CN203069860U - Axial adjustment device for lens in focusing and leveling measurement system - Google Patents
Axial adjustment device for lens in focusing and leveling measurement system Download PDFInfo
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- CN203069860U CN203069860U CN 201320043178 CN201320043178U CN203069860U CN 203069860 U CN203069860 U CN 203069860U CN 201320043178 CN201320043178 CN 201320043178 CN 201320043178 U CN201320043178 U CN 201320043178U CN 203069860 U CN203069860 U CN 203069860U
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- lens barrel
- block
- eyeglass
- fixed block
- support tube
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Abstract
The utility model relates to a focusing and leveling measurement system, in particular to an axial adjustment device for a lens in the focusing and leveling measurement system. The axial adjusting device for the lens comprises a supporting cylinder, a diaphragm arranged at the end surface of the supporting cylinder, at least one lens barrel group arranged in the supporting cylinder, an adjustment mechanism arranged on the side wall of the supporting cylinder for controlling and locking of axial movement of the lens barrel group and a supporting block for radial fixing of the lens barrel group, wherein the supporting block is arranged in the supporting cylinder, and the lens barrel group is embedded in the supporting block and can slide along an axial direction in the supporting block. According to a technical scheme in the utility model, small lens barrels are mutually independent and can be respectively adjusted to compensate for adjustment errors of an optical system; the whole adjustment device has the advantages of a compact structure, capability of realizing adjustment in a small space, high adjustment precision, good repeatability, a simple structure, convenience in installation and reasonable cost.
Description
Technical field
The utility model relates to focusing and leveling measuring system, is specifically related to eyeglass axial adjusting device in the focusing and leveling measuring system.
Background technology
Focusing and leveling measuring system is required more and more highlyer in projection lithography system, lens group is being brought into play important effect in focusing and leveling measuring system, controls the position of lens group well, to playing decisive role on the image quality.
Realize in the prior art that lens adjustment device mainly comprises following mode:
Mode one, as shown in Figure 1, the actuator 100 that piezoelectric element is formed drives flexible four-bar mechanism 101, four-bar mechanism 101 with actuator 100 levels to displacement dL convert the axial displacement dH of moving lens 102 to, flexible planar linkage mechanism complexity, the processing and manufacturing difficulty, installing also has big difficulty.Though precision ideal but piezoelectric element is expensive, cost is too high, and installing space is big.
Mode two as shown in Figure 2, adopts two linear slide rails 103 arranged side by side to lead, and servomotor drives moving lens 102 by cam mechanism 104 and moves up and down.Yet the cam difficulty of processing is big, can not realize self-locking, and has certain clearance between linear sliding-rail sliding and the guide rail, and MECHANISM PRECISION is not high, and installing space is big.
The utility model content
Technical problem to be solved in the utility model is that existing eyeglass axial adjusting device installing space is excessive, and complex structure in order to overcome above deficiency, provides eyeglass axial adjusting device in a kind of focusing and leveling measuring system.
In order to solve the problems of the technologies described above, the technical solution of the utility model is: described eyeglass axial adjusting device comprises support tube, is arranged on the diaphragm of support tube end face, is arranged at least one interior lens barrel group of support tube, is arranged on the adjusting mechanism of the control of support tube sidewall and the axially-movable of locking lens barrel group and is used for the radially back-up block of fixed lens barrel group, described back-up block is arranged in the support tube, and the lens barrel group is embedded in the back-up block and can endwisely slips therein.
Further, described back-up block is column type, and it comprises cylinder and along the axial slideway of cylinder circle distribution up/down perforation, the part in support tube matches described axial slideway with adjusting mechanism and lens barrel group, and control lens barrel group is slided vertically.
Further, back-up block also comprises for the last pin-and-hole that connects diaphragm and the following pin-and-hole that is used for being connected support tube.
Further, described lens barrel group comprises vertically corresponding at least one little lens barrel that arranges down, and a little lens barrel is by an independently adjusting mechanism control.Therefore, the little lens barrel of each in the lens barrel group is separate, can carry out axial adjustment to it respectively, and the scope of adjusting is bigger and more flexible.
Further, little lens barrel comprises column type microscope base, eyeglass and trim ring, has light hole and has step in the middle of the described microscope base, and eyeglass is placed on the step, and trim ring is pressed on the eyeglass.
Further, described adjusting mechanism comprises the guidepost between the fixed block and following fixed block in the last fixed block that is fixed on the support tube lateral wall vertically from top to bottom and following fixed block, the connection, pass guidepost can the spring of fixed block and movable block in movable block mobile between last fixed block and the following fixed block, connections, be arranged on the fixed block down the differential head and with the connecting link of movable block interlock, the top of differential head contacts with movable block, one end of connecting link is fixedlyed connected with little lens barrel, and the other end stretches out from movable block.Screw in or screw out fixed block down by the differential head, movable block under the acting in conjunction power of differential head and spring near or away from fixed block, further, drive little lens barrel by the connecting link with the movable block interlock and do axially motion up or down.
Further, described adjusting mechanism also comprises the interior fixed block with connecting link interlock, described in fixed block be arranged on support tube inwall and with movable block inside and outside corresponding, drive little lens barrel for special operations piece and connecting link and axially move.
Further, described axial slideway comprises the square groove that matches with interior fixed block, the thin layer groove that matches with connecting link and the through hole that matches with the lens barrel group.
Further, described adjusting mechanism also comprises set nut, and the end that described set nut and connecting link stretch out movable block unclamps set nut and connects by being threaded, movable block can slide between last fixed block and following fixed block, screws set nut and then movable block is carried out axial restraint.
The medium and small lens barrel of the technical solution of the utility model is separate, can adjust the error of debuging of compensation optical system respectively; Whole adjusting gear compact conformation can be adjusted in less space; Adjustment precision height, good reproducibility; The device simple in structure, easy for installation and cost is reasonable.
Description of drawings
Fig. 1 is the structural representation of mode one in the prior art;
Fig. 2 is the structural representation of mode two in the prior art;
Fig. 3 is the utility model perspective view;
Fig. 4 is the utility model upward view;
Fig. 5 is the cut-open view of little lens barrel;
Fig. 6 is that the A-A of Fig. 4 is to cut-open view;
Fig. 7 is the perspective view of back-up block.
Shown in the figure:
The 100-detent, 101-four-bar mechanism, 102-moving lens, the linear slide rail of 103-, 104-cam mechanism;
The 1-support tube;
The 2-diaphragm;
3-lens barrel group, the little lens barrel of 31-, 311-microscope base, 312-eyeglass, 313-trim ring, 314-light hole, 315-step;
The 4-adjusting mechanism, the last fixed block of 41-, fixed block under the 42-, 43-guidepost, 44-movable block, 45-spring, 46-differential head, fixed block in the 47-connecting link, 48-, 49-set nut;
The 5-back-up block, 51-cylinder, the axial slideway of 52-, the last pin-and-hole of 53-, the little pin-and-hole of 54-, 55-square groove, 56-thin layer groove, 57-through hole.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in detail:
Shown in Fig. 3 and 4, eyeglass axial adjusting device described in the utility model comprises support tube 1, be arranged on the diaphragm 2 of support tube 1 end face, be arranged on 5 lens barrel groups 3 in the support tube 1, the adjusting mechanism 4 of the sidewall control that is arranged on support tube 1 and 3 axially-movables of locking lens barrel group and be used for the radially back-up block 5 of fixed lens barrel group 3.
Described 5 lens barrel groups 3, each lens barrel group 3 include vertically corresponding 2 little lens barrels 31 that arrange down, and each little lens barrel 31 is by independently adjusting mechanism 4 controls.
As shown in Figure 5, little lens barrel 31 comprises column type microscope base 311, eyeglass 312 and trim ring 313, has light hole 314 and has step 315 in the middle of the described microscope base 311, and eyeglass 312 is placed on the step 315, and trim ring 313 is pressed on the eyeglass 312.
Shown in Fig. 3 and 6, described adjusting mechanism 4 comprises the guidepost 43 between the fixed block 41 and following fixed block 42 in the last fixed block 41 that is fixed on support tube 1 lateral wall vertically from top to bottom and following fixed block 42, the connection, passing guidepost 43 can be at the spring 45 of fixed block 41 and movable block 44 in movable block 44 mobile between last fixed block 41 and the following fixed block 42, connections, the interior fixed block 48 and the set nut 49 that are arranged on differential head 46 on the fixed block 42 down, link with the connecting link 47 of movable block 44 interlocks, with connecting link 47.
The top of differential head 46 contacts with movable block 44; One end of connecting link 47 is fixedlyed connected with little lens barrel 31, and the other end passes from movable block 44; Described set nut 49 stretches out an end of movable block 44 by being threaded with connecting link 47; Interior fixed block 48 is arranged on the inwall of support tube 1 and inside and outside corresponding with movable block 44.
Shown in Fig. 6 and 7, described back-up block 5 is column type, it comprises 5 axial slideways 52 of cylinder 51, circle distribution up/down perforation, the following pin-and-hole 54 that is used for the last pin-and-hole 53 of connection diaphragm 2 and is used for being connected support tube 1, part in support tube 1 matches described axial slideway 52 with adjusting mechanism 4 and lens barrel group 3, and described axial slideway 52 comprises the square groove 55 that matches with interior fixed block 41, the thin layer groove 56 that matches with connecting link 47 and the through hole 57 that matches with lens barrel group 3.
The course of work of described adjusting gear is as follows:
After each assembly installs, rotation differential head 46, under differential head 46 promoted, movable block 44 is upwards movable block 41 motions vertically, compress spring 45, and movable block 44 drives connecting link 47 motions, and connecting link 47 drives little lens barrel 31 and is axially moving in the slideway 52; If rotate differential head 46 in the opposite direction, under the thrust of spring 45, make movable block 44 downward fixed blocks 42 close, movable block 44 drives connecting link 47 motions, and connecting link 47 drives little lens barrel 31 and is axially moving in the slideway 52.By the adjustment of each little lens barrel 31, finally realize the axial adjustment of lens barrel group 3, when adjusting to the right place, tighten set nut 49.
Claims (9)
1. eyeglass axial adjusting device, it is characterized in that, comprise support tube, be arranged on the support tube end face diaphragm, be arranged at least one lens barrel group in the support tube, be arranged on the adjusting mechanism of the control of support tube sidewall and the axially-movable of locking lens barrel group and be used for the radially back-up block of fixed lens barrel group, described back-up block is arranged in the support tube, and the lens barrel group is embedded in the back-up block and can endwisely slips therein.
2. according to the described a kind of eyeglass axial adjusting device of claim 1, it is characterized in that, described back-up block is column type, and it comprises cylinder and along the axial slideway of cylinder circle distribution up/down perforation, the part in support tube matches described axial slideway with adjusting mechanism and lens barrel group.
3. according to the described a kind of eyeglass axial adjusting device of claim 2, it is characterized in that described back-up block also comprises for the last pin-and-hole that connects diaphragm and the following pin-and-hole that is used for being connected support tube.
4. according to the described a kind of eyeglass axial adjusting device of claim 1, it is characterized in that described lens barrel group comprises vertically corresponding at least one little lens barrel that arranges down, a little lens barrel is by an independently adjusting mechanism control.
5. according to the described a kind of eyeglass axial adjusting device of claim 4, it is characterized in that described little lens barrel comprises column type microscope base, eyeglass and trim ring, have light hole and have step in the middle of the described microscope base that eyeglass is placed on the step, trim ring is pressed on the eyeglass.
6. according to the described a kind of eyeglass axial adjusting device of claim 1, it is characterized in that, described adjusting mechanism comprises last fixed block and the following fixed block that is fixed on the support tube lateral wall vertically from top to bottom, guidepost in the connection between fixed block and the following fixed block, pass the movable block that guidepost can move between last fixed block and following fixed block, the spring of fixed block and movable block in the connection, the connecting link that is arranged on down the differential head on the fixed block and links with movable block, the top of differential head contacts with movable block, one end of connecting link is fixedlyed connected with little lens barrel, and the other end stretches out from movable block.
7. according to the described a kind of eyeglass axial adjusting device of claim 6, it is characterized in that described adjusting mechanism also comprises the interior fixed block with connecting link interlock, described in fixed block be arranged on support tube inwall and with movable block inside and outside corresponding.
8. according to the described a kind of eyeglass axial adjusting device of claim 7, it is characterized in that, described back-up block is column type, it comprises cylinder and along the axial slideway of cylinder circle distribution up/down perforation, described axial slideway comprises the square groove that matches with interior fixed block, the thin layer groove that matches with connecting link and the through hole that matches with the lens barrel group.
9. according to the described a kind of eyeglass axial adjusting device of claim 6, it is characterized in that described adjusting mechanism also comprises set nut, described set nut stretches out an end of movable block by being threaded with connecting link.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320043178 CN203069860U (en) | 2013-01-25 | 2013-01-25 | Axial adjustment device for lens in focusing and leveling measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320043178 CN203069860U (en) | 2013-01-25 | 2013-01-25 | Axial adjustment device for lens in focusing and leveling measurement system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203069860U true CN203069860U (en) | 2013-07-17 |
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ID=48768631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320043178 Expired - Lifetime CN203069860U (en) | 2013-01-25 | 2013-01-25 | Axial adjustment device for lens in focusing and leveling measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203069860U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112558429A (en) * | 2020-12-14 | 2021-03-26 | 中国科学技术大学 | Maskless plasmon direct-writing photoetching system |
-
2013
- 2013-01-25 CN CN 201320043178 patent/CN203069860U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112558429A (en) * | 2020-12-14 | 2021-03-26 | 中国科学技术大学 | Maskless plasmon direct-writing photoetching system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130717 |