CN203310776U - X-ray inspection device - Google Patents
X-ray inspection device Download PDFInfo
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- CN203310776U CN203310776U CN2013200630435U CN201320063043U CN203310776U CN 203310776 U CN203310776 U CN 203310776U CN 2013200630435 U CN2013200630435 U CN 2013200630435U CN 201320063043 U CN201320063043 U CN 201320063043U CN 203310776 U CN203310776 U CN 203310776U
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Abstract
The utility model provides an X-ray inspection device which carries out X-ray film taking suitable for inspection by using an X-ray film taking device during the inspection on a plurality of inspection objects. The X-ray inspection device inspects the inspection objects on the basis of the films of the inspection objects, taken by the X-ray film taking device, and comprises a carrying tray, an object fixing unit and a film taking execution unit, wherein the carrying tray can carry the plurality of inspection objects and is provided with a plurality of recesses capable of respectively containing the plurality of inspection objects; the object fixing unit respectively applies fixing force to the plurality of inspection objects from the outside so as to fix the inspection objects in the recesses before the X-ray film taking device carries out the film taking under a condition that the inspection objects are respectively contained in the plurality of recesses of the carrying tray; the film taking execution unit enables at least one of the X-ray film taking device and the carrying tray to move under the condition that the plurality of inspection objects are respectively fixed through the object fixing unit so that the X-ray film taking device can take films of the plurality of inspection objects for multiple times.
Description
Technical field
The utility model relates to X ray checking device and for the image pickup method of the inspection object of X-ray examination.
Background technology
Sometimes the inspection object for the product to producing on the plant produced line etc. checks, to checking the object X-ray irradiation, by analyzing its transmission picture, judges and checks whether object is qualified.Sometimes in order to advance detailed inspection, to checking that object carries out the X ray shooting, carry out visual examination, 3 D analysis etc. (for example,, with reference to patent documentation 1 from multiple directions.）。In the disclosed technology of patent documentation 1, the fixed configurations x-ray source, make to check that object moves, by on the parallel face of the moving direction with checking object, detecting, and, on the surfaces of revolution centered by the axle by vertical with this parallel surface, detect, thereby can, under the state of mobile x-ray source not, carry out various X ray and take.
In addition, in the high magnification that uses the X ray filming apparatus to carry out is taken, when needs are adjusted the relative distance of x-ray source, detecting device, inspection object, also need to x-ray source, to carry out focal spot (spot, diameter reduction) in order crispening and to change processing.But, because x-ray source is carried out to focal spot, easily be subject to the impact of external vibration.Therefore, in order to address this problem a little, for example, patent documentation 2 discloses such technology.In this technology, x-ray source is arranged on the structural elements of device, and, the arcuation frame that can rotate is set on its structural elements, on this arcuation frame, detecting device is set, thereby, the impact that can as far as possible alleviate external vibration.
The prior art document
Patent documentation
Patent documentation 1:JP JP 2006-162335 communique
The special table of patent documentation 2:JP 2008-505340 communique
In the past, in the situation that utilize the X ray filming apparatus to carry out be used to checking the shooting of object, to the X ray filming apparatus will check object one by one conveyance to the camera site of regulation, thus, take according to the inspection purpose.In the situation that, so one by one to checking that object checks, can't fully improve the checking ability of unit interval, hinder to improve and manufacture efficiency.
On the other hand, if once by the camera site of a plurality of inspection object conveyance to the regulation for checking, carry out thus the X ray shooting, need on conveyance pallet (tray), take in a plurality of inspection objects, conveyance is taken to the camera site of regulation under this state.Now, in order to make to check, become easy holding of object, and in the situation that larger spatial accommodation for checking object is set on the conveyance pallet, likely the external vibration when taking causes position, the posture of the inspection object in this spatial accommodation to be offset.Especially, repeatedly taking, in the situation that checks object and check, if in shooting process, caused checking the skew of the position etc. of object because of external vibration, should the skew meeting bring bad impact to check result based on its shooting results.
The utility model content
The utility model is made in view of the above problems, purpose is, in the situation that utilize the X ray filming apparatus to check a plurality of inspection objects, is provided for the appropriate X ray checking device of taking of the carrying out checked, in addition, be provided for the appropriate image pickup method of taking of the carrying out checked.
In the utility model, in order to address the above problem, adopted following structure: under the state in a plurality of inspection objects are contained in to the conveyance pallet, before carrying out for the shooting checked, from outside to a plurality of inspection object effect bed knifes that hold, thereby they are fixed.By this structure, when by the X ray filming apparatus, repeatedly taking, in the time of also can avoiding taking, check respectively that the position of object, posture are offset.Especially, when repeatedly taking, that is, take each conveyance pallet while as unit moves, checking object, or when the X ray filming apparatus is moved, also can suppress to make to check the object skew because it moves the vibration caused.
Specifically, the utility model provides a kind of X ray checking device, has the X ray filming apparatus, based on the shooting of the inspection object being carried out by this X ray filming apparatus, this inspection object is checked, it is characterized in that having: the conveyance pallet, be can a plurality of inspection objects of conveyance the conveyance pallet, and be formed with a plurality of recesses that hold respectively described a plurality of inspection objects; The object fixed cell, before described X ray filming apparatus is taken, described a plurality of recesses at described conveyance pallet accommodate respectively under the state of described inspection object, from outside to described a plurality of inspection objects, apply respectively bed knife, thereby should check that object was fixed in this recess; Take performance element, by described object fixed cell, fixing respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, thereby this X ray filming apparatus is repeatedly taken described a plurality of inspection objects.
X ray checking device of the present utility model, have the conveyance pallet that holds a plurality of inspection objects.In this conveyance pallet, a plurality of inspection objects are accommodated in respectively in corresponding recess.In the conveyance pallet, be formed with a plurality of these recesses, the size of each recess, space can both hold the inspection object.And described a plurality of recesses hold respectively the inspection object, in order to check required X ray to take (following, only be called " shooting ") by conveyance.
At this, in above-mentioned X ray checking device, the X ray filming apparatus is repeatedly taken, and based on its shooting results, the inspection object is checked.And, described repeatedly shooting is performed such: X ray filming apparatus and at least one party who has held in the conveyance pallet that checks object are moved, make thus the X ray filming apparatus be in different position, posture with respect to checking object, thereby check required shooting.At this, if by movement, make the X ray filming apparatus different from the relativeness of conveyance pallet like this, because moving the vibration caused, it can be passed to the inspection object, likely cause position, the posture of this inspection object in recess to be offset.For example, even small skew, in situation about can ignore as testing fixture, such skew also can have influence on final check result.
Therefore, in above-mentioned X ray checking device, utilizing before the X ray filming apparatus takes, utilize the object fixed cell to checking that object is fixed.Namely, before the X ray filming apparatus of the reason that becomes the skews such as position that check object is taken, in each recess, accommodate under the state that respectively checks object, for this inspection object is fixed in this recess, the object fixed cell applies bed knife from outside to this inspection object.This mode that applies bed knife is not particularly limited, as long as can reach the fixing purpose for taking like this, and, thereby can after inspection, will check that object removes this bed knife from the recess taking-up and get final product, as long as meet above-mentioned condition, can adopt any-mode.
And, carried out, under fixing state, taking performance element and taking the inspection object by the X ray filming apparatus at the object fixed cell.In addition, in order to realize the inspection purpose of X ray checking device of the present utility model, along with relatively moving of X ray filming apparatus and conveyance pallet, carry out repeatedly and should take.Yet, by the object fixed cell, in each recess, utilize above-mentioned bed knife to fix corresponding inspection object, therefore, even above-mentioned relatively moving occurred when taking, the phenomenons such as skew can not occur in the position of the inspection object in recess yet, thus, can access appropriate check result.In addition, above-mentioned relative movement be traveling priority, curve movement all can, can be also in rotary moving.
At this, the style of shooting as taking performance element, can adopt style of shooting arbitrarily according to the inspection purpose of X ray checking device of the present utility model.An example as its style of shooting, described shooting performance element, by described object fixed cell, fixing respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, so that this X ray filming apparatus carries out repeatedly described shooting with respect to relative position or the relative different mode of posture of described a plurality of inspection objects, perhaps, make this X ray filming apparatus carry out relative scanning with respect to described a plurality of inspection objects on one side, Yi Bian carry out repeatedly described shooting.The X ray filming apparatus is relatively moved with respect to checking object, although the vibration now produced can be passed to the inspection object, but, due to the bed knife that exists the object fixed cell to apply, therefore, the position skew etc. of the inspection object of impact can not occur check result is brought.
At this, in above-mentioned X ray checking device, described object fixed cell, accommodate respectively under the state of described inspection object at described a plurality of recesses, can check that object applies the pressing force of pressing to this recess to this, thereby be fixed.That is, press from outside to the inspection object be contained in recess, thereby utilize the object fixed cell to be fixed.In addition, as the fixed form applied beyond pressing force, also can adopt the attractive force of air in recess etc., the absorption affinity of magnetic force etc., be used as the bed knife that the object fixed cell applies.
In addition, in applying the mode of above-mentioned pressing force, described object fixed cell has: base component; Elastic component, it is arranged on described base component; Described object fixed cell, apply pressing force by described base component, so that described elastic component contacts with the described inspection object in being contained in respectively described a plurality of recess.Elastic component deforms because of the pressing force that base component transmits, and therefore easily enters in recess, and thus, easily the inspection object interior with being contained in recess contacts.Therefore, so, by base component, elastic component is pressed to the inspection object be contained in recess, can efficiently and reliably to this inspection object, be applied pressing force.
And in above-mentioned X ray checking device, described elastic component can consist of flat member, this flat member has the area that can cover described a plurality of recesses.And then described a plurality of recesses can be respectively equipped with notch part, this notch part is the one or more notch parts that are connected with this recess, and when by described object fixed cell, applying pressing force, the part of described flat member can enter described notch part.By the notch part be connected with recess is set, make the elastic component that forms flat member easily via this notch part, enter in recess.Therefore, not only can from top to the inspection object, apply pressing force via the peristome of recess, and can, from side to checking that object apply pressing force, thus, can realize checking more reliably the fixing of object.
In addition, also can replace the mode that makes elastic component form flat member as described above, and in the following way: described elastic component, have with described a plurality of recesses corresponding size a plurality of juts of dividing out respectively.In this case, when by described object fixed cell, applying pressing force, described a plurality of juts of described elastic component enter respectively described a plurality of recesses of described conveyance pallet.That is, in such mode, each jut enters recess from the peristome of recess, and the inspection object that is contained in its inside is applied to pressing force.Therefore, can improve elastic component and the contact that checks object, thus, can make this stationary state more reliable.
In addition, in above-mentioned X ray checking device, at least a portion of described object fixed cell can consist of member that can the Transmission X ray, described at least a portion of described object fixed cell refers to, is included in the part in the x-ray irradiation area of described conveyance pallet and described X ray filming apparatus.By such formation X ray checking device, can utilize the X ray filming apparatus to carry out good X ray and take.
In addition, as the utility model, from another aspect, provide a kind of image pickup method for X-ray examination,, to checking the shooting of object this inspection object has been checked based on the X ray filming apparatus.Namely, at the image pickup method for X-ray examination of the present utility model, by being formed with the conveyance pallet of a plurality of recesses that hold respectively a plurality of inspection objects, described a plurality of inspection objects are carried out to conveyance, this conveyance is for being taken by described X ray filming apparatus, described image pickup method for X-ray examination comprises: the object fixing step, before described X ray filming apparatus is taken, described a plurality of recesses at described conveyance pallet accommodate respectively under the state of described inspection object, from outside to described a plurality of inspection objects, apply respectively bed knife, thereby should check that object was fixed in this recess, take execution step, in described object fixing step, fixed respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, thereby this X ray filming apparatus is repeatedly taken described a plurality of inspection objects.
In addition, in described shooting execution step, can in described object fixing step, fix respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, so that this X ray filming apparatus carries out repeatedly described shooting with respect to relative position or the relative different mode of posture of described a plurality of inspection objects, perhaps, make this X ray filming apparatus carry out relative scanning with respect to described a plurality of inspection objects on one side, Yi Bian carry out repeatedly described shooting.In addition, in described object fixing step, can accommodate respectively under the state of described inspection object at described a plurality of recesses, this inspection object is applied to the pressing force of pressing to this recess.
At such image pickup method for X-ray examination, along with X ray filming apparatus and relatively moving of conveyance pallet, carrying out X ray while taking, because the inspection object that will be contained in recess is fixed in this recess, therefore can realize stable shooting.In addition, with regard to the structure of X ray checking device of the present utility model, as long as can realize so stable shooting, its appropriate combination can be advanced to the image pickup method for X-ray examination.
When utilizing the X ray filming apparatus to check a plurality of inspection objects, can provide the shooting that is suitable for checking.
The accompanying drawing explanation
Fig. 1 means the figure of the schematic configuration of X ray checking device of the present utility model.
Fig. 2 be from top, mean X ray checking device shown in Figure 1 the conveyance pallet is carried out to the figure of the conveyance route of conveyance.
Fig. 3 means the A-A cut-open view in Fig. 2.
Fig. 4 A means the first relevant figure of the first stationary state that checks object for fixing.
Fig. 4 B means the second relevant figure of the first stationary state that checks object for fixing.
Fig. 5 means the process flow diagram of the check process of the inspection object in X ray checking device shown in Figure 1.
Fig. 6 means the figure of other state that holds the conveyance pallet that checks object.
Fig. 7 means the relevant figure of the second stationary state that checks object for fixing.
Fig. 8 means the relevant figure of the 3rd stationary state that checks object for fixing.
Fig. 9 means the relevant figure of the 4th stationary state that checks object for fixing.
The explanation of Reference numeral
The 1X radiographic source
2 wave detectors
8 conveyance pallets
The 8a recess
8b, 8c notch part
10 stationary installations
11 frames
12 elastic components
Embodiment
Lower surface, illustrate X ray checking device of the present utility model with reference to accompanying drawing.This X ray checking device, utilize the device that carries out the X ray shooting, to checking that object checks.The structure of following embodiment is illustration, and the utility model is not limited to the structure of this embodiment.
The first embodiment
Fig. 1 means the figure of the schematic configuration of X ray checking device of the present utility model.This X ray checking device, utilize wave detector (detector) 2 to detect the X ray irradiated from x-ray source 1, thereby, to checking that object carries out the X ray shooting, based on its shooting results, the inspection object is checked.In X ray checking device, x-ray source 1 is arranged on guide rail 7, by the driving force of not shown motor and mobile along Z-direction (Z3 direction of principal axis shown in Figure 1) on guide rail 7.In addition, for wave detector 2 being positioned to the position that can detect from the X ray of x-ray source 1, and dispose XY objective table 3.This XY objective table 3 can move on the XY plane vertical with Z-direction.The movement of the X-direction on this XY face (X1 direction of principal axis shown in Figure 1) is along guide rail 4 and realized by the driving force of not shown motor; The movement of the Y direction on this XY face (Y1 direction of principal axis shown in Figure 1) is to be realized by the driving force of not shown motor along guide rail 5.
And then as shown in Figure 1, XY objective table 3 is equipped with wave detector 2 in the mode of hanging down, but the distance between this XY objective table 3 and wave detector 2 (the axial distance of Z1 shown in Figure 1) can change by not shown actuator.Like this, move and wave detector 2 is moved along the Z1 axle along the Z3 axle by making x-ray source 1, can change the relative distance that checks object and x-ray source etc., its result, can adjust the multiplying power of testing result etc.
At this, in X ray checking device shown in Figure 1, set structure can be by the zone of the x-ray bombardment from x-ray source 1 (below, only be called " irradiation area ") for checking that object 20 is moved into.Particularly, will hold the conveyance pallet 8 of a plurality of inspection objects 20, along guide rail 6 and conveyance to this irradiation area.In addition, under state shown in Figure 1, the conveyance pallet has held 9 and has checked objects 20, and with this state by conveyance to the x-ray irradiation area be used to taking.The conveyance to irradiation area like this (action, processing), become the conveyance (action, processing) of Y direction (Y2 direction of principal axis shown in Figure 1).In addition, in X ray checking device shown in Figure 1, conveyance pallet 8 can above move in Y direction (Y2 direction of principal axis shown in Figure 1) and perpendicular X-direction (X2 direction of principal axis shown in Figure 1), thereby can make conveyance pallet 8 be present in the optional position in irradiation area.Its result, held under the state of a plurality of inspection objects 20 in conveyance pallet 8, can with respect to x-ray source 1, make respectively to check that the position of object 20 and posture are different.In addition, utilize drive source to realize the conveyance of conveyance pallet 8 and with respect to the adjustment of the position of x-ray source 1 etc., this drive source is the not shown motor of supplying with along the driving force of X2 axle and Y2 axle.
And then, based on Fig. 4, illustrate and in conveyance pallet 8, hold the mode of holding that checks object 20.In conveyance pallet 8, form a plurality of recess 8a and be used as holding the space that checks object.In a recess in these recesses 8a, can hold one and check object 20, therefore, in conveyance pallet 8 shown in Figure 1, form 9 recess 8a, accommodate respectively and check object 20.And, the degree of depth of this recess is set as, under the state in inspection object 20 is accommodated in recess 8a, check that object 20 is not from the outstanding part of the opening portion of recess 8a.In addition, also can utilize the executor (manipulator) of the mechanical arm of prior art etc., will check that object 20 holds into each recess 8a.
Based on the instruction that carrys out self-control device 9, realize the driving of each axle of the X ray checking device formed like this.Control device 9 section within it has RAM(Random Access Memory, random access memory (RAM)), ROM(Read-only Memory, ROM (read-only memory)) etc. storer, form the computing machine that can carry out for the various programs of X-ray examination.In addition, for example, be electrically connected to by various sensors (, for detection of the sensor of position) and the control device 9 that Fig. 1 is not illustrated, utilize its detected value to carry out the processing for X-ray examination.
At this, in X ray checking device shown in Figure 1, so that carrying out repeatedly (multiple) X ray, inspection object 20 mode different from the relative position of x-ray source 1 take, based on its shooting results, generate 3D rendering.So, can realize checking the detailed inspection of object 20.In addition, the method for utilizing X ray to take to generate 3D rendering is prior art, and the description thereof will be omitted in this manual.In order so repeatedly to carry out the X ray shooting, in X ray checking device, make conveyance pallet 8 so that a plurality of inspection objects 20 are contained in respectively to the state in corresponding recess 8a, along X2 direction of principal axis and Y2 direction of principal axis, move, and each the movement all utilizes x-ray source 1 and wave detector 2 to carry out the X ray shooting.But, if mobile like this conveyance pallet 8, because moving the vibration caused, it can be passed to the inspection object 20 in conveyance pallet 8, small vibration also causes likely checking that the position of object 20, posture are offset in recess 8a, is difficult to make accurately the 3D rendering for X-ray examination.
Therefore, in X ray checking device of the present utility model, when carrying out as described above the X ray shooting, in the situation that conveyance pallet 8 is relatively moved with respect to x-ray source 1, for the phenomenons such as skew do not occur in the position that makes to check object 20, and adopted the structure (structure of stationary installation 10 has been shown in Fig. 1) that the inspection object 20 be contained in recess 8a is carried out to fixing (processing) of suitable (appropriately).Based on Fig. 2,3, illustrate this fixed sturcture.Fig. 2 observes and stationary installation 10 is configured in to the figure of the state on conveyance pallet 8 X ray checking device from top.In addition, for convenience of description, in Fig. 2, omitted the structure of wave detector 2 and XY objective table 3 etc.In addition, Fig. 3 is the A-A cut-open view in Fig. 2.
As shown in these figures, stationary installation 10 consists of frame 11 and elastic component 12, this frame 11 consists of the high metal of X ray transmission of nonmetal or aluminium etc., this elastic component 12 is located at the lower surface of this frame 11, the high metal of X ray transmission by nonmetal or aluminium of sponge, rubber etc. etc. forms, and can apply elastic force.This elastic component 12 form one laminar, its area can cover the whole recess 8a be located in conveyance pallet 8.And, utilizing before x-ray source 1 and wave detector 2 carry out the X ray shooting, first utilize stationary installation 10 to fix and check object 20.Based on Fig. 4 A and Fig. 4 B, the concrete mode that this is fixing is described.
Fig. 4 A shows the state (with reference to Fig. 3) that the lower surface of the elastic component 12 in stationary installation 10 does not contact with conveyance pallet 8.That is, Fig. 4 A shows the state that stationary installation 10 is configured in to the top of conveyance pallet 8, and under this state, stationary installation 10 is not yet to checking that object 20 is fixed.And, if stationary installation 10 descends near conveyance pallet 8, the lower surface of elastic component 12 first with the Surface Contact of conveyance pallet 8.And then if stationary installation 10 further descends, elastic deformation can occur elastic component 12, the part of elastic component 12 can enter in (clamp-oning) recess 8a, and the while contacts with the inspection object 20 in being contained in recess 8a, and it is transmitted to pressing force.And the decline of final stationary installation 10 finishes, to keep the mode of its decline state, make stationary installation 10 become the state fixing with respect to conveyance pallet 8.In addition, although Fig. 4 B shows this state, in order easily to grasp elastic component 12 and the contact condition that checks object 20, Fig. 4 B shows the state that cuts off stationary installation 10.
As shown in Figure 4 B, if reached stationary installation 10 state fixing with respect to conveyance pallet 8,12 pairs of recesses of elastic component, the 8 interior inspection objects 20 that elastic deformation has occurred apply flexible pressing force.Its result, check that object 20 becomes the state be fixed in recess 8a, carrying out as described above X ray while taking, even conveyance pallet 8 is relatively moved with respect to x-ray source 1, the inspection object 20 in recess 8a can the occurrence positions skew etc. yet.In addition, because the frame 11 that is used to form stationary installation 10 and elastic component 12 are nonmetal, therefore, the X ray irradiated from x-ray source 1 can transmission they.Therefore, in this case, take and can not bring impact for the X ray detected with wave detector 2.
At this, the control for X-ray examination of the inspection object 20 in X ray checking device shown in Figure 1 is described based on Fig. 5.Inspection shown in Figure 5 is controlled, and at conveyance pallet 8, having held under the state of a plurality of inspection objects 20, carries out its inspection thereby take to obtain by X ray the 3D rendering that respectively checks object 20.This inspection is controlled and is carried out by control device 9.
At first, in the S(step, below only be called " S ") in 101, the scrutiny program that selection should be carried out the inspection object be contained in conveyance pallet 8.This scrutiny program is stored in the storer in control part, and consideration should, to the scope of examination that checks that object 20 is carried out, be selected scrutiny program.And, according to the scrutiny program of selecting, set the number of times that uses X ray that x-ray source 1 and wave detector 2 carry out to take, conveyance pallet 8 with respect to the relative position of x-ray source 1 etc.If the processing of S101 finishes, enter S102.
In S102, the conveyance pallet 8 that will hold a plurality of inspection objects 20 is moved into the irradiation area of the X ray in X ray checking device.If above-mentioned, this moves into (action, process) is to make conveyance pallet 8 move (action) along the Y2 direction of principal axis, utilizes infrared ray sensor etc. suitably to control the stop position of conveyance pallet 8.If the processing of S102 finishes, enter S103.
In S103, locate more accurately conveyance pallet 8.Particularly, will set slightly widelyr than the width of conveyance pallet 8 for the distance of 6, the guide rail of conveyance, thus conveyance conveyance pallet 8 swimmingly.Therefore, stopping in processing of the conveyance pallet 8 in S102, although can keep the axial position of Y2 with degree of precision, do not adjust the axial position of X2 especially.Therefore, in S103, adjust more accurately the location of the axial conveyance pallet 8 of X2.For example, conveyance pallet 8 is pressed against to the location-plate that becomes benchmark on the X2 direction of principal axis etc. upper, carry out this location.If the processing of S103 finishes, enter S104.
In S104, as based on explanations such as Fig. 4 A, Fig. 4 B, for the conveyance pallet 8 of having located, stationary installation 10 is descended from the top of this conveyance pallet 8, thereby utilize elastic component 12 will check that object 20 is fixed in recess 8a.Owing to conveyance pallet 8 having been carried out the location of appropriate (suitable) in S103, therefore, stationary installation 10 can drop to appropriate position with respect to conveyance pallet 10.If the processing of S104 finishes, enter S105.
In S105, according to the scrutiny program of selecting, read the condition of the X ray shooting of having used x-ray source 1 and wave detector 2 in S101.For example, to check required 3D rendering in order obtaining, need to read conveyance pallet 8 and should take with respect to the relative position of x-ray source 1 and its condition of number of times etc.If the processing of S105 finishes, repeat the processing of S106～S108.That is, in S106, be used to take from the irradiation of the X ray of x-ray source 1, then, for the shooting condition according to next positions conveyance pallet 8, and conveyance pallet 8 moved on X2 direction of principal axis and Y2 direction of principal axis.In addition, while taking, the data that will obtain by the shooting that wave detector 2 obtains are stored in the storer in control device 9 at every turn.And in S108, whether judgement is used to finish from the shooting that the irradiation of the X ray of x-ray source 1 is carried out, if affirmative determination (in S108, "Yes") enters S109, if negative evaluation (in S108, "No") is carried out S106 and processing afterwards thereof again.
And in S108, the result that the repeatedly X ray carried out based on a plurality of inspection objects 20 to being contained in a conveyance pallet 8 is taken, check judgement to the plurality of inspection object 20.According to the scrutiny program of selecting, carry out the concrete processing in this inspection judgement in S101.For example, based on the 3D rendering that the result according to repeatedly X ray shooting generates, judge and check that object 20 has N/D etc.In addition, the not shown display device by X ray checking device or annunciator etc., this checks the result judged to examiner's notice (report).If the processing of S109 finishes, enter S110, at this, the conveyance pallet 8 that inspected is complete is from taking out of the irradiation area of X ray checking device.In addition, carrying out this while taking out of (action, process), in order to remove the fixing of stationary installation 10, and make the stationary installation that conveyance pallet 8 is pressed 10 increase.
In the inspection of carrying out is like this controlled, can once to a plurality of inspection object 20 relevant inspections, check control.Now, before carrying out the X ray shooting, by stationary installation 10, make respectively to check that object 20 fixes with respect to the recess 8a held separately respectively, therefore, can prevent reliably position skew of the inspection object 20 caused with respect to relatively moving of x-ray source 1 because of conveyance pallet 8 etc.In addition, although between inspection object 20 and wave detector 2, have stationary installation 10 when X ray is taken, stationary installation 10 consists of nonmetal, therefore can not have influence on the X ray shooting results.
In addition, stationary installation 10 also need not integral body all consist of nonmetallic member, as long as in the zone by x-ray bombardment, use at least the member that is easy to the Transmission X ray of non-metallic member etc., zone beyond it, can consider the mar proof of the intensity of X ray checking device and part and use required member.In addition, in the above-described embodiments, when repeatedly taking, conveyance pallet 8 is moved with respect to x-ray source 1, but also can replace, make under the fixing state of conveyance pallet 8, mobile x-ray source 1, in addition, also can mobile conveyance pallet 8 and x-ray source both.No matter adopt which kind of move mode, owing to utilizing stationary installation 10 to carry out carrying out the X ray shooting under fixing state, therefore, can both reliably avoid making to check that because conveyance pallet 8 or x-ray source 1 move the mechanical vibration that cause object 20 is at recess 8a bias internal.
<variation>
In the above-described embodiment, on conveyance pallet 8, be provided with the recess 8a that checks object be used to holding, but in this variation, as shown in Figure 6, also be provided with the notch part 8b and the 8c that subside that in the mode be connected with each recess 8a, form, the depth as shallow of the depth ratio recess 8a of this notch part 8b and 8c.Fig. 6 means the figure that observes conveyance pallet 8 from top, in this variation, at the longitudinal direction of Fig. 6, notch part 8b is set, and at transverse direction, notch part 8c is set.In these notch parts, do not hold and check object 20.
By notch part 8b, the 8c more shallow than recess 8a are set like this, when 12 pairs of conveyance pallets 8 of elastic component were pressed, the part of elastic component 12 not only entered (clamp-oning) recess 8a, but also entered (clamp-oning) each notch part 8b, 8c.Its result, for the inspection object 20 in being contained in recess 8a, elastic component 12 is in contact with it from its side, thus, can more stably will check that object 20 is fixed in recess 8a.In addition, by notch part 8b, 8c are set like this, can easily will be contained in the interior inspection object 20 of recess 8a from recess 8a, taking out.
The second embodiment
The second embodiment of X ray checking device of the present utility model is described based on Fig. 7 and Fig. 8.In a second embodiment, be used to the elastic component 12 that forms stationary installation 10, form the arrangement of haunched member, the size of this haunched member and configuration (configuration mode), corresponding with the recess 8a on being located at conveyance pallet 8.In Fig. 7, recess 8a on conveyance pallet 8 is inserted to the elastic component 12 as this haunched member, in order to keep this state, the frame 11 that has made to install elastic component 12 becomes clamping components 13 clampings (clamping) of " コ " word shape while with conveyance pallet 8, being analysed and observe, and then, press mechanical arm 14 and from top, press this clamping components 13.By like this stationary installation being fixed, can, reliably at the interior fixedly inspection of recess 8 object 20, after fixing, can carry out the above-mentioned X ray for checking and take.
<variation>
In the embodiment shown in fig. 7, although clamp (clamping) frame 11 and conveyance pallet 8 by clamping components 13, but in the situation that stationary installation 10 is very heavy, mobile gap in recess 8a perhaps between the elastic component 12 of shape for lugs and recess 8a, do not have to make elastic component 12 in the situation that can be omitted as shown in Figure 8 clamping components 13 yet and press mechanical arm 14.Under such state, because of the deadweight of stationary installation 10, make the elastic component 12 of shape for lugs, in recess 8a, elastic deformation occur, can get rid of the leeway (clearance spaces) that checks that object 20 moves in this recess 8a.
The 3rd embodiment
The 3rd embodiment of X ray checking device of the present utility model is described based on Fig. 9.In mode shown in Figure 9, the depth ratio that is located at the recess 8a in conveyance pallet 8 checks that the height of object 20 is shallow.Thus, will check that object 20 is contained under the state in recess 8a, check that the top of object 20 is exposed from the peristome of recess 8a.Under such state, also can with the above embodiments similarly, press elastic component 12, utilize its elastic deformation that inspection object 20 is fixed in recess 8a.And, after fixing, can carry out the above-mentioned X ray for checking and take.
Claims (7)
1. an X ray checking device, have the X ray filming apparatus, based on by the shooting of this X ray filming apparatus to checking that object carries out, this inspection object checked, it is characterized in that having:
The conveyance pallet, be can a plurality of inspection objects of conveyance the conveyance pallet, and be formed with a plurality of recesses that hold respectively described a plurality of inspection objects,
The object fixed cell, before by described X ray filming apparatus, being taken, described a plurality of recesses at described conveyance pallet accommodate respectively under the state of described inspection object, from outside, respectively described a plurality of inspection objects are applied to bed knife, thereby should check that object was fixed in this recess
Take performance element, by described object fixed cell, fixing respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, this X ray filming apparatus is repeatedly taken described a plurality of inspection objects.
2. X ray checking device as claimed in claim 1, is characterized in that,
Described shooting performance element, by described object fixed cell, fixing respectively under the state of described a plurality of inspection objects, at least one party in described X ray filming apparatus and described conveyance pallet is moved, with this X ray filming apparatus, carry out repeatedly described shooting with respect to the relative position of described a plurality of inspection objects or the relative different mode of posture, perhaps, make this X ray filming apparatus carry out relative scanning with respect to described a plurality of inspection objects on one side, Yi Bian carry out repeatedly described shooting.
3. X ray checking device as claimed in claim 1, is characterized in that,
Described object fixed cell, accommodate respectively under the state of described inspection object at described a plurality of recesses, is fixed thereby this inspection object is applied to the pressing force of pressing to this recess.
4. X ray checking device as claimed in claim 3, is characterized in that,
Described object fixed cell has:
Base component,
Elastic component, it is arranged on described base component;
Described object fixed cell, apply pressing force by described base component, so that described elastic component contacts with the described inspection object in being contained in respectively described a plurality of recess.
5. X ray checking device as claimed in claim 4, is characterized in that,
Described elastic component consists of flat member, and this flat member has the area that can cover described a plurality of recesses,
Described a plurality of recess is respectively equipped with notch part, and this notch part is the one or more notch parts that are connected with this recess, and when by described object fixed cell, applying pressing force, the part of described flat member can enter described notch part.
6. X ray checking device as claimed in claim 4, is characterized in that,
Described elastic component, have with described a plurality of recesses corresponding size a plurality of juts of dividing out respectively,
When by described object fixed cell, applying pressing force, described a plurality of juts of described elastic component enter respectively described a plurality of recesses of described conveyance pallet.
7. X ray checking device as described as any one in claim 1～6, is characterized in that,
At least a portion of described object fixed cell consists of member that can the Transmission X ray,
Described at least a portion of described object fixed cell refers to, is included in the part in the x-ray irradiation area of described conveyance pallet and described X ray filming apparatus.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-058405 | 2012-03-15 | ||
| JP2012058405A JP5853781B2 (en) | 2012-03-15 | 2012-03-15 | X-ray inspection apparatus and imaging method for X-ray inspection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203310776U true CN203310776U (en) | 2013-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013200630435U Expired - Fee Related CN203310776U (en) | 2012-03-15 | 2013-01-30 | X-ray inspection device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5853781B2 (en) |
| CN (1) | CN203310776U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110462390A (en) * | 2017-04-07 | 2019-11-15 | 柯尼卡美能达株式会社 | Detection method for quality |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023189135A1 (en) * | 2022-03-31 | 2023-10-05 | 東レ株式会社 | Inspection device and inspection method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE50100104D1 (en) * | 2001-03-24 | 2003-03-20 | Yxlon Int X Ray Gmbh | Method for checking objects, in particular for determining errors or irregularities in them using X-rays, and device for carrying out the method |
| JP2006162335A (en) * | 2004-12-03 | 2006-06-22 | Nagoya Electric Works Co Ltd | X-ray inspection device, x-ray inspection method and x-ray inspection program |
| JP4742782B2 (en) * | 2005-09-28 | 2011-08-10 | 株式会社島津製作所 | X-ray inspection equipment |
| JP5061025B2 (en) * | 2008-05-20 | 2012-10-31 | 日立アロカメディカル株式会社 | Sample holder for X-ray imaging |
| JP5396751B2 (en) * | 2008-06-18 | 2014-01-22 | オムロン株式会社 | Board inspection equipment using X-rays |
-
2012
- 2012-03-15 JP JP2012058405A patent/JP5853781B2/en active Active
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110462390A (en) * | 2017-04-07 | 2019-11-15 | 柯尼卡美能达株式会社 | Detection method for quality |
| CN110462390B (en) * | 2017-04-07 | 2022-03-08 | 柯尼卡美能达株式会社 | Quality inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013190380A (en) | 2013-09-26 |
| JP5853781B2 (en) | 2016-02-09 |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20131127 Termination date: 20210130 |