CN203323713U - Curved-surface-shaped precise measuring device without execution mechanism - Google Patents
Curved-surface-shaped precise measuring device without execution mechanism Download PDFInfo
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- CN203323713U CN203323713U CN2013203791937U CN201320379193U CN203323713U CN 203323713 U CN203323713 U CN 203323713U CN 2013203791937 U CN2013203791937 U CN 2013203791937U CN 201320379193 U CN201320379193 U CN 201320379193U CN 203323713 U CN203323713 U CN 203323713U
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Abstract
The utility model relates to a curved-surface-shaped precise measuring device without an execution mechanism and belongs to the three-dimensional surface shape measuring field. The curved-surface-shaped precise measuring device comprises a multi-angle illumination light path and a curved-surface-shaped measuring light path. On the multi-angle illumination light path, light beams originate from a light source, sequentially pass through a condenser, a pin hole and a collimating lens, parallelly enter a transmission type liquid crystal spatial light modulator I, are ejected parallelly out after modulation and parallelly illuminate on a surface of a detected sample after being reflected by a light splitting prism; on the curved-surface-shaped measuring light path, light reflected by the detected sample sequentially passes through a light splitting prism, a transmission type liquid crystal spatial light modulator II and an imaging object lens and realizes imaging through a sensor. Through matching between the transmission type liquid crystal spatial light modulator I and the transmission type liquid crystal spatial light modulator II, photographs at different positions of the detected sample illuminated from different angles are acquired, an optimum illumination angle is chosen, photograph integration is carried out, so a curved surface shape of the detected sample is constructed. The curved-surface-shaped precise measuring device has no execution mechanism and has properties of high measuring precision and fast speed.
Description
Technical field
A kind of precision measurement apparatus of the curve form without topworks belongs to the 3 d surface topography fields of measurement.
Background technology
3 d surface topography is measured in the modern precision fields of measurement, and important effect is arranged, and it has promoted the development in the fields such as micro mechanical structure processing, electrical equipment detection, biological cell research.Yet, because adopting light, existing measurement mechanism naturally shines the sample surface, and make some special construction not to be resolved out, therefore cause the measurement result precision low, even measurement result is inaccurate.In addition, it is mainly that sample is placed on objective table that prior art is measured 3 d surface topography, moves up and down to carry sample by objective table and moves up and down, and realizes the detection to the sample different depth.Yet this mode has two shortcomings, one is that objective table moves up and down and needs topworks, and its measuring speed is affected, and another is for nonrigid sample, in the process moved up and down, can make it that deformation occurs, and affects equally measuring accuracy.
In sum, measuring accuracy and speed make the technical issues that need to address in the 3 d surface topography fields of measurement.
The utility model content
In order to address the above problem, the utility model discloses a kind of precision measurement apparatus of the curve form without topworks, there is high, the fireballing advantage of measuring accuracy.
The purpose of this utility model is achieved in that
A kind of precision measurement apparatus of the curve form without topworks, comprise multi-angle illumination light path and curve form optical path;
Described multi-angle illumination light path is placed successively along the light transmition direction: light source, condenser, pin hole, collimation lens, transmission-type LCD space light modulator one, Amici prism and sample; The light beam that condenser sends light source is focused on pin hole, from the light beam of pin hole outgoing after the collimation lens collimation, the parallel transmission-type LCD space light modulator one that incides, parallel ejaculation after one modulation of transmission-type LCD space light modulator, after the Amici prism reflection, parallel radiation is to the sample surface;
Described curve form optical path is placed sample, Amici prism, transmission-type LCD space light modulator two, image-forming objective lens and imageing sensor successively along the light transmition direction; The light of sample reflection sees through Amici prism after transmission-type LCD space light modulator two collimations, then converges to imageing sensor by image-forming objective lens and carry out imaging.
Above-mentioned a kind of precision measurement apparatus of the curve form without topworks, described light source is area source.
Above-mentioned a kind of precision measurement apparatus of the curve form without topworks, described light source, condenser, pin hole is replaceable is the ideal point light source, and described ideal point light is placed in the pin hole position.That is: a kind of precision measurement apparatus of the curve form without topworks, comprise multi-angle illumination light path and curve form optical path; Described multi-angle illumination light path is placed successively along the light transmition direction: ideal point light source, collimation lens, transmission-type LCD space light modulator one, Amici prism and sample, the light beam that the ideal point light source sends is after the collimation lens collimation, the parallel transmission-type LCD space light modulator one that incides, parallel ejaculation after one modulation of transmission-type LCD space light modulator, after the Amici prism reflection, parallel radiation is to the sample surface; Described curve form optical path is placed sample, Amici prism, transmission-type LCD space light modulator two, image-forming objective lens and imageing sensor successively along the light transmition direction, the light of sample reflection sees through Amici prism after transmission-type LCD space light modulator two collimations, then converges to imageing sensor by image-forming objective lens and carry out imaging.
Above-mentioned a kind of precision measurement apparatus of the curve form without topworks, described transmission-type LCD space light modulator one, transmission-type LCD space light modulator two and imageing sensor are controlled by computing machine.
Above-mentioned a kind of precision measurement apparatus of the curve form without topworks, described sample is placed in the objective table top.
Above-mentioned a kind of precision measurement apparatus of the curve form without topworks, the equal angle of primary optical axis of the primary optical axis of described Amici prism and multi-angle illumination light path and curve form optical path is 45 degree.
A kind of precision measurement method of the curve form without topworks is:
Adjust transmission-type LCD space light modulator one, make parallel radiation to the light of transmission-type LCD space light modulator one along incident direction or the direction parallel outgoing angled with incident direction;
Adjust transmission-type LCD space light modulator two, make the light of sample different depth position reflection see through Amici prism after transmission-type LCD space light modulator two collimations, become parallel beam;
By transmission-type LCD space light modulator one and transmission-type LCD space light modulator two, match, obtained the different layers position photo of the sample under the different angles illumination by the imageing sensor imaging, finally by selecting the optimal illumination angle, integrate photo, the curve form of structure sample.
Image processing techniques by computing machine is measured, is proofreaied and correct, and draws the 3 d surface topography data of sample.
Because the utility model has increased the multi-angle illumination light path, make sample to be illuminated from different perspectives, the problem of effectively avoiding not good some structure caused of light angle to be identified, make measuring accuracy high; Because adopting LCD space light modulator, the utility model changes light angle, and the investigation depth that changes sample, only need computer control to complete, without executive component, so measuring speed is fast.In addition, the utility model is better than the place of traditional measurement method, and also be integrated use imageing sensor imaging technique and image high-resolution 3D processing technology makes whole measuring process intellectuality.
The accompanying drawing explanation
Fig. 1 is the precision measurement apparatus of the curve form without the topworks structural representation of the utility model embodiment mono-.
Fig. 2 is the precision measurement apparatus of the curve form without the topworks structural representation of the utility model embodiment bis-.
In figure: 1 light source, 2 condensers, 3 pin holes, 4 collimation lenses, 5 transmission-type LCD space light modulator one, 6 Amici prisms, 7 samples, 8 transmission-type LCD space light modulator two, 9 image-forming objective lens, 10 imageing sensors, 11 computing machines, 12 objective tables.
Embodiment
Below in conjunction with accompanying drawing, the utility model embodiment is described in further detail.
Specific embodiment one
As shown in Figure 1, this curve form precision measurement apparatus comprises multi-angle illumination light path and curve form optical path;
Described multi-angle illumination light path is placed successively along the light transmition direction: light source (1), condenser (2), pin hole (3), collimation lens (4), transmission-type LCD space light modulator one (5), Amici prism (6) and sample (7); The light beam that condenser (2) sends light source (1) is focused on pin hole (3), from the light beam of pin hole (3) outgoing after collimation lens (4) collimation, the parallel transmission-type LCD space light modulator one (5) that incides, parallel ejaculation after one (5) modulation of transmission-type LCD space light modulator, after Amici prism (6) reflection, parallel radiation is to sample (7) surface;
Described curve form optical path is placed sample (7), Amici prism (6), transmission-type LCD space light modulator two (8), image-forming objective lens (9) and imageing sensor (10) successively along the light transmition direction; The light of sample (7) reflection sees through Amici prism (6) after transmission-type LCD space light modulator two (8) collimations, then converges to imageing sensor (10) by image-forming objective lens (9) and carry out imaging.
Wherein, transmission-type LCD space light modulator one (5), transmission-type LCD space light modulator two (8) and imageing sensor (10) are controlled by computing machine (11).Described light source (1) is area source.Described sample (7) is placed in objective table (12) top.Described Amici prism (6) and the primary optical axis of multi-angle illumination light path and equal angle 45 degree of primary optical axis of curve form optical path.
Curve form without the topworks precision measurement method of the present embodiment is:
Adjust transmission-type LCD space light modulator one (5), make parallel radiation to the light of transmission-type LCD space light modulator one (5) along incident direction or the direction parallel outgoing angled with incident direction;
Adjust transmission-type LCD space light modulator two (8), make the light of sample (7) different depth position reflection see through Amici prism (6) after transmission-type LCD space light modulator two (8) collimations, become parallel beam;
By transmission-type LCD space light modulator one (5) and transmission-type LCD space light modulator two (8), match, obtained the different layers position photo of the sample (7) under the different angles illumination by imageing sensor (10) imaging, finally by selecting the optimal illumination angle, integrate photo, the curve form of structure sample (7).
Image processing techniques by computing machine is measured, is proofreaied and correct, and draws the 3 d surface topography data of sample.
Specific embodiment two
As shown in Figure 2, this curve form precision measurement apparatus comprises multi-angle illumination light path and curve form optical path;
Described multi-angle illumination light path is placed successively along the light transmition direction: ideal point light source, collimation lens (4), transmission-type LCD space light modulator one (5), Amici prism (6) and sample (7), the light beam that the ideal point light source sends is after collimation lens (4) collimation, the parallel transmission-type LCD space light modulator one (5) that incides, parallel ejaculation after one (5) modulation of transmission-type LCD space light modulator, after Amici prism (6) reflection, parallel radiation is to sample (7) surface;
Described curve form optical path is placed sample (7), Amici prism (6), transmission-type LCD space light modulator two (8), image-forming objective lens (9) and imageing sensor (10) successively along the light transmition direction, the light of sample (7) reflection sees through Amici prism (6) after transmission-type LCD space light modulator two (8) collimations, then converges to imageing sensor (10) by image-forming objective lens (9) and carry out imaging.
Wherein, transmission-type LCD space light modulator one (5), transmission-type LCD space light modulator two (8) and imageing sensor (10) are controlled by computing machine (11).Described sample (7) is placed in objective table (12) top.Described Amici prism (6) and the primary optical axis of multi-angle illumination light path and equal angle 45 degree of primary optical axis of curve form optical path.
Curve form without the topworks precision measurement method of the present embodiment is identical with specific embodiment one, but the present embodiment is from the different of specific embodiment one: the light source in embodiment mono-(1), condenser (2), pin hole (3) are replaced with to the ideal point light source, and described ideal point light is placed in pin hole (3) position.This design can simplification device, makes the structure of device simpler, reduces costs simultaneously.
Claims (8)
1. the precision measurement apparatus of the curve form without topworks, is characterized in that: comprise multi-angle illumination light path and curve form optical path;
Described multi-angle illumination light path is placed successively along the light transmition direction: light source (1), condenser (2), pin hole (3), collimation lens (4), transmission-type LCD space light modulator one (5), Amici prism (6) and sample (7), the light beam that condenser (2) sends light source (1) is focused on pin hole (3), from the light beam of pin hole (3) outgoing after collimation lens (4) collimation, the parallel transmission-type LCD space light modulator one (5) that incides, parallel ejaculation after one (5) modulation of transmission-type LCD space light modulator, after Amici prism (6) reflection, parallel radiation is to sample (7) surface,
Described curve form optical path is placed sample (7), Amici prism (6), transmission-type LCD space light modulator two (8), image-forming objective lens (9) and imageing sensor (10) successively along the light transmition direction, the light of sample (7) reflection sees through Amici prism (6) after transmission-type LCD space light modulator two (8) collimations, then converges to imageing sensor (10) by image-forming objective lens (9) and carry out imaging.
2. a kind of precision measurement apparatus of the curve form without topworks according to claim 1, it is characterized in that: described transmission-type LCD space light modulator one (5), transmission-type LCD space light modulator two (8) and imageing sensor (10) are controlled by computing machine (11).
3. a kind of precision measurement apparatus of the curve form without topworks according to claim 1, it is characterized in that: described light source (1) is area source.
4. a kind of precision measurement apparatus of the curve form without topworks according to claim 1 is characterized in that: described sample (7) is placed in objective table (12) top.
5. a kind of precision measurement apparatus of the curve form without topworks according to claim 1 is characterized in that: described Amici prism (6) is 45 degree with the primary optical axis of multi-angle illumination light path and the equal angle of primary optical axis of curve form optical path.
6. the precision measurement apparatus of the curve form without topworks, is characterized in that: comprise multi-angle illumination light path and curve form optical path;
Described multi-angle illumination light path is placed successively along the light transmition direction: ideal point light source, collimation lens (4), transmission-type LCD space light modulator one (5), Amici prism (6) and sample (7), the light beam that the ideal point light source sends is after collimation lens (4) collimation, the parallel transmission-type LCD space light modulator one (5) that incides, parallel ejaculation after one (5) modulation of transmission-type LCD space light modulator, after Amici prism (6) reflection, parallel radiation is to sample (7) surface;
Described curve form optical path is placed sample (7), Amici prism (6), transmission-type LCD space light modulator two (8), image-forming objective lens (9) and imageing sensor (10) successively along the light transmition direction, the light of sample (7) reflection sees through Amici prism (6) after transmission-type LCD space light modulator two (8) collimations, then converges to imageing sensor (10) by image-forming objective lens (9) and carry out imaging.
7. a kind of precision measurement apparatus of the curve form without topworks according to claim 6, it is characterized in that: described transmission-type LCD space light modulator one (5), transmission-type LCD space light modulator two (8) and imageing sensor (10) are controlled by computing machine (11).
8. a kind of precision measurement apparatus of the curve form without topworks according to claim 6 is characterized in that: described Amici prism (6) is 45 degree with the primary optical axis of multi-angle illumination light path and the equal angle of primary optical axis of curve form optical path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203791937U CN203323713U (en) | 2013-06-28 | 2013-06-28 | Curved-surface-shaped precise measuring device without execution mechanism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013203791937U CN203323713U (en) | 2013-06-28 | 2013-06-28 | Curved-surface-shaped precise measuring device without execution mechanism |
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| CN203323713U true CN203323713U (en) | 2013-12-04 |
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| CN2013203791937U Expired - Fee Related CN203323713U (en) | 2013-06-28 | 2013-06-28 | Curved-surface-shaped precise measuring device without execution mechanism |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292739A (en) * | 2013-06-28 | 2013-09-11 | 湖南长重机器股份有限公司 | Actuator-free surface shape accurate measurement device and method |
| WO2016020684A1 (en) * | 2014-08-05 | 2016-02-11 | Imperial Innovations Limited | Multiplexed optical tomography |
-
2013
- 2013-06-28 CN CN2013203791937U patent/CN203323713U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292739A (en) * | 2013-06-28 | 2013-09-11 | 湖南长重机器股份有限公司 | Actuator-free surface shape accurate measurement device and method |
| CN103292739B (en) * | 2013-06-28 | 2016-02-10 | 湖南长重机器股份有限公司 | A kind of curve form precision measurement apparatus without topworks and method |
| WO2016020684A1 (en) * | 2014-08-05 | 2016-02-11 | Imperial Innovations Limited | Multiplexed optical tomography |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131204 Termination date: 20160628 |
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| CF01 | Termination of patent right due to non-payment of annual fee |