CN203134937U - Periodic opening resonance ring structure terahertz wave filter - Google Patents

Periodic opening resonance ring structure terahertz wave filter Download PDF

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Publication number
CN203134937U
CN203134937U CN 201320022846 CN201320022846U CN203134937U CN 203134937 U CN203134937 U CN 203134937U CN 201320022846 CN201320022846 CN 201320022846 CN 201320022846 U CN201320022846 U CN 201320022846U CN 203134937 U CN203134937 U CN 203134937U
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China
Prior art keywords
split ring
ring resonator
transmission layer
wave filter
ring structure
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Expired - Fee Related
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CN 201320022846
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Chinese (zh)
Inventor
李九生
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China Jiliang University
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China Jiliang University
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Abstract

The utility model discloses a periodic opening resonance ring structure terahertz wave filter, which is characterized by comprising: a signal input terminal, a metal opening resonance ring structure transmission layer, a substrate, and a signal output terminal; wherein the opening resonance ring structure transmission layer is connected with the substrate, the opening resonance ring structure transmission layer comprises 100*100 opening resonance ring structure periodic units; and signals are input from the signal input terminal and pass successively through the opening resonance ring structure transmission layer and the substrate to the signal output terminal to achieve filtering for the signals. The filter has the advantages of high selectivity, wide bandwidth, simple structure, small size, small volume, light weight, saving material, easy production and easy integration.

Description

The THz wave filter of periodicity split ring resonator structure
Technical field
The utility model relates to filter, relates in particular to a kind of THz wave filter of periodicity split ring resonator structure.
Background technology
Between microwave and infrared radiation, the amount of information of this wave band accounts for about 50% of gross information content to THz wave in universe in electromagnetic spectrum.Until the eighties in 20th century, to THz wave each side The Characteristic Study with understand also very limitedly, thereby be called as so-called between far infrared and the millimeter wave " Terahertz space ".In the last few years, the research of the actual generating technique in Terahertz source had obtained very big progress.Along with quantum cascade laser, free electron laser, light wave difference frequency method and the appearance that produces more powerful continuous THz wave method by optical rectification etc., and the progress of the Terahertz detection aspects such as research of superhet and direct detector, Terahertz Technology becomes the focus of broad research in the world wide gradually.A lot of countries all carry out the research of Terahertz aspect energetically in the world at present, and a lot of colleges and universities and research institute are engaged in Terahertz research at home.
The Terahertz system mainly is made up of radiation source, sensitive detection parts and various function element.In actual applications, because the restriction that applied environment noise and application need etc. need filtering unwanted frequency scope and noise, improve the performance of system, thereby the THz wave filter there is important use in practice.
THz wave filter construction current domestic and international research and that proposed is mainly based on structures such as photonic crystal, surface plasmas, these structures are often very complicated, and difficult in the actual fabrication process, cost is higher, requires also high to processing technology and processing environment.So press for development simple in structure, that size is little, the THz wave filter of being convenient to processing and fabricating supports the THz wave application is proposed.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of THz wave filter of periodicity split ring resonator structure is provided.
Periodically the THz wave filter of split ring resonator structure is characterized in that comprising signal input part, metal openings resonant ring structural transmission layer, matrix, signal output part; Split ring resonator structural transmission layer links to each other with matrix, and split ring resonator structural transmission layer comprises 100 * 100 split ring resonator structural cycle unit; Signal is imported from signal input part, passes through split ring resonator structural transmission layer, matrix arriving signal output afterwards successively, realizes signal is carried out filtering.
The thickness of described split ring resonator structural transmission layer is 1~2 μ m.The thickness of described matrix is 200~400 μ m.Two adjacent described split ring resonator structural cycle unit intervals are 10~15 μ m; Metal openings resonant ring outer radius is 65~70 μ m, and width is 4~5 μ m, and notch length is 5~6 μ m.The material of described matrix is the High Resistivity Si material, and the material of split ring resonator structural transmission layer is copper.
The utlity model has the selectivity height, bandwidth is big, simple in structure, size is little, volume is little, in light weight, economical with materials, be convenient to make and be easy to advantages such as integrated.
Description of drawings
Fig. 1 is the THz wave Filter Structures schematic diagram of periodicity split ring resonator structure;
Fig. 2 is the structural representation of split ring resonator structural transmission layer of the present utility model;
Fig. 3 is the THz wave performance of filter curve of periodicity split ring resonator structure.
Embodiment
Shown in Fig. 1~3, periodically the THz wave filter of split ring resonator structure is characterized in that comprising signal input part 1, metal openings resonant ring structural transmission layer 2, matrix 3, signal output part 4; Split ring resonator structural transmission layer 2 links to each other with matrix 3, and split ring resonator structural transmission layer 2 comprises 100 * 100 split ring resonator structural cycle unit 5; Signal passes through split ring resonator structural transmission layer 2, matrix 3 arriving signal output 4 afterwards successively from signal input part 1 input, realizes signal is carried out filtering.
The thickness of described split ring resonator structural transmission layer 2 is 1~2 μ m.The thickness of described matrix 3 is 200~400 μ m.Two adjacent described split ring resonator structural cycle unit 5 spacings are 10~15 μ m; Metal openings resonant ring outer radius is 65~70 μ m, and width is 4~5 μ m, and notch length is 5~6 μ m.The material of described matrix 3 is the High Resistivity Si material, and the material of split ring resonator structural transmission layer 2 is copper.
Embodiment 1:
It is as follows to set each parameter value: metal structure unit number is 100, and split ring resonator structural transmission layer is 1 μ m.The thickness of matrix is 200 μ m.Two adjacent split ring resonator structural cycle unit intervals are 10 μ m; Metal openings resonant ring outer radius is 70 μ m, and width is 5 μ m, and notch length is 5 μ m.The material of described matrix is the High Resistivity Si material, and the material of split ring resonator structural transmission layer is copper.Recording this filter center Frequency point with THz-TDS is 1.2785THz, and the return loss S11 of this point is-27.3dB that inserting loss S21 is-0.93dB that bandwidth is 0.08THz.

Claims (5)

1. the THz wave filter of a periodicity split ring resonator structure is characterized in that comprising signal input part (1), metal openings resonant ring structural transmission layer (2), matrix (3), signal output part (4); Split ring resonator structural transmission layer (2) links to each other with matrix (3), and split ring resonator structural transmission layer (2) comprises 100 * 100 split ring resonator structural cycle unit (5); Signal passes through split ring resonator structural transmission layer (2), matrix (3) arriving signal output (4) afterwards successively from signal input part (1) input, realizes signal is carried out filtering.
2. the THz wave filter of a kind of periodicity split ring resonator structure according to claim 1, the thickness that it is characterized in that described split ring resonator structural transmission layer (2) is 1~2 μ m.
3. the THz wave filter of a kind of periodicity split ring resonator structure according to claim 1, the thickness that it is characterized in that described matrix (3) is 200~400 μ m.
4. the THz wave filter of a kind of periodicity split ring resonator structure according to claim 1 is characterized in that two adjacent described split ring resonator structural cycle unit (5) spacings are 10~15 μ m; Metal openings resonant ring outer radius is 65~70 μ m, and width is 4~5 μ m, and notch length is 5~6 μ m.
5. the THz wave filter of a kind of periodicity split ring resonator structure according to claim 1, the material that it is characterized in that described matrix (3) is the High Resistivity Si material, the material of split ring resonator structural transmission layer (2) is copper.
CN 201320022846 2013-01-14 2013-01-14 Periodic opening resonance ring structure terahertz wave filter Expired - Fee Related CN203134937U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320022846 CN203134937U (en) 2013-01-14 2013-01-14 Periodic opening resonance ring structure terahertz wave filter

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Application Number Priority Date Filing Date Title
CN 201320022846 CN203134937U (en) 2013-01-14 2013-01-14 Periodic opening resonance ring structure terahertz wave filter

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CN203134937U true CN203134937U (en) 2013-08-14

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CN 201320022846 Expired - Fee Related CN203134937U (en) 2013-01-14 2013-01-14 Periodic opening resonance ring structure terahertz wave filter

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104201443A (en) * 2014-08-14 2014-12-10 上海师范大学 Dual-frequency terahertz band-pass filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104201443A (en) * 2014-08-14 2014-12-10 上海师范大学 Dual-frequency terahertz band-pass filter
CN104201443B (en) * 2014-08-14 2017-07-11 上海师范大学 A kind of bifrequency Terahertz bandpass filter and preparation method thereof

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Granted publication date: 20130814

Termination date: 20140114