CN203770832U - Ultra-high vacuum valve device - Google Patents

Ultra-high vacuum valve device Download PDF

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Publication number
CN203770832U
CN203770832U CN201420165236.6U CN201420165236U CN203770832U CN 203770832 U CN203770832 U CN 203770832U CN 201420165236 U CN201420165236 U CN 201420165236U CN 203770832 U CN203770832 U CN 203770832U
Authority
CN
China
Prior art keywords
equipment
valve
valve body
joint pipe
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420165236.6U
Other languages
Chinese (zh)
Inventor
宋云萍
薛宏卫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SICHUAN LIANGCHUAN MACHINERY EQUIPMENT CO Ltd
Original Assignee
SICHUAN LIANGCHUAN MACHINERY EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SICHUAN LIANGCHUAN MACHINERY EQUIPMENT CO Ltd filed Critical SICHUAN LIANGCHUAN MACHINERY EQUIPMENT CO Ltd
Priority to CN201420165236.6U priority Critical patent/CN203770832U/en
Application granted granted Critical
Publication of CN203770832U publication Critical patent/CN203770832U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses an ultra-high vacuum valve device, and relates to the technical field of valve devices. A valve clack and a valve element are in threaded connection and are installed in a valve body, an operation rod is inserted into a square hole of the valve element from the lateral face of the valve body and is fixed onto a support through a pin, a seal body is welded onto the valve body through the operation rod and the support, a corrugated pipe penetrates through the operation rod, one end of the corrugated pipe is welded onto the seal body, the other end of the corrugated pipe is welded onto the operation rod, an equipment joint pipe is welded onto vacuumized equipment, an O-shaped seal ring is installed at the combined position of the lower end of the valve body and a joint pipe, a joint pipe nut is in threaded connection with the valve body through the joint pipe, the joint pipe penetrates through the equipment joint pipe, and an ultra-high vacuum valve is fixed onto the equipment joint pipe by adjusting the joint pipe nut. The full-sealing technology is adopted in the ultra-high vacuum valve device, and therefore the vacuum degree is improved; the ultra-high vacuum valve device is of a through-type structure; after vacuumizing is completed, sealing of a vacuumizing opening can be realized through an operation mechanism under the vacuum working condition. Thus, the purposes that the vacuum degree is high, the production cycle is short, the production cost is low, the use process is safe and reliable and the quality of products is high are realized.

Description

A kind of ultrahigh vacuum valve door device
Technical field:
The utility model relates to valving technical field, is specifically related to a kind of ultrahigh vacuum valve door device.
Background technique:
At present, what heat-preserving equipment vacuumized that operation generally adopts is a kind of vacuum valve, exhaust vacuum after this valve be retained in so a kind of mode on equipment.In use there is following shortcoming in which: on (1) valve, sealing surface is more, in other words be that easy leak source is more, and valve internal channel is less, and has labyrinth, multiple 90 ° of right angles, losing along stroke pressure while having increased circulation of air, causes the pumpdown time longer; (2) vacuum valve is retained on equipment, in handling, installation and using process, exist easily by clashing and breaking and sealing face leakage, thus the danger of destruction vacuum; (3) every equipment is installed a vacuum valve and the long increase that has caused cost of production of pumpdown time.
Model utility content:
The purpose of this utility model is to provide a kind of ultrahigh vacuum valve door device, and it adopts hermetically sealed technology, thereby has improved degree of vacuum; It is a kind of mode of structure of straight-through type; When vacuumizing after end, it can, under vaccum working condition, realize the sealing to vacuum orifice by operating device; Thereby realize, condition of high vacuum degree, shorter manufacture cycle, lower cost of production, using process are safe and reliable, the object of high quality of products.
In order to solve the existing problem of background technique, the utility model is to adopt following technological scheme: it comprises valve body 1, spool 2, operating handle 3, seal 4, pin 5, support 6, bellows 7, flap 8, O-ring seals 9, take over 10, union nut 11, equipment takes over 12, flap 8 is threaded with spool 2 and is arranged in valve body 1, operating handle 3 inserts in the square hole of spool 2 by valve body 1 side, and be fixed on support 6 by pin 5, seal 4 is by operating handle 3, support 6 is welded on valve body 1, bellows 7 is through operating handle 3, one end is welded on seal 4, the other end is welded on operating handle 3, equipment is taken over 12 and is welded on the equipment of being evacuated, O-ring seals 9 is arranged on valve body 1 lower end and takes over 10 junctions, union nut 11 is threaded with valve body 1 by taking over 10, take over 10 and take over 12 through equipment, by adjusting union nut 11, ultrahigh vacuum valve is fixed in equipment adapter 12.
Described valve body 1 left side is provided with the quick connection mouth with vaccum-pumping equipment.
All parts (except O RunddichtringO) of described ultrahigh vacuum valve all adopt stainless steel material manufacture.
Described ultrahigh vacuum valve adopts hermetically sealed bypass structure.
Working principle of the present utility model is: in the time that need vacuumize, this device is inserted in to equipment and takes over 12, by adjusting the degree of tightness of union nut 11, realize the sealing of O-ring seals 9 to equipment adapter place.Fast interface on valve body 1 is connected with vaccum-pumping equipment, to pressing down, makes flap 8 in working hole top operating handle 3, then start vacuum pumping.In the time that degree of vacuum reaches regulation requirement, close vaccum-pumping equipment, operating handle 3 is upwards lifted, operating handle 3 is with movable valve plug 2 to move down, and flap 8 is sent into equipment and take over the sealing station in 12.Solution format device is connected with vaccum-pumping equipment, unclamps union nut, and valve body 1 is moved up and takes over 12 with equipment to be separated, and in the sealed mouth that at this moment spool 2 and flap 8 are taken in equipment, by flap 8 compactings, rotary spool 2, makes it to depart from flap 8.
The utlity model has following beneficial effect: adopt hermetically sealed technology, thereby improved degree of vacuum; It is a kind of mode of structure of straight-through type; When vacuumizing after end, it can, under vaccum working condition, realize the sealing to vacuum orifice by operating device; Thereby realize, condition of high vacuum degree, shorter manufacture cycle, lower cost of production, using process are safe and reliable, the object of high quality of products.
Brief description of the drawings:
Fig. 1 is structural representation of the present utility model.
Embodiment:
Referring to Fig. 1, this embodiment adopts following technological scheme: it comprises valve body 1, spool 2, operating handle 3, seal 4, pin 5, support 6, bellows 7, flap 8, O-ring seals 9, take over 10, union nut 11, equipment takes over 12, flap 8 is threaded with spool 2 and is arranged in valve body 1, operating handle 3 inserts in the square hole of spool 2 by valve body 1 side, and be fixed on support 6 by pin 5, seal 4 is by operating handle 3, support 6 is welded on valve body 1, bellows 7 is through operating handle 3, one end is welded on seal 4, the other end is welded on operating handle 3, equipment is taken over 12 and is welded on the equipment of being evacuated, O-ring seals 9 is arranged on valve body 1 lower end and takes over 10 junctions, union nut 11 is threaded with valve body 1 by taking over 10, take over 10 and take over 12 through equipment, by adjusting union nut 11, ultrahigh vacuum valve is fixed in equipment adapter 12.
Described valve body 1 left side is provided with the quick connection mouth with vaccum-pumping equipment.
All parts (except O RunddichtringO) of described ultrahigh vacuum valve all adopt stainless steel material manufacture.
Described ultrahigh vacuum valve adopts hermetically sealed bypass structure.
The working principle of this embodiment is: in the time that need vacuumize, this device is inserted in to equipment and takes over 12, by adjusting the degree of tightness of union nut 11, realize the sealing of O-ring seals 9 to equipment adapter place.Fast interface on valve body 1 is connected with vaccum-pumping equipment, to pressing down, makes flap 8 in working hole top operating handle 3, then start vacuum pumping.In the time that degree of vacuum reaches regulation requirement, close vaccum-pumping equipment, operating handle 3 is upwards lifted, operating handle 3 is with movable valve plug 2 to move down, and flap 8 is sent into equipment and take over the sealing station in 12.Solution format device is connected with vaccum-pumping equipment, unclamps union nut, and valve body 1 is moved up and takes over 12 with equipment to be separated, and in the sealed mouth that at this moment spool 2 and flap 8 are taken in equipment, by flap 8 compactings, rotary spool 2, makes it to depart from flap 8.
This embodiment has following beneficial effect: adopt hermetically sealed technology, thereby improved degree of vacuum; It is a kind of mode of structure of straight-through type; When vacuumizing after end, it can, under vaccum working condition, realize the sealing to vacuum orifice by operating device; Thereby realize, condition of high vacuum degree, shorter manufacture cycle, lower cost of production, using process are safe and reliable, the object of high quality of products.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.

Claims (1)

1. a ultrahigh vacuum valve door device, it is characterized in that it comprises valve body (1), spool (2), operating handle (3), seal (4), pin (5), support (6), bellows (7), flap (8), O-ring seals (9), take over (10), union nut (11), equipment is taken over (12), flap (8) is threaded with spool (2) and is arranged in valve body (1), operating handle (3) inserts by valve body (1) side in the square hole of spool (2), and be fixed on support (6) by pin (5), seal (4) is by operating handle (3), support (6) is welded on valve body (1), bellows (7) is through operating handle (3), one end is welded on seal (4), the other end is welded on operating handle (3), equipment is taken over (12) and is welded on the equipment of being evacuated, 0 shape seal ring (9) is arranged on valve body (1) lower end and adapter (10) junction, union nut (11) is threaded with valve body (1) by taking over (10), take over (10) and take over (12) through equipment, by adjusting union nut (11), ultrahigh vacuum valve is fixed in equipment adapter (12).
CN201420165236.6U 2014-04-08 2014-04-08 Ultra-high vacuum valve device Expired - Fee Related CN203770832U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420165236.6U CN203770832U (en) 2014-04-08 2014-04-08 Ultra-high vacuum valve device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420165236.6U CN203770832U (en) 2014-04-08 2014-04-08 Ultra-high vacuum valve device

Publications (1)

Publication Number Publication Date
CN203770832U true CN203770832U (en) 2014-08-13

Family

ID=51288023

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420165236.6U Expired - Fee Related CN203770832U (en) 2014-04-08 2014-04-08 Ultra-high vacuum valve device

Country Status (1)

Country Link
CN (1) CN203770832U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108303211A (en) * 2018-02-23 2018-07-20 烟台国邦化工机械科技有限公司 A kind of device and encapsulating method for steel made vacuum container permanent seal
CN108468816A (en) * 2018-06-20 2018-08-31 天津中德应用技术大学 High-air-tightness vacuum valve
CN108825825A (en) * 2018-06-29 2018-11-16 苏州超磁半导体科技有限公司 A kind of mounting tool of vacuum seal disk

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108303211A (en) * 2018-02-23 2018-07-20 烟台国邦化工机械科技有限公司 A kind of device and encapsulating method for steel made vacuum container permanent seal
CN108303211B (en) * 2018-02-23 2024-01-19 烟台国邦化工机械科技有限公司 Device and method for permanently sealing steel vacuum container
CN108468816A (en) * 2018-06-20 2018-08-31 天津中德应用技术大学 High-air-tightness vacuum valve
CN108825825A (en) * 2018-06-29 2018-11-16 苏州超磁半导体科技有限公司 A kind of mounting tool of vacuum seal disk

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140813

Termination date: 20180408

CF01 Termination of patent right due to non-payment of annual fee