CN105752989A - Efficient high-purity recovery method of silicon carbide micro-powder - Google Patents
Efficient high-purity recovery method of silicon carbide micro-powder Download PDFInfo
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- CN105752989A CN105752989A CN201610119460.5A CN201610119460A CN105752989A CN 105752989 A CN105752989 A CN 105752989A CN 201610119460 A CN201610119460 A CN 201610119460A CN 105752989 A CN105752989 A CN 105752989A
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- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
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Abstract
The invention provides an efficient high-purity recovery method of silicon carbide micro-powder. The efficient high-purity recovery method comprises the following steps: (S1) putting a silicon carbide micro-powder crude product into a container tank, adding water and acid liquid to soak, and continuously stirring during the soaking so as to obtain a material a; (S2) adding water into the material a obtained in the step (S1) to regulate the pH value to 3-5, then adding alkali liquid to regulate the pH value to 9-12, standing to settle until four layers, respectively a clean water layer, a pure carbon layer, a carbon material layer and a silicon carbide micro-powder layer from top to bottom, appear in the container tank; (S3) after respectively extracting the clean water layer and the pure carbon layer in the container tank by virtue of a siphon extraction method, and scraping the third layer, namely the carbon material layer, so as to obtain a material b; and (S4) adding a recovery agent into the material b, filtering to obtain filter residues, adding water to clean, taking out residual materials, drying, and cooling to the room temperature, so as to obtain the recovered silicon carbide micro-powder. The efficient high-purity recovery method of the silicon carbide micro-powder is high in extraction efficiency and extraction purity.
Description
Technical field
The present invention relates to a kind of recovery method, particularly relate to the efficient high-purity recovery side of a kind of silicon carbide micro-powder
Method.
Background technology
Silicon chip is widely used to solar industry and electronic industry at present, and the making of silicon chip is typically silicon
Crystal bar carries out cutting and obtains.Wherein, silicon crystal bar cutting is typically with cutting tool with using cutting oil (such as
Polyethylene glycol, PEG) silicon crystal bar is cut and produces slicing slurry so that this slicing slurry generally wraps
The compositions such as the cutting loss containing carborundum, silicon, cutting oil and cutting element.If directly by slicing slurry
Abandon, not only cause environmental pollution, also will result in the waste of raw material.Therefore, it has been correlated with singly
Position puts into carborundum and the recovery correlation technique of silicon in research and development slicing slurry.
It is currently known the recovery method of carborundum, it is common that first add in slicing slurry and separate auxiliary agent (example in a large number
Such as water or organic solvent etc.) dilute slicing slurry, then with multistage filtering, slicing slurry is filtered, make liquid
The cutting oil of state and water separate with carborundum and the silicon of solid-state.
The extraction organic efficiency of the thick product of silicon carbide micro-powder of the prior art is low, recovery of poor quality.
Summary of the invention
For solving technical problem present in background technology, the present invention proposes the efficient high of a kind of silicon carbide micro-powder
Purity recovery method, extraction efficiency is high, and DNA purity is high.
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight the 50-80 thick product of part silicon carbide micro-powder is loaded in container tank, add carborundum micro-
The water of powder thick product weight part 2-5 times, adds the acid solution of silicon carbide micro-powder thick product weight part 3-6%, leaching
Bubble 30-50h, does not stop stirring and obtains material a during immersion;
Adding water in S2, the material a obtained in S1, regulation pH value, to 3-5, then adds alkali lye and adjusts pH
, to 9-12, standing sedimentation 6-10h, there are four layers of layering in treating container tank, is from top to bottom followed successively by clear water in value
Layer, pure carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after cleaning 1-3 time of then adding water, take
Go out leftover materials, be cooled to the silicon carbide micro-powder that room temperature is i.e. recycled after drying.
Preferably, in S1, acid solution is one or more the composition in sulfuric acid, hydrochloric acid, hydrofluoric acid.
Preferably, in S2, alkali is the one in NaOH or potassium hydroxide.
Preferably, in S4, the raw material of recovery catalyst includes by weight: gasoline 50-80 part, dimethylbenzene 30-50
Part, sulphur nitrogen nitrile ester 8-12 part, isopropoxyethyl radicals thiourethane 1-3 part, parabenzoquinone dioxime 3-6 part, liquid pine
Fragrant 5-9 part, benzo uh azoles mercaptan 2-5 part, methyl alcohol 5-15 part, auxiliary agent 1-4 part, water 30-60 part.
Preferably, in S4, the raw material of recovery catalyst includes by weight: gasoline 55-75 part, dimethylbenzene 35-45
Part, sulphur nitrogen nitrile ester 9-11 part, isopropoxyethyl radicals thiourethane 1.5-2.5 part, parabenzoquinone dioxime 4-5 part, liquid
Body rosin 6-8 part, benzo uh azoles mercaptan 2.5-4.5 part, methyl alcohol 8-12 part, auxiliary agent 2-3 part, water 35-55
Part.
Preferably, in S4, the raw material of recovery catalyst includes by weight: 65 parts of gasoline, dimethylbenzene 40 parts,
Sulphur nitrogen nitrile ester 10 parts, isopropoxyethyl radicals thiourethane 2 parts, parabenzoquinone dioxime 4.5 parts, liquid rosin 6.5 parts,
3.5 parts of benzo uh azoles mercaptan, methyl alcohol 10 parts, auxiliary agent 2.5 parts, 45 parts of water.
Preferably, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 30-50 part, propyl alcohol 10-20
Part, atoleine 5-8 part, water 50-80 part.
Preferably, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 35-45 part, propyl alcohol 12-18
Part, atoleine 6-7 part, water 55-75 part.
Preferably, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 40 parts, propyl alcohol 15 parts,
Atoleine 6.5 parts, 62 parts of water.
Preferably, in S4, the temperature being dried is 80-100 DEG C, and the time being dried is 2-5h.
In the present invention, after thick for silicon carbide micro-powder product is mixed with water, then with acid soak, then alkali lye
Adjust solution acid alkalinity, use the mode of siphon extraction to carry out removal of impurities after standing, finally carry with recovery catalyst
Take, be dried cooling after clean water and obtain silicon carbide micro-powder of the present invention;The use present invention of recovery catalyst
Use multi-solvents and water, under the effect of surfactant, form stable emulsification system, change silicon and
The interfacial tension of carborundum, will separate both it, the auxiliary agent of the application of the invention so that silicon and carborundum
Separation more thorough, the carborundum purity obtained is higher;The present invention reclaims carborundum with low cost, high efficiency
Micro mist, drastically increases the economic benefit of enterprise.The invention has the beneficial effects as follows: treating capacity is big, reclaim effect
Rate is high, device therefor and materials low cost;The carborundum purity reclaimed is high, is better than producing required carborundum
Powder material standard;The byproduct of silicon carbide micro-powder graded purification preparation technique is reclaimed with low cost, high efficiency
Carborundum in carbon material, drastically increases the economic benefit of enterprise.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of the efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail, it should be appreciated that embodiment is served only for
The bright present invention rather than be used for limiting the invention, any made on the basis of the present invention amendment,
Equivalents etc. are the most within the scope of the present invention.
As it is shown in figure 1, the efficient high-purity recovery method of a kind of silicon carbide micro-powder that Fig. 1 is the present invention to be proposed
Schematic flow sheet.
With reference to Fig. 1, the efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, including as follows
Step:
S1, by weight the 50-80 thick product of part silicon carbide micro-powder is loaded in container tank, add carborundum micro-
The water of powder thick product weight part 2-5 times, adds the acid solution of silicon carbide micro-powder thick product weight part 3-6%, leaching
Bubble 30-50h, does not stop stirring and obtains material a during immersion;
Adding water in S2, the material a obtained in S1, regulation pH value, to 3-5, then adds alkali lye and adjusts pH
, to 9-12, standing sedimentation 6-10h, there are four layers of layering in treating container tank, is from top to bottom followed successively by clear water in value
Layer, pure carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after cleaning 1-3 time of then adding water, take
Go out leftover materials, be cooled to the silicon carbide micro-powder that room temperature is i.e. recycled after drying.
Embodiment 1
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight 65 parts of thick products of silicon carbide micro-powder are loaded in container tank, add silicon carbide micro-powder thick
The water that product weight part is 3.5 times, adds the acid solution of silicon carbide micro-powder thick product weight part 4.5%, soaks
40h, does not stop stirring and obtains material a during immersion;
Adding water in S2, the material a obtained in S1, regulation pH value, to 4, then adds alkali lye and adjusts pH value
To 10.5, standing sedimentation 8h, treats to occur in container tank four layers of layering, is from top to bottom followed successively by clear water layer, pure
Carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after the cleaning 2 times of then adding water, take out
Leftover materials, are cooled to, after 90 DEG C of dry 3.5h, the silicon carbide micro-powder that room temperature is i.e. recycled.
The raw material of recovery catalyst includes by weight: 65 parts of gasoline, dimethylbenzene 40 parts, sulphur nitrogen nitrile ester 10 parts,
Isopropoxyethyl radicals thiourethane 2 parts, parabenzoquinone dioxime 4.5 parts, liquid rosin 6.5 parts, benzo uh azoles mercaptan
3.5 parts, methyl alcohol 10 parts, auxiliary agent 2.5 parts, 45 parts of water.
The raw material of auxiliary agent includes by weight: hydrochloric acid solution 40 parts, propyl alcohol 15 parts, atoleine 6.5 parts,
62 parts of water.
Embodiment 2
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight 50 parts of thick products of silicon carbide micro-powder are loaded in container tank, add silicon carbide micro-powder thick
The water that product weight part is 5 times, adds the acid solution of silicon carbide micro-powder thick product weight part 3%, soaks 50h,
Do not stop stirring during immersion and obtain material a;
Adding water in S2, the material a obtained in S1, regulation pH value, to 3, then adds alkali lye and adjusts pH value
To 12, standing sedimentation 6h, in treating container tank, four layers of layering occur, be from top to bottom followed successively by clear water layer, pure carbon
Layer, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after the cleaning 3 times of then adding water, take out
Leftover materials, are cooled to, after 80 DEG C of dry 5h, the silicon carbide micro-powder that room temperature is i.e. recycled.
The raw material of recovery catalyst includes by weight: 50 parts of gasoline, dimethylbenzene 50 parts, sulphur nitrogen nitrile ester 8 parts,
Isopropoxyethyl radicals thiourethane 3 parts, parabenzoquinone dioxime 3 parts, liquid rosin 9 parts, 2 parts of benzo uh azoles mercaptan,
Methyl alcohol 15 parts, auxiliary agent 1 part, 60 parts of water.
The raw material of auxiliary agent includes by weight: hydrochloric acid solution 30 parts, propyl alcohol 20 parts, atoleine 5 parts,
80 parts of water.
Embodiment 3
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight 80 parts of thick products of silicon carbide micro-powder are loaded in container tank, add silicon carbide micro-powder thick
The water that product weight part is 2 times, adds the acid solution of silicon carbide micro-powder thick product weight part 6%, soaks 30h,
Do not stop stirring during immersion and obtain material a;
Adding water in S2, the material a obtained in S1, regulation pH value, to 5, then adds alkali lye and adjusts pH value
To 9, standing sedimentation 10h, in treating container tank, four layers of layering occur, be from top to bottom followed successively by clear water layer, pure carbon
Layer, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after the cleaning 1 time of then adding water, take out
Leftover materials, are cooled to, after 100 DEG C of dry 2h, the silicon carbide micro-powder that room temperature is i.e. recycled.
The raw material of recovery catalyst includes by weight: 80 parts of gasoline, dimethylbenzene 30 parts, sulphur nitrogen nitrile ester 12 parts,
Isopropoxyethyl radicals thiourethane 1 part, parabenzoquinone dioxime 6 parts, liquid rosin 5 parts, 5 parts of benzo uh azoles mercaptan,
Methyl alcohol 5 parts, auxiliary agent 4 parts, 30 parts of water.
The raw material of auxiliary agent includes by weight: hydrochloric acid solution 50 parts, propyl alcohol 10 parts, atoleine 8 parts,
50 parts of water.
Embodiment 4
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight 55 parts of thick products of silicon carbide micro-powder are loaded in container tank, add silicon carbide micro-powder thick
The water that product weight part is 4 times, adds the acid solution of silicon carbide micro-powder thick product weight part 4%, soaks 45h,
Do not stop stirring during immersion and obtain material a;
Adding water in S2, the material a obtained in S1, regulation pH value, to 4.5, then adds alkali lye and adjusts pH
Value to 10, standing sedimentation 9h, treat to occur in container tank four layers of layering, be from top to bottom followed successively by clear water layer, pure
Carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after the cleaning 1.5 times of then adding water, take
Go out leftover materials, be cooled to, after 95 DEG C of dry 3h, the silicon carbide micro-powder that room temperature is i.e. recycled.
The raw material of recovery catalyst includes by weight: 55 parts of gasoline, dimethylbenzene 45 parts, sulphur nitrogen nitrile ester 9 parts,
Isopropoxyethyl radicals thiourethane 2.5 parts, parabenzoquinone dioxime 4 parts, liquid rosin 8 parts, benzo uh azoles mercaptan 2.5
Part, methyl alcohol 12 parts, auxiliary agent 2 parts, 55 parts of water.
The raw material of auxiliary agent includes by weight: hydrochloric acid solution 35 parts, propyl alcohol 18 parts, atoleine 6 parts,
75 parts of water.
Embodiment 5
The efficient high-purity recovery method of a kind of silicon carbide micro-powder that the present invention proposes, comprises the steps:
S1, by weight 75 parts of thick products of silicon carbide micro-powder are loaded in container tank, add silicon carbide micro-powder thick
The water that product weight part is 3 times, adds the acid solution of silicon carbide micro-powder thick product weight part 5%, soaks 45h,
Do not stop stirring during immersion and obtain material a;
Adding water in S2, the material a obtained in S1, regulation pH value, to 3.5, then adds alkali lye and adjusts pH
Value to 11, standing sedimentation 7h, treat to occur in container tank four layers of layering, be from top to bottom followed successively by clear water layer, pure
Carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after the cleaning 2.5 times of then adding water, take
Go out leftover materials, be cooled to, after 85 DEG C of dry 4h, the silicon carbide micro-powder that room temperature is i.e. recycled.
The raw material of recovery catalyst includes by weight: 75 parts of gasoline, dimethylbenzene 45 parts, sulphur nitrogen nitrile ester 11 parts,
Isopropoxyethyl radicals thiourethane 1.5 parts, parabenzoquinone dioxime 5 parts, liquid rosin 6 parts, benzo uh azoles mercaptan 4.5
Part, methyl alcohol 8 parts, auxiliary agent 3 parts, 35 parts of water.
The raw material of auxiliary agent includes by weight: hydrochloric acid solution 45 parts, propyl alcohol 12 parts, atoleine 7 parts,
55 parts of water.
The above, the only present invention preferably detailed description of the invention, but protection scope of the present invention not office
Being limited to this, any those familiar with the art is in the technical scope that the invention discloses, according to this
The technical scheme of invention and inventive concept thereof in addition equivalent or change, all should contain the protection in the present invention
Within the scope of.
Claims (10)
1. the efficient high-purity recovery method of a silicon carbide micro-powder, it is characterised in that comprise the steps:
S1, by weight the 50-80 thick product of part silicon carbide micro-powder is loaded in container tank, add carborundum micro-
The water of powder thick product weight part 2-5 times, adds the acid solution of silicon carbide micro-powder thick product weight part 3-6%,
Soak 30-50h, do not stop stirring during immersion and obtain material a;
Adding water in S2, the material a obtained in S1, regulation pH value, to 3-5, then adds alkali lye and adjusts pH
, to 9-12, standing sedimentation 6-10h, there are four layers of layering in treating container tank, is from top to bottom followed successively by clear water in value
Layer, pure carbon-coating, the carbon bed of material and silicon carbide micro-powder layer;
After clear water layer in container tank and pure carbon-coating are extracted out by S3, the method utilizing siphon to extract respectively, strike off
The carbon bed of material of three layers obtains material b;
S4, in material b, add recovery catalyst, after filtration, take filter residue, after cleaning 1-3 time of then adding water, take
Go out leftover materials, be cooled to the silicon carbide micro-powder that room temperature is i.e. recycled after drying.
The efficient high-purity recovery method of silicon carbide micro-powder the most according to claim 1, it is characterised in that
In S1, acid solution is one or more the composition in sulfuric acid, hydrochloric acid, hydrofluoric acid.
The efficient high-purity recovery method of silicon carbide micro-powder the most according to claim 1 and 2, its feature
Being, in S2, alkali is the one in NaOH or potassium hydroxide.
4., according to the efficient high-purity recovery method of the silicon carbide micro-powder described in claim 1-3, its feature exists
In, in S4, the raw material of recovery catalyst includes by weight: gasoline 50-80 part, dimethylbenzene 30-50 part, sulphur
Nitrogen nitrile ester 8-12 part, isopropoxyethyl radicals thiourethane 1-3 part, parabenzoquinone dioxime 3-6 part, liquid rosin 5-9
Part, benzo uh azoles mercaptan 2-5 part, methyl alcohol 5-15 part, auxiliary agent 1-4 part, water 30-60 part.
5. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 1-4, its
Being characterised by, in S4, the raw material of recovery catalyst includes by weight: gasoline 55-75 part, dimethylbenzene 35-45
Part, sulphur nitrogen nitrile ester 9-11 part, isopropoxyethyl radicals thiourethane 1.5-2.5 part, parabenzoquinone dioxime 4-5 part, liquid
Body rosin 6-8 part, benzo uh azoles mercaptan 2.5-4.5 part, methyl alcohol 8-12 part, auxiliary agent 2-3 part, water 35-55
Part.
6. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 1-5, its
Being characterised by, in S4, the raw material of recovery catalyst includes by weight: 65 parts of gasoline, dimethylbenzene 40 parts, sulphur
Nitrogen nitrile ester 10 parts, isopropoxyethyl radicals thiourethane 2 parts, parabenzoquinone dioxime 4.5 parts, liquid rosin 6.5 parts,
3.5 parts of benzo uh azoles mercaptan, methyl alcohol 10 parts, auxiliary agent 2.5 parts, 45 parts of water.
7. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 4-6, its
Being characterised by, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 30-50 part, propyl alcohol 10-20
Part, atoleine 5-8 part, water 50-80 part.
8. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 4-7, its
Being characterised by, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 35-45 part, propyl alcohol 12-18
Part, atoleine 6-7 part, water 55-75 part.
9. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 4-8, its
Being characterised by, in S4, the raw material of auxiliary agent includes by weight: hydrochloric acid solution 40 parts, propyl alcohol 15 parts, liquid
Paraffin body 6.5 parts, 62 parts of water.
10. according to the efficient high-purity recovery method of the silicon carbide micro-powder described in any one of claim 1-9,
It is characterized in that, in S4, the temperature being dried is 80-100 DEG C, and the time being dried is 2-5h.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108728287A (en) * | 2017-04-15 | 2018-11-02 | 西南技术物理研究所 | The method for recycling the waste and old laser cleaning liquid of laser water tank |
CN110182817A (en) * | 2019-05-27 | 2019-08-30 | 连云港利思特电子材料有限公司 | A kind of recoverying and utilizing method of silicon powder |
CN112746325A (en) * | 2020-12-18 | 2021-05-04 | 国宏中宇科技发展有限公司 | Method for treating and recycling silicon carbide crystal growth excess material |
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JP2004223321A (en) * | 2003-01-20 | 2004-08-12 | Hayaji Shibata | Method and apparatus for separating sio2 particle and sic particle, and separated/recovered sic |
CN101613104A (en) * | 2009-07-13 | 2009-12-30 | 平顶山煤业(集团)易成碳化硅制品有限公司 | A kind of method that reclaims silicon carbide micro-powder |
CN101811699A (en) * | 2009-12-30 | 2010-08-25 | 平顶山煤业(集团)易成碳化硅制品有限公司 | Method of recycling silicon carbide powder |
CN103639063A (en) * | 2013-11-28 | 2014-03-19 | 安徽苏源光伏科技有限公司 | Silicon carbide micro-powder recycling agent and preparation method thereof |
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JP2004223321A (en) * | 2003-01-20 | 2004-08-12 | Hayaji Shibata | Method and apparatus for separating sio2 particle and sic particle, and separated/recovered sic |
CN101613104A (en) * | 2009-07-13 | 2009-12-30 | 平顶山煤业(集团)易成碳化硅制品有限公司 | A kind of method that reclaims silicon carbide micro-powder |
CN101811699A (en) * | 2009-12-30 | 2010-08-25 | 平顶山煤业(集团)易成碳化硅制品有限公司 | Method of recycling silicon carbide powder |
CN103639063A (en) * | 2013-11-28 | 2014-03-19 | 安徽苏源光伏科技有限公司 | Silicon carbide micro-powder recycling agent and preparation method thereof |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN108728287A (en) * | 2017-04-15 | 2018-11-02 | 西南技术物理研究所 | The method for recycling the waste and old laser cleaning liquid of laser water tank |
CN110182817A (en) * | 2019-05-27 | 2019-08-30 | 连云港利思特电子材料有限公司 | A kind of recoverying and utilizing method of silicon powder |
CN112746325A (en) * | 2020-12-18 | 2021-05-04 | 国宏中宇科技发展有限公司 | Method for treating and recycling silicon carbide crystal growth excess material |
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