CN203096234U - Anti-explosion device for vacuum pipeline of silicon carbide single crystal furnace - Google Patents
Anti-explosion device for vacuum pipeline of silicon carbide single crystal furnace Download PDFInfo
- Publication number
- CN203096234U CN203096234U CN 201320018486 CN201320018486U CN203096234U CN 203096234 U CN203096234 U CN 203096234U CN 201320018486 CN201320018486 CN 201320018486 CN 201320018486 U CN201320018486 U CN 201320018486U CN 203096234 U CN203096234 U CN 203096234U
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- guide rod
- blind plate
- silicon carbide
- pressure
- ring flange
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Abstract
The utility model relates to an anti-explosion device for a vacuum pipeline of a silicon carbide single crystal furnace. The device comprises a flange disc, an O-shaped sealing ring, a pressure reliving blind plate, a guide rod with a thread at the end and a compression spring. The flange disc is vertically installed at the lower end of the vacuum pipeline. The pressure reliving blind plate is provided with a through hole and is arranged below the flange disc. The guide rod passes through the through hole in the pressure reliving blind plate and is fixedly connected with the flange disc. The flange disc and the pressure reliving blind plate are sealed by the O-shaped sealing ring. The compression spring is sleeved on the guide rod. The structure can automatically and continuously prevent unstable state due to overhigh pressure in the furnace, and is good in sealing property, small in abrasion and simple in structure and can be repeatedly used for a long time. The whole process does not involve manual operation and is automatically completed.
Description
Technical field
The utility model relates to a kind of explosion-proof apparatus, relates in particular to the explosion-proof apparatus on a kind of single-crystal silicon carbide stove vacuum pipe.
Background technology
Application facet at semiconducter device, reduction along with the silicon carbide production cost, single-crystal silicon carbide is because its good physics and electric property and part replaces silicon single crystal are broken silicon single crystal because the bottleneck of performance of material own will be brought revolutionary change to electronics industry.The main application fields of single-crystal silicon carbide has the LED solid state lighting at present, the high frequency device, high-voltage power element and resistant to elevated temperatures integrated circuit (IC) chip, these application provide huge increased requirement to single-crystal silicon carbide, and crystal growth equipment-monocrystal growing furnace also needs development at full speed thereupon simultaneously.The silicon carbide monocrystal growth stove belongs to the high pressure vacuum tightness system, and is very high to the requirement of vaccum leakage rate.Because unforeseen circumstances appears in the singularity of its working order in stove, for example to leak, mishandle etc., stove internal gas pressure moment becomes ten thousand multiple magnitudes to increase, when serious even can cause the blast of monocrystalline body of heater, threat to life property safety.
The utility model content
Technical problem to be solved in the utility model provides the explosion-proof apparatus on a kind of single-crystal silicon carbide stove vacuum pipe, overcome in the prior art because leaking appears in the high pressure vacuum stove or unexpected mishandle causes the body of heater internal gas pressure to increase fast, because the untimely dangerous defects that may cause the body of heater blast of pressure release.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: the explosion-proof apparatus on a kind of single-crystal silicon carbide stove vacuum pipe, comprise ring flange, O RunddichtringO, pressure release blind plate, the screwed guide rod in end and compression spring,
Described ring flange is vertically mounted on the lower end of described single-crystal silicon carbide stove vacuum pipe, and described pressure release blind plate is provided with through hole, and described pressure release blind plate is arranged on the below of described ring flange; The through hole that described guide rod one end passes on the described pressure release blind plate is threaded with described ring flange; Seal by the O RunddichtringO between described ring flange and the described pressure release blind plate; Described compression spring is set on the described guide rod, and the described guide rod the other end is installed on the pedestal.Wherein compression spring forms the certain deformation amount on guide rod, realizes integrally-built sealing.
The beneficial effects of the utility model are: reach and vacuum pipe flange connecting dish owing to be provided with the pressure release blind plate in the lower end of vacuum pipe, the through hole that guide rod passes on the method pressure release blind plate is fixedlyed connected with ring flange, needed opening pressure is determined the draught of spring in deadweight that can the pressure release blind plate and the stove, the ring flange that is threaded into by guide rod top, fixing after being rotated in place, when the pressure of vacuum pipe during greater than the pressure opened according to the rules, compression spring is further compressed, pressure release blind plate position moves down, produce the gap with the vacuum welding flange, furnace interior divides gas to go out to discharge from the space, thereby furnace pressure is descended.Compression spring is owing to limited by the lower end of the guide rod face, the savings elastic potential energy, and when furnace pressure drops to when being lower than opening pressure, the sealing contact surface recombine is recovered sealed state, continues operation.This structure is with the unsteady state of automatic, lasting control because of the too high generation of furnace pressure, and good airproof performance, and it is little to wear and tear, simple in structure, can reuse for a long time.Whole process need not manual operation, finishes automatically.
On the basis of technique scheme, the utility model can also be done following improvement.
Further, described guide rod is 8, and it all is connected with described ring flange by the screw thread of guide rod upper end.Can determine the number of guide rod and spring according to the size of vacuum pipe caliber.
Further, described O RunddichtringO is the fluororubber O-type sealing-ring.
Description of drawings
Fig. 1 is the axonometric drawing of the explosion-proof apparatus on a kind of single-crystal silicon carbide stove of the utility model vacuum pipe;
Fig. 2 is the diagrammatic cross-section of the explosion-proof apparatus on a kind of single-crystal silicon carbide stove of the utility model vacuum pipe;
In the accompanying drawing, the list of parts of each label representative is as follows:
1, vacuum pipe, 2, ring flange, 3, the O RunddichtringO, 4, guide rod, 5, compression spring, 6, the pressure release blind plate.
Embodiment
Below in conjunction with accompanying drawing principle of the present utility model and feature are described, institute gives an actual example and only is used to explain the utility model, is not to be used to limit scope of the present utility model.
Explosion-proof apparatus on a kind of single-crystal silicon carbide stove of the utility model vacuum pipe comprises ring flange 2, O RunddichtringO 3, pressure release blind plate 6, the screwed guide rod 4 in end and compression spring 5 as shown in Figure 1 and Figure 2;
Described ring flange 2 is vertically mounted on the lower end of described vacuum pipe 1, can be fixed on the lower end of described single-crystal silicon carbide stove vacuum pipe 1 by the mode of welding; Described pressure release blind plate 6 is provided with 8 through holes, and described pressure release blind plate 6 is arranged on the below of described ring flange 2; The through hole that passes on the described pressure release blind plate 6 by 8 guide rod 4 upper ends is threaded with described ring flange 2, and described compression spring 5 is set on the described guide rod 4, and has certain deflection.Pressure release blind plate 6 can move up and down along vertical guide rod, and the slip of pressure release blind plate is subjected to the constraint of ring flange 2, compression spring 5; By 3 sealings of O RunddichtringO, wherein said O RunddichtringO 3 is the fluororubber O-type sealing-ring between described ring flange 2 and the described pressure release blind plate 6, can realize sealing fully between pressure release blind plate 6 and the ring flange 2.The lower end of guide rod is fixed on the pedestal, and the normally contour setting of described guide rod.
Principle of work of the present utility model:
At first determine the draught of spring according to needed opening pressure in the deadweight of pressure release blind plate and the stove, by the ring flange that is threaded on guide rod top, fixing behind the position of the amount of spring compression that needed opening pressure is determined in rotating to according to the deadweight of pressure release blind plate and stove.
When the pressure of vacuum pipe during greater than the pressure opened according to the rules, compression spring is further compressed, and pressure release blind plate position moves down, and produces the gap with the vacuum welding flange, and furnace interior divides gas to go out to discharge from the space, thereby furnace pressure is descended.
Compression spring is owing to limited by the lower end of the guide rod face, the savings elastic potential energy, and when furnace pressure drops to when being lower than opening pressure, the sealing contact surface recombine is tight, recovers sealed state, and device continues the standard atmosphere pressure operation.
The above only is preferred embodiment of the present utility model, and is in order to restriction the utility model, not all within spirit of the present utility model and principle, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (3)
1. the explosion-proof apparatus on the single-crystal silicon carbide stove vacuum pipe is characterized in that, comprises ring flange, O RunddichtringO, pressure release blind plate, the screwed guide rod in end and compression spring,
Described ring flange is vertically mounted on the lower end of described single-crystal silicon carbide stove vacuum pipe, and described pressure release blind plate is provided with through hole, and described pressure release blind plate is arranged on the below of described ring flange; The through hole that described guide rod upper end is passed on the described pressure release blind plate is threaded with described ring flange; Seal by the O RunddichtringO between described ring flange and the described pressure release blind plate; Described compression spring is set on the described guide rod; Described lower end of the guide rod is installed on the pedestal.
2. according to the explosion-proof apparatus on the described a kind of single-crystal silicon carbide stove vacuum pipe of claim 1, it is characterized in that described guide rod is 8, it all is connected with described ring flange by guide rod upper end screw thread.
3. according to the explosion-proof apparatus on claim 1 or the 2 described a kind of single-crystal silicon carbide stove vacuum pipes, it is characterized in that described O RunddichtringO is the fluororubber O-type sealing-ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320018486 CN203096234U (en) | 2013-01-14 | 2013-01-14 | Anti-explosion device for vacuum pipeline of silicon carbide single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320018486 CN203096234U (en) | 2013-01-14 | 2013-01-14 | Anti-explosion device for vacuum pipeline of silicon carbide single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203096234U true CN203096234U (en) | 2013-07-31 |
Family
ID=48847652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320018486 Expired - Fee Related CN203096234U (en) | 2013-01-14 | 2013-01-14 | Anti-explosion device for vacuum pipeline of silicon carbide single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203096234U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289486A (en) * | 2021-12-23 | 2022-04-08 | 广东筑奥生态环境股份有限公司 | Modern ecological gardens soil remediation is with high-efficient thermal desorption processing apparatus |
-
2013
- 2013-01-14 CN CN 201320018486 patent/CN203096234U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289486A (en) * | 2021-12-23 | 2022-04-08 | 广东筑奥生态环境股份有限公司 | Modern ecological gardens soil remediation is with high-efficient thermal desorption processing apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130731 Termination date: 20180114 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |