CN202915952U - Four-dimensional adjusting table for optical detection - Google Patents
Four-dimensional adjusting table for optical detection Download PDFInfo
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- CN202915952U CN202915952U CN 201220570304 CN201220570304U CN202915952U CN 202915952 U CN202915952 U CN 202915952U CN 201220570304 CN201220570304 CN 201220570304 CN 201220570304 U CN201220570304 U CN 201220570304U CN 202915952 U CN202915952 U CN 202915952U
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Abstract
The utility model provides a four-dimensional adjusting table for optical detection to satisfy the demand of multidimension degree accurate adjustment work. The four-dimensional adjusting platform for optical detection comprises a base, a longitudinal displacement platform, a transverse displacement platform, a cloud platform seat, a cloud platform head and a workbench which are sequentially arranged from bottom to top, and is provided with joints and corresponding adjusting mechanisms in four directions of pitching, deflection, horizontal and transverse straight lines and horizontal and longitudinal straight lines. The utility model discloses a four-dimensional adjustment platform for optical detection structure is simple and clear, can realize that the four-dimensional is adjusted to very high stability has and adjusts the precision.
Description
Technical field
The utility model relates to a kind of optical detection and adjusts platform with multidimensional.
Background technology
Optical detection with debug in the process; often can use various pose adjusting mechanisms; such as translation stage, lifting table, universal stage, angular displacement platform; on the domestic and international market many enterprises that are devoted to such research and development of products are arranged at present; the product category of these enterprises is many but the most of mesa dimensions of its multidimensional adjustment platform are less, is difficult to satisfy the mesoscale optical element and detects and the needs of debuging.For a long time, the mesoscale optical element detect with debug in used multidimensional adjusting table all be to be formed by simple concatenation by the single-degree-of-freedom governor motion, although satisfied so reluctantly need of work, but bring many new problems, such as: because the interface shape of single-degree-of-freedom governor motion is different, interface is difficult to coupling when being combined into the multiple degrees of freedom governor motion; The multiple degrees of freedom that simple concatenation forms is adjusted the poor stability of platform, particularly causes the interference fringe shake owing to the governor motion anti-interference is poor in laser interference normal plane type detects, the data sampling difficulty, and data reliability reduces; Work efficiency is had a strong impact on simultaneously.
The utility model content
The utility model provides a kind of optical detection with the four-dimensional platform of adjusting, to satisfy the demand of various dimensions accurate adjustment work.
For realizing above utility model purpose, the utility model provides following technical scheme.
Optical detection comprises the base, length travel platform, transversal displacement platform, head seat, The Cloud Terrace and the worktable that set gradually from bottom to top with the four-dimensional platform of adjusting;
Described worktable is connected with described The Cloud Terrace by the pitching joint, and the pitching joint adopts two coaxial mounted cylinder swing hinge structures to realize; Horizontal-extending section at worktable and The Cloud Terrace is provided with angle of pitch governor motion;
Described The Cloud Terrace links to each other by the beat joint with the transversal displacement platform, and the bearing mounting flange that described beat joint matches by the right-angled intersection cylinder roller bearing, with bearing outer ring, the head seat that matches with bearing inner race and the upper and lower trim ring that plays the axial location effect form; Described The Cloud Terrace cooperates the location with the bearing mounting flange by seam and is fixedly connected with screw, the right-angled intersection cylinder roller bearing is positioned at its inboard head seat by upper trim ring and lower clamping ring tightening, and head seat is fixedly connected with by another seam location and with screw with the transversal displacement platform; The center of gravity of the integral body that pitching joint and beat joint consist of is positioned at the geometric center of worktable; Horizontal-extending section at The Cloud Terrace and transversal displacement platform is provided with the deflection angle governor motion;
Both sides are provided with horizontal straight-line displacement joint between transversal displacement platform and length travel platform, and the middle part is provided with horizontal straight-line displacement governor motion between transversal displacement platform and length travel platform;
Both sides are provided with vertical straight-line displacement joint between length travel platform and base, and the middle part is provided with vertical straight-line displacement governor motion between length travel platform and base;
Described horizontal straight-line displacement joint and vertically the straight-line displacement joint all adopt the slide block that is complementary and the version of line slideway, wherein, laterally the line slideway in straight-line displacement joint is mutually vertical with the line slideway in vertical straight-line displacement joint, forms the projection of rectangle frame at vertical direction.
Based on above-mentioned basic technical scheme, the utility model has also carried out following optimization to be limited and improves.
Above-mentioned angle of pitch governor motion comprises closely-pitched feed screw nut pair, pitching nut erecting frame and pitching feed screw top board; The nut of closely-pitched feed screw nut pair is fastenedly connected by pitching nut erecting frame and The Cloud Terrace, pitching feed screw top board and worktable are fastenedly connected, the lower end of the screw mandrel in the closely-pitched feed screw nut pair is equipped with angle of pitch control hand wheel, the upper end of screw mandrel is sphere, and this sphere forms higher pair with the pitching feed screw top board and contacts.
Be provided with extension spring near angle of pitch governor motion one end between worktable and The Cloud Terrace, the extension spring two ends are fixedly connected with respectively worktable and The Cloud Terrace.
Above-mentioned deflection angle governor motion comprises closely-pitched feed screw nut pair, beat nut erecting frame, upper bracket, lower carriage, beat screw mandrel top board and Flexible Reset assembly; The nut of closely-pitched feed screw nut pair is fastenedly connected by beat nut erecting frame and lower carriage and transversal displacement platform, beat screw mandrel top board is fastenedly connected by upper bracket and The Cloud Terrace, one end of the screw mandrel in the closely-pitched feed screw nut pair is equipped with the deflection angle control hand wheel, the other end of screw mandrel is sphere, this sphere forms higher pair with a side of beat screw mandrel top board and contacts, and the opposite side of beat screw mandrel top board forms higher pair with sphere one end of Flexible Reset assembly and contacts;
Stage clip, litter that above-mentioned Flexible Reset assembly comprises sliding sleeve and is connected sliding sleeve and connects successively from sliding sleeve bottom, sphere one end of described Flexible Reset assembly is a litter end outwardly, final and transversal displacement platform is fastenedly connected sliding sleeve by the sliding sleeve erecting frame.Like this, in sliding sleeve, can reciprocatingly slide under the effect of slide bar stage clip in sliding sleeve.
Above-mentioned horizontal straight-line displacement governor motion adopts ballscrew nut fitting, and this ballscrew nut fitting end is provided with horizontal straight-line displacement control hand wheel; Above-mentioned vertical straight-line displacement governor motion adopts ballscrew nut fitting, and this ballscrew nut fitting end is provided with vertical straight-line displacement control hand wheel.
In above-mentioned right-angled intersection cylinder roller bearing, a plurality of cylindrical rollers are arranged mutual vertically by spacing block on the V-groove rolling surface of 90 ° of one-tenth.So crossed roller bearing can bear multidirectional loads such as radial load, axial load and moment load.
Above-mentioned pitching joint is offset to five of worktable length/everywhere.
Worktable be provided with in order to the installation and measuring support a plurality of general-purpose interfaces.
Optical detection of the present utility model is simple and clear with four-dimensional adjustment platform structure, can realize four-dimensional adjusting, angle of pitch range of adjustment: ± 7 °, deflection angle range of adjustment: ± 7 °, horizontal straight-line displacement range of adjustment: ± 100mm, vertical straight-line displacement range of adjustment: ± 100mm; And have very high stability and degree of regulation, can satisfy the needs of putting into practice of optical detection engineering.
Description of drawings
Fig. 1 is structural representation of the present utility model (positive view).
Fig. 2 is external structure schematic diagram of the present utility model (left view).
Fig. 3 is vertical view of the present utility model.
The drawing reference numeral explanation:
The 1-base; 2-length travel platform; 3-transversal displacement platform; The 4-lower clamping ring; The 5-The Cloud Terrace; 6-right-angled intersection cylinder roller bearing; The upper trim ring of 7-; The 8-head seat; The 9-worktable; 10-bearing mounting flange; The 11-lower carriage; 12-beat joint; 121-deflection angle control hand wheel; 13-pitching joint; 131-angle of pitch control hand wheel; The 14-extension spring; 15-pitching feed screw top board; 16-pitching nut erecting frame; The horizontal straight-line displacement of 17-joint; The horizontal straight-line displacement control hand wheel of 171-; The vertical straight-line displacement of 18-joint; The vertical straight-line displacement control hand wheel of 181-; The 19-sliding sleeve; The 20-stage clip; The 21-slide bar; 22-beat screw mandrel top board; 23-beat nut erecting frame.
Embodiment
As shown in Figure 1 to Figure 3, this optical detection can be divided into four layers from top to bottom with four-dimensional the adjustment on the platform space layout, bears respectively different motor functions.Worktable and The Cloud Terrace link to each other to realize that the angle of pitch regulates by the pitching joint, and wherein the pitching joint is positioned at that five of worktable total length/, the eccentrically arranged type layout is close to the pitching feed screw top board that is connected with worktable all the time with the adjusting screw(rod) bulb under the weight effect everywhere; Simultaneously between worktable and The Cloud Terrace, be provided with extension spring.Even extension spring is not so that virtual connection can appear in worktable yet when (carrier center of gravity seriously relatively pitching joint one end) used in the extreme load situation touch or topple.The Cloud Terrace links to each other by the beat joint with the transversal displacement platform, and the preferred right-angled intersection cylinder roller bearing of the utility model is realized the beat motion.The center of gravity of pitching joint and beat joint integral body is positioned on the centre of gyration (center of worktable) of bearing, the weight in these two joints is fully by horizontal straight-line displacement joint and vertically straight-line displacement joint carrying, in order to make the four-dimensional platform of adjusting have higher stability, preferably make the whole center of gravity of the above structure of base be positioned at all the time the rectangular surfaces (vertical projection) that two guide rails and length travel platform two guide rails determine on the base in adjustment movement, this can be by determining that reasonably the distance between the distance between two guide rails and length travel platform two guide rails realizes on the base.
Worktable links to each other with The Cloud Terrace by the pitching joint, and The Cloud Terrace cooperates the location with the bearing mounting flange by seam, connects with screw; Bearing mounting flange, right-angled intersection cylinder roller bearing, upper trim ring, lower clamping ring and head seat consist of the beat joint to realize the beat motion; Head seat and transversal displacement platform are located by seam, connect with screw, transversal displacement platform, length travel platform link to each other with slide block, line slideway in the straight line assembly respectively and consist of horizontal straight-line displacement joint, length travel platform, the base vertical straight-line displacement of the formation joint that links to each other with slide block, line slideway in the straight line assembly respectively.
Pitching joint: realize by two coaxial mounted cylinder swing hinges.Hinge arrangement is simple, and good rigidly can be regulated by the high precision angle of pitch of control hinge shaft hole quality of fit and two cylinder swing hinge right alignment realization worktable.
Beat joint: realize by the right-angled intersection cylinder roller bearing.In the right-angled intersection cylinder roller bearing, because a plurality of cylindrical rollers are becoming on 90 ° the V-groove rolling surface by spacing block by orthogonal arrangement, so crossed roller bearing can bear multidirectional loads such as radial load, axial load and moment load.The size of its Internal and external cycle is miniaturized, and form is especially close to the miniature dimensions of the limit as thin as a wafer, and has high rigidity.The right-angled intersection cylinder roller bearing is applied to this so that the four-dimensional deflection angle joint of adjusting platform has very strong each to load-bearing capacity, very high running accuracy and stability, and has effectively reduced the physical dimension in deflection angle joint.
Horizontal and vertical straight-line displacement joint: select high-precision line slide rail to be equipped with the straight-line displacement that little helical pitch precise ball screw pair of nut is realized its high resolution.
The arthrotropic coupling implementation of above each side has guaranteed that this optical detection has the advantages that with the four-dimensional platform one-piece construction of adjusting rigidity is high, vibration resistance is strong, kinematic accuracy is high, has overcome the various shortcoming that single-degree-of-freedom adjusting mechanism simple concatenation is brought.This four-dimension is adjusted the platform type of drive and is all adopted manual adjustments, and wherein the angle of pitch and deflection angle are regulated by the closely-pitched feed screw nut pair and realized, is sliding friction herein between the closely-pitched feed screw nut pair, and its latching characteristics can be guaranteed the stability of adjustment movement.Horizontal and vertical straight-line displacement is regulated by little helical pitch ballscrew nut fitting and is realized, is rolling friction between this feed screw nut, though under large load also manual adjustments very easily.
This optical detection with four-dimensional adjust the platform work top be of a size of 320mm * 320mm, can satisfy diameter less than the detection of the mesoscale optical element of 350mm with debug.Uniform screw provides general-purpose interface for the installation of various structure detection supports on the worktable.
This optical detection is regulated respectively length travel, transversal displacement, the angle of pitch and deflection angle with the four-dimensional platform of adjusting by four handwheels.If staff rotates the sensitivity of control hand wheel by 3 °, the adjusting Calculation of Sensitivity of each degree of freedom is as follows:
The angle of pitch is regulated sensitivity:
Deflection angle is regulated sensitivity:
Laterally sensitivity is regulated in (vertically) straight-line displacement:
Wherein: P
1-angle of pitch governor motion screw mandrel pitch;
P
2-deflection angle governor motion screw mandrel pitch;
P
3-horizontal (vertically) straight-line displacement governor motion screw mandrel pitch;
L
1-the angle of pitch is regulated radius;
L
2-deflection angle is regulated radius.
The four-dimensional platform of adjusting of the present utility model can be divided into length travel and governor motion, transversal displacement and governor motion, deflection angle displacement and governor motion, angle of pitch displacement and governor motion by function, and it is an organic whole that each several part connects by precision-fit.This optical detection is regulated respectively length travel, transversal displacement, the angle of pitch and deflection angle with the four-dimensional platform of adjusting by four handwheels.Screw is 25mm * 25mm matrix arrangement on the worktable, is convenient to connection and the installation of various Bracket for Inspections.According to requirements, this four-dimension is adjusted platform and can be used stepper motor to replace handwheel to regulate to realize that optical detection is with the four-dimensional robotization control of adjusting platform.
Claims (9)
1. optical detection is characterized in that: comprise the base, length travel platform, transversal displacement platform, head seat, The Cloud Terrace and the worktable that set gradually from bottom to top with the four-dimensional platform of adjusting;
Described worktable is connected with described The Cloud Terrace by the pitching joint, and the pitching joint adopts two coaxial mounted cylinder swing hinge structures to realize; Horizontal-extending section at worktable and The Cloud Terrace is provided with angle of pitch governor motion;
Described The Cloud Terrace links to each other by the beat joint with the transversal displacement platform, and the bearing mounting flange that described beat joint matches by the right-angled intersection cylinder roller bearing, with bearing outer ring, the head seat that matches with bearing inner race and the upper and lower trim ring that plays the axial location effect form; Described The Cloud Terrace cooperates the location with the bearing mounting flange by seam and is fixedly connected with screw, the right-angled intersection cylinder roller bearing is positioned at its inboard head seat by upper trim ring and lower clamping ring tightening, and head seat is fixedly connected with by another seam location and with screw with the transversal displacement platform; The center of gravity of the integral body that pitching joint and beat joint consist of is positioned at the geometric center of worktable; Horizontal-extending section at The Cloud Terrace and transversal displacement platform is provided with the deflection angle governor motion;
Both sides are provided with horizontal straight-line displacement joint between transversal displacement platform and length travel platform, and the middle part is provided with horizontal straight-line displacement governor motion between transversal displacement platform and length travel platform;
Both sides are provided with vertical straight-line displacement joint between length travel platform and base, and the middle part is provided with vertical straight-line displacement governor motion between length travel platform and base;
Described horizontal straight-line displacement joint and vertically the straight-line displacement joint all adopt the slide block that is complementary and the version of line slideway, wherein, laterally the line slideway in straight-line displacement joint is mutually vertical with the line slideway in vertical straight-line displacement joint, forms the projection of rectangle frame at vertical direction.
2. optical detection according to claim 1 is adjusted platform with the four-dimension, and it is characterized in that: described angle of pitch governor motion comprises closely-pitched feed screw nut pair, pitching nut erecting frame and pitching feed screw top board; The nut of closely-pitched feed screw nut pair is fastenedly connected by pitching nut erecting frame and The Cloud Terrace, pitching feed screw top board and worktable are fastenedly connected, the lower end of the screw mandrel in the closely-pitched feed screw nut pair is equipped with angle of pitch control hand wheel, the upper end of screw mandrel is sphere, and this sphere forms higher pair with the pitching feed screw top board and contacts.
3. optical detection according to claim 2 is adjusted platform with the four-dimension, it is characterized in that: be provided with extension spring near angle of pitch governor motion one end between worktable and The Cloud Terrace, the extension spring two ends are fixedly connected with respectively worktable and The Cloud Terrace.
4. optical detection according to claim 1 is adjusted platform with the four-dimension, and it is characterized in that: described deflection angle governor motion comprises closely-pitched feed screw nut pair, beat nut erecting frame, upper bracket, lower carriage, beat screw mandrel top board and Flexible Reset assembly; The nut of closely-pitched feed screw nut pair is fastenedly connected by beat nut erecting frame and lower carriage and transversal displacement platform, beat screw mandrel top board is fastenedly connected by upper bracket and The Cloud Terrace, one end of the screw mandrel in the closely-pitched feed screw nut pair is equipped with the deflection angle control hand wheel, the other end of screw mandrel is sphere, this sphere forms higher pair with a side of beat screw mandrel top board and contacts, and the opposite side of beat screw mandrel top board forms higher pair with sphere one end of Flexible Reset assembly and contacts.
5. optical detection according to claim 4 is adjusted platform with the four-dimension, it is characterized in that: described Flexible Reset assembly comprises sliding sleeve and the stage clip, the litter that are connected sliding sleeve and connect successively from the sliding sleeve bottom, sphere one end of described Flexible Reset assembly is a litter end outwardly, and final and transversal displacement platform is fastenedly connected sliding sleeve by the sliding sleeve erecting frame.
6. optical detection according to claim 1 is adjusted platform with the four-dimension, it is characterized in that: described horizontal straight-line displacement governor motion adopts ballscrew nut fitting, and this ballscrew nut fitting end is provided with horizontal straight-line displacement control hand wheel; Above-mentioned vertical straight-line displacement governor motion adopts ballscrew nut fitting, and this ballscrew nut fitting end is provided with vertical straight-line displacement control hand wheel.
7. arbitrary described optical detection is adjusted platform with the four-dimension according to claim 1-6, it is characterized in that: in described right-angled intersection cylinder roller bearing, a plurality of cylindrical rollers are arranged mutual vertically by spacing block on the V-groove rolling surface of 90 ° of one-tenth.
8. optical detection according to claim 7 is characterized in that with the four-dimensional platform of adjusting: worktable be provided with in order to the installation and measuring support a plurality of general-purpose interfaces.
9. optical detection according to claim 8 is characterized in that with the four-dimensional platform of adjusting: described pitching joint is offset to five of worktable length/everywhere.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201220570304 CN202915952U (en) | 2012-10-31 | 2012-10-31 | Four-dimensional adjusting table for optical detection |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220570304 CN202915952U (en) | 2012-10-31 | 2012-10-31 | Four-dimensional adjusting table for optical detection |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102937457A (en) * | 2012-10-31 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | Four-dimensional adjusting table for optical detection |
| CN108422292A (en) * | 2018-04-10 | 2018-08-21 | 哈尔滨理工大学 | Kirschner wire processing method with chip space and equipment |
| CN110455505A (en) * | 2019-09-12 | 2019-11-15 | 西安昂科光电有限公司 | A kind of lens eccentric measuring instrument |
| CN112504976A (en) * | 2020-08-28 | 2021-03-16 | 中国科学院合肥物质科学研究院 | Multifunctional atmospheric flow field two-dimensional imaging detection device and detection method |
| CN113997250A (en) * | 2021-10-26 | 2022-02-01 | 铁道第三勘察设计院有限公司 | Two-dimensional rotating adjusting table with static force slow release device and using method thereof |
-
2012
- 2012-10-31 CN CN 201220570304 patent/CN202915952U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102937457A (en) * | 2012-10-31 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | Four-dimensional adjusting table for optical detection |
| CN102937457B (en) * | 2012-10-31 | 2015-03-25 | 中国科学院西安光学精密机械研究所 | Four-dimensional adjusting table for optical detection |
| CN108422292A (en) * | 2018-04-10 | 2018-08-21 | 哈尔滨理工大学 | Kirschner wire processing method with chip space and equipment |
| CN110455505A (en) * | 2019-09-12 | 2019-11-15 | 西安昂科光电有限公司 | A kind of lens eccentric measuring instrument |
| CN112504976A (en) * | 2020-08-28 | 2021-03-16 | 中国科学院合肥物质科学研究院 | Multifunctional atmospheric flow field two-dimensional imaging detection device and detection method |
| CN113997250A (en) * | 2021-10-26 | 2022-02-01 | 铁道第三勘察设计院有限公司 | Two-dimensional rotating adjusting table with static force slow release device and using method thereof |
| CN113997250B (en) * | 2021-10-26 | 2023-12-12 | 铁道第三勘察设计院有限公司 | Two-dimensional rotation adjusting table with static force slow-release device and use method thereof |
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