some installing holes of equidistantly arranging with respect to rotary disk center of circle annular on described rolling disc, described hairbrush is arranged in installing hole by the column bottom support bracket.
As further innovation of the present utility model, the quantity of described hairbrush is at least 4.
As further innovation of the present utility model, described column bottom support bracket is the SUS304 material.
As further innovation of the present utility model, described brush is silicon carbide material.
As further innovation of the present utility model, the granularity of the silicon carbide material of described brush is No. 800.
As further innovation of the present utility model, the bristle of described brush is fixed by glue.
As further innovation of the present utility model, described rolling disc is aluminum alloy material.
The beneficial effects of the utility model are:
. replace traditional emery wheel by hairbrush polysilicon is carried out to chamfer machining, polysilicon edge surface after the abrasive machine chamfering has angle burr to collapse limit crack or other defect is even arranged, edge surface is more coarse, in order to increase the qualification rate of the rear silicon chip of section, reduce the chamfering place and collapse limit, bright spot, and silicon rod chamfering place edge crack, will will use again the hairbrush polishing after its grinding wheel chamfering, and improve line with this and cut the qualification rate of producing section and reduce operating cost.
2. the mode that bottom support bracket is connected with rolling disc, facilitated the maintenance in the later stage of equipment, wearing and tearing, precision reduction that the regular dismounting of rolling disc and power transmission shaft causes have been reduced, further provide cost savings, hairbrush adopts the rigid metal piece to be connected with rolling disc, reduce the probability that hairbrush damages, reduced the cost of bristle simultaneously.
3. by processing through hole on rolling disc, hairbrush is installed, has been facilitated the dismounting of hairbrush.
4. by the rotation of a plurality of brush heads, polysilicon is carried out to polishing, provide cost savings, facilitate the single replacement of brush and maintenance simultaneously, also be convenient to draining of chip that processing produces, and accumulation that can globality is on brush, the quality of impact processing.
5. hairbrush employing customized SUS304 material, there is high corrosion resistance, under low temperature, room temperature and high temperature, all have higher moulding to return and toughness, and cold forming and weldability preferably, greatly provided the service life of hairbrush, also reduced the cost of manufacture of hairbrush base simultaneously.
6. adopt the hairbrush of the silicon carbide material of No. 800, there is good thermal conductivity, effectively prevent in polishing process the damage that excess Temperature causes polysilicon, silicon carbide material has good chemical resistance simultaneously, can adapt to complicated working environment, the hairbrush of silicon carbide material also has longer service life, can effectively reduce the cost of processing.
7. hairbrush is fixed by glue, prevents hairbrush scattering in process, affects crudy.
8. rolling disc adopts aluminum alloy material, and both durable have a rust-resisting property, also has good machining property simultaneously.
The accompanying drawing explanation
The schematic diagram of the rubbing head that Fig. 1 is the utility model polysilicon C angle hairbrush polisher.
The schematic diagram of the hairbrush that Fig. 2 is the utility model polysilicon C angle hairbrush polisher.
In figure: 1. bottom support bracket, 2. brush, 3. hairbrush installing hole, 4. turning cylinder installing hole, the 5. diameter of rolling disc, L. brush.
The specific embodiment
As shown Fig. 1 and Fig. 2, the utility model is transformed for traditional polysilicon chamfering sander, in the V-shaped groove of sander, adopt the banister brush rubbing head to be replaced the abrasive disc of original abrasive machine, polishing head of the present utility model divides and comprises rolling disc 5 and be arranged on six hairbrush on rolling disc, hairbrush is installed on rolling disc 5 by six hairbrush installing holes 3, hairbrush comprises bottom support bracket 1 and 2 two parts of brush, six hairbrush installing holes 3 are arranged with respect to turning cylinder installing hole 4 annular arrays of rolling disc 5 central parts, it is that No. 800 carbofrax materials are made and made hairbrush have good chemical resistance and thermal diffusivity that hairbrush in the utility model is chosen granularity, the diameter of bristle is by glue, to be cured between 0.7mm and bristle, to guarantee the stability of hairbrush work, the bottom support bracket 1 of hairbrush adopts the SUS304 steel to make, there is good thermal diffusivity and stability, the diameter of hairbrush is L, the stability of hairbrush while adopting special technique to carry out bonding connection with assurance work between the brush 2 of hairbrush and bottom support bracket 1, hairbrush installing hole 3 interference fit of bottom support bracket 1 and rolling disc 5, than screw thread, the stability of hairbrush when this fit system can guarantee to rotate, replace by banister brush of the present utility model the polishing that original emery wheel carries out polysilicon C angle, having eliminated angle burr that pressure that original hard grinding wheel produces polysilicon in when polishing destroys the edge surface caused collapses limit crack or other defect is even arranged, the problems such as edge surface is more coarse, can make product percent of pass improve percent 0.5 percentage points, there is good social benefit.

Claims (9)

1. a polysilicon C angle brush polishing machine, for polishing polycrystalline silicon C angle polysilicon; Comprise V-shaped groove, rubbing head, turning cylinder, described rubbing head is arranged on the bottom of V-shaped groove, and the clutch end of rubbing head and turning cylinder is connected, it is characterized in that: described rubbing head comprises rolling disc and hairbrush, described hairbrush is arranged on rolling disc, and described rolling disc is fixedly connected with turning cylinder.
2. a kind of polysilicon C as claimed in claim 1 angle brush polishing machine, it is characterized in that: described hairbrush comprises column bottom support bracket and brush, described brush is fixedly connected with rolling disc by the column bottom support bracket.
3. a kind of polysilicon C as claimed in claim 2 angle brush polishing machine, it is characterized in that: be provided with some installing holes of equidistantly arranging with respect to rotary disk center of circle annular on described rolling disc, described hairbrush is arranged in installing hole by the column bottom support bracket.
4. a kind of polysilicon C as claimed in claim 2 angle brush polishing machine, it is characterized in that: the quantity of described hairbrush is at least 4.
5. a kind of polysilicon C as claimed in claim 2 angle brush polishing machine, it is characterized in that: described column bottom support bracket is the SUS304 material.
6. a kind of polysilicon C as claimed in claim 1 angle brush polishing machine, it is characterized in that: described hairbrush is silicon carbide material.
7. a kind of polysilicon C as claimed in claim 6 angle brush polishing machine, it is characterized in that: the silicon-carbide particle degree of described hairbrush is No. 800.
8. a kind of polysilicon C as claimed in claim 1 angle brush polishing machine is characterized in that: the bristle of described hairbrush is fixed by glue.
9. a kind of polysilicon C as claimed in claim 1 angle brush polishing machine, it is characterized in that: described rolling disc is aluminum alloy material.
CN 201320346755 2013-06-18 2013-06-18 Polycrystalline silicon C-corner hairbrush polishing machine Expired - Fee Related CN203357184U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320346755 CN203357184U (en) 2013-06-18 2013-06-18 Polycrystalline silicon C-corner hairbrush polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320346755 CN203357184U (en) 2013-06-18 2013-06-18 Polycrystalline silicon C-corner hairbrush polishing machine

Publications (1)

Publication Number Publication Date
CN203357184U true CN203357184U (en) 2013-12-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201320346755 Expired - Fee Related CN203357184U (en) 2013-06-18 2013-06-18 Polycrystalline silicon C-corner hairbrush polishing machine

Country Status (1)

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CN (1) CN203357184U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103286655A (en) * 2013-06-18 2013-09-11 南通综艺新材料有限公司 Hairbrush polisher for polishing C-corners of polycrystalline silicon
CN105364641A (en) * 2015-11-19 2016-03-02 浙江工业大学 Micro semi-ring female die array-mode lapping and polishing method and device
CN109524331A (en) * 2018-11-26 2019-03-26 西安交通大学 A kind of wedge-shaped hairbrush handled for silicon flannelette wedge angle and seamed edge round and smoothization
CN109518282A (en) * 2018-11-26 2019-03-26 西安交通大学 Contain high grit wedge shape hairbrush for what silicon flannelette wedge angle and seamed edge round and smoothization were handled

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103286655A (en) * 2013-06-18 2013-09-11 南通综艺新材料有限公司 Hairbrush polisher for polishing C-corners of polycrystalline silicon
CN105364641A (en) * 2015-11-19 2016-03-02 浙江工业大学 Micro semi-ring female die array-mode lapping and polishing method and device
CN109524331A (en) * 2018-11-26 2019-03-26 西安交通大学 A kind of wedge-shaped hairbrush handled for silicon flannelette wedge angle and seamed edge round and smoothization
CN109518282A (en) * 2018-11-26 2019-03-26 西安交通大学 Contain high grit wedge shape hairbrush for what silicon flannelette wedge angle and seamed edge round and smoothization were handled

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131225

Termination date: 20180618