CN202905652U - Exhaust table for photomultiplier tube - Google Patents
Exhaust table for photomultiplier tube Download PDFInfo
- Publication number
- CN202905652U CN202905652U CN 201220331183 CN201220331183U CN202905652U CN 202905652 U CN202905652 U CN 202905652U CN 201220331183 CN201220331183 CN 201220331183 CN 201220331183 U CN201220331183 U CN 201220331183U CN 202905652 U CN202905652 U CN 202905652U
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- valve
- photomultiplier
- exhaust station
- exhaust
- main control
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Abstract
The utility model relates to an exhaust table for a photomultiplier tube. The exhaust table comprises an objective table, a vacuum gauge, a main control valve, a vacuum pump, a mechanical pump, a gas supply valve, a working gas and a temperature control system. The exhaust table also comprises a program control system, the main control valve and the gas supply valve are electric magnetic valves and the vacuum pump is a molecular pump. The exhaust table is flexibly used, the working efficiency is high, and the intake of various gases in the exhaust table is strictly controlled.
Description
Technical field
The utility model relates to a kind of exhaust station, particularly a kind of exhaust station for photomultiplier.
Background technology
Photomultiplier is a kind of vacuum tube, and the process of making its photocathode face by exhaust station is called exhaust process.Exhaust process comprises the steps such as the importing of the materials such as vacuum degassing, gas are filled with, alkali source and activation, foreign gas in the exhaust process and the content of various working gass directly affect the performance of photomultiplier, therefore, in exhaust process, to reduce the foreign gas in the exhaust station as far as possible, namely improve the vacuum degree in the exhaust station, and will strictly control the air inflow of various working gass.
Be used in the conventional art photomultiplier exhaust station structured flowchart as shown in Figure 1, this exhaust station mainly comprises objective table 1, vacuum gauge 2, main control valve 3, vacuum pump 4, mechanical pump 5, steam supply valve 6, working gas 7 and temperature control system 8.Vacuum pump 4 adopts diffusion pump, is connected with objective table 1 by main control valve 3, and is used in conjunction with to regulate vacuum degree with mechanical pump 5; Steam supply valve 6 connects working gas 7 and objective table 1 and controls air inlet order and the air inflow of various gases; Temperature control system 8 is used for the required temperature environment of control each link of exhaust.In addition, between objective table 1 and main control valve 3, be provided with vacuum gauge 2, control the operating state of each valve according to the reading of vacuum gauge 2.
But, this exhaust station must use the valve of glass material, and the valve of glass material requires the staff manually to control, cause staff in the exhaust process will be always the operating state of the each several parts such as the power supply of exhaust station, temperature control system, valve to be nursed, particularly in the importing and activation step of the materials such as vacuum degassing and alkali source, consume a large amount of man-hours, seriously restricted the raising of operating efficiency.
Although can adopt electric control glass valve, talked about in disclosed Chinese patent on October 1 " exhaustion bench for full-automatic glass vacuum system " (publication number is CN101276717) such as 2008, realize automatically switching on and off of electric control glass valve by Programmable Logic Controller, to increase work efficiency, but the process that switches on and off of electric control glass valve is slowly, thereby this mode and be not suitable for the device that this class of photomultiplier is had relatively high expectations to vacuum degree and air inflow.
The utility model content
The utility model provides a kind of exhaust station for photomultiplier, to solve the ineffective problem of exhaust station in the prior art.
The exhaust station that is used for photomultiplier that the utility model provides comprises objective table, vacuum gauge, main control valve, vacuum pump, mechanical pump, steam supply valve, working gas and temperature control system, it is characterized in that: described exhaust station also comprises program control system, described main control valve and steam supply valve are electromagnetic valve, and described vacuum pump is molecular pump;
In the above-mentioned exhaust station, the junction of main control valve and objective table is provided with the metal glass transition apparatus; Be provided with the labyrinth between molecular pump and the main control valve; Be provided with front step valve between molecular pump and the mechanical pump, mechanical pump is connected with objective table by taking out in advance valve, and front step valve and to take out in advance valve be electromagnetic valve;
The main control valve of above-mentioned exhaust station is gate valve, and the glass metal transition apparatus is grafting seal or metal glass transition segment.
Compare with conventional art, exhaust station of the present utility model has the following advantages:
1) adopts electromagnetic valve and molecular pump, not only can realize the automation control of whole exhaust process by program control system, automatically carry out exhaust process at the night of unmanned nurse, greatly improved operating efficiency, and can adopt manually operated mode, so that the occupation mode of this exhaust station is very flexible;
2) compare with diffusion pump, because molecular pump has faster the speed of evacuation and can not produce oiliness foreign gas, so that exhaust station has higher final vacuum;
3) owing to adopting electromagnetic valve, when the reading of vacuum gauge reached set point, electromagnetic valve was can moment closed, thereby can strictly control the air inflow of various gases in the exhaust station.
Accompanying drawing
Fig. 1 is the exhaust station structured flowchart that is used for photomultiplier in the conventional art.
Fig. 2 is the exhaust station structured flowchart that is used for photomultiplier in the utility model.
Embodiment
As shown in Figure 2, exhaust station structure of the present utility model comprises objective table 1, vacuum gauge 20, main control valve 30, vacuum pump 40, mechanical pump 5, steam supply valve 60, working gas 7, temperature control system 8 and program control system 90.
Objective table 1 is used for the assembling photomultiplier, is connected with working gas 7 by steam supply valve 60, and is connected with vacuum pump 40 by main control valve 30.Vacuum pump 40 also is connected with mechanical pump 5, is used for removing the foreign gas in the exhaust station, guarantees required vacuum degree in the photomultiplier exhaust process.Be provided with vacuum gauge 20 between objective table 1 and the main control valve 30, regulate the operating state of steam supply valves 60 according to vacuum gauge 20, can control order and the air inflow of the gas that enters photomultiplier.Program control system 90 adopts the programmable logic controller (PLC)s such as PLC, temperature control system 8, various valve, power supply etc. are controlled, therefore, main control valve 30 and steam supply valve 60 need to adopt electromagnetic valve, particularly when the junction size of objective table 1 and main control valve 30 was larger, main control valve 30 needed to adopt gate valves.Vacuum gauge 20 adopts cold rule, like this when vacuum gauge 20 detects air inflow in the photomultiplier and reaches set point, vacuum gauge 20 sends signal to program control system 90 immediately, and then steam supply valve 60 disconnects under the effect of program control system 90, intake process stops, thereby has realized the air inflow of working gas is strictly controlled.Air-tightness for fear of vitreous material junctions such as metallic electromagnetic valve and objective tables impacts the vacuum degree in the exhaust station, adopts molecular pump as vacuum pump 40.In order to prevent that the glass fragment after photomultiplier bursts in the exhaust process from entering molecular pump, between molecular pump and main control valve 30, be provided with labyrinth 41, labyrinth 41 is entrance and the outlet direct structure of conducting not, is concavo-convex cross structure such as inside; In order to guarantee that molecular pump can not cause because vacuum degree crosses low damage when starting, be provided with front step valve 42 between molecular pump and the mechanical pump 5, and mechanical pump 5 is connected with objective table 1 by taking out in advance valve 43, front step valve 42 and take out in advance valve 43 and be electromagnetic valve and be subjected to program control system 90 control.In the vacuum, step valve 42 before at first disconnecting is connected and is taken out in advance valve 43, bleeds in advance by mechanical pump 5, to remove the most of foreign gas in the exhaust station; Then, step valve 42 before connecting disconnects and takes out in advance valve 43, adopts molecular pump to bleed to obtain higher vacuum degree.
In addition, in order further to improve the air-tightness of exhaust station, be provided with the metal glass transition apparatus in the junction of main control valve 30 and objective table 1, such as grafting seal, metal glass transition segment etc.
In the above-mentioned exhaust station, all valves all adopt electromagnetic valve, so both can manually control each valve, also can automatically control by PLC supervisor control system the operating state of each valve, as long as photomultiplier is connected on the exhaust station, just can automatically finish whole exhaust process, particularly also can automatically move at the night of unmanned nurse, greatly improve the operating efficiency on daytime; In whole exhaust process, perhaps in some link of exhaust process, also can use manually operated mode, in order to process the various bursting problem in the exhaust, so that the occupation mode of this exhaust station is very flexible.
Claims (9)
1. exhaust station that is used for photomultiplier, comprise objective table, vacuum gauge, main control valve, vacuum pump, mechanical pump, steam supply valve, working gas and temperature control system, it is characterized in that: described exhaust station also comprises program control system, described main control valve and steam supply valve are electromagnetic valve, and described vacuum pump is molecular pump.
2. be used for as claimed in claim 1 the exhaust station of photomultiplier, it is characterized in that: the junction of described main control valve and objective table is provided with the metal glass transition apparatus.
3. be used for as claimed in claim 2 the exhaust station of photomultiplier, it is characterized in that: be provided with front step valve between described molecular pump and the mechanical pump, mechanical pump is connected with objective table by taking out in advance valve, described front step valve and to take out in advance valve be electromagnetic valve.
4. be used for as claimed in claim 1 the exhaust station of photomultiplier, it is characterized in that: described main control valve is gate valve.
As described in claim 2 or 3 for the exhaust station of photomultiplier, it is characterized in that: described main control valve is gate valve.
As described in claim 2 or 3 for the exhaust station of photomultiplier, it is characterized in that: described metal glass transition apparatus is grafting seal or metal glass transition segment.
7. be used for as claimed in claim 5 the exhaust station of photomultiplier, it is characterized in that: described metal glass transition apparatus is grafting seal or metal glass transition segment.
As described in claim 4 or 7 for the exhaust station of photomultiplier, it is characterized in that: described vacuum is counted cold rule.
9. be used for as claimed in claim 6 the exhaust station of photomultiplier, it is characterized in that: described vacuum is counted cold rule.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220331183 CN202905652U (en) | 2012-07-05 | 2012-07-05 | Exhaust table for photomultiplier tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220331183 CN202905652U (en) | 2012-07-05 | 2012-07-05 | Exhaust table for photomultiplier tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202905652U true CN202905652U (en) | 2013-04-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220331183 Expired - Lifetime CN202905652U (en) | 2012-07-05 | 2012-07-05 | Exhaust table for photomultiplier tube |
Country Status (1)
| Country | Link |
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| CN (1) | CN202905652U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367078A (en) * | 2013-07-29 | 2013-10-23 | 南京华东电子光电科技有限责任公司 | Exhaust activation method of photoelectric device |
-
2012
- 2012-07-05 CN CN 201220331183 patent/CN202905652U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103367078A (en) * | 2013-07-29 | 2013-10-23 | 南京华东电子光电科技有限责任公司 | Exhaust activation method of photoelectric device |
| CN103367078B (en) * | 2013-07-29 | 2015-10-28 | 南京华东电子光电科技有限责任公司 | A kind of exhaust activation method of photoelectric device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: 100070, room 3, building 128, No. 903 South Fourth Ring Road, Beijing, Fengtai District Patentee after: BEIJING HAMAMATSU PHOTON TECHNOLOGIES Inc. Address before: 100070, No. 18, building 11, 188, base station, South Fourth Ring Road West, Beijing, Fengtai District Patentee before: BEIJING HAMAMATSU PHOTON TECHNOLOGIES Inc. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130424 |
|
| CX01 | Expiry of patent term |