CN203192777U - Silicon wafer bench installation positioning system - Google Patents
Silicon wafer bench installation positioning system Download PDFInfo
- Publication number
- CN203192777U CN203192777U CN 201320043503 CN201320043503U CN203192777U CN 203192777 U CN203192777 U CN 203192777U CN 201320043503 CN201320043503 CN 201320043503 CN 201320043503 U CN201320043503 U CN 201320043503U CN 203192777 U CN203192777 U CN 203192777U
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- China
- Prior art keywords
- complete machine
- navigation system
- vacuum frame
- silicon chip
- positioning
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a silicon wafer bench installation positioning system. The system comprises a complete machine frame, a vacuum frame disposed under the complete machine frame, a positioning device fixed between the complete machine frame and the vacuum frame, and a lifting gear disposed on a bottom of the vacuum frame. The positioning device comprises at least a group of positioning units, and the positioning units comprise interface boards, positioning holes disposed on ends of the interface boards, and locating pins cooperating with the positioning holes. The interface boards are disposed on the complete machine frame. The locating pins are disposed on the vacuum frame. Through design of the interface board structure, the technical scheme makes vertical installation location of the vacuum frame and the complete machine frame adjustable, and vertical location precision is improved. The elastic locating pins are used, so gaps between the locating pins and the positioning holes are eliminated, thereby improving repeated positioning accuracy. A hinge sectional type of the elastic locating pins is large in deformation and convenient in installation. A guiding device and other components make positioning and installation more convenient and fast.
Description
Technical field
The utility model relates to a kind of silicon chip platform navigation system is installed.
Background technology
The mask aligner complete machine is when installing integrated and maintenance maintenance, need regularly the silicon chip platform to be moved to beyond the mask aligner main body or recover original position, positioning accuracy request is than higher between the mechanical references of silicon chip platform mechanical interface and mask aligner, repetitive positioning accuracy particularly, generally require about ± 75 μ m, therefore needs installation navigation system is helped the accurate location between silicon chip platform and the complete machine framework.
As shown in Figure 1, a kind of mask aligner is arranged in the prior art, comprise the mobile device of support frame and silicon chip platform, this mobile device comprises: support this photo-etching machine silicon chip platform supporting bracket 160, be arranged at a relative side with this vacuum frame of this supporting bracket air bag 17, be arranged at this supporting bracket 160 and air-cushion devices these air bag 17 homonymies and be arranged at this supporting bracket 160 and rollers these air bag 17 homonymies.The sidewall that supporting bracket 160 is provided with between two surfaces of silicon chip platform 15 and air-cushion device 161 is provided with alignment pin 164, the sidewall of this support frame 12 is provided with location hole, and this location hole matches with this alignment pin 164 and fixes position between this silicon chip platform 15 and this support frame 12.Preferential, the sidewall of this support frame 12 projection 121 that extends internally out, this location hole is arranged on this projection 121.Locate by alignment pin in this device, because being set, projection and the support frame of location hole adopt monolithic construction, locating interface is installed can not be adjusted, vertical positioning accuracy between the mechanical references of very difficult assurance and mask aligner, and the matched in clearance between alignment pin and the dowel hole, also be difficult to guarantee repetitive positioning accuracy, simultaneously sealing device be not set structurally, can't be applied in the extreme ultraviolet projection mask aligner.
The utility model content
Technical problem to be solved in the utility model is that locating interface is non-adjustable in the silicon chip platform installation process, causes positioning accuracy poor, has the gap between alignment pin and the dowel hole, can't guarantee repetitive positioning accuracy.
In order to solve the problems of the technologies described above, the utility model provides a kind of silicon chip platform that navigation system is installed, concrete technical scheme is: described silicon chip platform is installed navigation system and is comprised the vacuum frame that is arranged at complete machine framework below, the fixing positioner of position and be arranged on the lowering or hoisting gear of vacuum frame bottom between complete machine framework and the vacuum frame, described positioner comprises at least one group of positioning unit, described positioning unit comprises interface board, location hole and alignment pin, one end of interface board is fixed on the complete machine framework by securing member, described location hole is arranged on the interface board, described location hole matches with alignment pin, and described alignment pin links to each other with vacuum frame.Because therefore interface board and the non-integrative-structure of complete machine framework can guarantee vertical positioning accuracy by adjusting the interface board vertical position, described alignment pin is used for horizontal location.
Further, described complete machine framework comprises loam cake, support the support of loam cake around being arranged on and be arranged on the open slot that is used for the connecting interface plate on the support, one end of described interface board is fixed on the described open slot by pad and securing member, corrects rigging error by adjusting pad.
Further, described alignment pin is rigidity alignment pin or elastic positioning pin.
Further, described rigidity alignment pin comprises first matrix, is arranged on the first pin head and first level reference of described first body upper surface.
Further, described elastic positioning pin comprises second matrix, is arranged on grooving on described second matrix, is arranged in the described grooving and elastic rod that the lower end links to each other with described second matrix and be arranged on second of described elastic rod upper end and sell head.
The elastic rod bottom is fixed, and when cooperating with location hole, certain displacement takes place relative bottom, top again, thereby has eliminated the gap between the second pin head and the location hole, has guaranteed the precision of resetting.
Further, described elastic rod is segmentation shape structure, it comprises first sub bar, first hinge, second sub bar and second hinge that connects successively from top to bottom, and the upper end of described first sub bar links to each other with the described second pin head, and the lower end of described second hinge links to each other with described second matrix.The flexible hinge structure can be assisted the gap of eliminating pin head and location hole diameter, has improved repetitive positioning accuracy.
Further, described elastic positioning pin also comprises second level reference that is arranged on second body upper surface.
Further, described location hole is circle or Long Circle, and wherein the Long Circle location hole is X-direction fluting or Y-direction fluting.
Further, also comprise guider, described guider comprises at least one group of pilot unit, and described pilot unit comprises at least one group of groove and the roller that matches with groove, and described groove links to each other with vacuum frame, and described roller links to each other with the complete machine framework.Groove cooperates with roller, and restriction vacuum frame a plurality of degrees of freedom are used for the location of aiming between alignment pin and location hole, guarantee that alignment pin can enter in the corresponding location hole smoothly after lifting.
Further, described groove is X-direction fluting or Y-direction fluting.
Further, described lowering or hoisting gear comprises four lifting units, and the distribution of described four lifting units is quadrangle or trapezoidal.
Further, also comprise the tilt detection sensor that is arranged on the vacuum frame.Described tilt detection sensor is used for detecting the gradient of vacuum frame lifting process, and it is fed back to control system, thereby can regulate the work of lowering or hoisting gear, and the control levelness guarantees to install and carries out smoothly.
Further, described complete machine framework is connected by sealing device is airtight with vacuum frame.
The technical scheme that the utility model provides by the interface board structural design, makes that the vertical installation of vacuum frame and complete machine framework location is adjustable, has improved vertical positioning accuracy.Introduce elastic positioning pin in addition, eliminated the gap between rigidity alignment pin and the location hole, improved repetitive positioning accuracy.The hinge segmentation structure of elastic positioning pin, distortion is big, is convenient to install.Guider and other assemblies make the location and installation more convenient and quicker simultaneously.
Description of drawings
Fig. 1 is the prior art structural representation.
Fig. 2 is the utility model front view, and general frame does not show.
Fig. 3 be Fig. 2 A-A to cutaway view, wherein dotted portion is general frame.
Fig. 4 is the interface board structural representation.
Fig. 5 is rigidity locating pin structure schematic diagram.
Fig. 6 is elastic positioning pin structural representation and partial enlarged drawing.
Fig. 7 is elastic rod distortion schematic diagram.
Fig. 8 is the guider structural representation.
Fig. 9 is Fig. 2 elevated bottom perspective schematic diagram.
Shown in the figure:
1. complete machine framework
11. loam cake 12. supports 13. open slots
2. vacuum frame
21. sidewall 22. base plates
3. positioner
31. first positioning unit, 311. first interface boards, 312. first location holes, 313. first alignment pins
32. second positioning unit, 321. second interface boards, 322. second location holes, 323. second alignment pins
33. the 3rd positioning unit 331. the 3rd interface board 332. the 3rd location hole 333. the 3rd alignment pin
34. the 4th positioning unit 341. the 4th interface board 342. the 4th location hole 343. the 4th alignment pin
4. guider
41. first pilot unit, 411. first grooves, 412. first rollers
42. second pilot unit, 421. second grooves 422. the 3rd groove, 423. second rollers
424. the 3rd roller
5. lowering or hoisting gear
51. first lifting unit, 52. second lifting units 53. the 3rd lifting unit
54. the 4th lifting unit
6. tilt detection sensor
7. sealing device
8. rigidity alignment pin
81. first matrix, 82. first pin 83. first level reference
9. elastic positioning pin
91. second matrix, 92. groovings, 93. elastic rods, 94. second pin 95. second level reference
931. first sub bar, 932. first hinges, 933. second sub bars, 934. second hinges
Embodiment
Below in conjunction with accompanying drawing the utility model is described in detail:
Shown in Fig. 2 and 3, the vertical installation navigation system of silicon chip platform described in the utility model comprises vacuum frame 2, positioner 3, guider 4, lowering or hoisting gear 5, tilt detection sensor 6 and the sealing device 7 that is arranged under the complete machine framework 1.
Described complete machine framework 1 comprises the square loam cake 11 of central authorities, support the support 12 of loam cake 11 around being arranged on and be arranged on the open slot 13 that is used for the connecting interface plate on the support.
Described vacuum frame 2 is square box, and it is made up of sidewall 21 and base plate 22.
Described loam cake 11 and 21 closed connections of sidewall, sealing device 7 is established in the junction, and described sealing device 7 is sealing strip.
Shown in Fig. 2～4, described positioner 3 is arranged between sidewall 21 and the support 12, it comprises first positioning unit 31, second positioning unit 32, the 3rd positioning unit 33 and the 4th positioning unit 34, first positioning unit 31 and second positioning unit, 32 homonymies and and the 3rd positioning unit 33 be the diagonal angle setting, described the 4th positioning unit 34 and the 3rd positioning unit 33 homonymies and with second positioning unit 32 be the diagonal angle setting.
First positioning unit 31 in the upper left corner comprises first interface board 311, first location hole 312 and first alignment pin 313, one end of described first interface board 311 inserts in the open slot 13, be fixed on the support 12 by pad (not shown) and screw (not shown), described first location hole 312 is arranged on the other end of first interface board 311, and first alignment pin 313 that matches with first location hole 312 is fixed on the sidewall 21;
Second positioning unit 32 in the upper right corner comprises second interface board 321, X-direction fluting Long Circle second location hole 322 and second alignment pin 323, one end of described second interface board 321 inserts in the open slot 13, be fixed on the support 12 by pad (not shown) and screw (not shown), described second location hole 322 is arranged on the other end of second interface board 321, and second alignment pin 323 that matches with second location hole 322 is fixed on the sidewall 21;
The 3rd positioning unit 33 in the lower right corner comprises the 3rd interface board 331, Y-direction fluting Long Circle the 3rd location hole 332 and the 3rd alignment pin 333, one end of described the 3rd interface board 331 inserts in the open slot 13, be fixed on the support 12 by pad (not shown) and screw (not shown), described the 3rd location hole 332 is arranged on the other end of the 3rd interface board 331, and the 3rd alignment pin 333 that matches with the 3rd location hole 332 is fixed on the sidewall 21;
The 4th positioning unit 34 in the lower left corner comprises the 4th interface board 341, X-direction fluting Long Circle the 4th location hole 342 and the 4th alignment pin 343, one end of described the 4th interface board 341 inserts in the open slot 13, be fixed on the support 12 by pad (not shown) and screw (not shown), described the 4th location hole 342 is arranged on the other end of the 4th interface board 341, and the 4th alignment pin 343 that matches with the 4th location hole 342 is fixed on the sidewall 21;
By cooperatively interacting of interface board and alignment pin, the fixing relative position between complete machine framework 1 and the vacuum frame 2.
Wherein, circular first location hole 312 is used for control X, Y-direction precision, and Long Circle second location hole 322 and the 4th location hole 342 of X-direction setting can be controlled the Y-direction degree of freedom, and Long Circle the 3rd location hole 332 that Y-direction arranges is used for Rz to the location.
As shown in Figure 5, described first alignment pin 313 and the 3rd alignment pin 333 are rigidity alignment pin 8, described fixed locating stud 8 comprises first matrix 81, be arranged on small cylinder first pin 82 of first matrix, 81 upper surfaces and be arranged on projection first level reference 83 of first matrix, 81 upper surfaces, and the top of described first pin 82 is provided with taper seat.
As shown in Figure 6, described second alignment pin 323 and the 4th alignment pin 343 are elastic positioning pin 9, described elastic positioning pin 9 comprises large cylinder second matrix 91, be arranged on grooving 92 on second matrix, be arranged in the grooving 92 and second pin of elastic rod 93 that the lower end links to each other with second matrix 91, elastic rod 93 upper ends 94 and be arranged on projection second level reference 95 of second matrix, 91 upper surfaces, and described second sells a top of 94 is provided with taper seat.
Described elastic rod 93 is segmentation shape structure, it comprises first sub bar 931, first hinge 932, second sub bar 933 and second hinge 934 that connects successively from top to bottom, the upper end of described first sub bar 931 and second pin 94 link to each other, and the lower end of described second hinge 934 links to each other with second matrix 91.
As shown in Figure 7, the distortion situation of elastic rod 93 is that under the initial condition, the Q point represents the second pin head, QP represents first sub bar 931, the P point represents first hinge 932, and PO represents second sub bar 933, and O represents second hinge 934, suppose QP=PO, after the device location and installation, single hinge through θ, P point turn to the P1 point, Q turns to the Q1 point.In isosceles triangle OQ1P1: θ=β+β, i.e. β=0.5 θ; Total deformation angle [alpha]=θ+the β of elastic rod 93=1.5 θ, i.e. total deformation is 1.5 times of single hinge.
Shown in Fig. 2 and 8, shown in guider 4 comprise first pilot unit 41 that is positioned at first positioning unit, 31 upsides and second pilot unit 42 that is positioned at second positioning unit, 32 upsides;
Described first pilot unit 41 comprises first groove 411 that links to each other with sidewall 21 and first roller 412 that links to each other with support 12, and described first groove 411 is Y-direction flutings, matches with first roller 412.
Described second pilot unit 42 comprises the groove group that links to each other with sidewall 21 and the roller set that links to each other with support 12, described groove group comprises second groove 421 of Y-direction fluting and the 3rd groove 422 of X-direction fluting, and described roller set comprises second roller 423 that matches with second groove 421 and the 3rd roller 424 that matches with the 3rd groove 422.
As shown in Figure 9, the bottom of described base plate 22 is provided with lowering or hoisting gear 5, described lowering or hoisting gear 5 comprises second lifting unit 52 in first lifting unit 51, the upper right corner in the upper left corner, the 3rd lifting unit 53 in the lower left corner and the 4th lifting unit 54 in the lower right corner, described lifting unit is air spring, and four lifting units distributions are square.
As shown in Figure 2, described tilt detection sensor 6 is arranged on the vacuum frame 1, and described tilt detection sensor 6 is used for detecting the gradient of vacuum frame 2 lifting process, and it is fed back to control system, thereby can regulate the work of lowering or hoisting gear 5, the control levelness guarantees to install and carries out smoothly.
Shown in Fig. 2 and 3, described complete machine framework 1 and vacuum frame 2 are by 7 airtight connections of sealing device, and described sealing device 7 is for adopting the O type cross section sealing circle of low outgassing rate elastomeric material.Thereby satisfy this system and can be further used for the extreme ultraviolet projection mask aligner that the needs vacuum is used.
The installation location course of work of this system:
Install when integrated, in the vertical measurement frock of interface board assembling, measure the difference in height of the mechanical references of vertical measurement frock benchmark and mask aligner with height gauge, thereby computed correction is adjusted vertical positioning accuracy between the mechanical references that interface board lower gasket thickness satisfies interface board and mask aligner.
Vacuum frame is shifted onto under the complete machine framework, and alignment pin is aimed at corresponding location hole, ready after, air spring charges into gas, promotes vacuum frame steadily, and roller is entered respectively in the corresponding groove, allows alignment pin and location hole further aim at the location.Tilt detection sensor detects the gradient of vacuum frame lifting process, feeds back to the blowing pressure that control system is regulated air spring, thus the levelness of control lifting process.
Along with vacuum frame promotes steadily, the pin head of alignment pin enters corresponding location hole, has guaranteed the horizontal location precision.Because there are error in processing and installation, there is the gap in the pin head with location hole, and by elastic positioning pin generation strain, the power of generation is eliminated gap between rigidity alignment pin and the location hole, the raising repetitive positioning accuracy.When level reference contacts the location with the datum clamp face of complete machine framework, guaranteed the comprehensive positioning accuracy of vacuum frame.
When vacuum frame was in place, sealing ring was guaranteed to seal between vacuum frame and the complete machine framework by rational decrement by the compression of complete machine frame of reference face.
Claims (11)
1. a silicon chip platform is installed navigation system, it is characterized in that, comprise the vacuum frame that is arranged at complete machine framework below, the positioner of position and the lowering or hoisting gear that is arranged on described vacuum frame bottom between fixing described complete machine framework and the vacuum frame, described positioner comprises at least one group of positioning unit, described positioning unit comprises interface board, location hole and alignment pin, one end of described interface board is fixed on the described complete machine framework by securing member, described location hole is arranged on the described interface board, described location hole matches with alignment pin, and described alignment pin links to each other with described vacuum frame.
2. according to the described a kind of silicon chip platform of claim 1 navigation system is installed, it is characterized in that, the support that described complete machine framework comprises loam cake, support described loam cake around being arranged on be arranged on described support on the open slot that is used for being connected described interface board, an end of described interface board is fixed on the described open slot by pad and securing member.
3. according to the described a kind of silicon chip platform of claim 1 navigation system is installed, it is characterized in that described alignment pin is rigidity alignment pin or elastic positioning pin.
4. according to the described a kind of vacuum frame of claim 3 navigation system is installed, it is characterized in that, described rigidity alignment pin comprises first matrix, is arranged on first pin head and first level reference of described first body upper surface.
5. according to the described a kind of silicon chip platform of claim 3 navigation system is installed, it is characterized in that described elastic positioning pin comprises second matrix, be arranged on grooving on described second matrix, be arranged in the described grooving and elastic rod that the lower end links to each other with described second matrix and be arranged on second of described elastic rod upper end and sell head.
6. according to the described a kind of silicon chip platform of claim 5 navigation system is installed, it is characterized in that, described elastic rod is segmentation shape structure, it comprises first sub bar, first hinge, second sub bar and second hinge that connects successively from top to bottom, the upper end of described first sub bar links to each other with the described second pin head, and the lower end of described second hinge links to each other with described second matrix.
7. according to each described a kind of silicon chip platform of claim 1～6 navigation system is installed, it is characterized in that described location hole is circle or Long Circle, wherein the Long Circle location hole is X-direction fluting or Y-direction fluting.
8. according to claim 1～6 an arbitrary described a kind of silicon chip platform navigation system is installed, it is characterized in that, also comprise guider, described guider comprises at least one group of pilot unit, described pilot unit comprises at least one group of groove and the roller that matches with groove, described groove links to each other with described vacuum frame, and described roller links to each other with the complete machine framework, and described groove is X-direction fluting or Y-direction fluting.
9. according to each described a kind of silicon chip platform of claim 1～6 navigation system is installed, it is characterized in that described lowering or hoisting gear comprises four lifting units, the distribution of described four lifting units is quadrangle or trapezoidal.
10. according to each described a kind of silicon chip platform of claim 1～6 navigation system is installed, it is characterized in that, also comprise the tilt detection sensor that is arranged on the described vacuum frame.
11. according to each described a kind of silicon chip platform of claim 1～6 navigation system is installed, it is characterized in that described complete machine framework is connected by sealing device is airtight with described vacuum frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320043503 CN203192777U (en) | 2013-01-25 | 2013-01-25 | Silicon wafer bench installation positioning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320043503 CN203192777U (en) | 2013-01-25 | 2013-01-25 | Silicon wafer bench installation positioning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203192777U true CN203192777U (en) | 2013-09-11 |
Family
ID=49109614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320043503 Expired - Lifetime CN203192777U (en) | 2013-01-25 | 2013-01-25 | Silicon wafer bench installation positioning system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203192777U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102179A (en) * | 2017-06-02 | 2017-08-29 | 深圳市同创精密自动化设备有限公司 | A kind of test fixture of PCB soft boards |
-
2013
- 2013-01-25 CN CN 201320043503 patent/CN203192777U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107102179A (en) * | 2017-06-02 | 2017-08-29 | 深圳市同创精密自动化设备有限公司 | A kind of test fixture of PCB soft boards |
| CN107102179B (en) * | 2017-06-02 | 2023-09-29 | 深圳市同创精密自动化设备有限公司 | Test fixture of PCB soft board |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130911 |
|
| CX01 | Expiry of patent term |