CN203266389U - Heterogeneous medium composite grinding locating ring - Google Patents

Heterogeneous medium composite grinding locating ring Download PDF

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Publication number
CN203266389U
CN203266389U CN 201320165400 CN201320165400U CN203266389U CN 203266389 U CN203266389 U CN 203266389U CN 201320165400 CN201320165400 CN 201320165400 CN 201320165400 U CN201320165400 U CN 201320165400U CN 203266389 U CN203266389 U CN 203266389U
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CN
China
Prior art keywords
ring
ring body
pressed
composite grinding
utility
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Expired - Lifetime
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CN 201320165400
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Chinese (zh)
Inventor
陈宏奇
Original Assignee
孙建忠
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Priority to CN 201320165400 priority Critical patent/CN203266389U/en
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Publication of CN203266389U publication Critical patent/CN203266389U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a heterogeneous medium composite grinding locating ring which comprises an upper ring body and a lower ring body. The upper ring body and the lower ring body are overlapped in sequence, combined with each other and both made of plastic materials. Due to the fact that the heterogeneous medium composite grinding locating ring is made of the plastic materials, metal materials or plastic materials with high cost are saved. The heterogeneous medium composite grinding locating ring is divided into the upper ring body (a base portion) and the lower ring body (a grinding portion), and therefore when the lower ring body (the grinding portion) is ground and consumed, the upper ring body (the base portion) does not need to be changed along with the lower ring body (the grinding portion) in an integrated mode. Therefore, the cost of the plastic materials is saved and the economical effect is achieved.

Description

The Heterogeneous Composite grinding positioning ring
Technical field
The utility model is about a kind of grinding positioning ring, espespecially a kind of Heterogeneous Composite grinding positioning ring for wafer location grinding operation.
Background technology
Press, the structure of the grinding positioning ring that general grinding wafer operation is used, in the past made with integrally formed material, after have and consider the base portion ring body and grind ring body its function is respectively arranged, therefore have and develop heterogeneous (different material) as the structure of composite bed, the structure that presents as TaiWan, China new patent No. M347978 " structure-improved of grinding positioning ring ", one base portion, it adopts by stainless steel or metal alloy made, and be an annular aspect, the first side of this base portion is a locking face, is provided with locating hole on locking face; The second side of base portion is a faying face, is provided with conjugate foramen on faying face, and this conjugate foramen can be established the locking joint element in order to connect.One grind section, it adopts by macromolecule plasticity material made, and is an annular aspect, and the first side of this grind section is a faying face, is provided with entrance hole on faying face; The second side of grind section is an abradant surface.
By the grinding ring body of the base portion ring body of metal and a macromolecule material mutually combine consist of, present respectively different effects." heterogeneous " that yet this prior art presents is higher stainless steel or metal alloy take base material as common hardness, yet grind section adopts the lower macromolecule plasticity material of relative hardness.
Though this case emphasis finds expression in response to grinding positioning ring in the attrition process process, produce the violent rubbing action of continuation between meeting and wafer and processing parts, the reversal of stress that it produces, can be to the base portion ring body and the integrated structure that grinds ring body of grinding positioning ring, produce destructive effects, in case base portion ring body and grind and to produce loosening between ring body or when throwing off the phenomenon of peeling off, that is be equal to this grinding positioning ring and scrap, and need separately change.Therefore Special attention will be given to is in the fastness of both integrated structure, but the hierarchy structure that this case presents, as grinding-material with the hardness junior, thereby the loss of material is comparatively serious, and this case with hardness the higher person as base material, therefore its toughness is also relative low with compliance, therefore still has improved space.
Although, also having the dealer to adopt plastics (for example PPS) is that a base portion and a grind section are formed in one, do not reduce production costs though can not use metal, but owing to being one, therefore be worn and when consuming when grind section, even if base portion does not have attrition, but also must be in company with this grind section one replacing, but because these plastics (PPS) expense is immeasurable, also belong to waste with uneconomical.
The utility model content
The technical problem that the utility model solves is to provide a kind of Heterogeneous Composite grinding positioning ring, comprises a pressed on ring and once encircles, and both sequentially fold and merge into combination, and this pressed on ring and lower ring are all made with the plasticizing material, the composite bed effect that both has concurrently.
The technological means that the utility model adopts is as described below.
A kind of Heterogeneous Composite grinding positioning ring comprises a pressed on ring and encircles that both sequentially fold and merge into combination once, and this pressed on ring and lower ring are all made with the plasticizing material.
The hardness of this time ring is higher than this pressed on ring.
Between this pressed on ring and this time ring, more lining is established a gasket ring, forms multiple field with order.
The hardness of gasket ring is between this pressed on ring and this time ring.
this time ring is selected from polyphenylene sulfide (polyphenylene sulfide, PPS), polybutylene terepthatlate (polybutylene terephthalate, PBT), carbon fills polyether-ether-ketone (carbin-filled PEEK), PEI (polyetherimide, PEI), polyether-ether-ketone (polyether ether ketone, PEEK), polyethylene terephthalate (polyethylene terephthalate, PET), polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE), polybenzimidazoles (polybenzimidazole, PBI), polyamine-acid imide (polyamide-imide, PAI), polyethylene terephalic acid fat (PETP), polyvinyl chloride (PVC), nylon (NYLON), polyacetals (POM), ABS, iron is dragon (PTFE) not, poly-one of the inferior ethene PVDF or any compound more than two kinds that fluoridizes.
The beneficial effect that the utility model produces is as described below.
Because the utility model adopts plastifying material, all made to save higher metal or the plastifying material of cost with the plasticizing material.
And the utility model is divided into a pressed on ring (base portion) and encircles (grind section) once, therefore ring (grind section) is worn and when consuming instantly, pressed on ring (base portion) need not be changed in company with this time ring (grind section) one, therefore can save the expense of this plastifying material, and reach economic effect.And should be noted that, this case is not the expection effect of being reached with the change of material merely, and with the space kenel compared to the reverse Boulez of prior art, the effect that coordinates material to reach.
Description of drawings
The three-dimensional combination figure of Fig. 1 the utility model the first embodiment.
The three-dimensional exploded view of Fig. 2 the utility model the first embodiment.
The cutaway view of the decomposing state of Fig. 3 A the utility model the first embodiment.
The cutaway view of the assembled state of Fig. 3 B the utility model the first embodiment.
The three-dimensional exploded view of Fig. 4 the utility model the second embodiment.
The cutaway view of Fig. 5 the utility model the second embodiment assembled state.
The stereogram of Fig. 6 the utility model the second embodiment.
The figure number explanation:
1 Heterogeneous Composite grinding positioning ring
11 pressed on rings
12 times rings
13 gasket rings
1A has the Heterogeneous Composite grinding positioning ring that groove is set.
The specific embodiment
See also Fig. 1, the utility model is about a kind of Heterogeneous Composite grinding positioning ring 1, see also shown in Figure 2, comprise a pressed on ring 11 and encircle 12 once, both are sequentially folded merges into combination, and this combination can be with common known combined structures such as binding member or fusions, and this pressed on ring 11 is all made with the plasticizing material with lower ring 12, because the utility model adopts plastifying material, all made to save higher metal or the plastifying material of cost with the plasticizing material; And the utility model is divided into a pressed on ring (base portion) and encircles (grind section) once, therefore ring (grind section) is worn and when consuming instantly, pressed on ring (base portion) need not be changed in company with this time ring (grind section) one, therefore can save the expense of this plastifying material, and reach economic effect.And should be noted that, this case is not the expection effect of being reached with the change of material merely, and with the space kenel compared to the reverse Boulez of prior art, the effect that coordinates material to reach.
And preferred embodiment of the present utility model, the hardness of this time ring 12 coordinate shown in Fig. 3 A and Fig. 3 B higher than this pressed on ring 11, the utility model by profile view it, can show by heterogeneous (different material) structure as composite bed.And this pressed on ring 11 of the utility model is all made to save cost higher metal or plastifying material with the plasticizing material with lower ring 12, and the hardness of this time ring 12 is higher than this pressed on ring 11, reduce the loss of material, have better toughness and compliance, the composite bed effect that both has concurrently and the hardness of pressed on ring 11 is relatively low.
See also Fig. 4, coordinate Fig. 5 and shown in Figure 6, Fig. 6 is the second embodiment stereogram that the Heterogeneous Composite grinding positioning ring 1A that groove is set is arranged, and is preferred embodiment of the present utility model, and wherein between this pressed on ring 11 and this time ring 12, more lining is established a gasket ring 13.Wherein the hardness of this gasket ring 13 can be between this pressed on ring 11 and this time ring 12.
this time ring 12 of the present utility model is selected based on the variation of material, can be polyphenylene sulfide (polyphenylene sulfide, PPS), polybutylene terepthatlate (polybutylene terephthalate, PBT), carbon fills polyether-ether-ketone (carbin-filled PEEK), PEI (polyetherimide, PEI), polyether-ether-ketone (polyether ether ketone, PEEK), polyethylene terephthalate (polyethylene terephthalate, PET), polytetrafluoroethylene (PTFE) (polytetrafluoroethylene, PTFE), polybenzimidazoles (polybenzimidazole, PBI), polyamine-acid imide (polyamide-imide, PAI), polyethylene terephalic acid fat (PETP), polyvinyl chloride (PVC), nylon (NYLON), polyacetals (POM), ABS, iron is dragon (PTFE) not, poly-one of the inferior ethene PVDF or any compound more than two kinds that fluoridizes.

Claims (4)

1. a Heterogeneous Composite grinding positioning ring, is characterized in that, comprises a pressed on ring and once encircle, and both sequentially fold and merge into combination, and this pressed on ring and lower ring are all made with the plasticizing material.
2. Heterogeneous Composite grinding positioning ring as claimed in claim 1, is characterized in that, the hardness of this time ring is higher than this pressed on ring.
3. Heterogeneous Composite grinding positioning ring as claimed in claim 1, is characterized in that, between this pressed on ring and this time ring, more lining is established a gasket ring, forms multiple field with order.
4. Heterogeneous Composite grinding positioning ring as claimed in claim 3, is characterized in that, the hardness of gasket ring is between this pressed on ring and this time ring.
CN 201320165400 2013-04-03 2013-04-03 Heterogeneous medium composite grinding locating ring Expired - Lifetime CN203266389U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320165400 CN203266389U (en) 2013-04-03 2013-04-03 Heterogeneous medium composite grinding locating ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320165400 CN203266389U (en) 2013-04-03 2013-04-03 Heterogeneous medium composite grinding locating ring

Publications (1)

Publication Number Publication Date
CN203266389U true CN203266389U (en) 2013-11-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201320165400 Expired - Lifetime CN203266389U (en) 2013-04-03 2013-04-03 Heterogeneous medium composite grinding locating ring

Country Status (1)

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CN (1) CN203266389U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106965078A (en) * 2016-01-14 2017-07-21 孙建忠 Grinding positioning ring for chemical mechanical grinding process of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106965078A (en) * 2016-01-14 2017-07-21 孙建忠 Grinding positioning ring for chemical mechanical grinding process of semiconductor wafer

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Granted publication date: 20131106