CN203132512U - Structural optical projection and phase shift device - Google Patents
Structural optical projection and phase shift device Download PDFInfo
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- CN203132512U CN203132512U CN 201320124682 CN201320124682U CN203132512U CN 203132512 U CN203132512 U CN 203132512U CN 201320124682 CN201320124682 CN 201320124682 CN 201320124682 U CN201320124682 U CN 201320124682U CN 203132512 U CN203132512 U CN 203132512U
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Abstract
The utility model discloses a structural optical projection and phase shift device, which comprises a light source. The structural optical projection and phase shift device further comprises multiple slit light sources, a cylindrical face lens, a projection grating and a microscopic object lens which are sequentially arranged on the optical axis along the incident direction. Based on the self-imaging principle, the structural optical projection and phase shift device can satisfy requirements through a common displacement platform when in real use. By adopting the multiple slit light sources placed on the focal plane of the cylindrical face lens, the structural optical projection and phase shift device then acquires high-brightness high-contrast projection structure light stripes. By adopting the multiple slit light sources, the grating, the cylindrical face lens and the microscopic object lens all being common optical elements and having relatively small volumes, the structural optical projection and phase shift device thus has a simple structure and a low cost. Meanwhile, the volume of a whole projection device can be reduced. Device integration can be easily achieved.
Description
Technical field
The utility model belongs to the three dimensional optical measuring technical field, is specifically related to a kind of structured light projection and phase changer.
Background technology
The application of optical three-dimensional measurement in profiling object surface three-dimensional dimension and shape measure is increasingly extensive, in various fields such as object distortion measurement, plastic working, profiling in kind, machine vision, biomedicine, video display stunt, human detection, industrial detection, quality control, CAD of Garment and reverse-engineerings, has very high practical value.
The Structured Illumination three-dimensional sensing is measured, and mainly comprises three steps such as the processing of collection, phase shift bar graph of the generation of generation, phase shift of coherent structure light field and corresponding modulating light field image and contour of object reconstruct.
The phase-shifting technique that uses in the three-dimensional sensing of Structured Illumination is measured is owing to have the variation of background, contrast and noise insensitively, and the measuring accuracy height is beneficial to that signal data is handled and advantage such as three-dimensional measurement and being used widely automatically.Optics phase measurement system needs high-precision phase changer, causes system to become very complicated.
In adopting interfere type light field method or optical grating projection light field method, its phase shift is respectively the light path quarter-wave by the change reference light wave, or the distance realization of horizontal mobile grating 1/4th grating constants.This adopts the phase-shifter of high precision (its precision is at least 0.01 micron) to finish with regard to requiring, although do not have so high accuracy requirement for coarse grating, it is not suitable for trickle pattern and high-acruracy survey, defines its usable range.If do not reach accuracy requirement, will bring because suppressing striped drift and shake to this deadly defect of influence of measurement error.
At present, general Piezoelectric Ceramic mode or the precision stepper motor type of drive of adopting in interference or the grating phase shifting equipment.Although Piezoelectric Ceramic mode precision height also exists non-linear, sluggish, creep effect, it is inaccurate to cause phase shift to be measured.Stepper motor has high orientation precision, no position cumulative errors, but exist the stepper motor rotating speed steady inadequately, operation can be vibrated, noise is big, operation the time is easy to generate shortcomings such as resonance near natural oscillation frequency, needs software and hardware driving circuit such as complicated segmentation and technology to overcome above-mentioned shortcoming problem.
Liquid crystal light valve projecting structural optical mode is that the Sine distribution light field with computer simulation projects on the testee, without any need for phase changer, the interference fringe of having avoided causing because of extraneous vibration is shaken and drift, is very easy to obtain structure projection light field and realization phase shift.But along with the increase of fringe spatial frequency, owing to be subjected to the modulation of liquid crystal light valve sweep frequency, form Moire fringe, make the projection light field be discontented with sufficient Sine distribution, reduce the precision of systematic survey.Because liquid crystal light valve self projection white light light field is inhomogeneous, make the sinusoidal projection streak amplitude modulated, so that the bar graph of gathering shows as core is bright, the marginal portion is dark, the inhomogeneous of intensity will exert an influence to actual object surface shape measurement precision equally.Simultaneously, LCLV Projecting System itself is expensive, and volume is big, has limited its range of application.
The utility model content
The purpose of this utility model is to solve above-mentioned problems of the prior art, a kind of structured light projection and phase changer are provided, this device has mainly solved existing structure light projection system equipment complexity, volume is big, cost is high and phase changer accuracy requirement height, Drive and Control Circuit complexity, is not suitable for the technical matters that trickle pattern high-acruracy survey requires.
For achieving the above object, the technical scheme that the utility model adopts is: comprise light source, and many slits, cylindrical lens, projection grating and the microcobjective arranged successively in optical axis upper edge incident direction; Described many slits are fixed on manual or the electricity driving displacement platform.
Above-mentioned light source is monochromatic LED light source or the LASER Light Source of expansion.
Above-mentioned many slits are positioned on the object space focal plane of cylindrical lens.
Above-mentioned projection grating adopts Lang Qi grating or amplitude type sinusoidal grating.
The focus in object space of above-mentioned microcobjective is positioned on the imaging plane.
The utlity model has following beneficial effect is:
The utility model sets gradually many slits, cylindrical lens, projection grating and microcobjective based on from the imaging principle along the incident light optical axis direction, and designs the parameter of many slits; During actual the use, owing to have image distance of one's own from generally being several millimeters even littler, so the requirement of precision is decreased tens to hundred times, can meet the demands with general common displacement platform; In addition, the utility model adopts a plurality of slits that place on the cylindrical lens focal plane, many seams are divided into a plurality of separate phase dry joint light sources with incoherent light source, each slit forms the plane light wave of different directions behind lens, producing separately independently when the plane light wave of these different directions shines projection grating, grating obtains the projection structure striations of high brightness, high-contrast from imaging; At last, the utility model has adopted the less optical element commonly used of these volumes of many slits, grating, cylindrical lens and microcobjective, makes that the utility model is simple in structure, cost is low, can dwindle the volume of whole projection arrangement, and it is integrated to be easy to implement device.
Description of drawings
Fig. 1 is the one-piece construction synoptic diagram of the utility model device;
Fig. 2 is schematic diagram of the present utility model.
Wherein, 1 is light source; 2 is many slits; 3 is cylindrical lens; 4 is projection grating; 5 is microcobjective.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail:
Referring to Fig. 1, the utility model comprises light source 1, and many slits 2 of arranging successively in optical axis upper edge incident direction, cylindrical lens 3, projection grating 4 and microcobjective 5, wherein, light source is monochromatic LED light source or the LASER Light Source of expansion, projection grating 4 adopts Lang Qi grating or amplitude type sinusoidal grating, microcobjective is used for projection grating being projected on the object under test from imaging on the focal plane of lens, projection grating mainly is when plane wave illumination, near the object space focal plane of microcobjective, form the picture of grating, the focus in object space of microcobjective is positioned at certain on the imaging plane, grating can be selected the amplitude type sinusoidal grating for use, cylindrical lens is used for placing the diverse location slit sends on its front focal plane cylindrical wave to convert the plane wave of different directions to, the purpose that adopts a plurality of slits is in order to form separate relevant slit, to strengthen the light intensity of projection structure striped; Described many slits 2 be fixed on manually or electricity driving displacement platform on, and this many slits 2 are positioned on the object space focal plane of cylindrical lens 3, wherein, manually or electricity driving displacement platform be used for changing the position of slit, make the required phase shift of projection structure striations generation.
The method that adopts the utility model to carry out structured light projection and phase shift may further comprise the steps:
1) the at first projection of building structure light and phase changer are installed light source at experiment porch, on optical axis, set gradually many slits, cylindrical lens, projection grating and microcobjective along incident direction, and design the parameter of many slits;
Wherein, the design concrete grammar of many slits parameter is as follows:
Be positioned at horizontal slit apart from optical axis ξ position and make stripe displacement Δ x, wherein, stripe displacement amount Δ x=Kd, K gets positive negative integer, i.e. K=± 1, ± 2, ± 3 ... be displacement integral multiple fringe period, then this slit striped that produces and striped that the slit that is positioned on the central optical axis produces overlaps, and slit location is defined as ξ=MKd, choosing of concrete ξ is that to make each slit be separate spatial incoherent light source, the position of other slit is ξ ', and ξ '=L ξ, wherein, L=± 1, ± 2, ± 3, Many slits adopt are arranged periodic arrangement or the non-periodic for separate spatial incoherent light source.
2) many slits are placed near the focus in object space of cylindrical lens, utilize the fine motion governor motion, move axially many slits, many slits are positioned on the focal plane of cylindrical lens object space;
3) projection grating and microcobjective are placed on successively after the cylindrical lens, earlier the microcobjective camera lens are close to the projection grating rear surface, utilize the fine motion governor motion, axial mobile microcobjective backward, until occur grating from imaging;
4) utilize the fine motion governor motion, displacement and the phase shift of projected fringe have namely been realized in the position of the many slits of lateral adjustments; Projection structure striped phase-shift phase is
The stripe displacement amount is Δ x, and Δ x=Δ ξ/M, and wherein Δ ξ is the transversal displacement of many slits, and M is magnification, and d is grating constant.
Specific operation process of the present utility model is such:
Referring to Fig. 2, monochromatic LED light source or the laser of expansion are radiated on many slits, many slits are positioned on the displacement platform, the lateral adjustments displacement platform can change the position that is projected in the object under test striped makes striped produce phase shift in other words, the axial adjustment displacement platform makes many slits be positioned the front focal plane position of cylindrical lens, the cylindrical wave that cylindrical lens sends the diverse location slit converts the plane wave of different directions to, these plane waves behind Lang Qi grating or amplitude type sinusoidal grating since the grating that Tabo effect form to overlap from imaging, microcobjective is with near being projected on the object under test from imaging its object space focal plane.Be different from the method that existing direct mobile stop position changes phase place, the utility model is by changing the purpose that the slit position reaches the projected fringe phase shift; Moreover the utility model by projection grating from imaging but not grating itself with the realization fringe projection purpose.
The utlity model has following advantage:
1. phase shift precision height is amplified in the optical lever displacement: having of one's own similarly is to refer to grating when the monochromatic collimated beam along optical axis direction shines, a certain apart from Z behind grating
T(claim the Talbot distance again, Z
T=2d
2/ λ, d is grating constant in the formula, λ is light wavelength) and the integral multiple distance can form the picture of grating.When directional light favours the incident of optical axis small angle theta, be imaged on certainly perpendicular to optical axis transversely can produce displacement, namely striped takes place laterally mobilely, its stripe displacement amount is Δ x=Z
TSin θ ≈ 2d
2θ/λ, the displacement of visual striation, i.e. phase shift is directly proportional with the directional light pitch angle.
Placing focal length is to be positioned at horizontal certain slit apart from optical axis ξ position on the cylindrical lens focal plane of f to form the plane light wave that the pitch angle is θ ≈ tan θ=ξ/f incident behind lens.The pass that can get displacement (phase shift) amount Δ x and ξ is ξ=(λ f/2d
2) Δ x=M Δ x, M=λ f/2d in the formula
2=f/Z
TWe are referred to as displacement (phase shift) magnification, during actual the use, owing to have image distance of one's own from generally being several millimeters even littler, and focal length is tens even the hundreds of millimeter, so displacement (phase shift) magnification can reach tens to hundred times, the requirement of precision is decreased tens to hundred times, can meet the demands with general common displacement platform.
2. the projection structure light intensity is big, and the striped contrast is high: the utility model adopts a plurality of slits that place on the cylindrical lens focal plane.When monochromatic expansion light source illumination slit, many seams are divided into a plurality of separate phase dry joint light sources with incoherent light source, each slit forms the plane light wave of different directions behind lens, produce separately independently grating during the plane light wave of these different directions irradiation projection grating from imaging, when satisfying certain relation between many seams, grating and the lens, what each seam light source produced will overlap from the imaging fringe position, obtains the projection structure striations of high brightness, high-contrast.
3. the structural parameters adjustment is simple, and applicability is strong: require lower from the coaxial adjusting of the light path of imaging projection arrangement.By selecting the grating of suitable grating constant, can conveniently adjust the period pitch of projection structure striped; Perhaps remove cylindrical lens, the cylindrical wave irradiation grating that stitches the light source outgoing will form the grating of amplification from imaging more.Projecting on the bigger or less testee through microcobjective from the imaging striped of grating, according to the measuring accuracy requirement, conveniently adjusted projected fringe period pitch because grating constant is very little, can be advantageously applied to the meticulous topography measurement of object.
4. formation is simple, volume is little, cost is low, it is integrated to be easy to: when grating has image effect and dip-parallel illumination of one's own and penetrates on the basis of striped shifting principle, utilize cylindrical lens and many seam light sources etc. to guarantee under high brightness, high precision situation, to realize simple and easy, low-cost configuration light projection, phase shifting method and device, solved the projection of existing structure light and phase-shifting technique square law device complexity, problem that cost is high.The utility model has adopted the less optical element commonly used of these volumes of many slits, grating, cylindrical lens and microcobjective, and device constitutes simple, and cost is low; Can dwindle the volume of whole projection arrangement, it is integrated to be easy to implement device.
Above content is to further describing that the utility model is done in conjunction with concrete preferred implementation; can not assert that embodiment of the present utility model only limits to this; for the utility model person of an ordinary skill in the technical field; under the prerequisite that does not break away from the utility model design; can also make some simple deduction or replace, all should be considered as belonging to the utility model and determine scope of patent protection by claims of submitting to.
Claims (5)
1. a structured light projection and phase changer is characterized in that: comprise light source (1), and many slits (2), cylindrical lens (3), projection grating (4) and the microcobjective (5) arranged successively in optical axis upper edge incident direction; Described many slits (2) are fixed on manual or the electricity driving displacement platform.
2. structured light projection according to claim 1 and phase changer is characterized in that: monochromatic LED light source or the LASER Light Source of described light source (1) for expanding.
3. structured light projection according to claim 1 and phase changer, it is characterized in that: described many slits (2) are positioned on the object space focal plane of cylindrical lens (3).
4. structured light projection according to claim 1 and phase changer is characterized in that: described projection grating (4) employing Lang Qi grating or amplitude type sinusoidal grating.
5. structured light projection according to claim 1 and phase changer, it is characterized in that: the focus in object space of described microcobjective is positioned on the imaging plane.
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CN 201320124682 CN203132512U (en) | 2013-03-19 | 2013-03-19 | Structural optical projection and phase shift device |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103226009A (en) * | 2013-03-19 | 2013-07-31 | 陕西科技大学 | Self-imaging structured light projection and phase shift device and method |
CN109458954A (en) * | 2018-12-12 | 2019-03-12 | 电子科技大学 | A kind of Cosine fringe field projection module |
TWI665471B (en) * | 2014-11-21 | 2019-07-11 | 新加坡商海特根微光學公司 | Optical pattern projection |
-
2013
- 2013-03-19 CN CN 201320124682 patent/CN203132512U/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103226009A (en) * | 2013-03-19 | 2013-07-31 | 陕西科技大学 | Self-imaging structured light projection and phase shift device and method |
CN103226009B (en) * | 2013-03-19 | 2015-06-24 | 陕西科技大学 | Self-imaging structured light projection and phase shift device and method |
TWI665471B (en) * | 2014-11-21 | 2019-07-11 | 新加坡商海特根微光學公司 | Optical pattern projection |
US10359637B2 (en) | 2014-11-21 | 2019-07-23 | Ams Sensors Singapore Pte. Ltd. | Optical pattern projection |
CN109458954A (en) * | 2018-12-12 | 2019-03-12 | 电子科技大学 | A kind of Cosine fringe field projection module |
CN109458954B (en) * | 2018-12-12 | 2020-08-11 | 电子科技大学 | Cosine fringe field projection module |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20140319 |