CN203200233U - Separator coated and filtered silicon wafer cut waste mortar online recycling equipment - Google Patents
Separator coated and filtered silicon wafer cut waste mortar online recycling equipment Download PDFInfo
- Publication number
- CN203200233U CN203200233U CN 201320150057 CN201320150057U CN203200233U CN 203200233 U CN203200233 U CN 203200233U CN 201320150057 CN201320150057 CN 201320150057 CN 201320150057 U CN201320150057 U CN 201320150057U CN 203200233 U CN203200233 U CN 203200233U
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- recycling
- separating machine
- waste mortar
- liquid tank
- tank body
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model provides separator coated and filtered silicon wafer cut waste mortar online recycling equipment. The equipment comprises a modularized single separator, a separation liquid tank body, a filter press and a secondary recycling liquid tan, wherein the liquid outlet of the modularized single separator is connected with the inlet of the separation liquid tank body, and the outlet of the separation liquid tank body is connected with the inlet of the filter press through a pipeline; the outlet of the filter press is connected with the secondary recycling liquid tank through a pipeline; and a membrane filter device is arranged inside the filter press. The equipment has the advantages of separating and recycling waste mortar produced in a silicon wafer cutting process, being also suitable for waste liquid recycling in semiconductor chips, crystal, diamond and other fields and good in separation effect with over 95 percent of the removal rate of small particular impurities and over 90 percent of the recycling rate of recycling liquid, effectively avoiding wastes, and lowering the production cost of an enterprise.
Description
Technical field
The utility model relates to the electromechanical integration equipment field, particularly a kind of separating machine add the online recovery system of silicon chip dicing waste mortar of membrane filtration.
Background technology
At present, in order to guarantee the silicon chip cutting quality, the mortar that uses in the cutting technique substantially all is few repeated use, discarded mortar after cutting is used is directly piled up as trade waste and is handled, perhaps entrust professional treatment factory that used mortar is handled, above the sort of mode no matter, significant wastage is caused in the capital, produce big cost, therefore, realize that the recycling of mortar is the effective way that silicon chip manufacturing enterprise reduces production costs, need rational equipment, the existing installation complex structure, the cost height.
The utility model content
The purpose of this utility model is in order to reduce the cost recovery of mortar in the silicon chip cutting technique, the online recovery system of the silicon chip dicing waste mortar that the spy provides a kind of separating machine to add membrane filtration.
The online recovery system of the silicon chip dicing waste mortar that the utility model provides a kind of separating machine to add membrane filtration, it is characterized in that: described separating machine adds the online recovery system of silicon chip dicing waste mortar of membrane filtration, comprise modularization separate unit separating machine 1, parting liquid tank body 2, pressure filter 3, secondary recovery flow container 4;
Wherein: the liquid outlet of modularization separate unit separating machine 1 is connected by the import of pipeline with parting liquid tank body 2, and the outlet of parting liquid tank body 2 is connected by the import of pipeline with pressure filter 3, and the outlet of pressure filter 3 is connected with secondary recovery flow container 4 by pipeline.
Described pressure filter 3 inside have membrane filter appts.
Described modularization separate unit separating machine 1 agent structure is horizontal type screw settling centrifuge.
The solid matter that modularization separate unit separating machine 1 is separated and the liquid mixing in the secondary recovery flow container 4 form the regeneration mortar, realize recycling.
Advantage of the present utility model:
Separating machine described in the utility model adds the online recovery system of silicon chip dicing waste mortar of membrane filtration, for separating of with reclaim the waste mortar that produces in the silicon chip cutting technique, also be applicable to that the waste liquid of industries such as semi-conductor chip, crystal, diamond is recycled simultaneously.Good separating effect, the small-particle removal of impurity reaches more than 95%.The organic efficiency height, the rate of recovery that reclaims liquid reaches more than 90%.Avoid waste effectively, reduced the production cost of enterprise.
Description of drawings
Below in conjunction with drawings and the embodiments the utility model is described in further detail:
Fig. 1 adds the online recovery system theory structure of the silicon chip dicing waste mortar synoptic diagram of membrane filtration for separating machine.
Embodiment
Embodiment 1
The online recovery system of the silicon chip dicing waste mortar that present embodiment provides a kind of separating machine to add membrane filtration, it is characterized in that: described separating machine adds the online recovery system of silicon chip dicing waste mortar of membrane filtration, comprises modularization separate unit separating machine 1, parting liquid tank body 2, pressure filter 3, secondary recovery flow container 4;
Wherein: the liquid outlet of modularization separate unit separating machine 1 is connected by the import of pipeline with parting liquid tank body 2, and the outlet of parting liquid tank body 2 is connected by the import of pipeline with pressure filter 3, and the outlet of pressure filter 3 is connected with secondary recovery flow container 4 by pipeline.
Described pressure filter 3 inside have membrane filter appts.
Described modularization separate unit separating machine 1 agent structure is horizontal type screw settling centrifuge.
The solid matter that modularization separate unit separating machine 1 is separated and the liquid mixing in the secondary recovery flow container 4 form the regeneration mortar, realize recycling.
The online recovery system of the silicon chip dicing waste mortar that present embodiment provides a kind of separating machine to add membrane filtration, it is characterized in that: described separating machine adds the online recovery system of silicon chip dicing waste mortar of membrane filtration, comprises modularization separate unit separating machine 1, parting liquid tank body 2, pressure filter 3, secondary recovery flow container 4;
Wherein: the liquid outlet of modularization separate unit separating machine 1 is connected by the import of pipeline with parting liquid tank body 2, and the outlet of parting liquid tank body 2 is connected by the import of pipeline with pressure filter 3, and the outlet of pressure filter 3 is connected with secondary recovery flow container 4 by pipeline.
Described pressure filter 3 inside have membrane filter appts.
The solid matter that modularization separate unit separating machine 1 is separated and the liquid mixing in the secondary recovery flow container 4 form the regeneration mortar, realize recycling.
Claims (3)
1. online recovery system of silicon chip dicing waste mortar that separating machine adds membrane filtration, it is characterized in that: described separating machine adds the online recovery system of silicon chip dicing waste mortar of membrane filtration, comprise modularization separate unit separating machine (1), parting liquid tank body (2), pressure filter (3), secondary recovery flow container (4);
Wherein: the liquid outlet of modularization separate unit separating machine (1) is connected by the import of pipeline with parting liquid tank body (2), the outlet of parting liquid tank body (2) is connected by the import of pipeline with pressure filter (3), and the outlet of pressure filter (3) is connected with secondary recovery flow container (4) by pipeline.
2. add the online recovery system of silicon chip dicing waste mortar of membrane filtration according to the described separating machine of claim 1, it is characterized in that: described pressure filter (3) inside has membrane filter appts.
3. add the online recovery system of silicon chip dicing waste mortar of membrane filtration according to the described separating machine of claim 1, it is characterized in that: described modularization separate unit separating machine (1) agent structure is horizontal type screw settling centrifuge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320150057 CN203200233U (en) | 2013-03-28 | 2013-03-28 | Separator coated and filtered silicon wafer cut waste mortar online recycling equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320150057 CN203200233U (en) | 2013-03-28 | 2013-03-28 | Separator coated and filtered silicon wafer cut waste mortar online recycling equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203200233U true CN203200233U (en) | 2013-09-18 |
Family
ID=49144361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320150057 Expired - Fee Related CN203200233U (en) | 2013-03-28 | 2013-03-28 | Separator coated and filtered silicon wafer cut waste mortar online recycling equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203200233U (en) |
-
2013
- 2013-03-28 CN CN 201320150057 patent/CN203200233U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20170328 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |