CN202953260U - Combined wafer cassette - Google Patents
Combined wafer cassette Download PDFInfo
- Publication number
- CN202953260U CN202953260U CN 201220680740 CN201220680740U CN202953260U CN 202953260 U CN202953260 U CN 202953260U CN 201220680740 CN201220680740 CN 201220680740 CN 201220680740 U CN201220680740 U CN 201220680740U CN 202953260 U CN202953260 U CN 202953260U
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- Prior art keywords
- wafer cassette
- groove
- draw
- latch
- compound type
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Abstract
The utility model provides a combined wafer cassette. The combined wafer cassette at least comprises a box cover and a box bottom, wherein the box bottom is connected with the box cover in a matching manner to form a containing cavity, a first connecting piece and at least one clamping slot are formed on the lower surface of the box bottom, and a second connecting piece matched with the first connecting piece and at least one latch matched with the clamping slot are arranged on the upper surface of the box cover. By using the combined wafer cassette, wafer cassettes containing a plurality of single wafers can be combined to be packaged together when the number of the wafers with production batches is small. Due to the fact that connecting devices and the latch or the clamping slot are formed on the box cover and the box bottom of the wafer cassette, the firm connection can be realized among the wafer cassettes, the placement directions are not limited, the flat or vertical placement can be realized probably, the wafer cassette is hard to damage in the transportation process, and the package cost can be effectively saved by packaging the plurality of wafer cassettes together.
Description
Technical field
The utility model belongs to field of semiconductor manufacture, relates to a kind of wafer cassette, particularly relates to a kind of compound type wafer cassette.
Background technology
At present, the Chinese Integrated Circuit industry has formed IC design, chip manufacturing, packaging and testing three industry and has supported the common comparatively perfect industrial chain general layout developed of supporting industry.On September 25th, 2012, SMIC's second phase project is laid a foundation in BJ Eco & Tech Development Zone, by building 2 production capacities, it is respectively the manufacturing line of 3.5 ten thousand, to realize the chip breakthrough of volume production " zero " at home that technical merit is the 32-28 nanometer after building up, further weaken the dependence of domestic hightech chip to import.
In field of semiconductor manufacture, need to pack into wafer cassette packed and transportation is delivered in client's hand of the wafer finished product obtained through some processing procedures, wafer cassette can provide a relatively clean environment and avoid the pollution of external environment for wafer.
In the packing and transportation of wafer, normally used is the wafer cassette of following two types: a kind of is the crystal box that can hold 25 wafer, the advantage of this box be for granted full or approach granted full batch the time, packing and traffic cost are lower, but when batch wafer number when less, most of groove position in crystal box is all empty, makes cost raise.Another kind is the monocrystalline box that can only hold a wafer, and this monocrystalline box body is long-pending little and pack easy to carryly, but the monocrystalline box that each is equipped with a wafer is needed to carry out packing separately, is transported, and cost is higher.
In prior art, the monocrystalline box can only be realized simple stacked on top, if simple stacking monocrystalline box is packed together up and down, when running into barbarous operation and accidental impact in transportation, the even breakage that is easy to misplace between the monocrystalline box causes wafer to be damaged.In daily handling process, the situation that simple stacking wafer cassette also easily is scattered makes wafer impaired.
Therefore, provide a kind of and realize that the wafer cassette of combination function is to reduce costs the real necessity that belongs to.
The utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of compound type wafer cassette, for solving each monocrystalline box of prior art, needs to be separately packaged the problem that makes cost higher.
Reach for achieving the above object other relevant purposes, the utility model provides a kind of compound type wafer cassette, and described compound type wafer cassette at least comprises: a lid and be connected and form the box of host cavity with this lid at the bottom of; Under described box, surface is provided with the first attaching parts and at least one draw-in groove, and described lid upper surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch matched with described draw-in groove; Perhaps described lid upper surface is established the first attaching parts and at least one draw-in groove, and under described box, surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch matched with described draw-in groove.
Alternatively, the cross-sectional plane of described draw-in groove is annulus.
Alternatively, the quantity of described draw-in groove is at least two, respectively between this draw-in groove, separates, but all is positioned on the circumference of same circle.
Alternatively, the cross-sectional plane of described latch is an annulus.
Alternatively, the quantity of described latch is at least two, and respectively this latch is arc, and radian is consistent.
Alternatively, described draw-in groove forms perpendicular to the side wall at the bottom of described box by two.
Alternatively, described two side wall tops bend in opposite directions and are provided with relative flank.
Alternatively, the cross-sectional plane at the bottom of described lid and box is polygon or circle.
Alternatively, described the first attaching parts is bolt, the screw of described the second attaching parts for matching with described bolt; Perhaps described the first attaching parts is screw, the bolt of described the second attaching parts for matching with described screw.
As mentioned above, compound type wafer cassette of the present utility model, there is following beneficial effect: owing to all being provided with connecting device and latch or draw-in groove at the bottom of wafer cassette lid and box, when needs are packed a plurality of wafer cassette, a plurality of wafer cassette can be combined, after combination, between each wafer cassette, can firmly link together, can pack together, and be not easy to damage in transportation, can be effectively cost-saving.
The accompanying drawing explanation
Fig. 1 is shown as the schematic diagram of compound type wafer cassette of the present utility model.
Fig. 2 is shown as the schematic diagram at the bottom of the box of compound type wafer cassette of the present utility model.
Fig. 3 is shown as the schematic diagram of the lid of compound type wafer cassette of the present utility model.
Fig. 4 is shown as the schematic diagram of two side wall tops of compound type wafer cassette of the present utility model while being provided with relative flank.
Fig. 5 is shown as the schematic diagram of compound type wafer cassette draw-in groove quantity of the present utility model while being two.
Fig. 6 is shown as the schematic diagram of compound type wafer cassette latch quantity of the present utility model while being two.
The quantity that Fig. 7 is shown as compound type wafer cassette draw-in groove of the present utility model, latch is one and the schematic diagram while cooperatively interacting.
It is one, latch quantity is at least two and schematic diagram while cooperatively interacting with draw-in groove that Fig. 8 is shown as compound type wafer cassette draw-in groove quantity of the present utility model.
It is one and schematic diagram while cooperatively interacting with draw-in groove at least two, latch quantity that Fig. 9 is shown as compound type wafer cassette draw-in groove quantity of the present utility model.
Figure 10 is shown as compound type wafer cassette draw-in groove of the present utility model, latch quantity and is at least two and the schematic diagram while cooperatively interacting.
Figure 11 is shown as that compound type wafer cassette of the present utility model is combined and schematic diagram during horizontal positioned.
Figure 12 is shown as the schematic diagram of compound type wafer cassette of the present utility model when combining and vertically placing.
It is the schematic diagram of lid while being provided with draw-in groove that Figure 13 is shown as compound type wafer cassette of the present utility model.
It is the schematic diagram while being provided with latch at the bottom of box that Figure 14 is shown as compound type wafer cassette of the present utility model.
The element numbers explanation
1 lid
At the bottom of 2 boxes
3 wafers
4 draw-in grooves
41 side walls
42 flanks
5 bolts
6 latches
7 screws
The specific embodiment
Below by particular specific embodiment, embodiment of the present utility model is described, person skilled in the art scholar can understand other advantages of the present utility model and effect easily by the disclosed content of this specification sheets.
Refer to Fig. 1 to Figure 14.Notice, appended graphic the illustrated structure of this specification sheets, ratio, size etc., equal contents in order to coordinate specification sheets to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the utility model, therefore the technical essential meaning of tool not, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under the effect that the utility model can produce and the purpose that can reach, all should still drop on the technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, in this specification sheets, quote as " on ", D score, " left side ", " right side ", " centre " reach the term of " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under without essence change technology contents, when also being considered as the enforceable category of the utility model.
Embodiment mono-
Refer to Fig. 1 to Figure 12, the utility model provides a kind of compound type wafer cassette, and described compound type wafer cassette at least comprises: a lid 1 and be connected at the bottom of the box that forms host cavity 2 with this lid 1; At the bottom of described box, 2 lower surfaces are provided with the first attaching parts and at least one draw-in groove 4, and described lid 1 upper surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch 6 matched with described draw-in groove 4.
At first refer to Fig. 1, be shown as the schematic diagram of compound type wafer cassette of the present utility model.As shown in the figure, lid 1 is connected with lid 2, the inner host cavity that forms, and wafer 3 is positioned in described host cavity.It is pointed out that Fig. 1 is the situation of wafer lid while opening.Described lid 1 can cover the environment that a cleaning is provided for wafer.
Refer to Fig. 2, be shown as the schematic diagram at the bottom of the box of compound type wafer cassette of the present utility model.As shown in the figure, at the bottom of described box, 2 lower surfaces are provided with the first attaching parts and at least one draw-in groove 4.In the present embodiment, described the first attaching parts is preferably bolt 5, and the quantity of draw-in groove 4 is one.Concrete, described draw-in groove 4 forms (as shown in partial enlarged drawing in Fig. 2) by two perpendicular to 2 side wall 41 at the bottom of described box.The cross-sectional plane of described draw-in groove 4 is annulus.
Refer to Fig. 3, be shown as the schematic diagram of the lid of compound type wafer cassette of the present utility model.As shown in the figure, described lid 1 upper surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch 6 matched with described draw-in groove 4.In the present embodiment, described the second attaching parts is the screw 7 that matches with described bolt 5, described latch 6 quantity be one.The details of described latch 6 is as shown in partial enlarged drawing in Fig. 3.The cross-sectional plane of described latch 6 is also an annulus, with described draw-in groove 4, matches.Described draw-in groove 4 width be greater than the thickness of described latch 6, make the described latch 6 can be in the inner accommodating.
Concrete, can also bend in opposite directions relative flank 42 is set on two side wall 41 tops of described draw-in groove 4.Refer to Fig. 4, be shown as the schematic diagram of two side wall tops of compound type wafer cassette of the present utility model while being provided with relative flank.
When needs are packed several wafer cassette together, need first wafer cassette to be combined.Array mode is as follows: the draw-in groove 4 at the bottom of one of them wafer cassette box and bolt 5 are aimed at respectively to latch 6 and the screw 7 on another wafer cassette lid, make described latch 6 embed in described draw-in groove 4, then rotate wafer cassette, described bolt 5 and screw 7 are combined closely two wafer cassette are fixed together.Then continue as stated above other wafer cassette is grouped together.Described draw-in groove 4 with can further make coordinating of latch 6 between wafer cassette in conjunction with more firm, reduce the damage be subject to while running in transit barbarous operation or accidental impact.
In the above-described embodiments, the quantity of described draw-in groove, latch is one.In other embodiments, the quantity of described draw-in groove, latch also can be for two or more, and in other words, the quantity of described draw-in groove 4 is at least two, and respectively between this draw-in groove 4, separates, but all is positioned on the circumference of same circle; The quantity of described latch 6 is at least two, and respectively this latch 6 is arc, and radian is consistent, with described draw-in groove 4, matches.Refer to Fig. 5 and Fig. 6, wherein Fig. 5 is shown as the schematic diagram of compound type wafer cassette draw-in groove quantity of the present utility model while being two, and Fig. 6 is shown as the schematic diagram of compound type wafer cassette latch quantity of the present utility model while being two.
It is pointed out that when the quantity of described draw-in groove 4 is one, the quantity of described latch 6 can be one or at least two, and vice versa.Refer to Fig. 7 to Figure 10, draw-in groove 4 and the mated condition of latch 5 under different situations while being shown as the wafer cassette combination.Wherein, the quantity that Fig. 7 is shown as draw-in groove, latch is one and the schematic diagram while cooperatively interacting, Fig. 8 shows that draw-in groove quantity be one, latch quantity is at least two and schematic diagram while cooperatively interacting with draw-in groove, it is one and schematic diagram while cooperatively interacting with draw-in groove at least two, latch quantity that Fig. 9 is shown as draw-in groove quantity, and Figure 10 is shown as draw-in groove, latch quantity and is at least two and the schematic diagram while cooperatively interacting.For the situation shown in Figure 10, the position of described latch 6 can not be positioned at the middle of described draw-in groove 4, as long as there is overlapped zone can realize the effect of blocking.
Concrete, at the bottom of described lid 1 and box, 2 cross-sectional plane is polygon or circle.Be preferably polygon in the present embodiment, concrete, be octagon.Refer to Figure 11,, be shown as that compound type wafer cassette of the present utility model is combined and schematic diagram during horizontal positioned.Owing to coordinating with latch 6 by the coordinating of bolt 5 and screw 7, draw-in groove 4 between wafer cassette, can link together closely, and because wafer cassette is polygon, can also vertical placement after the wafer cassette combination.Refer to Figure 12, be shown as the schematic diagram of compound type wafer cassette of the present utility model when combining and vertically placing.
In the above-described embodiments, described the first attaching parts is bolt, the screw of described the second attaching parts for matching with described bolt.Yet can suspect, described the first attaching parts is screw, when being the bolt matched with described screw, described the second attaching parts also can realize above-mentioned functions.In other words, in other embodiments, the first attaching parts at the bottom of described box can be screw, accordingly, and the bolt that the second attaching parts on described lid matches with described screw.
It is pointed out that described first, second attaching parts is not limited to the connection mode of above-mentioned bolt and screw or screw and bolt, also can realize the connection mode of fastening effect for other, connect as fixed.
Use compound type wafer cassette of the present utility model, can, when the wafer number of production batch is less, a plurality of wafer cassette that single-wafer is housed be combined and pack together.Owing to all being provided with connecting device and latch or draw-in groove at the bottom of wafer cassette lid and box, can realize firm connection between each wafer cassette, placement direction is unrestricted, as keep flat or vertically place and all can, in transportation, also be not easy to damage, and a plurality of wafer cassette is packed together and can effectively be saved packing cost.
Embodiment bis-
The present embodiment and embodiment mono-take essentially identical scheme, and difference is that the draw-in groove of the two is different from arranging of latch.In embodiment mono-, described draw-in groove is arranged at the beneath surface of box, and described latch is arranged at the lid upper surface, and in the present embodiment, described draw-in groove is arranged at the lid upper surface, and described latch is arranged at the beneath surface of box.
Refer to Figure 13 and Figure 14, wherein, it is the schematic diagram of lid while being provided with draw-in groove that Figure 13 is shown as compound type wafer cassette of the present utility model, and it is the schematic diagram while being provided with latch at the bottom of box that Figure 14 is shown as compound type wafer cassette of the present utility model.Described in embodiment mono-, the quantity of draw-in groove and latch also can be single or multiple situations, and its position relationship please refer to embodiment mono-, repeats no more herein.Described lid upper surface is provided with the first attaching parts, and under described box, surface is provided with the second attaching parts matched with described the first attaching parts, and during the combination wafer cassette, the cooperation by described first, second attaching parts between wafer cassette achieves a fixed connection.The collocation that described first, second attaching parts is bolt and screw or screw and bolt, also can be the connection mode that other can realize fastening effect, as fixed, connects.
In sum, all be provided with connecting device and latch or draw-in groove at the bottom of compound type wafer cassette lid of the present utility model and box, can realize the combination firmly connected between wafer cassette.When the wafer number of production batch is less, packing together can combine a plurality of wafer cassette that single-wafer is housed, can effectively save packing cost, and owing between each wafer cassette, can realizing firm connection, its placement direction can be unrestricted, keep flat or place vertically as can be, also be not easy to damage in transportation, reduced unnecessary waste.So the utility model has effectively overcome various shortcoming of the prior art and the tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, be modified or be changed above-described embodiment.Therefore, have in technical field under such as and usually know that the knowledgeable modifies or changes not breaking away from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (9)
1. a compound type wafer cassette, is characterized in that, described compound type wafer cassette at least comprises: a lid and be connected and form the box of host cavity with this lid at the bottom of; Under described box, surface is provided with the first attaching parts and at least one draw-in groove, and described lid upper surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch matched with described draw-in groove; Perhaps described lid upper surface is established the first attaching parts and at least one draw-in groove, and under described box, surface is provided with the second attaching parts matched with described the first attaching parts and at least one latch matched with described draw-in groove.
2. compound type wafer cassette according to claim 1, it is characterized in that: the cross-sectional plane of described draw-in groove is annulus.
3. compound type wafer cassette according to claim 1, it is characterized in that: the quantity of described draw-in groove is at least two, respectively between this draw-in groove, separates, but all is positioned on the circumference of same circle.
4. according to the described compound type wafer cassette of claim 2 or 3, it is characterized in that: the cross-sectional plane of described latch is an annulus.
5. according to the described compound type wafer cassette of claim 2 or 3, it is characterized in that: the quantity of described latch is at least two, and respectively this latch is arc, and radian is consistent.
6. compound type wafer cassette according to claim 1, it is characterized in that: described draw-in groove forms perpendicular to the side wall at the bottom of described box by two.
7. compound type wafer cassette according to claim 6, it is characterized in that: described two side wall tops bend in opposite directions and are provided with relative flank.
8. compound type wafer cassette according to claim 1, it is characterized in that: the cross-sectional plane at the bottom of described lid and box is polygon or circle.
9. compound type wafer cassette according to claim 1, it is characterized in that: described the first attaching parts is bolt, the screw of described the second attaching parts for matching with described bolt; Perhaps described the first attaching parts is screw, the bolt of described the second attaching parts for matching with described screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220680740 CN202953260U (en) | 2012-12-11 | 2012-12-11 | Combined wafer cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220680740 CN202953260U (en) | 2012-12-11 | 2012-12-11 | Combined wafer cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202953260U true CN202953260U (en) | 2013-05-29 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220680740 Expired - Fee Related CN202953260U (en) | 2012-12-11 | 2012-12-11 | Combined wafer cassette |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202953260U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103280419A (en) * | 2013-05-31 | 2013-09-04 | 中国电子科技集团公司第十三研究所 | Turnover storing box for storing thin wafer |
-
2012
- 2012-12-11 CN CN 201220680740 patent/CN202953260U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103280419A (en) * | 2013-05-31 | 2013-09-04 | 中国电子科技集团公司第十三研究所 | Turnover storing box for storing thin wafer |
| CN103280419B (en) * | 2013-05-31 | 2016-02-03 | 中国电子科技集团公司第十三研究所 | A kind of turnover storage box for depositing thin wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130529 Termination date: 20181211 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |