CN203300770U - Microwave phase shifter based on micro-electromechanical technology - Google Patents
Microwave phase shifter based on micro-electromechanical technology Download PDFInfo
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- CN203300770U CN203300770U CN2013203558684U CN201320355868U CN203300770U CN 203300770 U CN203300770 U CN 203300770U CN 2013203558684 U CN2013203558684 U CN 2013203558684U CN 201320355868 U CN201320355868 U CN 201320355868U CN 203300770 U CN203300770 U CN 203300770U
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- transmission line
- phase shifter
- electric capacity
- distributed constant
- earth connection
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Abstract
The utility model discloses a microwave phase shifter based on a micro-electromechanical technology. The microwave phase shifter comprises a transmission line (1), capacitor drivers (3) and a medium substrate (2), wherein the capacitor drivers (3) are arranged on the medium substrate (2), one end of each capacitor driver (3) is connected with the grounding line of the transmission line (1) through a U-shaped beam (9), the other end is connected with a driving power supply, interdigital capacitors (8) are uniformly arranged between the signal line (7) and the grounding line to form the distributed parameter transmission line (1). The microwave phase shifter provides the advantages as follows: electrostatic forces are generated by the interdigital capacitor drivers, the ground of the distributed parameter transmission line moves, the capacitances of the interdigital capacitors are further changed correspondingly, the phase of a signal is changed, when the driving voltage continuously changes, continuous change of the phase is achieved, infinite phase states are realized, the structure is simple, and control is convenient.
Description
Technical field
The utility model relates to the microelectron-mechanical field, particularly relates to a kind of microwave phase shifter based on the micromechanics electronic technology.
Background technology
Phase shifter can be adjusted the phase place of ripple, at radar, missile attitude control, accelerator, communication, instrument and meter, all has a wide range of applications in the field such as music even.Use phase shifter can ensure voltage stability, not because of the interconnection cascading trip, in succession withdraw from and destroyed, can obviously improve voltage stability limit.Its operation principle there are differences according to different formations,, as transistor circuit, can add a control signal to control the phase shift size at input; Utilize the time delay of resistance-capacitance circuit to reach phase shift in some circuit; Also can utilize timer internal to reach the purpose of phase shift at single-chip computer control system.
Digital phase shifter of the prior art, the upper-lower position that it controls MEMS bridge by electrostatic force changes the distributed constant electric capacity of transmission line, thereby changes the phase place of input signal, as shown in Figure 4.Because MEMS bridge only has the up and down two states, cause the phase shifter of prior art can only realize limited phase state, if realize a plurality of phase states, need a plurality of control ports, not only control complexity, and make the structure of phase shifter become complicated, adding man-hour, adopt the silicon face process technology, complex process.
The utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provide a kind of simple in structure, processing technology simply based on the microwave phase shifter of micromechanics electronic technology, it can realize the continuous variation of phase place, only need simultaneously four control ports just can realize a unlimited phase state, control simple and convenient.
The purpose of this utility model is achieved through the following technical solutions: a kind of microwave phase shifter based on the micromechanics electronic technology, and it comprises distributed constant transmission line, electric capacity driver and dielectric substrate, transmission line is located at the dielectric substrate upper end.The distributed constant transmission line comprises holding wire, the first earth connection, the second earth connection and interdigital capacitor, holding wire is arranged between the first earth connection and the second earth connection, the two ends of holding wire are respectively equipped with signal input part and signal output part, also be provided with interdigital capacitor between holding wire and earth connection, interdigital capacitor is carried between holding wire and earth connection uniformly.The electric capacity driver is located on dielectric substrate, and electric capacity driver one end is connected with the ground of distributed constant transmission line by U-shaped beam, and the other end is connected with driving power.
Further, described distributed constant transmission line is the holding wire cycle to load interdigital capacitor, and described electric capacity driver is comb electric capacity driver.
Further, described dielectric substrate is silicon chip.
Further, described comb electric capacity driver is four, and four comb electric capacity drivers are symmetricly set on the left and right sides of distributed constant micromechanics transmission line.
Further, the silicon body processing technology is adopted in the processing of described microwave phase shifter.
The beneficial effects of the utility model are:
(1) produce electrostatic force by comb electric capacity driver, the ground of distributed constant micromechanics transmission line is subjected to displacement, and then corresponding the variation occurs in the capacitance that makes interdigital capacitor, the phase place of signal also changes, when driving voltage changes continuously, the continuous variation of signal phase of output, thus realize the continuous variation of phase place, also can realize a unlimited phase state simultaneously;
(2) the distributed constant transmission line is to load interdigital capacitor by the cycle, can realize a plurality of phase states, and can realize analog phase shifter, and processing is simple;
(3) only by four control ports, namely comb electric capacity driver, just can realize a unlimited phase state, and is simple in structure, controls simple and convenient;
(4) processing technology of microwave phase shifter adopts the silicon body processing technology, and technique is simple.
Description of drawings
Fig. 1 is structure chart of the present utility model;
Fig. 2 is the A-A direction cutaway view of Fig. 1;
Fig. 3 is the schematic diagram of distributed constant micromechanics transmission line;
Fig. 4 is the structure chart of existing phase shifter;
Structure chart when Fig. 5 is the utility model work;
In figure, 1-distributed constant transmission line, 2-dielectric substrate, 3-comb electric capacity driver, 4-the second earth connection, 5-signal output part, 6-signal input part, 7-holding wire, 8-interdigital capacitor, 9-U type beam, 10-the first earth connection.
Embodiment
Below in conjunction with accompanying drawing, the technical solution of the utility model is described in further detail, but protection range of the present utility model is not limited to the following stated.
As shown in Figure 1 and Figure 2, a kind of microwave phase shifter based on the micromechanics electronic technology, it comprises distributed constant transmission line 1, electric capacity driver 3 and dielectric substrate 2, transmission line 1 is located at dielectric substrate 2 upper ends.Distributed constant transmission line 1 comprises holding wire 7, the first earth connection 10, the second earth connection 4 and interdigital capacitor 8, holding wire 7 is arranged between the first earth connection 10 and the second earth connection 4, the two ends of holding wire 7 are respectively equipped with signal input part 6 and signal output part 5, also be provided with interdigital capacitor 8 between holding wire 7 and earth connection, interdigital capacitor 8 is carried between holding wire 7 and earth connection uniformly.Electric capacity driver 3 is located on dielectric substrate 2, and electric capacity driver 3 one ends are connected with the earth connection of transmission line 1 by U-shaped beam 9, and the other end is connected with driving power.
Further, described distributed constant transmission line 1 adopts the holding wire cycle to load interdigital capacitor 8, and described electric capacity driver 3 is comb electric capacity driver.
Further, described dielectric substrate 2 is silicon chip.
Further, described comb electric capacity driver 3 is four, and four comb electric capacity drivers are symmetricly set on the left and right sides of distributed constant micromechanics transmission line 1.
Further, the silicon body processing technology is adopted in the processing of described microwave phase shifter, and technique is simple.
As shown in Figure 3, C
t, L
tFor distributed constant electric capacity and the inductance of non-loaded CPW, C
bFor the capacitance of interdigital capacitor, L
bFor the inductance of interdigital capacitor, C
bAdjustable, the phase place change calculations formula of input/output signal is
Wherein f is frequency input signal, and l is the distributed constant length of transmission line.
Operation principle of the present utility model is as follows: as shown in Figure 5, comb electric capacity driver produces electrostatic force, and by U-shaped beam, the ground of distributed constant transmission line is subjected to displacement, be the g1 in Fig. 3, g2 changes, the capacitance of the interdigital capacitor that the cycle loads changes accordingly, and according to the phase place change calculations formula of input/output signal, the phase place of signal also changes.When driving voltage changed continuously, the signal phase of output also changed continuously, thereby realized a unlimited phase state.
Claims (4)
1. microwave phase shifter based on the micromechanics electronic technology, it comprises distributed constant transmission line (1) and dielectric substrate (2), distributed constant transmission line (1) is located at dielectric substrate (2) upper end, distributed constant transmission line (1) comprises holding wire (7), the first earth connection (10), the second earth connection (4) and loading capacitance (8), holding wire (7) is arranged between the first earth connection (10) and the second earth connection (4), the two ends of holding wire (7) are respectively equipped with signal input part (6) and signal output part (5), also be provided with interdigital loading capacitance (8) between holding wire (7) and earth connection, it is characterized in that: it also comprises electric capacity driver (3), electric capacity driver (3) is located on dielectric substrate (2), electric capacity driver (3) one ends are connected with the earth connection of distributed constant transmission line (1) by U-shaped beam (9), the other end is connected with driving power, described loading capacitance (8) is interdigital capacitor, and interdigital capacitor (8) is carried between holding wire (7) and earth connection uniformly, forms the distributed constant transmission line.
2. a kind of microwave phase shifter based on the micromechanics electronic technology according to claim 1, it is characterized in that: described distributed constant transmission line (1) loads interdigital capacitor (8) for holding wire (7) cycle, and described electric capacity driver (3) is comb electric capacity driver.
3. a kind of microwave phase shifter based on the micromechanics electronic technology according to claim 1, it is characterized in that: described dielectric substrate (2) is silicon chip.
4. a kind of microwave phase shifter based on the micromechanics electronic technology according to claim 2, it is characterized in that: described comb electric capacity driver (3) is four, and four comb electric capacity drivers are symmetricly set on the left and right sides of distributed constant micromechanics transmission line (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2013203558684U CN203300770U (en) | 2013-06-20 | 2013-06-20 | Microwave phase shifter based on micro-electromechanical technology |
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| CN2013203558684U CN203300770U (en) | 2013-06-20 | 2013-06-20 | Microwave phase shifter based on micro-electromechanical technology |
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| CN203300770U true CN203300770U (en) | 2013-11-20 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241735A (en) * | 2013-06-20 | 2014-12-24 | 成都国腾电子技术股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| CN107632193A (en) * | 2017-09-28 | 2018-01-26 | 东南大学 | A kind of microwave power detector based on metamaterial structure |
| CN114127873A (en) * | 2019-08-30 | 2022-03-01 | 华为技术有限公司 | Variable capacitance, reflection type phase shifter and semiconductor device |
-
2013
- 2013-06-20 CN CN2013203558684U patent/CN203300770U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241735A (en) * | 2013-06-20 | 2014-12-24 | 成都国腾电子技术股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| CN104241735B (en) * | 2013-06-20 | 2017-05-10 | 成都振芯科技股份有限公司 | Microwave phase shifter based on micro-mechano-electronic technology |
| CN107632193A (en) * | 2017-09-28 | 2018-01-26 | 东南大学 | A kind of microwave power detector based on metamaterial structure |
| CN114127873A (en) * | 2019-08-30 | 2022-03-01 | 华为技术有限公司 | Variable capacitance, reflection type phase shifter and semiconductor device |
| CN114127873B (en) * | 2019-08-30 | 2022-09-23 | 华为技术有限公司 | Variable capacitance, reflection type phase shifter and semiconductor device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CHENGDU ZHENXIN TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHENGDU ARTEC ELECTRONICS CORP. |
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| CP03 | Change of name, title or address |
Address after: No. 1 high tech Zone Gaopeng road in Chengdu city of Sichuan Province in 610000 Patentee after: CHENGDU CORPRO TECHNOLOGY CO., LTD. Address before: No. 1 high tech Zone Gaopeng road in Chengdu city of Sichuan Province in 610041 Patentee before: Chengdu ARTEC Electronics Corp. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 Termination date: 20190620 |
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| CF01 | Termination of patent right due to non-payment of annual fee |