CN203274980U - Film pressure sensor - Google Patents
Film pressure sensor Download PDFInfo
- Publication number
- CN203274980U CN203274980U CN 201320314700 CN201320314700U CN203274980U CN 203274980 U CN203274980 U CN 203274980U CN 201320314700 CN201320314700 CN 201320314700 CN 201320314700 U CN201320314700 U CN 201320314700U CN 203274980 U CN203274980 U CN 203274980U
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- CN
- China
- Prior art keywords
- pressure sensor
- sensor
- installing plate
- film pressure
- flexible diaphragm
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- Expired - Lifetime
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Abstract
The utility model relates to a film pressure sensor and mainly discloses a film pressure sensor which satisfies various satellite demands and can accurately measure high-range pressures. The film pressure sensor is also super light. The film pressure sensor comprises a housing and a pressure drawing base on the lower side of the housing. The film pressure sensor further comprises a circuit support, a flexible diaphragm, a lower support arranged above the flexible diaphragm and a lead wire installing plate arranged above the lower support. The circuit support, the flexible diaphragm, the lower support and the lead wire installing plate are all arranged inside the housing. The pressure drawing base and the flexible diaphragm are integrated. The circuit support is sleeved on the outer sides of the lead wire installing plate and the lower support. Meanwhile, the lead wire installing plate and the lower support are connected through a fastener. By integrating the pressure drawing base and the flexible diaphragm, the film pressure sensor has the sealing performance increased when high-range pressures of products are measured. The main parts of the sensor are all made of titanium alloy. The weight of the sensor is thus reduced. By adopting the resistance adjusting technology and the temperature resistance compensation technology to eliminate the external compensation of the sensor, the sensor can have the weight further reduced.
Description
Technical field
The utility model relates to a kind of diaphragm pressure sensor, be mainly a kind of ultra lightweight that satisfies all kinds of satellite needs and to the diaphragm pressure sensor of high range pressure Measurement accuracy.
Background technology
existing strain-type film sensitive pressure sensor as shown in Figure 1, comprise in turn impulse pedestal 1, flexible sheet 2, lower carriage 3, the first installing plate 10, the lead-in wire installing plate 7 of the responsive strain film resistance 6 of top band pressure, upper bracket 11, compensating plate 12, circuit carriers 4 and modulate circuit 8, owing to adopting the sputter mode to prepare on the metal background, being adapted to various rugged surroundings downforce measures, structure adopts welding manner, can guarantee high range pressure lower seal performance, but because structured material adopts stainless steel, overall weight is heavier, difficulty satisfies the fields such as satellite to the requirement of device weight.
Summary of the invention
The purpose of this utility model is, for the deficiencies in the prior art, provides a kind of diaphragm pressure sensor, alleviates diaphragm pressure sensor weight, satisfies satellite fields to the requirement of diaphragm pressure sensor weight, and can realize the Measurement accuracy of superelevation range downforce.
The technical solution of the utility model is, a kind of diaphragm pressure sensor, comprise the impulse pedestal of shell, shell downside and be placed in respectively the lead-in wire installing plate of lower carriage, the lower carriage top of circuit carriers in shell, flexible sheet, flexible sheet top, described impulse pedestal and flexible sheet are the integral type structure, and circuit carriers is sleeved on the lead-in wire installing plate and is connected by securing member with lower carriage with the lower carriage outside and lead-in wire installing plate.
Flexible sheet and impulse pedestal are taked integral structure, make flexible sheet and impulse pedestal one-body molded, need not both to weld again, solve the problems such as titanium material welding technology difficulty and high pressure lower seal reliability, the sealing of pressure measurement medium when having guaranteed large range measuring; And cancelled upper bracket and the first installing plate, compensating plate, and circuit carriers is sleeved on lead-in wire installing plate and the lower carriage outside, the installing plate that goes between directly is connected with lower carriage, also can reach the function of former diaphragm pressure sensor, and further alleviate weight.
Original impulse pedestal, flexible sheet, lower carriage, circuit carriers, shell all can adopt titanium alloy to substitute the stainless steel material of original structure, alleviate the sensor overall weight.
The sheet resistance bridge is realized the coupling of bridge circuit by the laser resistor trimming technology, realize the compensation of bridge circuit temperature performance by temperature and resistance, thereby cancels post compensation, further alleviates sensor weight.
Principle of work of the present utility model is: flexible sheet and impulse pedestal are processed into integral structure, be fixed on test point, flexible sheet is experienced test pressure and is produced certain deformation, the sheet resistance that is deposited thereon is followed diaphragm deformation, thereby resistance changes, the electric signal that one of sheet resistance bridge circuit output and pressure are substantially linear amplifies by the later stage modulate circuit and converts standard signal to and export.
Compared with prior art, the beneficial effects of the utility model are:
(1) integral structure of impulse pedestal and flexible sheet has improved the sealing when product is measured high range pressure.
(2) the sensor critical piece all adopts titanium alloy, has alleviated sensor weight.
(3) laser resistor trimming technology and temperature and resistance compensation technique are cancelled the sensor external compensation, have further alleviated sensor weight.
In sum, due to the employing of full titanium integral structure, greatly alleviated sensor weight under the prerequisite that guarantees properties of product, and can realize that ultralight titanium alloy thin films pressure transducer is to the Measurement accuracy of high range pressure.
Description of drawings
Fig. 1 is the STRUCTURE DECOMPOSITION figure of existing diaphragm pressure sensor;
Fig. 2 is the axial cut-open view of diaphragm pressure sensor described in the utility model.
Embodiment
As shown in Figure 2, a kind of diaphragm pressure sensor, comprise the impulse pedestal 1 of shell 5, shell downside and be placed in respectively the lead-in wire installing plate 7 of lower carriage 3, lower carriage 3 tops of circuit carriers 4 in shell, flexible sheet 2, flexible sheet 2 tops, impulse pedestal and flexible sheet 2 are the integral type structure, and circuit carriers 4 is sleeved on lead-in wire installing plate 7 and is connected by securing member with lower carriage 3 with lower carriage 3 outsides and lead-in wire installing plate 7.
Adopt that precision is ground, the throwing machine to flexible sheet 2 surfaces grind, throwing, cleaning treatment, adopt the ion beam sputtering mode to prepare presser sensor strain film resistance 6 on flexible sheet 2, by photoetching and resistance trimming technology, the strain film resistance string is connected into Hui Sideng full-bridge strain circuit, the thin film bridge signal causes modulate circuit 8 by lead-in wire installing plate 7, and amplification converts the standard electric signal to and draws by electric connector 9.
Realize the balance of bridge diagram by photoetching and resistance trimming technology, float by the temperature of film temperature resnstance transformer bridge diagram, reduce the compensation of guest performer's resistance, effectively save product component and reduce external structure, further alleviate product weight.
Claims (6)
1. diaphragm pressure sensor, comprise the impulse pedestal (1) of shell (5), shell downside and be placed in respectively the lead-in wire installing plate (7) of lower carriage (3), lower carriage (3) top of circuit carriers (4) in shell, flexible sheet (2), flexible sheet (2) top, it is characterized in that, described impulse pedestal and flexible sheet (2) are the integral type structure; Circuit carriers (4) is sleeved on lead-in wire installing plate (7) and is connected by securing member with lower carriage (3) with lower carriage (3) outside and lead-in wire installing plate (7).
2. diaphragm pressure sensor according to claim 1, is characterized in that, impulse pedestal (1) is made by titanium alloy.
3. diaphragm pressure sensor according to claim 1, is characterized in that, flexible sheet (2) is made by titanium alloy.
4. diaphragm pressure sensor according to claim 1, is characterized in that, lower carriage (3) is made by titanium alloy.
5. diaphragm pressure sensor according to claim 1, is characterized in that, circuit carriers (4) is made by titanium alloy.
6. diaphragm pressure sensor according to claim 1, is characterized in that, shell (5) is made by titanium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320314700 CN203274980U (en) | 2013-06-03 | 2013-06-03 | Film pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320314700 CN203274980U (en) | 2013-06-03 | 2013-06-03 | Film pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203274980U true CN203274980U (en) | 2013-11-06 |
Family
ID=49505364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320314700 Expired - Lifetime CN203274980U (en) | 2013-06-03 | 2013-06-03 | Film pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203274980U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712729A (en) * | 2013-12-18 | 2014-04-09 | 中国电子科技集团公司第四十八研究所 | Non-welding-sealed pressure sensor |
| CN105136377A (en) * | 2015-08-18 | 2015-12-09 | 熊辉 | Sputtering film hammering union pressure sensor |
| CN105509936A (en) * | 2015-11-27 | 2016-04-20 | 北京卫星制造厂 | Thin-film sputtering force transducer adapting to lunar environment |
| CN105806553A (en) * | 2016-06-02 | 2016-07-27 | 中国工程物理研究院材料研究所 | High-pressure sensor |
| CN107621285A (en) * | 2017-10-17 | 2018-01-23 | 雷念程 | High temperature wide range pressure sensor and its manufacture method with temperature measurement function |
-
2013
- 2013-06-03 CN CN 201320314700 patent/CN203274980U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712729A (en) * | 2013-12-18 | 2014-04-09 | 中国电子科技集团公司第四十八研究所 | Non-welding-sealed pressure sensor |
| CN103712729B (en) * | 2013-12-18 | 2016-06-29 | 中国电子科技集团公司第四十八研究所 | Non-solder seals pressure transducer |
| CN105136377A (en) * | 2015-08-18 | 2015-12-09 | 熊辉 | Sputtering film hammering union pressure sensor |
| CN105509936A (en) * | 2015-11-27 | 2016-04-20 | 北京卫星制造厂 | Thin-film sputtering force transducer adapting to lunar environment |
| CN105509936B (en) * | 2015-11-27 | 2018-04-10 | 北京卫星制造厂 | A kind of thin film sputtering force snesor for being suitable for lunar surface environment |
| CN105806553A (en) * | 2016-06-02 | 2016-07-27 | 中国工程物理研究院材料研究所 | High-pressure sensor |
| CN107621285A (en) * | 2017-10-17 | 2018-01-23 | 雷念程 | High temperature wide range pressure sensor and its manufacture method with temperature measurement function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20131106 |