CN203193894U - MEMS (micro-electromechanical systems) microphone - Google Patents
MEMS (micro-electromechanical systems) microphone Download PDFInfo
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- CN203193894U CN203193894U CN 201320176349 CN201320176349U CN203193894U CN 203193894 U CN203193894 U CN 203193894U CN 201320176349 CN201320176349 CN 201320176349 CN 201320176349 U CN201320176349 U CN 201320176349U CN 203193894 U CN203193894 U CN 203193894U
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- wiring board
- strutting piece
- mems
- hole
- mems microphone
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Abstract
The utility model discloses an MEMS (micro-electromechanical systems) microphone, which relates to the technical field of electroacoustic products. The MEMS microphone comprises a housing, and a circuit board integrally combined with the housing, wherein a first sound hole is formed in the circuit board, one side, combined with the housing, of the circuit board, is defined to be the inner side of the circuit board, an MEMS chip is arranged at a position, corresponding to the first sound hole, of the inner side of the circuit board; a support element is arranged between the circuit board and the MEMS chip; at least two second sound holes are formed in the support element, and the aperture size of each second sound hole is less than the aperture size of the first sound hole; isolation plates used for preventing the airflows from the second sound holes interfering mutually are further arranged on the support element; and an airflow buffering cavity is formed between the support element and the circuit board. According to the MEMS microphone disclosed by the utility model, the technical problems that the MEMS chip is easy to damage, and the like in the prior art are solved; and the MEMS microphone disclosed by the utility model has the advantages of being long in service life, high in sensitivity, good in high-frequency curve adjustability, good in acoustic performance, and the like.
Description
Technical field
The utility model relates to the electro-acoustic product technical field, particularly a kind of MEMS microphone.
Background technology
Along with the fast development of electronic technology, MEMS(microelectromechanical systems) microphone little with its volume, be convenient to the SMT(surface mounting technology) install, high temperature resistant, good stability, automaticity is high and be fit to advantage such as production in enormous quantities has obtained application more and more widely.The wiring board that MEMS microphone of the prior art generally includes shell and is combined as a whole with shell, wiring board is provided with hole, in the inboard of wiring board the position in hole at the sound is provided with the MEMS chip.The MEMS chip is that back pole plate is last, diaphragm under structure, as shown in Figure 7, comprise substrate 31, substrate 31 is provided with diaphragm 32, and the edge of diaphragm 32 is provided with support ring 34, and support ring 34 is provided with back pole plate 33, back pole plate 33 is provided with pole plate hole 331, is provided with oscillation space between back pole plate 33 and the diaphragm 32.
The weak point of the MEMS microphone of this structure is: because the structure of MEMS chip is that diaphragm is following, back pole plate is last, do not block between diaphragm and the sound hole, damage diaphragm easily when the air-flow that enters when the sound hole is strong, thereby damage the MEMS chip, cause the MEMS microphone can't operate as normal, shortened the useful life of MEMS microphone.
The utility model content
Technical problem to be solved in the utility model provides a kind of MEMS microphone, the entering air-flow and can directly not impact the MEMS chip of this MEMS microphone, thus the MEMS chip has been played protection, reduced the damage probability of MEMS chip, long service life; And this MEMS sensitivity of microphone height, the controllability of high frequency curve is good.
For solving the problems of the technologies described above, the technical solution of the utility model is: a kind of MEMS microphone, comprise shell and the wiring board that is combined as a whole with described shell, described wiring board is provided with the hole first, defining the side that described wiring board combines with described shell is the inboard of described wiring board, the position in inboard corresponding described first hole of described wiring board is provided with the MEMS chip, described MEMS chip is installed on the described wiring board by strutting piece, described strutting piece is provided with at least two rising tone holes, and described rising tone hole aperture size is less than described first hole aperture size; Also be provided with on the described strutting piece be used to the division board that prevents the air-flow phase mutual interference that each described rising tone hole is passed through, described division board and described MEMS chip are positioned at the same side of described strutting piece; Be provided with the air-flow cushion chamber between described strutting piece and the described wiring board.
Wherein, described MEMS chip is by a substrate and be arranged on suprabasil capacitor and constitute, described capacitor comprise a rigid back pole plate, a flexible sheet and be arranged on back pole plate and diaphragm between support ring, described diaphragm end face links to each other with described substrate, described back pole plate end is away from described substrate, and described MEMS chip is installed on the described strutting piece by described substrate.
Wherein, described division board is positioned at the centre position of described strutting piece, and each described rising tone pore size distribution is in the both sides of described division board.
Wherein, the aperture in described first hole is 0.25 ± 0.05mm; The aperture in described rising tone hole is 0.01～0.1mm; Each described rising tone hole all with the setting of staggering of described first hole.
As a kind of execution mode, described strutting piece is the lid-like of an end opening, and the openend of described lid-like combines with described wiring board, and described strutting piece and wiring board have surrounded described air-flow cushion chamber jointly.
As another execution mode, described strutting piece is slab construction, is provided with supporting bead between described strutting piece and the described wiring board, and described strutting piece, supporting bead and wiring board have surrounded described air-flow cushion chamber jointly.
As another execution mode, described strutting piece is slab construction, and the position in inboard corresponding described first hole of described wiring board and rising tone hole is provided with groove, and described groove has formed described air-flow cushion chamber between described strutting piece and described wiring board.
As another execution mode, combine with the described wiring board wiring board of position of described strutting piece is provided be used to the excessive glue groove of depositing glue, and described excessive glue groove is arranged at the outward flange side of described strutting piece.
After having adopted technique scheme, the beneficial effects of the utility model are: because the wiring board of MEMS microphone described in the utility model is provided with the hole first, the MEMS chip is installed in the circuit board by strutting piece, and strutting piece is provided with at least two rising tone holes; Also be provided with on the described strutting piece be used to the division board that prevents the air-flow phase mutual interference that each described rising tone hole is passed through, described division board and described MEMS chip are positioned at the same side of described strutting piece; Be provided with the air-flow cushion chamber between strutting piece and the wiring board.Air-flow enters the MEMS microphone by first hole, at first passes through the buffering of air-flow cushion chamber, carries out shunting action on the diaphragm of MEMS chip by rising tone hole then, finishes the conversion of acoustic-electric.The setting of air-flow cushion chamber, the stronger air-flow of having avoided first hole to enter directly impacts the diaphragm of MEMS chip, the MEMS chip is played protective effect, effectively reduced the impaired probability of MEMS chip, thereby prolonged the useful life of MEMS microphone; And as the case may be, can regulate the high frequency curve of MEMS microphone by the size that changes the air-flow cushion chamber, high frequency curve controllability is good, has improved the high frequency performance of MEMS microphone.Because strutting piece is provided with at least two rising tone holes, the air-flow that each rising tone hole is passed through can interfere with each other before the diaphragm that is applied to the MEMS chip, the phase mutual interference meeting of air-flow impacts the acoustical behavior of MEMS microphone, so between two rising tone holes of strutting piece, set up division board, division board has effectively stoped the phase mutual interference between the air-flow, guarantee sound pressure equalization in the MEMS chip chamber, improved the sensitivity of MEMS microphone greatly, improved the acoustical behavior of MEMS microphone.
Since strutting piece and wiring board paste in conjunction with the time, unnecessary viscose glue is easy to obstruction sound hole, makes the MEMS microphone normally to use, postorder also needs to remove the glue processing could guarantee that finished product is qualified; So be provided with the glue groove that overflows at combine with the wiring board wiring board of position of strutting piece, unnecessary viscose glue can flow in the glue groove that overflows, effectively solved the viscose glue problem in obstruction sound hole easily, thereby saved the operation of handling except glue, not only simplify the assembling procedure of MEMS microphone, also improved the product qualified rate of MEMS microphone.
In sum, the utility model MEMS microphone has solved technical problems such as MEMS microphone MEMS chip damages easily in the prior art, and useful life is short.The utility model MEMS microphone has long service life, highly sensitive, and high frequency curve adjustability is good, and acoustical behavior is good, the product qualified rate advantages of higher.
Description of drawings
Fig. 1 is the cross-sectional view of the utility model MEMS microphone embodiment one;
Fig. 2 is the structural representation of the strutting piece of the utility model MEMS microphone embodiment one;
Fig. 3 is the cross-sectional view of the utility model MEMS microphone embodiment two;
Fig. 4 is the cross-sectional view of the utility model MEMS microphone embodiment three;
Fig. 5 is the section solution structure schematic diagram of the utility model MEMS microphone embodiment four;
Fig. 6 is the cross-sectional view of the utility model MEMS microphone embodiment five;
Fig. 7 is the structural representation of the MEMS chip of the utility model MEMS microphone;
Among the figure: 1, wiring board, 11a, first hole, 11b, first hole, 2, shell, 3, MEMS chip, 31, substrate, 32, diaphragm, 33, back pole plate, 331, the pole plate hole, 34, support ring, 4a, strutting piece, 4b, strutting piece, 41, rising tone hole, 5a, air-flow cushion chamber, 5b, air-flow cushion chamber, 5c, air-flow cushion chamber, 6, division board, 7, the glue groove that overflows, 8, supporting bead.
Embodiment
Below in conjunction with drawings and Examples, further set forth the utility model.
Embodiment one:
Shown in Fig. 1 and Fig. 2 are common, a kind of MEMS microphone, comprise the shell 2 that is made by metal material or wiring board material, shell 2 is the tubular structure of an end opening one end sealing, the openend of shell 2 is combined with wiring board 1, the side that wiring board 1 combines with shell 2 is the inboard of wiring board 1, and the center of wiring board 1 is provided with hole 11a first, and the aperture of first hole 11a is 0.25 ± 0.05mm.The inboard of the wiring board 1 of corresponding first hole 11a is bonded with strutting piece 4a, strutting piece 4a is the lid-like of an end opening one end sealing, the blind end of strutting piece 4a is provided with two rising tone holes 41, the aperture in rising tone hole 41 is 0.01～0.1mm, the aperture in rising tone hole 41 is preferably 0.03～0.05mm in the present embodiment, and the openend of strutting piece 4a and wiring board 1 are pasted combination.The outside of the blind end of strutting piece 4a is combined with MEMS chip 3, and strutting piece 4a and wiring board 1 have surrounded air-flow cushion chamber 5a jointly.Air-flow enters the MEMS microphone by first hole 11a, at first passes through the buffering of air-flow cushion chamber 5a, by acting on the diaphragm of MEMS chip 3 after 41 shuntings of rising tone hole, finishes the conversion of acoustic-electric then.The setting of air-flow cushion chamber 5a; that has avoided that first hole 11a enter directly impacts the diaphragm of MEMS chip 3 than air blast; MEMS chip 3 is played protective effect, effectively reduced MEMS chip 3 impaired probability, thereby prolonged the useful life of MEMS microphone.And as the case may be, can regulate the high frequency curve of MEMS microphone by the size that changes air-flow cushion chamber 5a, improve the high frequency performance of MEMS microphone.
As shown in Figure 7, MEMS chip 3 is made of a substrate 31 and the capacitor that is arranged in the substrate 31, capacitor comprise a rigid back pole plate 33, a flexible sheet 32 and be arranged on back pole plate 33 and diaphragm 32 between support ring 34, diaphragm 32 end faces link to each other with substrate 31, back pole plate 33 ends are away from substrate 31, back pole plate 33 is provided with pole plate hole 331, is provided with oscillation space between back pole plate 33 and the diaphragm 32.MEMS chip 3 is installed in 4a on the strutting piece by substrate 31.
As shown in Figure 1, the middle part on the strutting piece 4a is provided with the both sides that 6, two rising tone holes 41 of division board are distributed in division board 6, and division board 6 and MEMS chip 3 are positioned at the same side of strutting piece 4a, and division board 6 is positioned at the operatic tunes that advances of MEMS chip 3.In order to make the cushioning effect maximization of air-flow cushion chamber, be preferably two rising tone holes 41 all with first hole 11a setting of staggering, namely two rising tone holes 41 all should be avoided being located in the orthographic projection of first hole 11a.Because strutting piece 4a is provided with two rising tone holes 41, the air-flow that two rising tone holes 41 are passed through can interfere with each other in MEMS chip 3 chambeies, the phase mutual interference meeting of air-flow impacts the acoustical behavior of MEMS microphone, so between two rising tone holes 41 on the strutting piece 4a, set up division board 6, division board 6 has effectively stoped the phase mutual interference between the air-flow, guaranteed that MEMS chip 3 advances sound pressure equalization in the operatic tunes, improve the sensitivity of MEMS microphone greatly, improved the acoustical behavior of MEMS microphone.
Operation principle of the present utility model is as follows: the air-flow that sound produces enters from first hole 11a, by passing through from rising tone hole 41 after the buffering of air-flow cushion chamber 5a, be applied on the diaphragm 32 of MEMS chip 3, the air-flow that 6 pairs of two rising tone holes 41 of division board are passed through is isolated, can make the air-flow equilibrium that acts on diaphragm 32 different parts, MEMS chip 3 changes into the corresponding signal of telecommunication with amplitude with different voice signals according to the frequency of diaphragm 32 vibrations, thereby finishes the conversion of acoustic-electric.
Embodiment two:
As shown in Figure 3, present embodiment and embodiment one are basic identical, and its difference is:
Be positioned at the position that strutting piece 4a combines with wiring board 1 on the wiring board 1 and be provided with the glue groove 7 that overflows, the glue groove 7 that overflows is arranged at the outward flange side of strutting piece 4a.Strutting piece 4a and wiring board paste in conjunction with the time, unnecessary viscose glue is easy to obstruction sound hole, the glue groove 7 that overflows can be collected unnecessary viscose glue, has effectively solved easily blocked problem of sound hole, has improved the product qualified rate of MEMS microphone.
Embodiment three:
As shown in Figure 4, present embodiment and embodiment one are basic identical, and its difference is:
Strutting piece 4b is slab construction, is provided with supporting bead 8 between the edge of strutting piece 4b and the wiring board 1, and strutting piece 4b, supporting bead 8 and wiring board 1 have surrounded air-flow cushion chamber 5b jointly.
Present embodiment is compared with embodiment one, the air-flow cushion chamber on the z direction of principal axis, take up room for a short time, can make that becoming of MEMS microphone is thinner, be applicable to slim product.
Embodiment four:
As shown in Figure 5, present embodiment and embodiment three are basic identical, and its difference is:
Strutting piece 4b directly is pasted on the wiring board 1, and the position in corresponding first hole 11b and rising tone hole 41 is provided with groove on the wiring board 1, and groove has formed air-flow cushion chamber 5c between strutting piece 4b and wiring board 1.
Present embodiment is compared with embodiment three, has further dwindled air-flow cushion chamber taking up room on the z axle, makes the further attenuation of MEMS microphone.
Embodiment five:
As shown in Figure 6, present embodiment and embodiment four are basic identical, and its difference is:
Be positioned at the position that strutting piece 4b combines with wiring board 1 on the wiring board 1 and be provided with the glue groove 7 that overflows, the glue groove 7 that overflows is arranged at the outward flange side of strutting piece 4b.The glue groove 7 that overflows can be collected unnecessary viscose glue, has effectively solved easily blocked problem of sound hole, has improved the product qualified rate of MEMS microphone.
The utility model is not limited to above-mentioned concrete execution mode, and those of ordinary skill in the art is from above-mentioned design, and without performing creative labour, all conversion of having done all drop within the protection range of the present utility model.
Claims (10)
1.MEMS microphone, comprise shell and the wiring board that is combined as a whole with described shell, described wiring board is provided with the hole first, defining the side that described wiring board combines with described shell is the inboard of described wiring board, the position in inboard corresponding described first hole of described wiring board is provided with the MEMS chip, it is characterized in that: described MEMS chip is installed on the described wiring board by strutting piece, described strutting piece is provided with at least two rising tone holes, and described rising tone hole aperture size is less than described first hole aperture size; Also be provided with on the described strutting piece be used to the division board that prevents the air-flow phase mutual interference that each described rising tone hole is passed through, described division board and described MEMS chip are positioned at the same side of described strutting piece; Be provided with the air-flow cushion chamber between described strutting piece and the described wiring board.
2. MEMS microphone according to claim 1, it is characterized in that: described MEMS chip is by a substrate and be arranged on suprabasil capacitor and constitute, described capacitor comprise a rigid back pole plate, a flexible sheet and be arranged on back pole plate and diaphragm between support ring, described diaphragm end face links to each other with described substrate, described back pole plate end is away from described substrate, and described MEMS chip is installed on the described strutting piece by described substrate.
3. MEMS microphone according to claim 2, it is characterized in that: described division board is positioned at the centre position of described strutting piece, and each described rising tone pore size distribution is in the both sides of described division board.
4. MEMS microphone according to claim 3, it is characterized in that: described strutting piece is the lid-like of an end opening, and the openend of described lid-like combines with described wiring board, and described strutting piece and wiring board have surrounded described air-flow cushion chamber jointly.
5. MEMS microphone according to claim 3, it is characterized in that: described strutting piece is slab construction.
6. MEMS microphone according to claim 5, it is characterized in that: be provided with supporting bead between described strutting piece and the described wiring board, described strutting piece, supporting bead and wiring board have surrounded described air-flow cushion chamber jointly.
7. MEMS microphone according to claim 5 is characterized in that: the position in inboard corresponding described first hole of described wiring board and rising tone hole is provided with groove, and described groove has formed described air-flow cushion chamber between described strutting piece and described wiring board.
8. according to claim 4 or 7 described MEMS microphones, it is characterized in that: combine with the described wiring board wiring board of position of described strutting piece is provided be used to the excessive glue groove of depositing glue, and described excessive glue groove is arranged at the outward flange side of described strutting piece.
9. MEMS microphone according to claim 1, it is characterized in that: the aperture in described first hole is 0.25 ± 0.05mm; The aperture in each described rising tone hole is 0.01～0.1mm; Each described rising tone hole all with the setting of staggering of described first hole.
10. MEMS microphone according to claim 1, it is characterized in that: described shell is metal shell or wiring board shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320176349 CN203193894U (en) | 2013-04-09 | 2013-04-09 | MEMS (micro-electromechanical systems) microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320176349 CN203193894U (en) | 2013-04-09 | 2013-04-09 | MEMS (micro-electromechanical systems) microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203193894U true CN203193894U (en) | 2013-09-11 |
Family
ID=49110716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320176349 Withdrawn - After Issue CN203193894U (en) | 2013-04-09 | 2013-04-09 | MEMS (micro-electromechanical systems) microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203193894U (en) |
-
2013
- 2013-04-09 CN CN 201320176349 patent/CN203193894U/en not_active Withdrawn - After Issue
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130911 Effective date of abandoning: 20151111 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |