CN203118902U - Transmission electron microscope sample bearing apparatus - Google Patents
Transmission electron microscope sample bearing apparatus Download PDFInfo
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- CN203118902U CN203118902U CN 201220624713 CN201220624713U CN203118902U CN 203118902 U CN203118902 U CN 203118902U CN 201220624713 CN201220624713 CN 201220624713 CN 201220624713 U CN201220624713 U CN 201220624713U CN 203118902 U CN203118902 U CN 203118902U
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Abstract
The utility model provides a transmission electron microscope sample bearing apparatus. The apparatus comprises a bearing portion and a metal electrode. The bearing portion is provided with structures of a through hole, a card slot, a metal sheet/layer and the like. A bearing size is equivalent to a micro-grid size. The bearing portion can bear the sample whose thickness is in a range of 500 micrometers. While a sample substrate is fixed, a detection probe can be moved to an edge of the sample from the through hole conveniently so as to carry out operations of bending, modification, contact changing and the like and observation is performed through using the transmission electron microscope. The metal electrode can be connected with a source electrode, a drain electrode and a grid electrode of a nanometer device in the sample. Through using an external connection power supply and an instrument, in situ measurement is performed on a nano-electronical device. The metal sheet/layer of the bearing portion can effectively eliminate electrostatic interference.
Description
Technical field
The utility model relates to a kind of physical unit, is specifically related to a kind of sample for use in transmitted electron microscope bogey, can be used for being implemented in site measurement nano electron device in the transmission electron microscope.
Background technology
Compare with macroscopic material, nano material has very little size and very big surface-to-volume ratio, shown unique quantum effect and skin effect, especially the unique texture of one dimension or quasi-one-dimensional nanometer material makes it have very large potential advantages aspect the structure nano-device.Nanometer electronic device is just becoming the traditional microelectronic component size of solution and is dwindling an important breakthrough mouth of limit problem; Nano-device is also constantly obtained important achievement in the research work aspect high-performance optical electric device, transducer and various new principle, the new function element.The performance of nano-device directly is subjected to the structure and performance, nano material and factor affecting such as contacting of electrode and dielectric layer of nano material itself.But because the nano material individual difference of growth is big, nano material and contacting of electrode and dielectric layer also are difficult to accomplish identical, had a strong impact on stablizing of nano-device performance, restricted research and the application of nano-device.Understanding the performance of nano-device and the one-to-one relationship of structure is a key that addresses this problem.Transmission electron microscope is the strong tools of research material microstructure, and the situ probes technology is combined with transmission electron microscope and the mankind's eyes and hand can be stretched over nanoscale simultaneously.At present, the in-situ techniques in the transmission electron microscope can combine nano material's structure and its mechanics and electric property.If can in transmission electron microscope, study nano-device, not only performance and the structure of nano-device can be mapped, and nanometer material structure that can be in changing nano-device and contact situation in the change of observation nano-device performance, this will provide important references for preparation and the performance study of nano-device, and this is an important breakthrough of nano-device and transmission representational field.In existing business-like TEM-STM probe station, an end that is used for the dress sample is hollow tubule, can only be placed on diameter to sample on the filament about 0.4mm, has limited the further application of probe station.The original position work of nano-device is had higher requirement to the transmission electron microscope probe station, and it requires the unsettled and nano-device of nano-device within the scope that nano-probe can touch.Nano-device research work on common sample for use in transmitted electron microscope platform (non-probe station) launches successively.At article K.Liu, W.Wang, Z.Xu, X.Bai, E.Wang, Y.Yao, J.Zhang and Z.Liu, Journal of the American Chemical Society, 2008, the author can only observe the performance that nano material's structure is tested nano-device then in the nano-device outside transmission electron microscope earlier among 131, the 62-63. in transmission electron microscope, can not in real time structure and performance be mapped.At article H.Wang, J.Luo, F.
M.H.R ü mmeli, G.A.D.Briggs and J.H.Warner, Nanotechnology, 2011, the author is by being mapped in performance and the structure (non-probe station) on common sample for use in transmitted electron microscope platform of silicon chip making silicon nitride transparent window with nano-device in 22,245305..But this structure is very high to the requirement of technique for processing silicon chip, and is also very high to the requirement of equipment, and can influence the high resolution structures information that obtains sample.
The utility model content
The purpose of this utility model is to overcome the defective of existing method of measurement, provides a kind of and can carry nano electron device also and the bogey of commercial transmission electron microscope probe station compatibility.This device can be connected firmly with present business-like TEM-STM probe station, guarantees not influence the resolution of transmission electron microscope, can carry device, and possess the metal electrode that is connected with device, allows to utilize probe that the nano material in the nano-device is modified.
In order to realize above purpose, the utility model has designed a kind of sample for use in transmitted electron microscope bogey, and this device mainly comprises bearing part, metal electrode.The bearing part is used for carrying the nano-device substrate, one side has through hole, 3mm * 3mm is with electron beam interior, 100% thoroughly, making electron beam can pass through hole gets to and receives on the on-chip sample of electric device, simultaneously, detector probe also can move to sample edge from the through hole easily and sample carried out operations such as bending, modification, change contact; The sample platform should at utmost be satisfied in the field range of X, Y, three directions of Z near the center, visual field of transmission electron microscope in the center of through hole.Metal electrode is used for connecting nano-device and external measurement devices, be arranged on the bearing part opposite side and/or on/downside, number be set to 2 and more than, can be 2 or 3 or 4 etc.
For making device of the present utility model more firm when carrying sample substrate, the bearing part also is provided with draw-in groove in through hole one side, described draw-in groove is positioned at the middle part of this side, sample substrate is inserted draw-in groove, upper and lower and one-sided fixing, be positioned at the edge of bearing part around the sample substrate, on-chip sample is positioned at the through hole central range; Bulge-structure is positioned at both sides adjacent with metal electrode place side with through hole on the bearing part, fixedlys connected with the bearing part (being generally integrated design or bonding forming).The thickness of draw-in groove is suitable with the electric device substrate thickness of receiving, and cross sectional shape can be wedge shape or rectangle, can carry in big or small 3mm * 3mm the sample of thickness in 500um; The size of bulge-structure and sample platform are complementary.
In addition, in bottom and the adjacent two sides of accepting part sheet metal or the metal level that is connected with the sample platform arranged, sheet metal or metal level can or paste by evaporation to be accepted on the part, is used for preventing accumulation of static electricity.
Compared with prior art, the beneficial effects of the utility model are:
1. the utility model device can carry size and little grid sizableness, and the sample of thickness in 500um can only be placed on diameter to sample on the filament about 0.4mm compared with prior art, expanded the application of probe station greatly.
2. be provided with metal electrode above the utility model device, can link to each other with nano-device source, leakage, the grid in the sample, by using external power supply and instrument, in site measurement nano electron device, thereby make the integrated level of equipment higher, be conducive to develop to the facilitation direction.
3. in conjunction with the probe station in the utility model device and the transmission electron microscope, can utilize probe on purpose to change the structure of nano-device, thereby the electric property of nano-device and mechanics and structural information are connected.
4. use the utility model device, nano-device does not need to use the silicon nitride film support, does not influence the resolution to structure.
Description of drawings
Fig. 1 is front view of the present utility model;
Fig. 2 is front view of the present utility model;
Fig. 3 is right view of the present utility model;
Fig. 4 is pack into the relative position figure of sample platform meron and probe of the utility model device;
Fig. 5 is the schematic diagram with the nano material in the crooked nano-device of probe;
Fig. 6 is the schematic diagram that changes the nano-device contact with probe;
Fig. 7 is for making the schematic diagram of the unsettled grid in the nano-device of probe;
1-through hole; 2-bearing part; 3-sheet metal; 4-bulge-structure; 5-metal electrode;
6-draw-in groove; 7-substrate; 8-on-chip electrode; 9-nano material; 10-probe.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing, but not as limit.
As shown in Figure 1, structure of the present utility model mainly comprises bearing part 2, metal electrode 5.Bearing part 2 is used for carrying the nano-device substrate, a side of 2 offers through hole 1 in the bearing part, electron beam can pass through hole 1 and get on the on-chip sample of the nano-device that is positioned on the bearing part 2, simultaneously, detector probe also can move to substrate edge easily from through hole 1 and sample carried out operations such as bending, modification, change contact; The sample platform should at utmost be satisfied in the field range of X, Y, three directions of Z near the center, visual field of transmission electron microscope in the center of through hole 1.In Fig. 1, through hole 1 be shaped as rectangle, but also can be set to circle or other shapes as required, the utility model is not as limit.In Fig. 1,2 opposite side corner area also is provided with 4 metal electrodes 5 in the bearing part, in actual use, metal electrode 5 can also be arranged on bearing part 2 on/downside, metal electrode 5 can link to each other with nano-device source, leakage, the grid in the sample, by using external power supply and instrument, nano electron device is carried out in site measurement.In Fig. 3, metal electrode 5 is symmetrically distributed, and is positioned at two of the outside and is designed to L shapedly, and two in the middle of being positioned at are designed to linear, but the utility model is as limit, and the quantity of metal electrode 5 and shape are also done corresponding change according to actual needs.
For making device of the present utility model more firm when carrying sample substrate, 2 also are provided with draw-in groove 6(and see Fig. 2 in the bearing part) and bulge-structure 4, draw-in groove 6 is positioned at the middle part of bearing part, through hole 1 is divided into two sections, the thickness of the thickness of draw-in groove 6 and nano-device substrate is suitable, and cross sectional shape can be wedge shape or rectangle; After sample substrate was inserted draw-in groove 6, it was upper and lower and one-sidedly namely be fixed, and was positioned at the edge of bearing part 2 around the sample substrate, and on-chip sample is positioned at through hole 1 central range.Bulge-structure 4 is positioned at the both sides of bearing part 2, with bearing part 2 be that integrated design or bonding form; The size of bulge-structure and sample platform are complementary.
For the accuracy that guarantees to test, and the interference of getting rid of static, 2 the bottom in the bearing part (dotted portion among Fig. 2), the both sides adjacent with through hole 1 and metal electrode 5 are provided with sheet metal 3, and in actual use, sheet metal 3 will link to each other with the sample platform.Certainly, also can process the layer of metal layer at dotted portion by modes such as evaporations, the utility model is not as limit.
The concrete operations step:
(1) nano-device being put into the sample for use in transmitted electron microscope bogey fixes, described nano-device requires and can observe in transmission electron microscope, the substrate of nano material below is thin or hollow out enough, electron beam is passed through, and nano material allows the probe in the transmission electron microscope to contact from a side joint: clamp the nano-device substrate with tweezers and insert this utility model device from draw-in groove 6 one sides, adjust the position, and the nano-device that will observe is positioned at through hole 1 center is that former spot diameter is 3 millimeters scope, and uses the elargol fixation.
(2) with fine wire the source in the nano electron device, leakage, grid and metal electrode 5 are coupled together, with wire or elargol sheet metal 3 parts among Fig. 1 are linked to each other with substrate, be used for getting rid of accumulation of static electricity.
(3) bulge-structure 4 is put into the groove of specimen holder, made this utility model device be arranged in the sample for use in transmitted electron microscope bar.
Pack into and insert specimen holder behind the probe, after vacuum is taken out, observe sample.The relative position of sample as shown in Figure 4 on probe and the substrate.
(4) add source-drain voltage and grid voltage with the external voltage source to nano-device, measure source-drain current with current measurement instrument.
(5) with probe nano material is modified (power that for example applies makes its distortion or changes contact etc., sees the application example among Fig. 5-7), measure the performance of nano-device then, thereby structure and performance are mapped.
Fig. 5 is that the bending strain of nano material in the research nano-device raceway groove is to the schematic diagram of nano-device Effect on Performance.
This utility model device is installed to transmission sample platform neutralization, and to connect (1), (2) in process such as electrode and the above-mentioned concrete operations step, (3), (4) identical, repeats no more herein.After finishing aforesaid operations, measure the electric property of nano-device, as V
Sd(source-drain voltage)-I
Sd(source-drain current), or V
g(gate voltage)-Isd etc.Traveling probe then, touch in the nano-device raceway groove nano material and to its stress of exerting pressure, crooked nano material is observed nano material's structure this moment simultaneously, and measures the electric property of nano-device this moment, as shown in Figure 5.Contrast the electric property of the stress front and back nano-device of exerting pressure, thereby the bending strain of nano material is to the influence of nano ZnO in the research nano-device raceway groove.
Also available probe changes the situation that contacts of nano material and metal electrode in the nano-device, as shown in Figure 6:
With near the nano material the probe contacting metal electrode, attempt changing contacting of nano material and metal electrode, and measure this operation front and back nano-device performance.
Also available probe is done the unsettled grid in the nano-device, as shown in Figure 7:
Near the nano material in the nano-device raceway groove, the height of adjusting nano-probe is consistent with the nano material height, allows and leaves certain distance between nano-probe and the nano material with nano-probe, and gate dielectric layer is the vacuum layer between nano-probe and the nano material.Add gate voltage by nano-probe, and measure the source-drain current under the particular source drain voltage simultaneously.
Though the utility model discloses as above with embodiment, however its only for example with reference to but not be used for limiting scope of the present utility model, anyly have the knack of this skill person, in not breaking away from spirit and scope of the present utility model, when doing a little change and retouching.Therefore above-described embodiment is not to limit scope of the present utility model, and protection range of the present utility model is as the criterion with claims.
Claims (10)
1. a sample for use in transmitted electron microscope bogey is characterized in that, comprises bearing part and metal electrode, and described bearing part one side has through hole, metal electrode be positioned at the bearing part opposite side and/or on/downside.
2. sample for use in transmitted electron microscope bogey as claimed in claim 1 is characterized in that, described through hole is in the 3mmx3mm.
3. sample for use in transmitted electron microscope bogey as claimed in claim 1 is characterized in that, the number of described metal electrode is at least 2.
4. sample for use in transmitted electron microscope bogey as claimed in claim 1 is characterized in that, described bearing part also is provided with draw-in groove in through hole one side, and described draw-in groove is positioned at the middle part of this side.
5. sample for use in transmitted electron microscope bogey as claimed in claim 4 is characterized in that, the cross section of described draw-in groove is wedge shape or rectangle.
6. sample for use in transmitted electron microscope bogey as claimed in claim 4 is characterized in that, the thickness of described draw-in groove is in the 500um.
7. sample for use in transmitted electron microscope bogey as claimed in claim 1 is characterized in that, both sides adjacent with metal electrode place side with through hole on the described bearing part are provided with bulge-structure, fixedly connected with the bearing part.
8. sample for use in transmitted electron microscope bogey as claimed in claim 7 is characterized in that, described bulge-structure and bearing part are the integrated design or are bonding.
9. sample for use in transmitted electron microscope bogey as claimed in claim 7 is characterized in that, the size of described bulge-structure and sample platform coupling.
10. sample for use in transmitted electron microscope bogey as claimed in claim 1 is characterized in that, is provided with sheet metal or metal level in described bottom and adjacent two sides of accepting part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220624713 CN203118902U (en) | 2012-11-22 | 2012-11-22 | Transmission electron microscope sample bearing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220624713 CN203118902U (en) | 2012-11-22 | 2012-11-22 | Transmission electron microscope sample bearing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203118902U true CN203118902U (en) | 2013-08-07 |
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ID=48899223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220624713 Expired - Fee Related CN203118902U (en) | 2012-11-22 | 2012-11-22 | Transmission electron microscope sample bearing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203118902U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102983049A (en) * | 2012-11-22 | 2013-03-20 | 北京大学 | Transmission electron microscope sample bearing device |
| CN104931350A (en) * | 2015-06-11 | 2015-09-23 | 中国科学院山西煤炭化学研究所 | Method for quantitatively testing flexibility of flexible graphene membrane |
-
2012
- 2012-11-22 CN CN 201220624713 patent/CN203118902U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102983049A (en) * | 2012-11-22 | 2013-03-20 | 北京大学 | Transmission electron microscope sample bearing device |
| CN102983049B (en) * | 2012-11-22 | 2015-07-29 | 北京大学 | Sample for use in transmitted electron microscope bogey |
| CN104931350A (en) * | 2015-06-11 | 2015-09-23 | 中国科学院山西煤炭化学研究所 | Method for quantitatively testing flexibility of flexible graphene membrane |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130807 Termination date: 20161122 |