CN203275872U - Photoresist coating device and photoresist coating system - Google Patents
Photoresist coating device and photoresist coating system Download PDFInfo
- Publication number
- CN203275872U CN203275872U CN 201320242042 CN201320242042U CN203275872U CN 203275872 U CN203275872 U CN 203275872U CN 201320242042 CN201320242042 CN 201320242042 CN 201320242042 U CN201320242042 U CN 201320242042U CN 203275872 U CN203275872 U CN 203275872U
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- jet
- liquid storage
- storage bottle
- coating photoresit
- switch valve
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Abstract
The utility model discloses a photoresist coating device which comprises a liquid storage bottle and a sprayer, wherein an outlet is formed in the liquid storage bottle; the sprayer is connected with the outlet of the liquid storage bottle; the outlet is positioned at the bottom of the liquid storage bottle; the sprayer is positioned below the outlet; an air hole by which the inside of the liquid storage bottle is communicated with the outside of the liquid storage bottle is also formed in the liquid storage bottle. The utility model also provides a photoresist coating system. According to the photoresist coating device provided by the utility model, the sprayer is positioned below the outlet of the liquid storage bottle, and the air hole by which the inside of the liquid storage bottle is communicated with the outside of the liquid storage bottle is also formed in the liquid storage bottle, so that liquid in the liquid storage bottle can flow to the sprayer under the actions of the atmospheric pressure and the gravity of the liquid in the liquid storage bottle and then is sprayed out of the sprayer; the photoresist coating device is simple in structure and low in cost.
Description
Technical field
The spraying of the utility model design photoresist particularly, relates to a kind of jet-coating photoresit device and a kind of jet-coating photoresit system that comprises this jet-coating photoresit device.
Background technology
In the production run of display panel, need through thin film deposition, photoetching and etching three link.Wherein photoetching link comprises spraying photoresist, exposure and development three phases.Present jet-coating photoresit device comprises liquid storage bottle, pressue device and shower nozzle.When storing photoresist in liquid storage bottle, utilize pressue device to pressurize in liquid storage bottle, by pressure, photoresist is supplied in shower nozzle, then eject from shower nozzle.The jet-coating photoresit apparatus structure of this structure is complicated, and cost is higher.And often comprising a plurality of jet-coating photoresit devices in a cover jet-coating photoresit system, this has further increased the overall cost of jet-coating photoresit system.
Therefore, the cost that how to reduce the jet-coating photoresit device becomes the technical matters that this area needs to be resolved hurrily.
The utility model content
The purpose of this utility model is to provide a kind of jet-coating photoresit device and a kind of jet-coating photoresit system that comprises this jet-coating photoresit device, and described jet-coating photoresit apparatus structure is simple, cost is lower, can reduce the cost of whole jet-coating photoresit system.
As an aspect of the present utility model, a kind of jet-coating photoresit device is provided, this jet-coating photoresit device comprises liquid storage bottle and shower nozzle, be provided with outlet on described liquid storage bottle, described shower nozzle is connected with the outlet of described liquid storage bottle, and wherein, described outlet is positioned at the bottom of described liquid storage bottle, described shower nozzle is positioned at the below of described outlet, also is provided with the pore that the inside with described liquid storage bottle is communicated with the outside of this liquid storage bottle on described liquid storage bottle.
Preferably, described pore is positioned at the bottom of described liquid storage bottle, and described jet-coating photoresit device also comprises snorkel, and an end of this snorkel passes described pore, and to enter described liquid storage bottle inner, and the other end of described snorkel is positioned at the outside of described liquid storage bottle.
Preferably, described jet-coating photoresit device also comprises the drain pipe that is connected between described shower nozzle and described outlet, is provided with on this drain pipe for the first switch valve with described shower nozzle and the ground connection of described egress selection.
Preferably, described the first switch valve is solenoid valve, and described jet-coating photoresit device also comprises controller, and this controller is electrically connected to described the first switch valve.
Preferably, described jet-coating photoresit device also comprises the sensor for detection of object to be sprayed, and this sensor is electrically connected to described controller, and described controller can first switch valve according to the signal controlling that described sensor sends.
Preferably, described drain pipe comprises flexible part, and described jet-coating photoresit device also comprises pressing mechanism, and described flexible part is arranged on described the first switch valve upstream, and described pressing mechanism acts on described flexible part, so that described flexible part is pushed.
Preferably, described jet-coating photoresit device also comprises the second switch valve that makes described flexible part optionally be communicated with described outlet, and this second switch valve is arranged on described drain pipe, and is positioned at the upstream of described flexible part.
Preferably, described second switch valve is solenoid valve, and described second switch valve is electrically connected to described controller.
Preferably, described pressing mechanism comprises squeegee roller and the support member that extends along the length direction of described flexible part, described flexible part is arranged between described squeegee roller and described support member, described squeegee roller is electrically connected to described controller, makes described squeegee roller to move along the radial direction of described flexible part and the length direction of described flexible part.
As another one of the present utility model aspect, a kind of jet-coating photoresit system also is provided, this paint finishing comprises a plurality of jet-coating photoresit devices, and wherein, at least one in a plurality of described jet-coating photoresit devices is above-mentioned jet-coating photoresit device provided by the utility model.
In jet-coating photoresit device provided by the utility model, shower nozzle is positioned at the below of the outlet of liquid storage bottle, and be provided with the pore that the inside with liquid storage bottle is connected with the outside of liquid storage bottle on liquid storage bottle, therefore, liquid can be by the run by gravity of liquid self in atmospheric pressure and liquid storage bottle to shower nozzle in liquid storage bottle, and sprays from shower nozzle.Jet-coating photoresit apparatus structure provided by the utility model is simple, and cost is low, thereby has reduced the overall cost of the jet-coating photoresit system that comprises jet-coating photoresit device provided by the utility model.
Description of drawings
Accompanying drawing is to be used to provide further understanding of the present utility model, and consists of the part of instructions, is used from explanation the utility model with following embodiment one, but does not consist of restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the schematic diagram of the first embodiment of jet-coating photoresit device provided by the utility model;
Fig. 2 is the schematic diagram of the second embodiment of jet-coating photoresit device provided by the utility model.
Description of reference numerals
10: liquid storage bottle 20: shower nozzle
30: snorkel 40: drain pipe
41: 51: the first switch valves of flexible part
52: second switch valve 60: controller
70: sensor 81: squeegee roller
82: support member 100: substrate
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is elaborated.Should be understood that, embodiment described herein only is used for description and interpretation the utility model, is not limited to the utility model.
In the utility model, noun of locality D score refers to when described jet-coating photoresit device is in the use state, the direction of gravity." on " refer to the direction opposite with gravity direction.
As an aspect of the present utility model, a kind of jet-coating photoresit device is provided, as shown in Figure 1, this jet-coating photoresit device comprises liquid storage bottle 10 and shower nozzle 20, is provided with outlet on liquid storage bottle 10, and shower nozzle 20 is connected with the outlet of liquid storage bottle 10, wherein, described outlet is positioned at the bottom of liquid storage bottle 10, and shower nozzle 20 is positioned at the below of described outlet, also is provided with the pore that the inside with liquid storage bottle 10 is communicated with the outside of this liquid storage bottle 10 on liquid storage bottle 10.
It is pointed out that when utilizing jet-coating photoresit device spraying photoresist provided by the utility model, be contained with the photoresist of liquid in liquid storage bottle 10.At this moment, described pore should be able to make the part that is positioned at liquid level top in liquid storage bottle 10 be connected with the outside of liquid storage bottle 10, thereby the air of liquid storage bottle 10 outsides can be incorporated into the top of the photoresist liquid level in liquid storage bottle 10, and photoresist is applied atmospheric pressure.
Utilize jet-coating photoresit device provided by the utility model on the substrate 100 during the spraying photoresist, the outlet of liquid storage bottle 10 is communicated with shower nozzle 20.The photoresist that stores in liquid storage bottle 10 can be under action of gravitation flows to shower nozzle 20 below the outlet that is positioned at liquid storage bottle 10 from the outlet that is positioned at liquid storage bottle 10 bottoms, and further ejection from shower nozzle 20 under action of gravitation, and is coated on substrate 100.Owing to also being provided with pore on liquid storage bottle 10, and this pore is connected the outside of liquid storage bottle 10 with the inside of liquid storage bottle 10, so the photoresist in liquid storage bottle 10 can be descending smoothly under the effect of gravity and atmospheric pressure.
In the utility model, in order to ensure when spraying photoresist, atmospheric pressure can act on the top of photoresist liquid level, can directly offer described pore at the top of liquid storage bottle 10.But for the ease of liquid storage bottle 10 storage photoresists, preferably, described pore can be arranged on the bottom of liquid storage bottle 10, in this case, described jet-coating photoresit device can also comprise snorkel 30, one end of this snorkel 30 passes described pore and enters liquid storage bottle 10 inside, and the other end of snorkel 30 is positioned at the outside of liquid storage bottle 10.Easily be understood that, when utilizing described jet-coating photoresit device spraying photoresist, should guarantee that a described end of snorkel 30 is arranged in the top of the photoresist liquid level of liquid storage bottle 10.
The advantage that described pore and described outlet all is arranged on the bottom of liquid storage bottle 10 is, when not using described jet-coating photoresit device, liquid storage bottle 10 can be pulled down from described jet-coating photoresit device, then be inverted, in liquid storage bottle 10, remaining photoresist just can not flow out like this.
Usually, the jet-coating photoresit device is all intermittent work, therefore, preferably, described jet-coating photoresit device can also comprise the drain pipe 40 that is connected between shower nozzle 20 and described outlet, is provided with on this drain pipe 40 for the first switch valve 51 with shower nozzle 20 and the ground connection of described egress selection.That is, when described jet-coating photoresit device sprays substrate 100, the first switch valve 51 can be opened, shower nozzle 20 is communicated with the described outlet of liquid storage bottle 10, make photoresist ejection from shower nozzle 20 under the effect of self gravitation and atmospheric pressure; After complete to substrate 100 sprayings, the first switch valve 51 can cut out, make the described outlet of liquid storage bottle 10 and shower nozzle 20 be separated with each other (that is, the outlet of liquid storage bottle 10 is not communicated with shower nozzle 20) by the spool of the first switch valve 51.
For the ease of controlling, preferably, the first switch valve 51 can be solenoid valve, and described jet-coating photoresit device can also comprise controller 60, and this controller 60 is electrically connected to the first switch valve 51.When substrate 100 arrived the below of shower nozzle 20, controller 60 was controlled the first switch valve 51 and is opened, and the described outlet of liquid storage bottle 10 is communicated with shower nozzle 20, and substrate 100 is sprayed; After complete to substrate 100 sprayings, controller 60 controls the first switch valve 51 and cuts out, thereby liquid storage bottle 10 and shower nozzle 20 are disconnected.
In order to make control more accurate, preferably, described jet-coating photoresit device also comprises the sensor 70 for detection of object to be sprayed (being substrate 100 herein), this sensor 70 is electrically connected to controller 60, and controller 60 can open or close according to signal controlling the first switch valve 51 that sensor 70 sends.
After sensor 70 detects substrate 100 (that is, and the close sensor 70 of substrate 100, and enter in the sensing range of sensor 70), just can send signal to controller 60, controller 60 is opened according to this signal controlling first switch valve 51.In the utility model, can utilize controller 60 to control spray time.That is, after the spraying schedule time, controller 60 controls the first switch valve 51 and cuts out, and stops spraying.Until when sensor 70 detects substrate 100 again, send signal to controller 60, controller 60 is controlled the first switch valve 51 and is opened, the spraying of a beginning new round.
Generally, when sensor 70 did not detect substrate 100, shower nozzle 20 was positioned at its initial position.Shower nozzle 20 should be consistent with the sensing range of sensor 70 in the spraying scope of initial position.If when sensor 70 detects substrate 100, this substrate 100 is positioned at outside the spraying scope of shower nozzle 20, and controller 60 should be controlled the top that shower nozzle 20 moves to substrate 100, makes substrate 100 be positioned at the spraying scope of shower nozzle 20.
In order to make photoresist ejection smoothly from shower nozzle 20, preferably, as shown in Figure 2, drain pipe 40 can comprise flexible part 41, described jet-coating photoresit device can also comprise pressing mechanism, flexible part 41 is arranged on the first switch valve 51 upstreams, and described pressing mechanism acts on flexible part 41, so that flexible part 41 is pushed.
Be arranged on the upstream of the first switch valve 51 due to flexible part 41, therefore, before opening the first switch valve 51, photoresist is full of flexible part 41.After opening the first switch valve 51, utilize described pressing mechanism that flexible part 41 is pushed, can guarantee that the photoresist in flexible part 41 passes through the first switch valve 51, and flow to shower nozzle 20, ejection from shower nozzle 20 under the continuation effect of pressing mechanism.
In order to ensure the photoresist ejection, preferably, described jet-coating photoresit device can also comprise the second switch valve 52 that makes flexible part 41 optionally be communicated with described outlet, and this second switch valve 52 is arranged on drain pipe 40, and is positioned at the upstream of flexible part 41.
When utilizing jet-coating photoresit device spraying photoresist described in the utility model, the first switch valve 51 and second switch valve 52 alternately open or close.Specifically, when filling photoresist to flexible part 41, second switch valve 52 is opened, and the first switch valve 51 cuts out, and when the spraying photoresist, described pressing mechanism extruding flexible part 41, the first switch valves 51 are opened, and second switch valve 52 cuts out.Can also prevent the Photoresist reflow that flexible part 41 is interior after closing second switch valve 52.
For the ease of controlling, in the utility model, second switch valve 52 also can be solenoid valve, and second switch valve 52 is electrically connected to controller 60.Can control by controller 60 opening and closing of second switch valve 52.
In the utility model, the concrete form of described pressing mechanism do not had special requirement, as long as the photoresist of flexible part 41 interior storages can be extruded.As shown in Figure 2, in the second embodiment of the present utility model, described pressing mechanism can comprise squeegee roller 81 and the support member 82 that extends along the length direction of flexible part 41, flexible part 41 is arranged between squeegee roller 81 and support member 82, squeegee roller 81 is electrically connected to controller 60, makes squeegee roller 81 to move along the radial direction of flexible part 41 and the length direction of flexible part 41.
When utilizing described pressing mechanism extruding flexible part 41, at first with squeegee roller 81 radially moving towards support member 82 along flexible part 41, flexible part 41 is resisted against on support member 82, squeegee roller 81 is moved along the length direction of flexible part 41, make the acting in conjunction of squeegee roller 81 and support member 82 that the photoresist of storage in flexible part 41 is extruded.
Introduce the specific works process of the second embodiment of the present utility model below in conjunction with Fig. 2.When sensor 70 does not detect substrate 100 (, substrate 100 does not enter the sensing range of sensor 70, therefore sensor 70 can not send signal to controller 60), the first switch valve 51 cuts out, second switch valve 52 is opened, squeegee roller 81 is positioned at the top of flexible part 41, and does not contact (initial position) with flexible part 41.
Photoresist in liquid storage bottle 10 is full of flexible part 41 under gravity and atmospheric effect.When sensor 70 detects substrate 100 (, substrate 100 enters the sensing range of sensor 70), send signal to controller 60, controller 60 is opened according to this signal controlling first switch valve 51, controls simultaneously second switch valve 52 and closes.In this simultaneously, controller 60 is controlled squeegee roller 81 radially moving towards support member 82 along flexible part 41, and control squeegee roller 81 and roll towards the direction of the first switch valve 51 along flexible part 41, the photoresist in flexible part 41 being pressed through the first switch valve 51, and ejection from shower nozzle 20.Controller 60 begins timing when opening the first switch valve 51.
After the schedule time, substrate 100 sprayings are complete, and in this simultaneously, controller 60 controls the first switch valve 51 and cuts out, and control squeegee roller 81 and get back to initial position, and control second switch valve 52 and open.Until sensor 70 when again substrate 100 being detected (, substrate 100 enters the sensing range of sensor 70 again), the next spraying circulation of beginning.
One skilled in the art will appreciate that in the utility model, Fig. 1 and Fig. 2 are only schematic diagram.Shower nozzle 20 can be set to movably.In the process of spraying photoresist, the opposite side of shower nozzle 20 from a side shifting of substrate 100 to this substrate 100.To those skilled in the art, this is known, therefore repeats no more.
As another one of the present utility model aspect, a kind of jet-coating photoresit system also is provided, this jet-coating photoresit system comprises a plurality of jet-coating photoresit devices, and wherein, at least one in a plurality of described jet-coating photoresit devices is above-mentioned jet-coating photoresit device provided by the utility model.Jet-coating photoresit apparatus structure provided by the utility model is simple, and cost is lower, therefore can reduce the overall cost of jet-coating photoresit system.
In the utility model, deposit different photoresist in the liquid storage bottle of each jet-coating photoresit device.In order further to reduce costs, preferably, each in a plurality of described jet-coating photoresit devices is above-mentioned jet-coating photoresit device provided by the utility model.
Be understandable that, above embodiment is only the illustrative embodiments that adopts for principle of the present utility model is described, yet the utility model is not limited to this.For those skilled in the art, in the situation that do not break away from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement also are considered as protection domain of the present utility model.
Claims (10)
1. jet-coating photoresit device, this jet-coating photoresit device comprises liquid storage bottle and shower nozzle, be provided with outlet on described liquid storage bottle, described shower nozzle is connected with the outlet of described liquid storage bottle, it is characterized in that, described outlet is positioned at the bottom of described liquid storage bottle, and described shower nozzle is positioned at the below of described outlet, also is provided with the pore that the inside with described liquid storage bottle is communicated with the outside of this liquid storage bottle on described liquid storage bottle.
2. jet-coating photoresit device according to claim 1, it is characterized in that, described pore is positioned at the bottom of described liquid storage bottle, described jet-coating photoresit device also comprises snorkel, one end of this snorkel passes described pore, and to enter described liquid storage bottle inner, and the other end of described snorkel is positioned at the outside of described liquid storage bottle.
3. jet-coating photoresit device according to claim 1, it is characterized in that, described jet-coating photoresit device also comprises the drain pipe that is connected between described shower nozzle and described outlet, is provided with on this drain pipe for the first switch valve with described shower nozzle and the ground connection of described egress selection.
4. jet-coating photoresit device according to claim 3, is characterized in that, described the first switch valve is solenoid valve, and described jet-coating photoresit device also comprises controller, and this controller is electrically connected to described the first switch valve.
5. jet-coating photoresit device according to claim 4, it is characterized in that, described jet-coating photoresit device also comprises the sensor for detection of object to be sprayed, this sensor is electrically connected to described controller, and described controller can first switch valve according to the signal controlling that described sensor sends.
6. according to claim 4 or 5 described jet-coating photoresit devices, it is characterized in that, described drain pipe comprises flexible part, described jet-coating photoresit device also comprises pressing mechanism, described flexible part is arranged on described the first switch valve upstream, described pressing mechanism acts on described flexible part, so that described flexible part is pushed.
7. jet-coating photoresit device according to claim 6, it is characterized in that, described jet-coating photoresit device also comprises the second switch valve that makes described flexible part optionally be communicated with described outlet, and this second switch valve is arranged on described drain pipe, and is positioned at the upstream of described flexible part.
8. jet-coating photoresit device according to claim 7, is characterized in that, described second switch valve is solenoid valve, and described second switch valve is electrically connected to described controller.
9. jet-coating photoresit device according to claim 6, it is characterized in that, described pressing mechanism comprises squeegee roller and the support member that extends along the length direction of described flexible part, described flexible part is arranged between described squeegee roller and described support member, described squeegee roller is electrically connected to described controller, makes described squeegee roller to move along the radial direction of described flexible part and the length direction of described flexible part.
10. jet-coating photoresit system, this jet-coating photoresit system comprise a plurality of jet-coating photoresit devices, it is characterized in that, at least one in a plurality of described jet-coating photoresit devices is the described jet-coating photoresit device of any one in claim 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320242042 CN203275872U (en) | 2013-05-07 | 2013-05-07 | Photoresist coating device and photoresist coating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320242042 CN203275872U (en) | 2013-05-07 | 2013-05-07 | Photoresist coating device and photoresist coating system |
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| Publication Number | Publication Date |
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| CN203275872U true CN203275872U (en) | 2013-11-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320242042 Expired - Fee Related CN203275872U (en) | 2013-05-07 | 2013-05-07 | Photoresist coating device and photoresist coating system |
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| CN (1) | CN203275872U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105728243A (en) * | 2014-12-08 | 2016-07-06 | 沈阳芯源微电子设备有限公司 | Device and method for moisture preservation of photoresist sprayer |
| CN108340984A (en) * | 2015-11-28 | 2018-07-31 | 漳州龙文区信创友工业设计有限公司 | A kind of wind-powered electricity generation leg surface maintaining method |
| CN114377906A (en) * | 2020-10-22 | 2022-04-22 | 中国科学院微电子研究所 | Photoresist distributor and semiconductor manufacturing equipment |
-
2013
- 2013-05-07 CN CN 201320242042 patent/CN203275872U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105728243A (en) * | 2014-12-08 | 2016-07-06 | 沈阳芯源微电子设备有限公司 | Device and method for moisture preservation of photoresist sprayer |
| CN108340984A (en) * | 2015-11-28 | 2018-07-31 | 漳州龙文区信创友工业设计有限公司 | A kind of wind-powered electricity generation leg surface maintaining method |
| CN108340984B (en) * | 2015-11-28 | 2020-04-14 | 长乐致远技术开发有限公司 | Surface maintenance method for wind power stand column |
| CN114377906A (en) * | 2020-10-22 | 2022-04-22 | 中国科学院微电子研究所 | Photoresist distributor and semiconductor manufacturing equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 |