CN203128643U - PVD (physical vapor deposition) device adopting light heating - Google Patents
PVD (physical vapor deposition) device adopting light heating Download PDFInfo
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- CN203128643U CN203128643U CN 201220724475 CN201220724475U CN203128643U CN 203128643 U CN203128643 U CN 203128643U CN 201220724475 CN201220724475 CN 201220724475 CN 201220724475 U CN201220724475 U CN 201220724475U CN 203128643 U CN203128643 U CN 203128643U
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- transport tape
- heating
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Abstract
The utility model relates to the field of semiconductor production devices and particularly relates to a PVD (physical vapor deposition) device adopting light heating. According to the PVD device adopting light heating, provided by the utility model, by arranging a roller group which is matched with a conveyor belt, the dynamic sealing effect between a housing and the conveyor belt is achieved; and simultaneously, a mobile target boat is arranged in a lower cavity, and coating treatment on a material to be coated, which is placed on the conveyor belt can be realized through the movement of the mobile target boat in the lower cavity. The whole PVD device can complete the dynamic sealing with the conveyor belt and the coating treatment on the material to be coated, which is placed on the conveyor belt, the structure is more miniaturized, and compared with the prior art, the manufacturing coat and the manufacturing construction period have significant progress.
Description
Technical field
The utility model relates to the semiconductor production equipment field, relates in particular to the PVD equipment that adopts the light heating.
Background technology
Owing to need be finished step by step by a plurality of technologies in the process of the integrated manufacturing of semi-conductor, as clean, drying treatment, isolation processing, PVD plated film etc., and each processing step all need carry out under airtight environment, to adopting integrated sealing manufacturing system in this prior art usually, each step process is carried out under same airtight environment.In the integrated manufacturing processed of whole semi-conductor, the PVD plated film is the core procedure of semi-conductor moulding.
PVD refers to utilize physical process to realize substance transfer, and atom or molecule are transferred to process on the substrate surface by the source.In present semiconductor fabrication, the basic skills of PVD coating technique has the method for vacuum-evaporation, vacuum sputtering and vacuum ion membrane plating.Vacuum-evaporation refers to the film material is placed evaporation source in the vacuum chamber, really stop up under the condition at height, make its evaporation by the evaporation heating, after the linear dimension of mean free path greater than vacuum chamber of steam molecule, atom under the steam condition and molecule seldom are subjected to impact and the obstruction of other molecules or atom after the effusion of evaporation source surface, can be directly to reach on the substrate surface that is plated, because substrate temperature is lower, just condenses thereon and form plated film.
In the prior art, in the semi-conductor integrated manufacturing system, after finishing a technical process, need the semi-conductor work in-process are taken out, carrying out next step art breading, but it is had relatively high expectations to the vacuum of space after taking out, therefore cause the integrated producing apparatus of semi-conductor to make difficulty, factory building huge.Producer's investment is founded the factory need bear a large amount of fund input in early stage on the one hand, usually build the time that the semiconductor integrated manufacturing system needs the several years on the other hand, as seen it is big and of long duration to build semiconductor integrated manufacturing system fund input amount at present, and causes the difficulty of producer's turnover of funds easily.
The utility model content
The purpose of this utility model is to overcome the defective of prior art, aims to provide the PVD equipment that adopts the light heating and realizes modularization and miniaturized design to realize the PVD filming equipment in the semiconductor production equipment, thereby reduce the manufacturing cost of PVD filming equipment.
The utility model is to realize like this, adopt the PVD equipment of light heating, comprise a housing, described housing both lateral sides is respectively equipped with the entrance and exit that passes through for the transport tape of placing material to be coated, and described transport tape is separated into epicoele and cavity of resorption with described housing, the entrance and exit place is provided with the described transport tape of dynamic clamp respectively and drives the cylinder group that it moves in the described housing, each described cylinder group comprises the last cylinder that is attached at the transport tape upside and the bottom roll that is attached at the transport tape downside, also is provided with first servomotor that drives described cylinder group running on the described housing; Be provided with in the described cavity of resorption for the running target boat of placing target and reach the photo-thermal device that described running target boat is provided thermal source, described running target boat upper end has a tuyere towards described transport tape, and described photo-thermal device is located at described running target boat lower end.
Particularly, be provided with a screw mandrel that rotates in the described cavity of resorption, described running target boat is provided with the threaded hole adaptive with described screw mandrel, and described running target boat is installed on the described screw mandrel by described threaded hole.
Particularly, described photo-thermal device comprises the optical cavity of being located at described running target boat lower end, be located in the described optical cavity and focus on amasthenic lens and the flexible light pipe of described mobile target disc lower end, one end of described light pipe is inserted in the described optical cavity and towards described amasthenic lens, and the other end is connected with light source.
Particularly, described light source is located at the outside of described housing, and an end of described light pipe connection light source passes described housing and is connected with described light source.
Particularly, offer the inlet mouth that enters for rare gas element and the venting port of discharge on the described housing.
Particularly, described inlet mouth and venting port are equipped with air intake control valve and gas exhausting valve respectively.
Particularly, described housing sidewall is provided with and drives second servomotor that described screw mandrel rotates.
Particularly, each described surface of going up cylinder and bottom roll is provided with elastic layer, each described mutual elasticity in surface, both ends that goes up cylinder and bottom roll is pressed, each described going up has the gap of passing through for described transport tape between cylinder and the bottom roll, and mutual elasticity is pressed between each described upward cylinder and bottom roll and the described transport tape.
Particularly, above-mentioned PVD equipment comprises Controlling System, also comprise Controlling System, described Controlling System comprises the video monitoring apparatus of System Controlled by Measuring Pressure, the described epicoele of monitoring and the cavity of resorption internal medium of film thickness monitoring system, temperature measuring equipment, the described epicoele of monitoring and following cavity pressure.
The beneficial effects of the utility model: the PVD equipment of the employing light heating that the utility model provides arranges described cylinder group by adopting between described housing and described transport tape, utilize the relation of being tightly connected of described cylinder group and housing and described transport tape, reach the dynamic seal design between described housing and the described transport tape; Simultaneously, the running target boat is set in described cavity of resorption, by the movement of running target boat at described lower chamber, realizes the material to be coated that is positioned on the described transport tape is carried out coating film treatment.Whole PVD equipment finished and transport tape between dynamic seal and to being positioned over the coating film treatment of the material to be coated on the transport tape, more be tending towards microminiaturized on its structure, no matter manufacturing cost or manufacturing schedule all are with respect to prior art tangible progress to be arranged.
Description of drawings
Fig. 1 is the external structure synoptic diagram of the utility model one preferred embodiment;
Fig. 2 is the structural representation after Fig. 1 removes housing one sidewall;
Fig. 3 is the structural representation after Fig. 1 removes housing;
Fig. 4 is the mounting structure synoptic diagram between running target boat and the photo-thermal device;
Fig. 5 is the sectional view of Fig. 4 cross section.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Please refer to Fig. 1 ~ 5, adopt the PVD equipment of light heating, comprise a housing 1, described housing 1 both lateral sides is respectively equipped with entrance 11 and the outlet of passing through for the transport tape 2 of placing material 6 to be coated 12, and described transport tape 2 is separated into epicoele 13 and cavity of resorption 14 with described housing 1, entrance 11 and outlet 12 places are provided with the described transport tape 2 of dynamic clamp respectively and drive its cylinder group that moves 3 in the described housing 1, each described cylinder group 3 comprises the last cylinder 31 that is attached at transport tape 2 upsides and the bottom roll 32 that is attached at transport tape 2 downsides, also is provided with first servomotor 4 that drives described cylinder group 3 runnings on the described housing 1.By adopting described cylinder group 3 is set between described housing 1 and described transport tape 2, utilizes the relation of being tightly connected of described cylinder group 3 and described housing 1 and described transport tape 2, reach the dynamic seal design between described housing 1 and the described transport tape 2.So, can be convenient to PVD equipment of the present utility model and can realize that good sealing is connected by described transport tape 2 with all the other technical modules of semi-conductor integrated manufacturing system.
Be provided with in the described cavity of resorption 14 for the running target boat 51 of placing target and reach the photo-thermal device 52 that described running target boat 51 is provided thermal source, described running target boat 51 upper ends have a tuyere 511 towards described transport tape 2, and described photo-thermal device 52 is located at described running target boat 51 lower ends.In described cavity of resorption 14, running target boat 51 is set, by the movement that described running target boat 51 comes and goes in described lower chamber 14, realizes the material to be coated 6 that is positioned on the described transport tape 2 is carried out coating film treatment.Whole PVD equipment finished and transport tape between dynamic seal and to being positioned over the coating film treatment of the material to be coated on the transport tape, more be tending towards microminiaturized on its structure, no matter manufacturing cost or manufacturing schedule all are with respect to prior art tangible progress to be arranged.
In the present embodiment, be provided with a screw mandrel 53 that rotates in the described cavity of resorption 14, described running target boat 51 is provided with the threaded hole 512 adaptive with described screw mandrel 53, and described running target boat 51 is installed on the described screw mandrel 53 by described threaded hole 512.Wherein, described screw mandrel 53 is parallel with horizontal plane, so, can change described running target boat 51 position in the horizontal direction by rotating described screw mandrel 53.Certainly, in the utility model, the motion-promotion force that described running target boat 51 is provided that the mode that can also adopt cylinder to promote is come also can reach same technique effect.
In the present embodiment, described photo-thermal device 52 comprises the optical cavity 521 of being located at described running target boat 51 lower ends, be located in the described optical cavity 521 and focus on amasthenic lens 522 and the flexible light pipe 523 of described mobile target disc 51 lower ends, one end of described light pipe 523 is inserted in the described optical cavity 521 and towards described amasthenic lens 522, and the other end is connected with light source (figure does not draw).So, can realize the energy of light source is transferred in the described running target boat 51 by described light pipe 523, the target that is positioned in the described running target boat 51 is heated.Because the utility model adopts flexible light pipe 523, can make light pipe 523 together mobile in company with described running target boat 51, make described light source that the position is set is more flexible.Particularly, described light source is located at the outside of described housing 1, and the end that described light pipe 523 connects light source passes described housing 1 and is connected with described light source.So, can make things convenient for being separated from each other of PVD equipment of the present utility model and light source, also be convenient to the maintenance of described PVD equipment.
In the present embodiment, offer the inlet mouth 15 that enters for rare gas element and the venting port 16 of discharging on the described housing 1.Wherein said rare gas element can be any in helium, neon, argon, krypton, xenon, the radon.So, PVD equipment of the present utility model is when work, can be in advance by described inlet mouth 15 injecting inert gas in the described housing 1, simultaneously by the gas in the described housing 1 of described venting port 16 discharges, make to be full of rare gas element in the whole described housing 1, make the air that can not react with the target material of gaseous state in the condition of high temperature in the described housing 1.And in the prior art, normally adopt the mode that vacuumizes, and avoid the target material of air and gaseous state to react, its manufacture difficulty is obviously bigger.Therefore, with respect to prior art, this improvement project more the utmost point in operation with implement, make on the manufacturing cost of equipment more cheap.
In the present embodiment, described inlet mouth 15 and venting port 16 are equipped with air intake control valve and gas exhausting valve respectively.So, can be by the air pressure monitoring device that is connected with the operating device of described air intake control valve and gas exhausting valve be set in described housing 1, utilize air pressure monitoring device to record air pressure in the described housing 1 in real time, reach the opening degree of described air intake control valve and gas exhausting valve or the control of closed degree by Feedback mechanism, reach the effective control to the free air delivery of the air input of described inlet mouth 15 and described venting port 16.
In the present embodiment, described housing 1 sidewall is provided with and drives second servomotor 7 that described screw mandrel 53 rotates.
In the present embodiment, each described surface of going up cylinder 31 and bottom roll 32 is provided with elastic layer (not drawing among the figure), each described mutual elasticity in surface, both ends that goes up cylinder 31 and bottom roll 32 is pressed, each described going up has the gap of passing through for described transport tape 2 between cylinder 31 and the bottom roll 32, and mutual elasticity is pressed between each described upward cylinder 31 and bottom roll 32 and the described transport tape 2.Wherein, described elastic layer adopts silicon rubber to be made.Technique scheme has been given the concrete sealing means of described cylinder group 3, by being in contact with one another part, described upward cylinder 31, bottom roll 32 and substrate 2 be arranged to Elastic Contact, so, in described cylinder group 3 operation process of described substrate 2 companions, can keep good sealing effectiveness constantly, realize dynamic seal.In addition, because the way of contact of adopting mutual elasticity to press between described cylinder group 3 and the described transport tape 2, therefore, will inevitably produce a large amount of heats because of friction each other, for the heat that makes the heat that produces can in time distribute, also be provided with the water-cooling system 8 that described cylinder group 3 is lowered the temperature in the described housing 1.
In the present embodiment, above-mentioned PVD equipment comprises Controlling System, and described Controlling System comprises the film thickness monitoring system that adopts the infrared external reflection principle to be made, temperature measuring equipment, the System Controlled by Measuring Pressure of monitoring described epicoele and following cavity pressure that employing infrared measurement of temperature method is made, the video monitoring apparatus of monitoring described epicoele and cavity of resorption internal medium.In view of described film thickness monitoring system, temperature measuring equipment, System Controlled by Measuring Pressure and video monitoring apparatus are prior art respectively, carefully do not state at this.
The above only is the utility model preferred embodiment; its structure is not limited to the above-mentioned shape of enumerating; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (9)
1. adopt the PVD equipment of light heating, comprise a housing, it is characterized in that: described housing both lateral sides is respectively equipped with the entrance and exit that passes through for the transport tape of placing material to be coated, and described transport tape is separated into epicoele and cavity of resorption with described housing, the entrance and exit place is provided with the described transport tape of dynamic clamp respectively and drives the cylinder group that it moves in the described housing, each described cylinder group comprises the last cylinder that is attached at the transport tape upside and the bottom roll that is attached at the transport tape downside, also is provided with first servomotor that drives described cylinder group running on the described housing; Be provided with in the described cavity of resorption for the running target boat of placing target and reach the photo-thermal device that described running target boat is provided thermal source, described running target boat upper end has a tuyere towards described transport tape, and described photo-thermal device is located at described running target boat lower end.
2. the PVD equipment of employing light according to claim 1 heating, it is characterized in that: be provided with a screw mandrel that rotates in the described cavity of resorption, described running target boat is provided with the threaded hole adaptive with described screw mandrel, and described running target boat is installed on the described screw mandrel by described threaded hole.
3. the PVD equipment of employing light according to claim 1 heating, it is characterized in that: described photo-thermal device comprises the optical cavity of being located at described running target boat lower end, be located in the described optical cavity and focus on amasthenic lens and the flexible light pipe of described mobile target disc lower end, one end of described light pipe is inserted in the described optical cavity and towards described amasthenic lens, and the other end is connected with light source.
4. the PVD equipment of employing light according to claim 3 heating, it is characterized in that: described light source is located at the outside of described housing, and the end that described light pipe connects light source passes described housing and is connected with described light source.
5. the PVD equipment of employing light according to claim 1 heating is characterized in that: offer the inlet mouth that enters for rare gas element and the venting port of discharge on the described housing.
6. the PVD equipment of employing light according to claim 5 heating, it is characterized in that: described inlet mouth and venting port are equipped with air intake control valve and gas exhausting valve respectively.
7. the PVD equipment of employing light according to claim 2 heating, it is characterized in that: described housing sidewall is provided with and drives second servomotor that described screw mandrel rotates.
8. the PVD equipment of employing light according to claim 1 heating, it is characterized in that: each described surface of going up cylinder and bottom roll is provided with elastic layer, each described mutual elasticity in surface, both ends that goes up cylinder and bottom roll is pressed, each described going up has the gap of passing through for described transport tape between cylinder and the bottom roll, and mutual elasticity is pressed between each described upward cylinder and bottom roll and the described transport tape.
9. according to the PVD equipment of each described employing light heating of claim 1 ~ 8, it is characterized in that: also comprise Controlling System, described Controlling System comprises the video monitoring apparatus of System Controlled by Measuring Pressure, the described epicoele of monitoring and the cavity of resorption internal medium of film thickness monitoring system, temperature measuring equipment, the described epicoele of monitoring and following cavity pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724475 CN203128643U (en) | 2012-12-25 | 2012-12-25 | PVD (physical vapor deposition) device adopting light heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724475 CN203128643U (en) | 2012-12-25 | 2012-12-25 | PVD (physical vapor deposition) device adopting light heating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203128643U true CN203128643U (en) | 2013-08-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220724475 Expired - Fee Related CN203128643U (en) | 2012-12-25 | 2012-12-25 | PVD (physical vapor deposition) device adopting light heating |
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| Country | Link |
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| CN (1) | CN203128643U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074581A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | PVD equipment adopting light heating |
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2012
- 2012-12-25 CN CN 201220724475 patent/CN203128643U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074581A (en) * | 2012-12-25 | 2013-05-01 | 王奉瑾 | PVD equipment adopting light heating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130814 Termination date: 20201225 |
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| CF01 | Termination of patent right due to non-payment of annual fee |