CN203270023U - 一种磁钢结构 - Google Patents

一种磁钢结构 Download PDF

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CN203270023U
CN203270023U CN 201320232453 CN201320232453U CN203270023U CN 203270023 U CN203270023 U CN 203270023U CN 201320232453 CN201320232453 CN 201320232453 CN 201320232453 U CN201320232453 U CN 201320232453U CN 203270023 U CN203270023 U CN 203270023U
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magnetic
magnetic steel
coil
steel structure
target
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王畅茹
熊红斌
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Abstract

针对磁性靶材难起辉的问题，本实用新型提供一种磁钢结构，包括靶材、磁钢、线圈，其中，磁钢外面包有软磁材料层，软磁材料层上面缠绕有线圈，磁钢安装在靶材的下面。本实用新型线圈构成的电磁铁与磁钢的永磁体结合起来，电磁铁的磁场能够调节，两者叠加能够产生更强的磁场，能够适应不同的磁性靶材的需求，适用性广。

Description

一种磁钢结构
技术领域
本实用新型涉及磁控溅射系统及其附件领域，尤其涉及到一种磁钢结构。
背景技术
磁控溅射应用广泛，已经成为一种重要的薄膜沉积技术。磁控溅射时，氩离子在电场的作用下，加速轰击阴极的靶材，溅射出的靶材原子和原子团沉积到薄膜上，完成镀膜过程。在实际应用中，非磁性靶材往往很容易溅射，但是，对于磁性靶材，由于磁屏蔽的作用，一般很难起辉。这时候就需要磁钢提供更强的磁场。
实用新型内容
针对磁性靶材难起辉的问题，本实用新型提供一种磁钢结构，磁场能够调节，能够适应不同的磁性靶材的需求，适用性广。本实用新型采取的技术方案为，一种磁钢结构，包括靶材、磁钢、线圈，其中，磁钢外面包有软磁材料层，软磁材料层上面缠绕有线圈，磁钢安装在靶材的下面。
本实用新型线圈构成的电磁铁与磁钢的永磁体结合起来，电磁铁的磁场能够调节，两者叠加能够产生更强的磁场，能够适应不同的磁性靶材的需求，适用性广。
附图说明
图1为本实用新型的结构示意图。
图中：1靶材、2磁钢、3线圈。
具体实施方式
以下结合附图实施例对本实用新型作进一步详细描述。
图1为本实用新型的结构示意图，靶材1、磁钢2、线圈3，其中，磁钢2外面包有软磁材料层，软磁材料层上面缠绕有线圈3，磁钢2安装在靶材1的下面。本实用新型线圈3构成的电磁铁与磁钢的永磁体结合起来，电磁铁的磁场能够调节，两者叠加能够产生更强的磁场，能够适应不同的磁性靶材1的需求，适用性广。
以上显示和描述了本实用新型的基本原理和主要特征和本实用新型的优点。本行业的技术人员应该了解，本实用新型不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。本实用新型要求保护范围由所附的权利要求书及其等效物界定。

Claims (1)

1.一种磁钢结构，包括靶材、磁钢、线圈，其特征在于：所述的磁钢外面包有软磁材料层，软磁材料层上面缠绕有线圈，磁钢安装在靶材的下面。
CN 201320232453 2013-04-20 2013-04-20 一种磁钢结构 Expired - Fee Related CN203270023U (zh)

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CN203270023U true CN203270023U (zh) 2013-11-06

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106435500A (zh) * 2016-09-30 2017-02-22 西南交通大学 一种用于平面圆形磁控溅射阴极靶的磁场源
CN110408902A (zh) * 2019-08-22 2019-11-05 深圳市金耀玻璃机械有限公司 一种绕线式电弧靶装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106435500A (zh) * 2016-09-30 2017-02-22 西南交通大学 一种用于平面圆形磁控溅射阴极靶的磁场源
CN106435500B (zh) * 2016-09-30 2018-07-27 西南交通大学 一种用于平面圆形磁控溅射阴极靶的磁场源
CN110408902A (zh) * 2019-08-22 2019-11-05 深圳市金耀玻璃机械有限公司 一种绕线式电弧靶装置

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