CN202974180U - Piezoresistive strain gauge of ceramic base - Google Patents
Piezoresistive strain gauge of ceramic base Download PDFInfo
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- CN202974180U CN202974180U CN 201220703140 CN201220703140U CN202974180U CN 202974180 U CN202974180 U CN 202974180U CN 201220703140 CN201220703140 CN 201220703140 CN 201220703140 U CN201220703140 U CN 201220703140U CN 202974180 U CN202974180 U CN 202974180U
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- pressure resistance
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Abstract
The utility model provides a piezoresistive strain gauge of a ceramic base. The piezoresistive strain gauge of the ceramic base is composed of a ceramic substrate, a conductor layer, an resistance layer with piezoresistive effect, insulating protection layers and a seal glass layer, wherein the conductor layer and the resistance layer are produced at the upper surface of the ceramic base; the insulating protection layers are covered at the upper parts of the conductor layer and the resistance layer; and the seal glass layer is produced at the lower surface of the ceramic substrate. The piezoresistive strain gauge of the ceramic base can be used for manufacturing high-temperature anti-corrosive force sensors of weight and pressure, and is high in accuracy, good in stability, and long in service life.
Description
Technical field
The utility model relates to the foil gauge for the manufacture of force-sensing sensor, particularly a kind of ceramic bases pressure resistance type foil gauge.
Background technology
The strain-type force-sensing sensor forms strain gauge adhesion on sensor elastomer, such as weigh, the sensor such as acceleration and pressure, the performance of foil gauge has directly determined the performance of this type sensor.
As Fig. 1～shown in Figure 6, traditional foil gauge is to be made of substrate 101, resistance sensitive grid 102 and insulating protective layer 103.The effect of substrate 101 is fixed resistance sensitive grids 102, makes it keep certain geometric configuration, also plays insulating effect simultaneously.Substrate 101 adopts the flexible materials such as epoxy, acetal, polyimide to make usually.Resistance sensitive grid 102 alloy foil, method and substrate 101 by hot pressing combine, and then form grizzly bar by techniques such as photoetching corrosions.With reference to figure 1, Fig. 2, because the metal or alloy resistivity of material that is fit to do strain resistor is less, need long grizzly bar 102,202 length could form larger resistance value, this has just increased technology difficulty, even like this, the impedance of common this foil gauge also is difficult to surpass 1K Ω.Insulating protective layer 103 is to form with insulation film hot pressing or with the method that liquid insulating material applies.
Foil gauge and elastic body with adhesives together, adhesive property has influence on directly that the temperature of sensor is floated, creep, hysteresis, non-linear, stability and serviceable life, is all with organic bonds such as epoxy resin usually.Because organism is easily aging, the sensor that adopts above-mentioned foil gauge and bonding process to make, poor stability, life-span are short, are not suitable for using under hot conditions.
The utility model content
The purpose of this utility model is to provide a kind of ceramic bases pressure resistance type foil gauge, effectively address the above problem, high temperature resistant, corrosion-resistant, stable performance, the life-span is long, technique is simple, cost is low, and greatly simplifies and make the foil gauge paster processing procedure that is difficult to grasp in the sensor process.
The technical solution of the utility model is as follows:
A kind of ceramic bases pressure resistance type foil gauge comprises ceramic substrate, at the upper surface of described ceramic substrate, conductor layer and resistive layer is arranged.
Its further technical scheme is: at the lower surface printing seal glass slurry of described ceramic substrate, oven dry or sintering form the seal glass layer.
Its further technical scheme is: insulating protective layer is arranged at the top at described conductor layer and resistive layer.
And its further technical scheme is: described ceramic substrate is selected the aluminium oxide ceramics thin slice.Described conductor layer forms with the gold conductive paste printing-sintering.Described resistive layer is the thick-film resistor with piezoresistive effect, is that the resistance slurry printing-sintering forms with ruthenium.
In a kind of technical scheme, described resistive layer is single resistance; Perhaps in another kind of technical scheme, described resistive layer forms Wheatstone bridge by four resistance.
Useful technique effect of the present utility model is:
The ceramic bases pressure resistance type foil gauge that employing the utility model provides and the sensor of making have following characteristics:
(1) adopt the thick-film technique manufacturing, the simple cost of technique is low.
(2) corrosion-resistant, good insulating, low in energy consumption.
(3) highly sensitive, good linearity, creep are little.
(4) paster technique is simple, anti-aging, reliable and stable, the life-span is long.
(5) for the sensors such as weighing of using under hot environment, pressure provide low-cost highly reliable solution, such as the ladle LOAD CELLS of steel plant, injection machine with the pressure transducer of molten condition plastics etc.
The additional advantage of the utility model provides in embodiment description partly below, and part will become obviously from the following description, or recognize by practice of the present utility model.
Description of drawings
Fig. 1 is the hierarchy chart of the traditional foil gauge with single strain resistor.
Fig. 2 is the structural drawing of protective seam in Fig. 1.
Fig. 3 is the structural drawing of resistance sensitive grid in Fig. 1.
Fig. 4 is the structural drawing of substrate in Fig. 1.
Fig. 5 is the vertical view of the traditional foil gauge with single strain resistor.
Fig. 6 is traditional vertical view that is become the foil gauge of full-bridge by four resistor group that has.
Fig. 7 is the hierarchy chart of the utility model embodiment one.
Fig. 8 is the structural drawing of protective seam in Fig. 7.
Fig. 9 is the structural drawing of thick film resistive layer in Fig. 7.
Figure 10 is the structural drawing of conductor layer in Fig. 7.
Figure 11 is the structural drawing of ceramic bases in Fig. 7.
Figure 12 is the structural drawing of seal glass layer in Fig. 7.
Figure 13 is the vertical view of the utility model embodiment one.
Figure 14 is the hierarchy chart of the utility model embodiment two.
Figure 15 is the structural drawing of protective seam in Figure 14.
Figure 16 is the structural drawing of thick film resistive layer in Figure 14.
Figure 17 is the structural drawing of conductor layer in Figure 14.
Figure 18 is the structural drawing of ceramic bases in Figure 14.
Figure 19 is the structural drawing of seal glass layer in Figure 14.
Figure 20 is the vertical view of the utility model embodiment two.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described further.
The ceramic bases pressure resistance type foil gauge that the utility model provides adopts the aluminium oxide ceramics thin slice as substrate; upper surface at the aluminium oxide ceramics thin slice is made conductor layer and resistive layer and covers insulating protective layer; the seal glass layer of making at the lower surface of aluminium oxide ceramics thin slice; this layer seal glass can hot setting, also can only carry out drying and processing.Below by two embodiment, the utility model is described in detail.
Embodiment one:
Fig. 7～Figure 13 is the schematic diagram of the utility model embodiment one, and this embodiment is the foil gauge of a single resistance, is fit to the application such as LOAD CELLS.
As Fig. 7～shown in Figure 13; upper surface at ceramic substrate 301 prints respectively also sintering formation conductor layer 302, thick film resistive layer 303, insulating protective layer 304; then at the lower surface printing seal glass slurry of ceramic substrate 301, oven dry or sintering form seal glass layer 305.Ceramic substrate 301 is selected the aluminium oxide ceramics thin slice of thickness 0.1mm left and right.Conductor layer 302 is selected the gold paste material, thickness 1～5 micron left and right.Thick film resistive layer 303 is a single resistance, and selecting the ruthenium of sheet resistance coefficient 10K Ω is resistance slurry, 5～10 microns of thickness.Insulating protective layer 304 is selected the insulating medium slurry, forms the thickness of 5～10 microns after sintering.The thickness of seal glass layer 305 is 5～10 microns.
Embodiment two:
Figure 14～Figure 20 is the schematic diagram of the utility model embodiment two, and this embodiment forms Wheatstone bridge by four resistance, is the full-bridge foil gauge, is mainly used in pressure transducer.
As Figure 14～shown in Figure 20; similar with embodiment one; printing respectively also at ceramic substrate 401 upper surfaces, sintering forms conductor layer 402, thick film resistive layer 403, insulating protective layer 404; then at the lower surface printing seal glass slurry of ceramic substrate 401, oven dry or sintering form seal glass layer 405.Be with the difference of embodiment one, in embodiment two, the Wheatstone bridge that thick film resistive layer 403 is comprised of four resistance.
In sum, the utility model adopts pottery as base material, corrosion-resistant, high temperature resistant, the characteristics such as thermal expansivity is low, intensity is high, good insulation preformance that pottery has, and be particularly suitable for thick-film technique, most thick-film electronic slurry is developed take aluminium oxide ceramics as target substrate, at present can produce thickness less than the ultrathin alumina potsherd of 0.1mm, and cheap.
Resistive layer, conductor layer, seal glass layer and insulating protective layer all can adopt thick-film technique to make: namely with method for printing screen, the slurries such as resistance, conductor, insulating medium and glass are printed on respectively on ceramic substrate, solidify through high temperature sintering.
Thick-film resistor has piezoresistive effect, be that resistive element resistance under effect of stress can change, and the variable quantity of resistance and suffered stress are linear, and the characteristics such as manufacturing process is simple, impedance large (low in energy consumption), good stability are arranged, the traditional metal or alloy foil gauge of remolding sensitivity exceeds several times.
Glass is desirable seal, sealing materials, is widely used in the sealing-in of the of the same race or foreign material of glass, metal, pottery and compound substance, is used widely in manufacture field of electronic elements.According to different requirements, can select from the sealing glass material of 400 ℃～700 ℃ of different melt temperatures.With glass as foil gauge and elastomeric connector, overcome the easy ageing failure of organic binder bond, the shortcomings such as non-refractory, strong bonded between foil gauge and elastic body after sintering floats the temperature of sensor, creep, hysteresis, a series of defectives such as non-linear obtain basic improvement.
The utility model is beforehand with the seal glass layer at the lower surface of ceramic substrate, replaced traditional organic bond, and saved the paster that is difficult to grasp and made, only need be placed on to be heating and curing on elastic body and get final product, be easy to realize the automatic batch production of sensor.
Above-described is only preferred implementation of the present utility model, and the utility model is not limited to above embodiment.Be appreciated that other improvement and variation that those skilled in the art directly derive or associate under the prerequisite that does not break away from basic conception of the present utility model, all should think be included in protection domain of the present utility model within.
Claims (8)
1. ceramic bases pressure resistance type foil gauge is characterized in that: comprise ceramic substrate (301), at the upper surface of described ceramic substrate (301), conductor layer (302) and resistive layer (303) are arranged.
2. ceramic bases pressure resistance type foil gauge according to claim 1, it is characterized in that: at the lower surface printing seal glass slurry of described ceramic substrate (301), oven dry or sintering form seal glass layer (305).
3. ceramic bases pressure resistance type foil gauge according to claim 1, it is characterized in that: insulating protective layer (304) is arranged at the top at described conductor layer (302) and resistive layer (303).
4. according to claim 1 and 2 or 3 described ceramic bases pressure resistance type foil gauges, it is characterized in that: described ceramic substrate (301) is selected the aluminium oxide ceramics thin slice.
5. according to claim 1 and 2 or 3 described ceramic bases pressure resistance type foil gauges, it is characterized in that: described conductor layer (302) forms with the gold conductive paste printing-sintering.
6. according to claim 1 and 2 or 3 described ceramic bases pressure resistance type foil gauges, it is characterized in that: described resistive layer (303) is the thick-film resistor with piezoresistive effect, is that the resistance slurry printing-sintering forms with ruthenium.
7. according to claim 1 and 2 or 3 described ceramic bases pressure resistance type foil gauges, it is characterized in that: described resistive layer (303) is single resistance.
8. according to claim 1 and 2 or 3 described ceramic bases pressure resistance type foil gauges, it is characterized in that: described resistive layer (303) forms Wheatstone bridge by four resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220703140 CN202974180U (en) | 2012-12-18 | 2012-12-18 | Piezoresistive strain gauge of ceramic base |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220703140 CN202974180U (en) | 2012-12-18 | 2012-12-18 | Piezoresistive strain gauge of ceramic base |
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| CN202974180U true CN202974180U (en) | 2013-06-05 |
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| CN 201220703140 Expired - Fee Related CN202974180U (en) | 2012-12-18 | 2012-12-18 | Piezoresistive strain gauge of ceramic base |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047927A (en) * | 2012-12-18 | 2013-04-17 | 无锡莱顿电子有限公司 | Piezoresistive strain gauge with ceramic substrate |
| CN104006735A (en) * | 2014-06-12 | 2014-08-27 | 智性科技南通有限公司 | Embedded type thick-film resistor strain sensor and manufacturing method of embedded type thick-film resistor strain sensor |
| CN105424238A (en) * | 2015-12-08 | 2016-03-23 | 北京金风科创风电设备有限公司 | Stress strain sensor |
| WO2018170998A1 (en) * | 2017-03-24 | 2018-09-27 | 上海大和衡器有限公司 | Deformation measurement device |
-
2012
- 2012-12-18 CN CN 201220703140 patent/CN202974180U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103047927A (en) * | 2012-12-18 | 2013-04-17 | 无锡莱顿电子有限公司 | Piezoresistive strain gauge with ceramic substrate |
| CN103047927B (en) * | 2012-12-18 | 2016-03-02 | 无锡莱顿电子有限公司 | Ceramic bases pressure resistance type foil gauge |
| CN104006735A (en) * | 2014-06-12 | 2014-08-27 | 智性科技南通有限公司 | Embedded type thick-film resistor strain sensor and manufacturing method of embedded type thick-film resistor strain sensor |
| CN105424238A (en) * | 2015-12-08 | 2016-03-23 | 北京金风科创风电设备有限公司 | Stress strain sensor |
| WO2018170998A1 (en) * | 2017-03-24 | 2018-09-27 | 上海大和衡器有限公司 | Deformation measurement device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130605 Termination date: 20161218 |
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| CF01 | Termination of patent right due to non-payment of annual fee |