CN203264955U - Piezoelectric mirco spray device - Google Patents
Piezoelectric mirco spray device Download PDFInfo
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- CN203264955U CN203264955U CN 201320241293 CN201320241293U CN203264955U CN 203264955 U CN203264955 U CN 203264955U CN 201320241293 CN201320241293 CN 201320241293 CN 201320241293 U CN201320241293 U CN 201320241293U CN 203264955 U CN203264955 U CN 203264955U
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- flexible hinge
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Abstract
The utility model discloses a piezoelectric mirco spray device, which comprises a valve body, a displacement magnification mechanism, piezoelectric ceramic, a firing pin, a prepressing spring and a fixing bracket, wherein a liquid flow passage and a nozzle are arranged in the valve body; the displacement magnification mechanism is fixed on the valve body and comprises a main body and a terminal support arm with one end connected with the main body through a flexible hinge; the piezoelectric ceramic is directly or indirectly connected with the terminal support arm; one end of the firing pin is fixed at the other end of the terminal support arm and penetrates the valve body in a sealing manner, and a sealing piece is arranged at the other end of the firing pin and is sealed on the nozzle; the prepressing spring is pressed on the terminal support arm through a fixing bracket in a prepressing manner; the fixing bracket is fixed on the displacement magnification mechanism or the valve body.
Description
Technical field
The utility model relates to a kind of piezoelectric type micro-spray device, belongs to the technical field that mechanical engineering, microelectronics Packaging and microelectronic component are made.
Background technology
Micro-spray device is a kind ofly liquid can be formed the injection apparatus of micron order drop from nozzle ejection, generally can be applied in little specking glue, microelectronics Packaging, be printed as and the field such as look like.Micro-spray device mainly contains piezoelectricity spray, ultrasonic vibration spray, the thermal spray etc. that declines that declines that declines, and the piezoelectric type micro-spray device is the piezo-electric effect of utilizing piezoelectric ceramics, make piezoelectric ceramics produce micro-deformation, drive the valve of striker front end, make the nozzle opening and closing, realize the opening time that nozzle is very short, make it eject micro liquid and form fine droplet.
Yet there is following shortcoming in existing piezoelectric type micro-spray device:
1. the opening and closing that two groups of piezoelectric ceramics are controlled respectively striker will be set usually, and complex structure, controlling organization are also complicated.
2. the size of drop and speed are by amplitude and the FREQUENCY CONTROL of driving voltage, and the adjusting of emitted dose is also convenient not.
3. because the deflection of piezoelectric ceramics is limited, therefore limited the raising of emitted dose.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of simple in structure and or convenient piezoelectric type micro-spray device of regulating the dropping liquid amount.
For solving the problems of the technologies described above, technical solution of the present utility model is:
A kind of piezoelectric type micro-spray device comprises valve body, displacement amplifying mechanism, piezoelectric ceramics, striker, pre-compressed spring and fixed mount; Be provided with flow channel for liquids and nozzle in this valve body; This displacement amplifying mechanism is fixed on valve body, and it comprises main body and a terminal support arm, and an end of this terminal support arm is connected with main body by flexible hinge; This terminal support arm of the direct or indirect interlock of this piezoelectric ceramics; This striker one end is fixed on the other end of described terminal support arm, and the described valve body of its hermetically passing, the other end are provided with on the nozzle that seal is sealed in valve body; This pre-compressed spring is pressed on described terminal support arm in advance by described fixed mount, and this fixed mount is fixed on described displacement amplifying mechanism or valve body.
Described displacement amplifying mechanism further comprises one or more middle support arm, sequentially is connected by flexible hinge between support arm, terminal support arm and main body in the middle of each; And in the middle of described piezoelectric ceramics is supported therein one on support arm.
Described displacement amplifying mechanism also comprises a laterally middle support arm and a vertically middle support arm, in the middle of being somebody's turn to do laterally, an end of support arm is connected with described main body by flexible hinge, its other end is connected with support arm lower end, described vertical centre by flexible hinge, in the middle of being somebody's turn to do vertically, the upper end of support arm is connected with described terminal support arm by flexible hinge, and described piezoelectric ceramics is supported the stage casing at described horizontal middle support arm.
Described piezoelectric type micro-spray device comprises that further one is fixed on the adjustment screw in order to the pretightning force of regulating described pre-compressed spring on described fixed mount.
After adopting such scheme, the utlity model has following advantage:
1. owing to having increased a pre-compressed spring, can give precompression of striker, simultaneously striker is resetted, therefore only need a piezoelectric ceramics can realize striker to the unlatching of nozzle with closed, not only make simple in structurely, controlling organization is also simple.
2. described displacement amplifying mechanism is the flexible hinge structure, quantity and position by support arm (comprising terminal support arm and middle support arm), flexible hinge, and the Position Design of the relative support arm of piezoelectric ceramics, can design easily different amplification ratios, thereby regulate the droplet size that sprays easily.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is front view of the present utility model;
Fig. 3 is valve inner structural representation one described in the utility model;
Fig. 3 A is the partial enlarged drawing of Fig. 3;
Fig. 4 is valve inner structural representation two described in the utility model;
Fig. 5 is the schematic diagram of movements of displacement amplifying mechanism described in the utility model;
Fig. 6 is the isoboles of displacement amplifying mechanism described in the utility model.
The specific embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
What the utility model disclosed is a kind of piezoelectric type micro-spray device, as shown in Figures 1 to 4, is preferred embodiment of the present utility model.Described micro-spray device comprises valve body 1, displacement amplifying mechanism 2, piezoelectric ceramics 3, striker 4, pre-compressed spring 5 and fixed mount 6.Wherein:
Be provided with flow channel for liquids 11 and nozzle 12(in described valve body 1 and coordinate Fig. 3 A), the diameter of this nozzle 12 can be in the 200um left and right.
Described displacement amplifying mechanism 2 is fixed on above-mentioned valve body 1, and it comprises main body 21 and a terminal support arm 22, and an end of this terminal support arm 22 is connected with main body 21 by flexible hinge 23.Flexible hinge is to utilize the strain of material to produce a kind of kinematic pair version of relative motion between the adjacent rigid bar, and it is prior art, is not described in detail at this.
The described terminal support arm 22 of the direct or indirect interlock of described piezoelectric ceramics 3.
Described striker 4 one ends are fixed on the other end of above-mentioned terminal support arm 22, and these striker 4 described valve bodies 1 of hermetically passing, its other end are provided with on the nozzle 12 that seal 41 is sealed in described valve body 1.
Described pre-compressed spring 5 is pressed on described terminal support arm 22 in advance by described fixed mount 6, thereby gives 4 one precompressions of striker, makes the certain sealing force of formation between the seal 41 of nozzle 12 and striker 4 ends, also can give 4 one reset forces of striker.
Described fixed mount 6 is fixed on displacement amplifying mechanism 2 or valve body 1.
Further, micro-spray device described in the utility model also includes an adjustment screw 7 that is fixed on described fixed mount 6, and this arranges screw 7 in order to regulate the pretightning force of described pre-compressed spring 5, to regulate the precompression between the relative nozzle 12 of striker 4.
Operation principle of the present utility model is: after adding voltage (as 200V voltage) for described piezoelectric ceramics 3, make its elongation certain-length (as 30um); Piezoelectric ceramics 3 is supported the terminal support arm 22 of displacement amplifying mechanism 2, the elongation displacement of piezoelectric ceramics 3 is amplified (multiplication factor is decided according to the multiplication factor of displacement amplifying mechanism), if multiplication factor is 10 times, so just make described striker 4 obtain the displacement of 300um, thereby described nozzle 12 is opened.Otherwise, piezoelectric ceramics 3 outages, pre-compressed spring 5 resets striker 4, shut-off nozzle 12 to pressing down terminal support arm 22.When striker 4 pressed down, itself and nozzle 12 formed sealing and liquid can't be sprayed; Frequency (as 200HZ) by input voltage, make piezoelectric ceramics 3 output displacements, unlatching and closure that Control Nozzle 12 is very short, when striker 4 is raised 300um, highly pressurised liquid is spouting from nozzle 12, after striker 4 resetted rapidly, nozzle 12 was closed, and made the micro liquid that ejects form drop.
Described displacement amplifying mechanism 2 can be regulated its multiplication factor easily by setting the position of piezoelectric ceramics 3 and terminal support arm 22.In order to reduce the length of terminal support arm 22, can also regulate multiplication factor by the quantity of support arm in the middle of increasing and flexible hinge.Coordinate simultaneously shown in Figure 5, the described displacement amplifying mechanism 2 of the present embodiment also comprises a laterally middle support arm 24 and a vertically middle support arm 25, in the middle of being somebody's turn to do laterally, an end of support arm 24 is connected with described main body 21 by flexible hinge 23, its other end is connected with support arm 25 lower ends, described vertical centre by flexible hinge 23, in the middle of being somebody's turn to do vertically, the upper end of support arm 25 is connected with described terminal support arm 22 by flexible hinge 23, and described piezoelectric ceramics 3 is supported the stage casing at described horizontal middle support arm 24.The isoboles of this displacement amplifying mechanism 2 is worked as a=10 as shown in Figure 6, b=20, and c=45, during d=15, the amplification ratio of calculating gained is A=(1+b/a) (1+c/d)=12, and consider material deformation, amplification ratio is about 10 times.Like this, by changing the length of a, b, c, d, namely can conveniently regulate the multiplication factor of enlarger.Also can by quantity and the position of support arm and flexible hinge in the middle of design, come the Design enlargement multiple.
The above, it is only preferred embodiment of the present utility model, be not that technical scope of the present utility model is imposed any restrictions, thus variation or the modification in every case done according to claim of the present utility model and specification, within all should belonging to the scope that the utility model patent contains.
Claims (4)
1. a piezoelectric type micro-spray device, is characterized in that: comprise valve body, displacement amplifying mechanism, piezoelectric ceramics, striker, pre-compressed spring and fixed mount; Be provided with flow channel for liquids and nozzle in this valve body; This displacement amplifying mechanism is fixed on valve body, and it comprises main body and a terminal support arm, and an end of this terminal support arm is connected with main body by flexible hinge; This terminal support arm of the direct or indirect interlock of this piezoelectric ceramics; This striker one end is fixed on the other end of described terminal support arm, and the described valve body of its hermetically passing, the other end are provided with on the nozzle that seal is sealed in valve body; This pre-compressed spring is pressed on described terminal support arm in advance by described fixed mount, and this fixed mount is fixed on described displacement amplifying mechanism or valve body.
2. a kind of piezoelectric type micro-spray device according to claim 1 is characterized in that: described displacement amplifying mechanism further comprise one or more in the middle of support arm, sequentially be connected by flexible hinge between support arm, terminal support arm and main body in the middle of each; And in the middle of described piezoelectric ceramics is supported therein one on support arm.
3. a kind of piezoelectric type micro-spray device according to claim 1, it is characterized in that: described displacement amplifying mechanism also comprises a laterally middle support arm and a vertically middle support arm, in the middle of being somebody's turn to do laterally, an end of support arm is connected with described main body by flexible hinge, its other end is connected with support arm lower end, described vertical centre by flexible hinge, in the middle of being somebody's turn to do vertically, the upper end of support arm is connected with described terminal support arm by flexible hinge, and described piezoelectric ceramics is supported the stage casing at described horizontal middle support arm.
4. one of according to claim 1-3 described a kind of piezoelectric type micro-spray devices is characterized in that: comprise that further one is fixed on the adjustment screw in order to the pretightning force of regulating described pre-compressed spring on described fixed mount.
Priority Applications (1)
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CN 201320241293 CN203264955U (en) | 2013-05-07 | 2013-05-07 | Piezoelectric mirco spray device |
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CN 201320241293 CN203264955U (en) | 2013-05-07 | 2013-05-07 | Piezoelectric mirco spray device |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104959248A (en) * | 2015-07-02 | 2015-10-07 | 厦门理工学院 | Nanojet device based on pyroelectric effect, micro-nano-composite-jet device based on pyroelectric effect and control method of micro-nano-composite-jet device |
CN107214015A (en) * | 2017-05-08 | 2017-09-29 | 常州铭赛机器人科技股份有限公司 | Fluid micro injection apparatus and its execution system |
CN109092584A (en) * | 2018-10-24 | 2018-12-28 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | The micro- spray valve of Piezoelectric Ceramic |
CN111889680A (en) * | 2020-06-09 | 2020-11-06 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
-
2013
- 2013-05-07 CN CN 201320241293 patent/CN203264955U/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104959248A (en) * | 2015-07-02 | 2015-10-07 | 厦门理工学院 | Nanojet device based on pyroelectric effect, micro-nano-composite-jet device based on pyroelectric effect and control method of micro-nano-composite-jet device |
CN107214015A (en) * | 2017-05-08 | 2017-09-29 | 常州铭赛机器人科技股份有限公司 | Fluid micro injection apparatus and its execution system |
CN109092584A (en) * | 2018-10-24 | 2018-12-28 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | The micro- spray valve of Piezoelectric Ceramic |
CN111889680A (en) * | 2020-06-09 | 2020-11-06 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
CN111889680B (en) * | 2020-06-09 | 2022-08-26 | 哈尔滨工业大学 | Direct on-demand printing mechanism for hot-melt metal micro-droplets based on piezoelectric micro-jetting |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20160507 |